Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社filedCritical大日本スクリ−ン製造株式会社
Priority to JP16144081UpriorityCriticalpatent/JPS5867330U/ja
Publication of JPS5867330UpublicationCriticalpatent/JPS5867330U/ja
Application grantedgrantedCritical
Publication of JPH02737Y2publicationCriticalpatent/JPH02737Y2/ja