JPS5858424A - Pyroelectric infrared detector - Google Patents
Pyroelectric infrared detectorInfo
- Publication number
- JPS5858424A JPS5858424A JP56157872A JP15787281A JPS5858424A JP S5858424 A JPS5858424 A JP S5858424A JP 56157872 A JP56157872 A JP 56157872A JP 15787281 A JP15787281 A JP 15787281A JP S5858424 A JPS5858424 A JP S5858424A
- Authority
- JP
- Japan
- Prior art keywords
- pyroelectric
- electrode layer
- fire
- elements
- human body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 230000010287 polarization Effects 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 8
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000002265 prevention Effects 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は防犯、防火その他の用途に供し得る焦電型赤外
線検出装置に関するものであり、侵入者、火炎の検出は
勿論、侵入経路、侵入者移動方向、火災発生場所等をも
捉えることができる検出装置を提案するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pyroelectric infrared detection device that can be used for crime prevention, fire prevention, and other purposes, and is capable of detecting not only intruders and flames, but also intrusion routes, intruder movement directions, and fire occurrence locations. This paper proposes a detection device that can also detect the following.
以下本発明をその実施例を示す図面に基いて具体的に説
明する。EMBODIMENT OF THE INVENTION The present invention will be specifically explained below based on drawings showing embodiments thereof.
第１図は零Ｊ発明装置の第１の実施例の要部の断面構造
図、第２図は同じく略示平面図である。゛本発明装置は
人体検出用に設けた素子と火災検出用に設けた素子とを
一組とする検出ユニットを複数個規則的に配してなるも
のであシ、第１．第２図の例では６個の検出ユニットＳ
Ｕを各検出ユニットを構成する２つの素子１０．２０が
横方向に並ぶようＫして２行３列のマトリックス状に配
しである。FIG. 1 is a cross-sectional structural view of a main part of a first embodiment of the Zero J invention device, and FIG. 2 is a schematic plan view of the same. ``The device of the present invention is constituted by a plurality of regularly arranged detection units each having a set of an element provided for detecting a human body and an element provided for detecting fire. In the example shown in Fig. 2, there are six detection units S.
U is arranged in a matrix of 2 rows and 3 columns so that two elements 10 and 20 constituting each detection unit are lined up in the horizontal direction.
各検出ユニツ）ＳＵＨその赤外線検出面、即ち表面電極
層１２．２２側を上方に向けて金属製のス□ラム３１上
に適宜手段にて固着してあシ、ステム３１［は金属キャ
ップ３２が被着されて各検出ユニットＳＵを榎っている
。金属キャップ３２の上面部（ステム３１と対向する部
分）Ｋは窓３２ａが開放されてｈて、この窓３２ａには
赤外線透過性素材よりなる窓板３３が固着されていて、
検出ユニツ）ＳＵを配し・た空間を密封している。窓３
２ｍは監視対象空間から金属キャップ３２内部へ赤外線
を入光させるためのものであり、窓板３３としては０．
８〜１５ハの波長の赤外線を効率よ七透過させる厚さ歌
百声鯛のＳｉ、Ｇｅ板が適当である。なお説明の便宜上
窓３２ｉ側を上側とするが、この装置を部屋の天井に取
付ける場合は窓３２ａ側が下側になる。Each detection unit) SUH is fixed on the metal slam 31 with its infrared detection surface, that is, the surface electrode layer 12. It is attached to cover each detection unit SU. The upper surface part (the part facing the stem 31) K of the metal cap 32 has an open window 32a, and a window plate 33 made of an infrared transparent material is fixed to the window 32a.
The space where the detection unit (SU) is placed is sealed. window 3
2 m is for allowing infrared rays to enter the inside of the metal cap 32 from the monitored space, and the window plate 33 is 0.2 m.
Suitable is a Si or Ge plate made of Uta Hyakusei Tai, which has a thickness that efficiently transmits infrared rays with a wavelength of 8 to 15 cm. For convenience of explanation, the window 32i side will be the upper side, but when this device is attached to the ceiling of a room, the window 32a side will be the lower side.
次に犬々が２つの赤外線検出素子１０．２０からなる検
出ユニットの構造にりいて説明する。Next, the structure of a detection unit consisting of two infrared detection elements 10 and 20 will be explained.
赤外線検出素子１０及び−２６＃ｉ、ＬｉＴａ０１ （
ｆｉンタル酸リすクム）＃Ｉの焦電体薄板４１の一側皐
分のｆＲ域４１１及び他側半分の領域４１２夫々の表面
に適長離隔させて各別の電極層１２．２２を、また裏面
に画素子共通の電極層４２をいずれもＮｉ−Ｃｒ蒸着の
方法にて５００〜ｘｏｏｏＡの厚さに形成してなるもの
であって、裏面電極層４２をステム３１の上面に固着し
た例えば銅製の支持台４４にエポキシ樹脂等の絶縁層４
５を介して固定しである。表面電極層１２．２２夫々の
上面にＦｉＰｂＴｅ 、 ＺｎＳ ｈ４を多層蒸着して
なる光学フィルタ１３．２３が被着形成されている。第
３図は火炎（■）及び人体（＠）夫々の赤外線スペクト
ルを示しているが、光学フィルタ１３．２３は人体検知
のために５声調以上の波長の赤外線を選択的に透過させ
、それよりも矩い波長の赤外線を実質的にカットするロ
ーカット（１）イパス）フィルタ、光学フィルタ２３は
火災検知用として０．８〜７′声調の範囲の波長の赤外
線を選択的に透過させ、この範囲外の波長の赤外線を実
質的にカットするバンドパスフィルタである。Infrared detection elements 10 and -26#i, LiTa01 (
Separate electrode layers 12 and 22 are placed on the surface of each of the fR region 411 on one side and the half region 412 on the other side of the pyroelectric thin plate 41 of #I, spaced apart by an appropriate length, In addition, an electrode layer 42 common to all pixels is formed on the back surface by Ni-Cr vapor deposition to a thickness of 500 to xooooA, and the back electrode layer 42 is fixed to the upper surface of the stem 31, for example. An insulating layer 4 made of epoxy resin or the like is placed on a support base 44 made of copper.
It is fixed via 5. Optical filters 13.23 formed by depositing multiple layers of FiPbTe and ZnS h4 are formed on the upper surface of each of the surface electrode layers 12.22. Figure 3 shows the infrared spectra of a flame (■) and a human body (@), and the optical filter 13.23 selectively transmits infrared rays with wavelengths of five tones or more in order to detect a human body. The optical filter 23, which is a low-cut (1) pass) filter that substantially cuts infrared rays with a rectangular wavelength, selectively transmits infrared rays with a wavelength in the range of 0.8 to 7' tones for fire detection. It is a bandpass filter that substantially cuts out infrared rays of outside wavelengths.
画素子１０．２’０の表面電極層１２．２２＃ｉ金線等
を用いてなるリード線１４．・２４（第４図参照）夫々
の一端に接続されている。ステム３１上には各検出ユニ
ツ）ＳＵＫつき各１個の接合型のＦＥＴ （電界効果ト
クンジスタ）４６が設けてあシ、前記リード＠１４の他
端はこのＦＥＴ４６のゲートに接続されている。またリ
ード線２４の他端はステム３１に接続されており、更に
このステム３１と電気的に接続されていて、外部回路と
の接続のために１キヤツプ３２、ステム３１等からなる
パッケージ外へ引き出されたリード線３９に連なってい
る。Surface electrode layer 12 of pixel element 10.2'0. Lead wire 14 made of 22#i gold wire or the like. - 24 (see Figure 4) are connected to one end of each. A junction FET (field effect transistor) 46 is provided on the stem 31 for each detection unit (SUK), and the other end of the lead 14 is connected to the gate of the FET 46. The other end of the lead wire 24 is connected to a stem 31, and is electrically connected to this stem 31, and is pulled out of the package consisting of a cap 32, stem 31, etc. for connection to an external circuit. The lead wire 39 is connected to the lead wire 39.
このリード４１３９は各検出ユニットｓＵに共通である
。該リード４１３９同様にパッケージ外へ引出されてい
るリード線３７．３８ｉ各検出ユニツト毎に＆けられる
ものであるが、犬々ＦＥＴ４６のドレイン及びソースに
連なって込る。This lead 4139 is common to each detection unit sU. Similarly to the lead 4139, lead wires 37 and 38i which are drawn out of the package are connected to the drain and source of the FET 46, though they are removed for each detection unit.
第４図は本発明装置の１つの検出ユニットｓＵの電気回
路図であり、上述のステム３１．リード線３９を接地レ
ベルとし、ＦＥＴ４６のドレイン又はリード線３７には
正の電位ｖＤＤを与え、そのソース又はリード線３８か
ら出力■。ｕｔを得るようＫしている。ＦＥＴ ４６の
ゲート及びソースと接地レベルのステム３１又はリード
線３９との闇には１Ｇ”〜１０口０のオーダのゲート抵
抗４７及び１０にΩ程度のソース抵抗４８を夫゛々接続
して自己バイアスをかけである。なおゲート抵抗４７は
キャップ３２内Ｋ ＦＥＴ ４６と共に配してあシ、ソ
ース抵抗４８Ｆｉ外付は抵抗としている。この検出ユニ
ットＳＵは焦電体薄板４１．裏面電極層４２を画素子１
０．２０に共用しているから、画素子は分極方向が逆に
なるように直列接続されていることＫなる。FIG. 4 is an electrical circuit diagram of one detection unit sU of the device of the present invention, and shows the above-mentioned stem 31. The lead wire 39 is set to the ground level, a positive potential vDD is applied to the drain or lead wire 37 of the FET 46, and the source or lead wire 38 outputs an output (2). K is trying to get ut. Between the gate and source of the FET 46 and the ground level stem 31 or lead wire 39, a gate resistor 47 on the order of 1G'' to 10Ω and a source resistor 48 on the order of 10Ω are connected, respectively. A bias is applied.The gate resistor 47 is arranged together with the K FET 46 inside the cap 32, and the external source resistor 48Fi is used as a resistor.This detection unit SU has a pyroelectric thin plate 41 and a back electrode layer 42. Pixel element 1
0.20, the pixel elements are connected in series so that their polarization directions are opposite.
所かる構成の検出ユニットｓＵの動作は次のとおシであ
る。即ち窓′板３３を介して人体が放出する赤外線（第
３図に示すように５ハ以上）が装置内へ入ると、この赤
外線の殆んどはフィルタ１３のみを透過し・、素子１ｏ
の表面電極層１２側に負電荷が生じ、出力Ｖｏｕｔ ＃
ｉ常態時のレベルより低下することＫなる。また火災が
発生して例；′えば炎からの赤外線（第４図に示すよう
に２声調、程度、倉ビークとして０．８〜７声調声調例
分布）が窓板３３を介して装置内へ入ると、この赤外線
の殆んどはフィルタ２３のみを透過し、素子２ｏの表面
電極層２２側に負電荷が生じ、その結果、出力Ｖｏｕｔ
Ｆｉ常態時のレベルより上昇することになる。仁のよ
うなしペル変化は遠隔報知或は警報器の動作のための信
号として使用されるが、本発明装置は上述の如く構成さ
れ、動作する検出ユニツ）ＳＵを複数個、規則的に配し
てなるものであるから、各検出ユニットＳυの出力ｖ。The operation of the detection unit sU having a certain configuration is as follows. That is, when infrared rays emitted by the human body (5 or more as shown in FIG. 3) enter the device through the window plate 33, most of this infrared rays passes only through the filter 13 and is transmitted through the element 1o.
A negative charge is generated on the surface electrode layer 12 side of the output Vout #
iIt will be lower than the normal level. In addition, if a fire occurs, for example, infrared rays from the flames (as shown in Figure 4, the tone distribution is 2 tones, degree, 0.8 to 7 tones as Kurabeek) enters the device through the window plate 33. When entering, most of this infrared rays passes only through the filter 23, and negative charges are generated on the surface electrode layer 22 side of the element 2o, resulting in the output Vout
Fi will rise above the normal level. A sudden Pel change is used as a signal for remote notification or operation of an alarm, and the device of the present invention is constructed as described above, and a plurality of operating detection units (SU) are arranged regularly. Therefore, the output v of each detection unit Sυ.
ｕｔをマイクロコンピュータ或は所要の構成を有する論
理回路に与え、これらによって、複数の出力Ｖ。ｕｔ
ＯＩｆ視により単なる人体検知、火災検知以外の情報を
得ることができる。１ｐら複数の出力Ｖｏｕｔの経時変
化を監視する構成とするととＫよって、人体のＶＩＰ＃
方向に関する情報力；得られ、例えば侵入者の侵入経路
、移動方向が解る。ま九出入口ＫＭ着する場合は検知人
体の出入を識別することができる。また火災検知の場合
は火炎の広がる方向又は移動する方向に関する情報が得
られ、例えば火元の特定が可能になる。また複数の出力
Ｖｇｔの同時的監視を行わせる構成とすることによって
、各検出ユニットの監視ｍ域ごとの人体の有無を検知す
ることが可能である。ut to a microcomputer or a logic circuit having the required configuration, thereby producing a plurality of outputs V. ut
Information other than simple human body detection and fire detection can be obtained by OIf viewing. If the configuration is such that the temporal changes of multiple outputs Vout such as 1p are monitored, then the human body's VIP#
Information power regarding direction: Obtain information such as the intruder's intrusion route and direction of movement. When arriving at Maku entrance/exit KM, it is possible to identify the entrance/exit of a detected human body. In the case of fire detection, information regarding the direction in which the flame spreads or moves can be obtained, making it possible to identify the source of the fire, for example. Furthermore, by configuring the system to simultaneously monitor a plurality of outputs Vgt, it is possible to detect the presence or absence of a human body in each monitoring area of each detection unit.
なお各検出ユニットＳＵの配置はマトリックス状でも単
一列状でもよく、また不等間隔配置でもよい。ま九各検
出江ニッ）ＳＵ犬身の監視傾城を相異させて装置全体と
しての監視域を広げるべく異方向を向けたレンズ又は鏡
を組合せた光学手段を窓板３３の前方に配して若しくは
ノ（ツケージ内に配して使用されるが、このような補助
的光学手段を用いることなく広い領域の監視を可能とす
る九めに各検出ユニットの検出面を一方向とせず、少し
ずつ異った方向を向けて夫々の検知面の法線が放射状を
なすようＫしてもよい。The detection units SU may be arranged in a matrix or in a single row, or may be arranged at irregular intervals. In order to widen the monitoring area of the device as a whole by making the monitoring angles of the SU dog bodies different, an optical means combining lenses or mirrors facing different directions is arranged in front of the window plate 33. Alternatively, the detection surface of each detection unit is not oriented in one direction, but is used in a cage, but it is possible to monitor a wide area without using such auxiliary optical means. They may be oriented in different directions so that the normals of the respective sensing surfaces form a radial pattern.
第５図は本発明装置の第２の実施例を示す要部の断面構
造図である。この実施例ｔｉ１つの検出ユニツ）ＳＵを
構成する２つの赤外線検出素子１０′。FIG. 5 is a sectional structural view of the main parts showing a second embodiment of the device of the present invention. In this embodiment, one detection unit) two infrared detection elements 10' constituting an SU.
２０′が独立的に構成されている。即ち金属性のステム
３１上には導電性の支持台１５．２５が固定されている
。等面積の焦電体薄板１１．２１の表面にはＮｉ−Ｃｒ
の電極層１２．２２が、また裏面ＫＦｉ同じく電極
層１６．２６が蒸着等によって形成されておシ、裏面電
極層１６．２６を夫々金属性の支持台１５゜２５上に銀
ペースト等の導電性接着剤１４．２４を用いて接着しで
ある。これＫより両裏面電極１６゜２６は支持台１５，
２５及びステム３１を介して電気的に接続されたことに
なる。そしてこの実施例で岐第５図に模式的に示すよう
に焦電体薄板１１゜２１の分極方向を上下逆にして配し
′【あり、表面電極層１２．２２を金線等を用いてなる
リード線４０にて一括接続し、これをＦＥＴ ４６のグ
ー）Ｋ接続しである。第６図はこの第２の実施例の電気
回路図であるが、上述の結線により雨検出素子１０．２
０は分極方向が逆になるようＫして並列に接続されてい
る。20' are independently constructed. That is, a conductive support base 15.25 is fixed on the metal stem 31. The surface of the pyroelectric thin plate 11.21 with equal area is Ni-Cr.
Electrode layers 12.22 and 16.26 on the back surface KFi are formed by vapor deposition, etc., and the back electrode layers 16.26 are coated with conductive material such as silver paste on a metal support 15.25. It is glued using adhesive 14.24. From this K, both back electrodes 16°26 are the support base 15,
This means that they are electrically connected via the stem 31 and the stem 31. In this embodiment, as schematically shown in FIG. The lead wires 40 are connected together, and this is connected to the lead wires 46 of the FET 46. FIG. 6 is an electrical circuit diagram of this second embodiment, and the above-mentioned wiring connects the rain detection element 10.2.
0 are connected in parallel in K so that the polarization direction is opposite.
而してとの実施例では人体が発する５声調以上の波長を
透過せしめる光学フィルタ１３と、火炎が発する０、８
〜７声廓の範囲の波長を透過せしめる光学フィルｐ２３
をキャップ３２の窓３２１に取付は九窓板３３の内面に
おける素子１Ｇ’、２０’夫々と対向するｆＲ域に固着
しである。その他＄１図の“実施例のものと同様のもの
は同符号を付しである。In this embodiment, there is an optical filter 13 that transmits wavelengths of 5 tones or more emitted by the human body, and 0 and 8 tones emitted by flame.
Optical filter p23 that transmits wavelengths in the range of ~7 tones
is attached to the window 321 of the cap 32 by fixing it to the fR region on the inner surface of the nine-window plate 33, which faces the elements 1G' and 20', respectively. Other components similar to those in the embodiment shown in Figure $1 are designated by the same reference numerals.
所かる構成とする場合も各検出ユニツ）ＳＵＦｉ前述の
第１ｆ）９４施例と同様に動作し、Ｖｏｕｔのレベル低
下により人体検知を、またレベル上昇により火炎検知を
各報しる。そして仁のような検出ユニツ）ＳＵＩ［ｌＩ
ｋ個を備えた本発明装置により人体の移動方向等の検知
が可能となるのも全く同様である０
而して上述の２つの実施例に見られる如く２つの素子を
分極方向が逆となるように直列的又は並列的に接続しで
ある。これＫよる効果は次のとおりである。即ち、暖房
＃ＩＫよる雰囲気温度の変化があった場合には焦電体薄
板４１又は１１．２１Ｆｉ共にその影響を受けて焦電効
果を示すが、本発明装置では素子１０，２０又＃ｉＩＯ
’、２０’の両者の分極方向を逆にして直列接続又は並
列接続してあシ、しかも両者は等面積としであるので、
この直列又は並列回路内でその帯電効果が相殺され、Ｆ
ＥＴ出 力の変化は殆んどない。ま良熱電体は公知
のように圧電効果も示すので、この装置を取付けた密閉
性に優れ九部屋の扉を急激に閉め九ような場合には画素
子１０．２０又は１０’、２０’に圧電効果が現れるが
、これも分極方向が逆であるので上記同様に相殺されそ
の影響がない。なお画素子の受光面積は厳密に等しい必
要はなく回路動作に悪影響を及ぼさない範囲の受光面積
の差異は許容できる。Even in the case of a certain configuration, each detection unit (SUFi) operates in the same manner as in the above-mentioned 1f)94 embodiment, and a decrease in the level of Vout reports the detection of a human body, and a rise in the level of Vout reports the detection of a flame. and detection units like Jin) SUI[lI
It is exactly the same that the device of the present invention equipped with k elements can detect the moving direction of a human body, etc.0 However, as seen in the above two embodiments, the polarization directions of the two elements are opposite. They can be connected in series or in parallel. The effects of K are as follows. That is, when there is a change in the ambient temperature due to heating #IK, both the pyroelectric thin plates 41 and 11.21Fi are affected by the change and exhibit a pyroelectric effect, but in the device of the present invention, the elements 10, 20 and #iIO
', 20' can be connected in series or in parallel with their polarization directions reversed, and both have the same area, so
The charging effect is canceled out in this series or parallel circuit, and F
There is almost no change in ET output. As is well known, the Mara thermoelectric material also exhibits a piezoelectric effect, so it has excellent airtightness when this device is installed, and in the event that the door of the room is suddenly closed, the pixel elements 10, 20, 10', 20' A piezoelectric effect appears, but since the polarization direction is opposite, it is canceled out similarly to the above and has no effect. Note that the light-receiving areas of the pixel elements do not need to be strictly equal, and a difference in the light-receiving areas within a range that does not adversely affect the circuit operation is acceptable.
なお光学フィルタ１３．２３は上述のように赤外線検出
素子の表面電極に固着しても、また窓板に取付叶てもい
ずれでもよく、更に＊面電極と窓板との中間に非接触的
に位置するように、ステムに立設した支柱に取付けるこ
ととしてもよい。Note that the optical filter 13.23 may be fixed to the surface electrode of the infrared detection element as described above, or may be attached to the window plate, or may be attached non-contactly between the surface electrode and the window plate. It may also be attached to a post erected on the stem so that it is positioned.
第７図は本発明装置の第３の実施例の要部の断面構造図
、！ｌＩｓ図はその部分平面図である。この実施例Ｆｉ
ｌｊ＆の検出ユニツ）ＳＵの焦電体を１枚の基板を用い
て構成したものである。即ち平面視で長方形の基板５１
０表面には２行６列に平面視で正方形の表面電極層１２
．２２が適長離隔されて蒸着形成されており、その裏面
には１組の表面電極層１２．２２に対向する部分Ｋｍ合
さ鷺るようＫして裏面電極層５２が形成され、これらに
よって、裏面電極層５２と同数、つまり６個の検出ユニ
ツ）ＳＵが形成されており、１つの表面電極層１２と、
と尤に対向する裏面電極層５２部分と、その間に挾まれ
る焦電体基板５１の領域とで１つの素子１０’が、また
前記表面電極層１２に相隣し、上記したところと同一の
裏面電極層５２に対向する表面電極層２２と、該裏面電
極層５２とその闇に挾まれる焦電体基板５１の領域とで
もう１つの素子２０＃が形成され、画素子ｌＯ’、 ２
０”にて検出ユニットＳＵが形成されることになる。FIG. 7 is a cross-sectional structural diagram of the main part of the third embodiment of the device of the present invention. The IIs diagram is a partial plan view thereof. This example Fi
Detection unit of lj&) The pyroelectric body of SU is constructed using one substrate. That is, the substrate 51 is rectangular in plan view.
0 surface has a square surface electrode layer 12 arranged in 2 rows and 6 columns in plan view.
．． 22 are formed by vapor deposition at appropriate lengths apart, and a back electrode layer 52 is formed on the back surface of the set of surface electrode layers 12 and 22 so as to overlap the portions Km opposite to the front electrode layers 12 and 22. The same number of detection units (SU) as the back electrode layer 52, that is, six detection units, are formed, and one front electrode layer 12 and
One element 10' is made up of the back electrode layer 52 portion which is directly opposed to the pyroelectric substrate 51 and the area of the pyroelectric substrate 51 sandwiched therebetween. Another element 20# is formed by the front electrode layer 22 facing the back electrode layer 52 and the region of the pyroelectric substrate 51 sandwiched between the back electrode layer 52 and the darkness thereof, and the pixel element 1O', 2
0'', a detection unit SU is formed.
光学フィルタ１３．２３は図示の如く各表面電極層１２
．２２に被着形成しであるが、第２の実施例のように表
面電極１２．２２と位置を整合させるようにキャップ３
２の窓板３３内面に固着してもよいＯ
無電体基板−５１の表面には各検出ユニットＳＵを区画
する部分、即ち裏面電極層５２が形成されていない間隔
部分に対向する表面側の位置ＩＣＦｉ溝５１ｍが凹設し
である。この溝５１ａｔは検出ユニットＳＵ相互間の熱
的影響を低減する上で有効であるが、必ずしも設ける必
要はない。The optical filters 13 and 23 are connected to each surface electrode layer 12 as shown in the figure.
．． 22, but as in the second embodiment, the cap 3 is aligned with the surface electrode 12.22.
O may be fixed to the inner surface of the window plate 33 of No. 2. On the surface of the non-electric substrate 51, there is a position on the surface side opposite to the portion that partitions each detection unit SU, that is, the interval portion where the back electrode layer 52 is not formed. The ICFi groove 51m is recessed. Although this groove 51at is effective in reducing the thermal influence between the detection units SU, it is not necessary to provide it.
以上のように焦電体基板５１の表裏に電極層を形成し、
また光学フィルタを被着したものを支持台５３上にエポ
キシ樹脂等の絶縁層５４を介して固定しである。そして
表面電極層１２をＦＥＴ ４６のゲートへ、また表面電
極層２２をステム３１に接続しである。この第３の実施
例は各検出ユニツ）ＳＵにおいて画素子ｌＯ’、２Ｏｆ
’が分極方向を逆にし九状謙で直列状ｆｌＫ接続される
こととなり、電気的な接続にりいてみれば＠１の実施例
と全く同様である。As described above, electrode layers are formed on the front and back sides of the pyroelectric substrate 51,
Further, the optical filter coated with the optical filter is fixed onto a support base 53 via an insulating layer 54 made of epoxy resin or the like. Then, the surface electrode layer 12 is connected to the gate of the FET 46, and the surface electrode layer 22 is connected to the stem 31. In this third embodiment, each detection unit (SU) has pixel elements lO', 2Of
' are connected in series flK with the polarization direction reversed, and the electrical connection is exactly the same as the embodiment @1.
以上のように本発明に係る焦電型赤外線検出装置社無電
体を用い九２つの赤外線検出素子の犬々に透過波兼域が
相異する光学フィルタを配してなる検出ユニットを複数
個並設してなるものであるから人体及び火炎の両方を検
知できることは勿論人体、火炎の移動方向等の検知も可
能な極めて有用性の高い防犯、防火装置或は防火装置を
兼ねる人出前監視装置が実現できる。そして本発明装置
は２つの素子を夫々の分極方向が逆になるように直列的
に又は並列的に接続しているので雰囲気温度、圧力の変
化による影響が相殺されてその結果、雑音出力がなく誤
報知又は警報器誤動作がない等の利点がある。そして第
３の実施例のように１秋の焦電体基板に多数の電極層を
形成して複数の検出ユニットを製造する場合は各検出ユ
ニットの特性が均一化し、また製作工程が少くて済む等
、本発明は優れた効果を奏する。As described above, the pyroelectric infrared detection device according to the present invention uses a non-electric body to arrange a plurality of detection units in parallel, each of which has optical filters having different transmitted waves and bands on each of the 92 infrared detection elements. It is an extremely useful crime prevention and fire prevention device that can detect both human bodies and flames, as well as detect the moving direction of human bodies and flames, or it can also serve as a fire prevention device. realizable. In the device of the present invention, two elements are connected in series or in parallel so that their polarization directions are opposite, so the effects of changes in ambient temperature and pressure are canceled out, and as a result, there is no noise output. There are advantages such as no false alarms or alarm malfunctions. If multiple detection units are manufactured by forming a large number of electrode layers on a single pyroelectric substrate as in the third embodiment, the characteristics of each detection unit will be uniform and the number of manufacturing steps will be reduced. etc., the present invention has excellent effects.
図面は本発明の実施例を示すものであって、第１図は第
１の実施例の要部の断面構造図、第２図はその略示平面
図、ｆｆ１３図は火炎及び人体夫々の赤外線スペクトル
、第４図Ｕ第１の実施例の電気回路図、第５図は＠２の
実施例の要部の断面構造図、第６図はその電気回路図、
第７図は第３の実施例の要部の断面構造図、第８図はそ
の平面図である。
１０、２０．１０’、 ２０’、 １０＃、 ２０”・
・・赤外線検出素子１１、２１．４１・・・焦電体薄板
５１・・・焦電体基板１２．２２・・・表面電極 １
６．２６．４２・・・裏面電極−１３，２３・・・光学
フィルタ
特許出願人 三洋電機株式会社
代理人 弁理士 河 野 登 犬
第 １ 図
波長（μ電）
第 ３ ｚ
第 ６ 図
第７２
第 δ 閃The drawings show an embodiment of the present invention, and FIG. 1 is a cross-sectional structural diagram of the main part of the first embodiment, FIG. 2 is a schematic plan view thereof, and FIG. Spectrum, Fig. 4 is an electric circuit diagram of the first embodiment, Fig. 5 is a sectional structural diagram of the main part of the @2 embodiment, Fig. 6 is its electrical circuit diagram,
FIG. 7 is a sectional structural view of the main part of the third embodiment, and FIG. 8 is a plan view thereof. 10, 20.10', 20', 10#, 20"・
...Infrared detection element 11, 21.41...Pyroelectric thin plate 51...Pyroelectric substrate 12.22...Surface electrode 1
6.26.42... Back electrode-13, 23... Optical filter patent applicant Sanyo Electric Co., Ltd. agent Patent attorney Noboru Kono Inu Figure 1 Wavelength (μ-electron) 3 z 6 Figure 72 δ Flash
Claims (1)
波婦が相異する光学フィルタを配してなる検出ユニット
を複数個並設してなることを特徴とする焦電型赤外線検
出装置。 乙 前記検出ユニットを構成する２つの赤外線検出素子
は分極方向が逆になるように直列的に接続しである特許
請求の範囲第１項記載の焦電型赤外線検出装置０ ３、前記検出ユニットを構成する２一つの赤外線検出素
子は分極方向が逆になるように並列的に接続しである特
許請求の範囲第１項記載の焦電型赤外線検出装置。 ｔ 複数の赤外線検出素子の焦電体を１枚の基板にて構
成しである特許請求の範阻第１項記載の焦電型赤外線検
出装置。 ＆ 前記基板は各素子を構成する領域間に溝を形成しで
ある特許請求の範囲第４項記載の焦電型赤外線検出装置
。[Claims] 1. A plurality of detection units are arranged in parallel, each of which has two infrared detection elements using a pyroelectric material, each of which is provided with an optical filter having a different transmitted wave width. Pyroelectric infrared detection device. B. The pyroelectric infrared detection device 03 according to claim 1, wherein the two infrared detection elements constituting the detection unit are connected in series so that their polarization directions are opposite. The pyroelectric infrared detection device according to claim 1, wherein the two constituent infrared detection elements are connected in parallel so that their polarization directions are reversed. t. A pyroelectric infrared detecting device according to claim 1, wherein the pyroelectric bodies of the plurality of infrared detecting elements are constructed from one substrate. & The pyroelectric infrared detection device according to claim 4, wherein the substrate has grooves formed between regions constituting each element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56157872A JPS5858424A (en) | 1981-10-02 | 1981-10-02 | Pyroelectric infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56157872A JPS5858424A (en) | 1981-10-02 | 1981-10-02 | Pyroelectric infrared detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5858424A true JPS5858424A (en) | 1983-04-07 |
| JPH0337132B2 JPH0337132B2 (en) | 1991-06-04 |
Family
ID=15659244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56157872A Granted JPS5858424A (en) | 1981-10-02 | 1981-10-02 | Pyroelectric infrared detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5858424A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935118A (en) * | 1982-08-24 | 1984-02-25 | Matsushita Electric Ind Co Ltd | Heat-infrared ray detector |
| US5468960A (en) * | 1993-05-12 | 1995-11-21 | Optex Co., Ltd. | Pyroelectric infrared detector |
| US5804823A (en) * | 1995-10-10 | 1998-09-08 | Raytheon Company | Bismuth layered structure pyroelectric detectors |
| JP2000215364A (en) * | 1999-01-26 | 2000-08-04 | Hochiki Corp | Flame detector |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5035676A (en) * | 1973-06-15 | 1975-04-04 | ||
| JPS54108690U (en) * | 1978-01-13 | 1979-07-31 |
-
1981
- 1981-10-02 JP JP56157872A patent/JPS5858424A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5035676A (en) * | 1973-06-15 | 1975-04-04 | ||
| JPS54108690U (en) * | 1978-01-13 | 1979-07-31 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935118A (en) * | 1982-08-24 | 1984-02-25 | Matsushita Electric Ind Co Ltd | Heat-infrared ray detector |
| JPH037057B2 (en) * | 1982-08-24 | 1991-01-31 | Matsushita Electric Ind Co Ltd | |
| US5468960A (en) * | 1993-05-12 | 1995-11-21 | Optex Co., Ltd. | Pyroelectric infrared detector |
| US5804823A (en) * | 1995-10-10 | 1998-09-08 | Raytheon Company | Bismuth layered structure pyroelectric detectors |
| JP2000215364A (en) * | 1999-01-26 | 2000-08-04 | Hochiki Corp | Flame detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337132B2 (en) | 1991-06-04 |
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