JPS5856422B2 - force conversion mechanism - Google Patents
force conversion mechanismInfo
- Publication number
- JPS5856422B2 JPS5856422B2 JP53041599A JP4159978A JPS5856422B2 JP S5856422 B2 JPS5856422 B2 JP S5856422B2 JP 53041599 A JP53041599 A JP 53041599A JP 4159978 A JP4159978 A JP 4159978A JP S5856422 B2 JPS5856422 B2 JP S5856422B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator body
- force
- piezoelectric element
- vibrator
- mechanism according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
Description
【発明の詳細な説明】
本発明は力を周波数に変換する機構に関するものである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a mechanism for converting force into frequency.
第1図は、従来より一般に用いられている力を周波数に
変換する機構の一実施例の原理的構成説明図である。FIG. 1 is an explanatory diagram of the principle structure of an embodiment of a conventionally commonly used mechanism for converting force into frequency.
図において、1は両端を固定された断面一様な棒、2は
、たとえば筐体等のベースである。In the figure, 1 is a rod with a uniform cross section fixed at both ends, and 2 is a base of, for example, a casing.
今、棒1の両固定端にそれぞれ軸力Sが加わるものとす
ると、軸力Sと棒の横方向の振動周波数fとの間にはl
>Kzgr%の場合(1)式に示すような関係がある。Now, assuming that an axial force S is applied to both fixed ends of the rod 1, there is a difference of l between the axial force S and the lateral vibration frequency f of the rod.
>Kzgr%, there is a relationship as shown in equation (1).
共振周波数ωは2πfで表わされるので、棒lの共振周
波数のを測定すれば、対応する軸力Sを測定することが
できる。Since the resonant frequency ω is expressed as 2πf, by measuring the resonant frequency of the rod l, the corresponding axial force S can be measured.
このようなトランスデユーサにおいて、高精度の測定を
実現するための条件としては以下の条件が満足されなげ
ればならない。In such a transducer, the following conditions must be satisfied in order to achieve highly accurate measurement.
(1)周波数fの安定性が良い。(1) Good stability of frequency f.
つまり、振動子(=俸l)のQが高い。In other words, the Q of the vibrator (=salary l) is high.
(11)単位応力当りの周波数変化率Δf/σが大きい
。(11) Frequency change rate Δf/σ per unit stress is large.
即ち、このようなトランスデユーサの良好塵Gは次のよ
うな式で表わすことができる。That is, the good dust G of such a transducer can be expressed by the following equation.
而して、第1図の構成のものにおいて、俸lを共振させ
、その共振周波数ωを測定すれば、加えられた軸力Sを
知ることができるが、第2図に示す如<、陣が振動して
いる場合に、ベース2との固定端部には反力R,モモ−
ン)Mが発生し、この力はベース部が理想的な固定端で
ない場合損失となり消費され、俸lのQの低下の原因と
なる。In the configuration shown in Fig. 1, the applied axial force S can be determined by making the salary l resonate and measuring its resonance frequency ω, but as shown in Fig. 2, the When the is vibrating, a reaction force R is generated at the fixed end of the base 2.
If the base part is not an ideal fixed end, this force becomes a loss and is consumed, causing a decrease in the Q of the salary l.
本発明は上記の問題点を解決したものである。The present invention solves the above problems.
本発明の目的は簡単な構成により、振動エネルギー損失
の少く、効率のよい力変換機構を提供するにある。An object of the present invention is to provide an efficient force conversion mechanism with a simple configuration and low vibration energy loss.
第3図は本発明の一実施例の構成説明図で、Aは正面図
、Bは側面図である。FIG. 3 is a configuration explanatory diagram of an embodiment of the present invention, in which A is a front view and B is a side view.
図において、1は振動子本体で、振動部11、結合部1
2と支持部13よりなる。In the figure, 1 is the vibrator main body, the vibrating part 11, the coupling part 1
2 and a support section 13.
振動部11は中心軸A−Aに対称に平行して設けられ、
2個の板ビーム状をなしている。The vibrating part 11 is provided symmetrically in parallel to the central axis A-A,
It is shaped like two plate beams.
結合部12はその両端が振動部11のそれぞれの一端と
結合しているもので、振動部11と結合部12とにより
口の字形に構威され全体が一つの振動子として構威され
ている支持部13は振動子本体1の取付げられるベース
2、たとえば筐体等から振動子本体1を振動的に絶縁す
ると共に、振動子本体1をベース2に固定する場合の取
付は誤差にもとすく、中心軸のずれによる誤差の発生を
防止するようにしたもので、互に直角をなす板状の7レ
クシヤ131゜132よりなり、結合部12とベース2
とを連結している。Both ends of the coupling part 12 are coupled to one end of each of the vibrating parts 11, and the vibrating part 11 and the coupling part 12 form a mouth shape, and the whole is structured as one vibrator. The support portion 13 vibrationally insulates the vibrator body 1 from the base 2 to which the vibrator body 1 is attached, such as a housing, and also prevents mounting error when fixing the vibrator body 1 to the base 2. It is designed to prevent the occurrence of errors due to misalignment of the center axis, and is made up of seven plate-shaped lexers 131° and 132 that are at right angles to each other, and connects the connecting part 12 and the base 2.
are connected.
3,4は第3図に示すごとく、結合部12の側面にそれ
ぞれ取付けられた圧電素子で、この場合は、圧電素子3
は励振素子として用いられ、外部に設けられた増幅器5
に接続されている。3 and 4 are piezoelectric elements respectively attached to the side surfaces of the coupling part 12, as shown in FIG.
is used as an excitation element, and an externally provided amplifier 5
It is connected to the.
また圧電素子4は振動のピックアップ素子として用いら
れ、その出力は増幅器5に帰還されるもので、振動子本
体1と、圧電素子3,4と、増幅器5とにより、第4図
に示すように発振回路Bが構成されている。Furthermore, the piezoelectric element 4 is used as a vibration pickup element, and its output is fed back to the amplifier 5. An oscillation circuit B is configured.
6は周波数測定器である。以上の構成において、第3図
に示す如く、被測定軸力Sが矢印方向に振動子本体1に
加えられた場合に、軸力Sが変化すると、前述(1)式
に示す如く振動子本体1の共振周波数は変化し、これに
対応して、発振回路Bの発振周波数も変化する。6 is a frequency measuring device. In the above configuration, as shown in FIG. 3, when the measured axial force S is applied to the vibrator body 1 in the direction of the arrow, when the axial force S changes, the vibrator body The resonant frequency of oscillation circuit B changes, and the oscillation frequency of oscillation circuit B changes accordingly.
したがって、発振回路Bの発振周波数を周波数測定器6
により測定すれば振動子本体1に加えられた軸力Sの値
を知ることができる。Therefore, the oscillation frequency of the oscillation circuit B is determined by the frequency measuring device 6.
The value of the axial force S applied to the vibrator main body 1 can be known by measuring it.
この場合、第5図に示す如く、2個の振動部11、結合
部12が中心軸A−Aに対称に振動する振動モードの場
合、振動子本体10ベース2への固定端部には振動部1
1と結合部12との接続点において発生する反力R、モ
ーノ)Mが互に逆方向で大きさが等しいため結合部12
において互に打消し合い、振動子の振動に伴う力が外部
に全く発生せず、支持が理想的な状態でない場合でも、
振動子本体1から外部にエネルギーが消費されることが
ない。In this case, as shown in FIG. 5, in the vibration mode in which the two vibrating parts 11 and the coupling part 12 vibrate symmetrically about the central axis A-A, the fixed end of the vibrator body 10 to the base 2 has a vibration Part 1
Since the reaction forces R and M generated at the connection point between 1 and the joint 12 are in opposite directions and equal in magnitude, the joint 12
cancel each other out, no force associated with the vibration of the vibrator is generated externally, and even if the support is not ideal,
Energy is not consumed externally from the vibrator body 1.
この結果、Qの高い(良好塵Gの値の大きい)振動子本
体を得ることができる。As a result, a vibrator body with a high Q (large value of good dust G) can be obtained.
第6図は本発明の他の実施例の要部構成説明図で、Aは
正面図、Bは側面図である。FIG. 6 is an explanatory diagram of the main part configuration of another embodiment of the present invention, in which A is a front view and B is a side view.
本実施例においては、中心軸A−Aに対称にフレクシャ
132をはさんで、結合部12に一面を固定されたアイ
ソレーションマス14を4個設けたものである。In this embodiment, four isolation masses 14 are provided, one side of which is fixed to the joint 12, with a flexure 132 sandwiched therebetween symmetrically about the central axis A-A.
この結果、発生する反力R1モーメン)Mをより小さく
することができ、その小さな反力が互に打消されること
になるので、振動子本体1のヘース2への支持点に、力
がより確実に発生しないものが得られる。As a result, the generated reaction force R1 (moment) M can be made smaller, and the small reaction forces cancel each other out, so that more force is applied to the support point of the vibrator body 1 to the heath 2. You get something that definitely won't happen.
なお、前述の実施例においては、圧電素子3゜4は結合
部12の側面に取付けられていると説明したが、第7図
Aに示すごとく、振動部11に取付げられてもよいこと
は勿論である。In the above-mentioned embodiment, it was explained that the piezoelectric element 3.4 is attached to the side surface of the coupling part 12, but it is also possible to attach it to the vibrating part 11 as shown in FIG. 7A. Of course.
但し、結合部12の側面附近が、より良好なQが得られ
る。However, a better Q can be obtained near the side surface of the joint portion 12.
圧電素子の固着位置とQとの関係を第7図Bに示す。The relationship between the fixed position of the piezoelectric element and Q is shown in FIG. 7B.
なお、圧電素子3.4として蒸着あるいはスパッタリン
グ等により、薄膜形圧電素子を振動子本体1の側面に直
接形成するようにすれば、圧電素子を接着する等の場合
に比して、更に高いQを得ることができるとともに、本
体側面に直接形成するので、生産性のよいものが得られ
る。Note that if a thin film piezoelectric element is directly formed on the side surface of the vibrator body 1 by vapor deposition or sputtering as the piezoelectric element 3.4, a higher Q can be achieved than in the case where the piezoelectric element is bonded. In addition, since it is formed directly on the side surface of the main body, it is possible to obtain a product with good productivity.
また、振動子本体1を磁性材で構威し、コイルにより振
動子のドライブ及びピックアップを行う電磁的方法を用
いれば、ドライブ及びピックアップ素子としてのコイル
が振動子本体1に非接触にできるのでより特性のよいも
のが得られる。Furthermore, if the transducer main body 1 is made of a magnetic material and an electromagnetic method is used in which the transducer is driven and picked up by a coil, the coil as a drive and pickup element can be made non-contact with the transducer main body 1. Products with good characteristics can be obtained.
また、振動子本体1を圧電材料、たとえば水晶等で直接
構成し、圧電素子に電極を蒸着等で取付け、振動子を構
成すれば、更に、構成は簡単となり、而も特性は良好で
、出力インピーダンスの低いものが得られる。Furthermore, if the vibrator main body 1 is directly composed of a piezoelectric material such as crystal, and the vibrator is constructed by attaching electrodes to the piezoelectric element by vapor deposition, etc., the configuration becomes even simpler, the characteristics are good, and the output is Low impedance can be obtained.
この場合、水晶のカット及び電極の配置は振動部11が
屈曲振動するように選択すればよい。In this case, the cut of the crystal and the arrangement of the electrodes may be selected so that the vibrating section 11 undergoes bending vibration.
また、前述の実施例においては、振動部11は板ビーム
状をなしていると説明したが、これにかぎることはなく
、丸棒状でもよく、要するに、対向する振動部が対称構
造のものであればよい。Furthermore, in the above-mentioned embodiment, it was explained that the vibrating part 11 has a plate beam shape, but it is not limited to this, and may be in the shape of a round bar.In short, even if the opposing vibrating parts have a symmetrical structure Bye.
また、フレクシャ131,132のいずれかが、なくて
もよいことは勿論である。Furthermore, it goes without saying that either the flexures 131 or 132 may be omitted.
以上説明したように、本発明によれば、簡単な構成によ
り、振動エネルギー損失の少く、効率のよい力変換機構
を実現することができる。As described above, according to the present invention, it is possible to realize an efficient force conversion mechanism with a simple configuration and low vibration energy loss.
第1図は従来公知のカー周波数変換機構の一実施例の原
理的構成説明図、第2図は第1図の動作説明図、第3図
は本発明の一実施例の構成説明図で、Aは正面図、Bは
側面図、第4図は発振回路の構成説明図、第5図は第3
図の動作説明図、第6図は本発明の他の実施例の構成説
明図で、Aは正面図、Bは側面図、第7図A、 Bは圧
電素子の固着位置とQとの関係を示す説明図である。
1・・・・・・振動子本体、11・・・・・・振動部、
12・・・・・・結合部、13・・・・・・支持部、1
4・・・・・・アイソレーションマス、2・・・・・・
ベース、3,4・・・・・・圧電素子、5・・・・・・
増幅器、6・・・・・・周波数測定器、A・・・・・・
中心軸。FIG. 1 is an explanatory diagram of the principle configuration of an embodiment of a conventionally known Kerr frequency conversion mechanism, FIG. 2 is an explanatory diagram of the operation of FIG. 1, and FIG. 3 is an explanatory diagram of the configuration of an embodiment of the present invention. A is a front view, B is a side view, Fig. 4 is an explanatory diagram of the configuration of the oscillation circuit, and Fig. 5 is the third
Fig. 6 is an explanatory view of the configuration of another embodiment of the present invention, where A is a front view, B is a side view, and Figs. 7A and B are the relationship between the fixed position of the piezoelectric element and Q. FIG. 1... Vibrator body, 11... Vibrating part,
12...Connection part, 13...Support part, 1
4...Isolation mass, 2...
Base, 3, 4...Piezoelectric element, 5...
Amplifier, 6... Frequency measuring device, A...
central axis.
Claims (1)
力が軸方向に実質的に加えられる長軸状の振動部と該振
動部のそれぞれの一端を結合する結合部とよりなる振動
子本体、該振動子本体を共振させる励振手段および前記
振動子本体の振動を検出する検出手段を具備してなる力
変換機構。 2 励振手段、検出手段の素子として圧電素子を用い、
かつ該圧電素子を振動子本体の結合部に設けたことを特
徴とする特許請求の範囲第1項記載の力変換機構。 3 圧電素子として薄膜蒸着圧電素子を用いたことを特
徴とする特許請求の範囲第2項記載の力変換機構。 4 振動子本体を磁性材で構成し、励振手段、検出手段
の素子としてコイルを用いたことを特徴とする特許請求
の範囲第1項記載の力変換機構。 5 振動子本体を圧電材と電極で構成したことを特徴と
する特許請求の範囲第1項記載の力変換機構。[Scope of Claims] 1. A long-shaft vibrating part that is provided symmetrically in parallel to a central axis and to which the human axial force to be converted is substantially applied in the axial direction, and a connection that connects one end of each of the vibrating parts. A force transducing mechanism comprising a vibrator body comprising a vibrator body, an excitation means for causing the vibrator body to resonate, and a detection means for detecting vibration of the vibrator body. 2 Using a piezoelectric element as an element of the excitation means and detection means,
2. The force transducing mechanism according to claim 1, wherein the piezoelectric element is provided at a connecting portion of the vibrator body. 3. The force transducing mechanism according to claim 2, characterized in that a thin film vapor-deposited piezoelectric element is used as the piezoelectric element. 4. The force conversion mechanism according to claim 1, wherein the vibrator body is made of a magnetic material, and coils are used as elements of the excitation means and the detection means. 5. The force transducing mechanism according to claim 1, wherein the vibrator body is composed of a piezoelectric material and an electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53041599A JPS5856422B2 (en) | 1978-04-07 | 1978-04-07 | force conversion mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53041599A JPS5856422B2 (en) | 1978-04-07 | 1978-04-07 | force conversion mechanism |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18477685A Division JPS61142434A (en) | 1985-08-22 | 1985-08-22 | Power conversion mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54133390A JPS54133390A (en) | 1979-10-17 |
JPS5856422B2 true JPS5856422B2 (en) | 1983-12-14 |
Family
ID=12612851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53041599A Expired JPS5856422B2 (en) | 1978-04-07 | 1978-04-07 | force conversion mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5856422B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5786018A (en) * | 1980-11-17 | 1982-05-28 | Yokogawa Hokushin Electric Corp | Oscillation element |
JPS6010122A (en) * | 1983-06-30 | 1985-01-19 | Shinko Denshi Kk | Load converting mechanism |
ATE72897T1 (en) * | 1986-07-01 | 1992-03-15 | Sensor Int | VIBRATION FORCE SENSOR. |
FR2685960B1 (en) * | 1992-01-08 | 1994-03-25 | Stanislas Konieczka | DOUBLE-STRAP FORCE SENSOR ELEMENT. |
-
1978
- 1978-04-07 JP JP53041599A patent/JPS5856422B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS54133390A (en) | 1979-10-17 |
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