JPS5854782Y2 - Sample tension device for electron microscopes, etc. - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an improvement of a sample tensioning device used in an electron microscope or the like.

Conventionally, a combination of a motor and a screw or a hydraulic mechanism and a lever has been widely used as a tension driving means in such a sample tensioning device.

However, with such a tension driving means, it is difficult to control the tension speed of the sample to a minute level (for example, 1×10 −2 μm/5 ec).

Therefore, it is not possible to observe minute deformations such as dislocation movement in metal samples.

The present invention aims to solve such inconveniences, and will be explained in detail below with reference to the drawings.

The attached drawing is a plan cross section showing one embodiment of the present invention.
is the mirror body of an electron microscope.

2 is a holder attached through the side wall of the mirror body 1;
The holder is arranged so that its axis (longitudinal direction) is substantially perpendicular to the optical axis.

The end of the holder 2 on the vacuum side is inserted between the upper magnetic pole (not shown) and the lower magnetic pole 3a of the objective lens, and an opening 4 is formed in the portion intersecting the optical axis.

Further, a grip portion 5 is provided on the atmosphere side of the holding body 2.

Reference numeral 6 denotes a thin film sample placed in the opening 4 of the holder 2, and the sample is held by two sample holding members 7a and 7b.

The inner portions 7a of both sample holding members are fixed to the holder 2,
The other 7b is attached to the drive rod 9 via a piezoelectric element 8, which will be described later.

The other end of the drive rod 9 movably passes through the center of the holder 2 and is taken out into the atmosphere, and has a male screw 10 formed at its tip.

The drive rod 9 is prevented from rotating by a key 11a and a keyway 11b, and a male threaded body 13 formed on the drive rod is screwed into the drive rod.

Therefore, when the motor 12 is driven by operating the motor drive power supply 14, the drive rod 9 moves in the direction of arrow A in the figure due to the screw engagement of the female screw and the male screw, and the piezoelectric element 8 and the sample holding member 7b move in the same direction. In order to move the sample 6, tension is applied to the sample 6.

Note that the motor 12 is fixed to a plate 15 provided on the grip portion 5.

The piezoelectric element 8 described above is made of a material that causes mechanical strain when a voltage is applied, and two electrode plates 16a and 16b are attached to the piezoelectric element, and a voltage is applied to the electrode plates from a power source 17. The piezoelectric element 8 is configured to expand or contract in the axial direction of the drive rod 9 by applying .

Here, the amount of strain in the piezoelectric element 8 is several μm or less, and moreover, the amount of strain is proportional to the applied voltage.

Therefore, if the strain of the piezoelectric element 8 is used to apply tension to the sample 6, it is easy to obtain, for example, I x 10 = μm/s.
It becomes possible to obtain a slow tensile speed of less than ec.

Therefore, the motor 12 was operated until just before the dislocation change occurred in sample 6.
Sample 6 is pulled by.

After that, if the driving of the motor 12 is stopped and a voltage is applied between the electrode plates 16a and 16b from the power source 17 to contract the piezoelectric element 8, it is possible to apply a minute amount of tension to the sample 6. The state of dislocation movement can be observed accurately.

It should be noted that the above description is an illustration of the present invention, and many modifications may be made in its implementation.

For example, the piezoelectric element is provided between the sample holding member 7b and the drive rod 9, but it may also be provided at other points, such as the connecting portion between the sample and each sample holding member or the connecting portion between the holder 2 and the sample holding member 9a. Good too.

Further, although a combination of a motor and a screw is used as the means for pulling the sample, the present invention is not limited to this, and tension may be applied to the sample by a combination of a lever and a hydraulic mechanism, for example.

Further, when pulling the sample, although the case where a tensile force is applied to one end of the sample has been shown, it may be configured so that a tensile force is applied to both ends of the sample.

[Brief explanation of drawings]

The accompanying drawing is a sectional plan view showing an embodiment of the present invention. In the figure, 1 is a mirror body, 2 is a holder, 3a is an upper magnetic pole of an objective lens, 4 is an aperture, 5 is a gripping part, 6 is a sample, 7a and 7b are sample holding members, 8 is a piezoelectric element, and 9 is a drive rod , 10 is a male screw, 12 is a motor, 13 is a female screw body, 1 is a drive power source,
16a and 16b are electrode plates, and 17 is a power source.

Claims (1)

[Scope of utility model registration request] comprising a holder attached to a mirror body, a sample holding member attached to the holder and for holding a sample, and a driving means for applying a tensile force to the sample holding member to pull the sample, A substance that causes mechanical strain by applying a voltage for applying tension to the sample independently of the drive means is provided between the sample and the holder or between the sample and the drive means, and a voltage is applied to the substance. A specimen tensioning device for an electron microscope, etc., which is provided with means for applying .