JPS5854718A - Crystal oscillator - Google Patents
Crystal oscillatorInfo
- Publication number
- JPS5854718A JPS5854718A JP15434281A JP15434281A JPS5854718A JP S5854718 A JPS5854718 A JP S5854718A JP 15434281 A JP15434281 A JP 15434281A JP 15434281 A JP15434281 A JP 15434281A JP S5854718 A JPS5854718 A JP S5854718A
- Authority
- JP
- Japan
- Prior art keywords
- oscillation
- rod
- crystal
- section
- surface electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 23
- 230000007423 decrease Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000010355 oscillation Effects 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract description 4
- 239000010453 quartz Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- 235000011511 Diospyros Nutrition 0.000 description 1
- 244000236655 Diospyros kaki Species 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 210000003423 ankle Anatomy 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、いわゆるエツジモードの思想に基(新規な振
動モードを有する水晶振動子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a crystal resonator having a novel vibration mode based on the idea of so-called edge modes.
従来、超小型で周波数温度特性が比較的フラットでかつ
製造しやすい水晶振動子として、音叉型あるいはレンズ
型AT板があり、水晶時計等に主として用いられてきた
。しかるに、音叉型1Cおいては発振周波数がやや低す
ぎろため、可変分周比の分周器を用いた出力周波数の微
調整が粗くなりすぎろ不便や、音叉の左右の枝の固有振
動数の一致の程度が工作誤作により僅かにずれても特性
劣化を起し易く、量産における歩留り低下の一要因とな
っていた。他方AT板振動子はその周波数温度特性が補
償の困離な:3次曲線である上に極めて切出角に対して
敏感であり、いわゆる副振動も存在するので特性を揃え
難く、又レンズ加工も1個づつとなるため、水晶のブロ
ック又はウェハー内で多数の振動片を同時加J:するこ
とが出来ないため必然的にコストが高くなる欠点があっ
た。BACKGROUND ART Tuning fork-type or lens-type AT plates have conventionally been used as crystal resonators that are ultra-small, have relatively flat frequency-temperature characteristics, and are easy to manufacture, and have been mainly used in quartz watches and the like. However, in the tuning fork type 1C, the oscillation frequency is a little too low, so the fine adjustment of the output frequency using a frequency divider with a variable frequency division ratio becomes too rough, which is inconvenient, and the natural frequency of the left and right branches of the tuning fork becomes too low. Even if there is a slight deviation in the degree of coincidence due to a manufacturing error, characteristics tend to deteriorate, which is one of the factors that lowers the yield in mass production. On the other hand, the frequency-temperature characteristic of the AT plate resonator is difficult to compensate for: it is a cubic curve and is extremely sensitive to the cutting angle, and there are so-called secondary vibrations, making it difficult to match the characteristics, and lens processing However, since a large number of vibrating elements cannot be applied simultaneously within a crystal block or wafer, the cost inevitably increases.
本発明においてはこれら従来品の欠点を解消し長所を兼
ねそなえた振動子をイ()ろ目的でなされたもので、多
量生産性に11−ぐれ、支持も容易で、形状バランスも
特に考慮する必要がなく、比較的すぐれた温度特性か期
待でき、周波数も適度に高い振動子が得られるものであ
る。以下図面に基いて説明する。The present invention was made with the aim of creating a vibrator that eliminates the drawbacks of these conventional products and has the advantages. This is not necessary, and a resonator with relatively excellent temperature characteristics and a moderately high frequency can be obtained. This will be explained below based on the drawings.
第1図は本発明の一実施例の振動子の容器の内部での、
支持を含めた構造を示す斜視図である。FIG. 1 shows the inside of a container of a vibrator according to an embodiment of the present invention.
FIG. 3 is a perspective view showing the structure including support.
1は断面かほぼ正方形又はl)+1形の棒状の水晶振動
体で、その上端附近だけを、2点鎖線で示すように断面
がいわゆるI) Tカット振動板が行う振動モードとし
て知られているのど同じ輪廓ずベリ振動が起るようにさ
れたものである。そのために上端部だけに有効電界を起
すように表面電極膜2及び6が設けられている。1 is a rod-shaped crystal vibrating body with a cross section of approximately square or l)+1 shape, and only the vicinity of its upper end, as shown by the two-dot chain line, has a cross section that is known as the so-called I) vibration mode performed by a T-cut diaphragm. It is designed to cause vibrations in the throat without the same ringing. For this purpose, surface electrode films 2 and 6 are provided so as to generate an effective electric field only at the upper end.
電極2及び乙は下端へ向けて極力励振電界を作らないよ
うに引きまわし、棒1の下端附近で、・・−メチツク端
子乙の絶縁ガラス部を貫通している端子ピン4及び5の
容器内突出部に例えば・・ンダ伺などで導電的に接着し
、あるいは端子乙に直接接着して、ピン4.5には導電
ペース!・で連結シ、水晶枠1を片持的に固定する。The electrodes 2 and B are routed toward the lower end so as not to create an excitation electric field as much as possible, and near the lower end of the rod 1, ... Glue conductively to the protruding part, for example, with a pad, or directly to the terminal B, and apply conductive paste to pins 4.5!・Fix the connection lever and the crystal frame 1 in a cantilevered manner.
全体は筒型容器に気密的に収納されるが、これは図示を
省略した。The entire device is hermetically housed in a cylindrical container, but this is not shown.
第2図は水晶枠1の結晶軸に関する切出方位の1例を示
したもので、端面の方位がdぼDT板の方位と一致する
。あるいはAT板と+iぼ直交ずろと言ってもよい。こ
の附近の切出角にて周波数の温度係数がゼロになる可能
性が極めて大きい。励振電極は、それが作る電界のy方
向成分が最も大きくなるように、しかも振動の歪の大き
い局部(先端部の各辺の中火)になるべく集中するよう
な配置形状とするのが望ましい。本実施例はそこまでの
細い考慮を払ってい′j[い。FIG. 2 shows an example of the cutting direction with respect to the crystal axis of the crystal frame 1, and the direction of the end face coincides with the direction of the d-shaped DT plate. Alternatively, it can be said that it is shifted perpendicularly to the AT plate by +i. There is a very high possibility that the temperature coefficient of frequency becomes zero at a cutting angle in this vicinity. The excitation electrode is desirably arranged so that the y-direction component of the electric field it creates is the largest, and moreover, it is concentrated as much as possible in local areas where the vibration distortion is large (medium heat on each side of the tip). This embodiment does not take such careful consideration.
第3図は水晶枠1を水晶月のグロック7からワイヤーソ
ーやブレードノーで゛切出しつつある状態を示した図で
゛、8はワイヤーである。水晶ブロック7は図示のよう
に2][オ°−で格子状にカットされ、多数の水晶枠に
(2リリ分け1゛)れイ)。Figure 3 shows the state in which the crystal frame 1 is being cut out from the Glock 7 of the crystal moon using a wire saw or blade saw, and 8 is a wire. As shown in the figure, the crystal block 7 is cut into a lattice shape using 2][o] and placed into a large number of crystal frames (divided into 2 rims).
第1I図の各図G土それぞれ水晶枠1の他の実施例の側
面プロフィルを示す。いずれも上端部への振動エネルギ
ーの閉じ込め効果を増す1]夫をしたものであり、棒の
長手方向に宿って断1rrj形状の変化をつけて、任意
断面での’IQ E’(lず・パり振動の固有振動数を
異ならしめ、下端・\の振動の伝播を極力少クシ」二う
とするものでル、ろ。Each of the figures in FIG. 1I shows a side profile of another embodiment of the crystal frame 1. Both of them increase the effect of confining vibrational energy to the upper end.They are located in the longitudinal direction of the rod and have a cross-sectional shape that changes to create an 'IQ E' (lz- The purpose is to make the natural frequencies of the pawl vibrations different and to minimize the propagation of vibrations at the bottom end.
第4図(a)は高さの途中に段数の+7J込みを入れた
もので、これは切分は加工途中でワイヤーノーを左右に
振ることで容易に形成できろ。、第4図(b)〜(e)
は直方体の柿の一部に断面を絞る加工を行ったもので、
加工途中にワイヤーソー(の切込方向)を傾けたり、格
子の一方向がカットされた板の状態で板厚変化をつけろ
研削を行い、その後書びそれらの板を重ねてワイヤー切
断ずろ、あるいは直方体にカットされた棒を再びジグプ
レー11 K整列接着して一側面づつ研削加工ずろ(ウ
ォッチのアンクル重石と同様な加工)することによって
作られる。Figure 4 (a) shows the height including +7J in the middle of the height, which can be easily formed by swinging the wire no to the left and right during processing. , Fig. 4(b) to (e)
is a part of a rectangular persimmon whose cross section has been narrowed down.
During machining, tilt the wire saw (cutting direction), or grind to change the thickness of the plate with one side of the grid cut, and then stack the plates to create a wire cutting line, or It is made by aligning and gluing the rods cut into rectangular parallelepipeds again and grinding each side one by one (the same process as the ankle weight of a watch).
第4図(f)は側面に穴加工を行なって断面変化をつけ
た例である。尚これ等のプロフィル加工は、水晶枠の辺
長が例えば2 r) r)μm以下の場合には水晶ウェ
ハーからエツチングによって多数同時に切出しうろこと
、電極膜けまで完成させてからウェハーから折って分離
しうろことは現在の水晶薄型音叉振動片の場合と同様可
能性が高い。断面変化を相対する一対の側面だけでなく
、4つの全側面に設けてもよい。本モードの振動子の固
有周波数はほぼ数] OOK〜数メガヘルツの値が得ら
れる。また振動は各断面でDT板同様バランスしている
ため、音叉の如き複雑な形状にずろことを要しない。FIG. 4(f) is an example in which a hole is formed on the side surface to change the cross section. In addition, in these profile processing, when the side length of the crystal frame is, for example, 2 μm or less, a large number of pieces are simultaneously cut out from the crystal wafer by etching, the scales and the electrode film are completed, and then the pieces are separated from the wafer by being folded. It is highly likely that the phenomenon is similar to that of the current crystal thin tuning fork vibrating piece. The cross-sectional change may be provided not only on a pair of opposing side surfaces but also on all four side surfaces. The natural frequency of the vibrator in this mode is approximately a few megahertz. Also, since the vibrations are balanced in each cross section like a DT plate, there is no need to adjust the shape to a complicated shape like a tuning fork.
以」−述べたところから明らかな如く、本発明において
は単純な形状で支持も容易な振動子が構成できるので量
産に適し製造コストも安く、周波数も適度に高く温度特
性も秀れた振動子が得られる効果がある。1t6切り出
し角度や棒状振動子の細部形状、電極膜の配置構造、支
持の仕ツバ容器の形状は図示されたものに限られないこ
とはもちろんである。As is clear from the above, the present invention makes it possible to construct a vibrator with a simple shape and easy support, making it suitable for mass production at low manufacturing costs, and with a moderately high frequency and excellent temperature characteristics. There is an effect that can be obtained. Of course, the 1t6 cutting angle, the detailed shape of the rod-shaped vibrator, the arrangement structure of the electrode film, and the shape of the supporting brim container are not limited to those shown in the drawings.
第1図は本発明の−・実施例の余1祝図、第2図は水晶
板の切出方位の一例を示す説明図、第3図は水晶枠の加
工法の概略を示す旧祝図、第4図の各図は本発明の各々
他の実施例における水晶枠のプロフィルを示すΔI/−
面図で・ある。
1・ ・・水晶枠、
2.3 ・ 励振電極。Fig. 1 is an illustration of the first embodiment of the present invention, Fig. 2 is an explanatory drawing showing an example of the cutting direction of the crystal plate, and Fig. 3 is an old drawing showing an outline of the processing method of the crystal frame. , each figure in FIG. 4 shows the profile of the crystal frame in each other embodiment of the present invention.
It is a front view. 1. Crystal frame, 2.3. Excitation electrode.
Claims (1)
廓すべり振動をなすように表面電極を配し、かつ振巾が
前記固定端部に向うに従い減少するように構成したこと
を特徴とする水晶振動子。One end of a rod made of a crystal material is fixed, a surface electrode is arranged so that the free end surface of the rod makes a circular sliding vibration, and the amplitude decreases toward the fixed end. crystal oscillator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15434281A JPS5854718A (en) | 1981-09-29 | 1981-09-29 | Crystal oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15434281A JPS5854718A (en) | 1981-09-29 | 1981-09-29 | Crystal oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5854718A true JPS5854718A (en) | 1983-03-31 |
JPH0129088B2 JPH0129088B2 (en) | 1989-06-07 |
Family
ID=15582049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15434281A Granted JPS5854718A (en) | 1981-09-29 | 1981-09-29 | Crystal oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5854718A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8041072B2 (en) | 2005-10-20 | 2011-10-18 | Sony Corporation | Audio output apparatus and method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679515A (en) * | 1979-11-30 | 1981-06-30 | Hiroshi Shimizu | Edge mode ceramic resonator |
-
1981
- 1981-09-29 JP JP15434281A patent/JPS5854718A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679515A (en) * | 1979-11-30 | 1981-06-30 | Hiroshi Shimizu | Edge mode ceramic resonator |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8041072B2 (en) | 2005-10-20 | 2011-10-18 | Sony Corporation | Audio output apparatus and method |
Also Published As
Publication number | Publication date |
---|---|
JPH0129088B2 (en) | 1989-06-07 |
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