JPS5853143A - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS5853143A
JPS5853143A JP56151390A JP15139081A JPS5853143A JP S5853143 A JPS5853143 A JP S5853143A JP 56151390 A JP56151390 A JP 56151390A JP 15139081 A JP15139081 A JP 15139081A JP S5853143 A JPS5853143 A JP S5853143A
Authority
JP
Japan
Prior art keywords
anode
cathode
potential
ion
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56151390A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6260788B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56151390A priority Critical patent/JPS5853143A/ja
Publication of JPS5853143A publication Critical patent/JPS5853143A/ja
Publication of JPS6260788B2 publication Critical patent/JPS6260788B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56151390A 1981-09-26 1981-09-26 イオン発生装置 Granted JPS5853143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56151390A JPS5853143A (ja) 1981-09-26 1981-09-26 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56151390A JPS5853143A (ja) 1981-09-26 1981-09-26 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS5853143A true JPS5853143A (ja) 1983-03-29
JPS6260788B2 JPS6260788B2 (enrdf_load_stackoverflow) 1987-12-17

Family

ID=15517530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56151390A Granted JPS5853143A (ja) 1981-09-26 1981-09-26 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS5853143A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03115340U (enrdf_load_stackoverflow) * 1990-03-07 1991-11-28

Also Published As

Publication number Publication date
JPS6260788B2 (enrdf_load_stackoverflow) 1987-12-17

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