JPS5850036B2 - laser couch - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser device that outputs an invisible laser beam, and which can use the visible laser beam as an indicator of the position of the invisible laser beam by superimposing the visible laser beam. be.

The present invention includes a plurality of laser tubes arranged in parallel,
At one end of each laser tube, an output mirror is installed whose surface on the laser tube side is a common plane to the plurality of laser tubes, and by making the output beams from each laser tube parallel, a rotating parabola etc. In a laser device that can obtain high output power in combination with the use of a condensing device, visible lasers are used in some of the many laser tubes and invisible lasers such as infrared or ultraviolet are used in other parts. An object of the present invention is to provide a laser device that can determine the position of an invisible laser beam from the position of a visible laser beam.

Conventionally, when superimposing a visible laser beam on an invisible laser beam, it is difficult to make the beams parallel to each other because independent laser tubes are lined up.As a result, when the beams are focused, they are not focused on the same point, or Even if it can be adjusted so that the light is focused on a single point, it has the disadvantage that it is easily distorted by shocks or the like.

The present invention utilizes the fact that when a plane mirror is used as the output mirror, the laser beam oscillates perpendicularly to the output mirror (ignoring the spread of the laser beam), and the visible and invisible laser tubes are held approximately parallel to each other. The visible and invisible laser beams can be focused to the same point within the polishing precision of the mirror by commonly polishing each output mirror, or by using a common mirror that can be shared by the visible and invisible lasers. This is to provide a laser device that can.

Hereinafter, a carbon dioxide gas laser will be explained as an example of an invisible laser, and a helium neon laser will be used as an example of a visible laser.

In Figure 1, the laser device consists of six carbon dioxide lasers 2.
, one helium neon laser 2' is arranged, and each laser tube 2 and 2' has a gas population 3a and an outlet 3b, 3.
'b gas discharge tubes 3 and 3';
'Hollow cylindrical electrodes 4a, 4' provided near the ends
at 4b, 4'b, an output mirror 5, 5' attached to one end of the discharge tube 3.3', and a total reflection mirror 6.6' attached to the other end.

The discharge tubes 3 and 3' are formed of an insulating material such as glass or ceramic, and each discharge tube 3 and 3' is held to be as parallel as possible within the machining accuracy.

The electrodes 4a, 4/a, 4b, and 4'b are made of metal such as stainless steel, carbon, or the like.

The total reflection mirror 6 is made of glass or metal, such as carbon tool steel, or made of gold or aluminum on a semiconductor substrate.
．． The total reflection mirror 6' is made of a material deposited with a material having a high reflectance around 6 μm, and the total reflection mirror 6' is a general total reflection mirror for helium neon lasers, such as a quartz or glass mirror, with a multilayer film deposited thereon.

Each total reflection mirror 6 is adjusted and adhered to the discharge tube 3 so that 6' and 3' are perpendicular to its length direction.

The output mirror 5 has a mirror support plate 8, which will be described later, made of Ge or GaAs.
A mirror material that transmits infrared light around 10.6 μm is pasted with adhesive at a position corresponding to each discharge tube.
For 5', a mirror material such as quartz or optical glass that transmits light around 0.6328 μm is attached, and the surfaces of the latter mirrors 5 and 5' are commonly polished so that their front and back surfaces are on the same plane. However, a reflectance suitable for laser oscillation (several percent to several tens of percent) is provided with this by multilayer film deposition or the like.

Reference numeral 7 denotes a water-cooled tube provided to cover the discharge tube 3. In order to make the laser device 1 smaller, one water-cooled tube is provided in common to all discharge tubes. It is also possible to have a structure in which water cooling is performed at each time.

The mirror support plate 8 is made of a suitable vacuum-tight material such as metal, glass, ceramic, etc., and commonly holds the respective output mirrors 5, 5'.

The mirror reinforcement body 9 is made of metal such as carbon tool steel, copal, stainless steel, or ceramic glass, and the mirror support body 8 is distorted by the force caused by the difference between the external pressure and the internal pressure, and the mutual parallelism of each output mirror 5, 5' is prevented. This prevents the parallelism of the output beam from being lost, and at the same time allows adjustment of the output mirrors 5, 5' by means of the bellows 1o and the screw 11.

The output mirrors 5, 5' are adjusted by screws 11 so that the laser output after discharge is maximized.

The gas population 3a is arranged in the mirror reinforcement 9 and integrated with one of the electrodes 4a, 4'a through a bellows 10, so that a voltage can be applied to the electrodes 4a, 4'a.

12 is a condensing device such as a rotating parabolic mirror for condensing the visible laser beam and the infrared laser beam to the same point.

Thereby, the focusing position of the infrared laser beam can be known from the focusing position of the visible laser beam.

FIG. 2 shows an example of the arrangement of the output mirror 5.5'.

As described above, according to the present invention, it is possible to easily make a visible laser beam and an invisible laser beam parallel, and therefore, the beams can be focused very precisely on the same point within the polishing accuracy of the mirror. Points can be confirmed with visible light.

Further, the mutual parallelism of the beams is almost never disrupted by impact or the like.

Therefore, the present invention is particularly effective for welding, medical use, etc., especially when precise positioning is required.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a laser device according to an embodiment of the present invention, and FIG. 2 is a front view of a portion thereof. 2...Non-proprietary laser tube, 2'...Visible laser tube, 5, 5'...Output mirror 12
・・・・・・Light condensing device.

Claims (1)

[Claims] 1 is equipped with a visible laser tube and an invisible laser tube held substantially in parallel, and includes an output mirror at one end of each of the laser tubes, the surface of which faces at least the laser tube side is a common plane with the plurality of laser tubes. What is claimed is: 1. A laser device, characterized in that the output beams from the plurality of laser tubes are condensed by a condensing system.