JPS584871U - solenoid vacuum valve - Google Patents

solenoid vacuum valve

Info

Publication number
JPS584871U
JPS584871U JP8462982U JP8462982U JPS584871U JP S584871 U JPS584871 U JP S584871U JP 8462982 U JP8462982 U JP 8462982U JP 8462982 U JP8462982 U JP 8462982U JP S584871 U JPS584871 U JP S584871U
Authority
JP
Japan
Prior art keywords
valve
solenoid
vacuum valve
solenoid vacuum
valve shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8462982U
Other languages
Japanese (ja)
Inventor
斉藤 尚武
恒 佐藤
臼井 正夫
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP8462982U priority Critical patent/JPS584871U/en
Publication of JPS584871U publication Critical patent/JPS584871U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のソレノイド真空バルブの断面図、第2図
は第1図のラッチングソレノイドの内部構造を示す断面
図、第3図は第2図のラッチングソレノイドの差引き吸
引力とバルブ軸の移動距離との関係を示す線図、第4図
は本考案の一実施例であるソレノイド真空バルブの断面
図、第5図は第4図の連結軸の拡大断面図、第6図は第
5図の側面図である。 1・・・ラッチングソレノイド、3・・・バルブ軸、5
゜7・・・弁体、13・・・磁性体、15.18・・・
永久磁石、16.17・・・ソレノイド([磁コイル)
、19・・・連結軸(遊び連結部の軸)、20・・・連
結ピン、21・・・楕円溝、23・・・コイルばね(弾
性体)。
Fig. 1 is a cross-sectional view of a conventional solenoid vacuum valve, Fig. 2 is a cross-sectional view showing the internal structure of the latching solenoid shown in Fig. 1, and Fig. 3 is a cross-sectional view showing the internal structure of the latching solenoid shown in Fig. 2. A diagram showing the relationship with the moving distance, FIG. 4 is a sectional view of a solenoid vacuum valve that is an embodiment of the present invention, FIG. 5 is an enlarged sectional view of the connecting shaft in FIG. 4, and FIG. FIG. 1... Latching solenoid, 3... Valve shaft, 5
゜7...Valve body, 13...Magnetic material, 15.18...
Permanent magnet, 16.17... Solenoid ([magnetic coil)]
, 19... Connection shaft (axis of play connection part), 20... Connection pin, 21... Elliptical groove, 23... Coil spring (elastic body).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 永久磁石と電磁コイルとを組合わせたラッチングソレノ
イドを用いたソレノイド真空バルブにおいて、上記ラッ
チングソレノイドのバルブ軸と弁体とを分離して別部材
とし、上記バルブ軸と上記弁体との接続部に上記バルブ
軸の軸方向の遊び接続部を設け、上記バルブ軸を移動さ
せたとき上記弁体が遅れて作動するごと(構成したこと
を特徴とするソレノイド真空バルブ。
In a solenoid vacuum valve using a latching solenoid that combines a permanent magnet and an electromagnetic coil, the valve shaft and valve body of the latching solenoid are separated and made into separate members, and the connection part between the valve shaft and the valve body is A solenoid vacuum valve characterized in that a play connection is provided in the axial direction of the valve shaft, and the valve body is activated with a delay when the valve shaft is moved.
JP8462982U 1982-06-09 1982-06-09 solenoid vacuum valve Pending JPS584871U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8462982U JPS584871U (en) 1982-06-09 1982-06-09 solenoid vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8462982U JPS584871U (en) 1982-06-09 1982-06-09 solenoid vacuum valve

Publications (1)

Publication Number Publication Date
JPS584871U true JPS584871U (en) 1983-01-12

Family

ID=29879975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8462982U Pending JPS584871U (en) 1982-06-09 1982-06-09 solenoid vacuum valve

Country Status (1)

Country Link
JP (1) JPS584871U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347027A (en) * 1976-10-08 1978-04-27 Sulzer Ag Magnetic valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347027A (en) * 1976-10-08 1978-04-27 Sulzer Ag Magnetic valve

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