JPS5846095U - drying equipment - Google Patents
drying equipmentInfo
- Publication number
- JPS5846095U JPS5846095U JP14127481U JP14127481U JPS5846095U JP S5846095 U JPS5846095 U JP S5846095U JP 14127481 U JP14127481 U JP 14127481U JP 14127481 U JP14127481 U JP 14127481U JP S5846095 U JPS5846095 U JP S5846095U
- Authority
- JP
- Japan
- Prior art keywords
- article
- drying equipment
- drying device
- abstract
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の回転型のウェハ乾燥装置の一例を示す側
断面図、第２図はこの考案の一実施例を示す側断面図で
ある。
図中、１は外箱、２はダクト、３はターンテーブル、４
はシャフト、５はカセット、６はウェハ、７はパイプ、
８はノズル、９は上蓋、１０は丁番、・１１はパツキン
、１２はプロペラ、１３は伝動装置、１４は駆動装置で
ある。なお、図中の同一符号は同一または相当部分を示
す。FIG. 1 is a side sectional view showing an example of a conventional rotary type wafer drying apparatus, and FIG. 2 is a side sectional view showing an embodiment of this invention. In the figure, 1 is the outer box, 2 is the duct, 3 is the turntable, 4
is the shaft, 5 is the cassette, 6 is the wafer, 7 is the pipe,
8 is a nozzle, 9 is a top lid, 10 is a hinge, 11 is a gasket, 12 is a propeller, 13 is a transmission device, and 14 is a drive device. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
、遠心力で前記物品に付着している水を振り飛ばすとと
もに乾燥用気体を送り込んで前記物品の乾燥を行う乾燥
装置において、前記乾燥用気体を加圧して前記物品に送
り込むためのプロペラを設けたことを特徴とする乾燥装
置。In a drying device, an article to be dried is placed on a turntable that rotates at high speed, water adhering to the article is shaken off by centrifugal force, and a drying gas is sent in to dry the article. 1. A drying device comprising a propeller for pressurizing and sending the material into the article.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14127481U JPS5846095U (en) | 1981-09-21 | 1981-09-21 | drying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14127481U JPS5846095U (en) | 1981-09-21 | 1981-09-21 | drying equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5846095U true JPS5846095U (en) | 1983-03-28 |
Family
ID=29934384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14127481U Pending JPS5846095U (en) | 1981-09-21 | 1981-09-21 | drying equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5846095U (en) |
-
1981
- 1981-09-21 JP JP14127481U patent/JPS5846095U/en active Pending
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