JPS5845501U - 反射鏡 - Google Patents

反射鏡

Info

Publication number
JPS5845501U
JPS5845501U JP13901981U JP13901981U JPS5845501U JP S5845501 U JPS5845501 U JP S5845501U JP 13901981 U JP13901981 U JP 13901981U JP 13901981 U JP13901981 U JP 13901981U JP S5845501 U JPS5845501 U JP S5845501U
Authority
JP
Japan
Prior art keywords
wall
main body
reflecting mirror
reflecting surface
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13901981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120561Y2 (cg-RX-API-DMAC7.html
Inventor
住谷　充夫
上田　勝宣
神谷　聖志
塚田　為康
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP13901981U priority Critical patent/JPS5845501U/ja
Publication of JPS5845501U publication Critical patent/JPS5845501U/ja
Application granted granted Critical
Publication of JPS6120561Y2 publication Critical patent/JPS6120561Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
JP13901981U 1981-09-21 1981-09-21 反射鏡 Granted JPS5845501U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13901981U JPS5845501U (ja) 1981-09-21 1981-09-21 反射鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13901981U JPS5845501U (ja) 1981-09-21 1981-09-21 反射鏡

Publications (2)

Publication Number Publication Date
JPS5845501U true JPS5845501U (ja) 1983-03-26
JPS6120561Y2 JPS6120561Y2 (cg-RX-API-DMAC7.html) 1986-06-20

Family

ID=29932222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13901981U Granted JPS5845501U (ja) 1981-09-21 1981-09-21 反射鏡

Country Status (1)

Country Link
JP (1) JPS5845501U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013542582A (ja) * 2010-08-11 2013-11-21 カール ツァイス レーザー オプティクス ゲーエムベーハー Ｅｕｖリソグラフィ用のｅｕｖコレクタのｅｕｖコレクタミラーシェル

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5468258A (en) * 1977-11-10 1979-06-01 Mitsubishi Electric Corp Reflecting mirror and production of the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5468258A (en) * 1977-11-10 1979-06-01 Mitsubishi Electric Corp Reflecting mirror and production of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013542582A (ja) * 2010-08-11 2013-11-21 カール ツァイス レーザー オプティクス ゲーエムベーハー Ｅｕｖリソグラフィ用のｅｕｖコレクタのｅｕｖコレクタミラーシェル

Also Published As

Publication number Publication date
JPS6120561Y2 (cg-RX-API-DMAC7.html) 1986-06-20

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