JPS5844847U - Wafer transport device - Google Patents

Wafer transport device

Info

Publication number
JPS5844847U
JPS5844847U JP13828581U JP13828581U JPS5844847U JP S5844847 U JPS5844847 U JP S5844847U JP 13828581 U JP13828581 U JP 13828581U JP 13828581 U JP13828581 U JP 13828581U JP S5844847 U JPS5844847 U JP S5844847U
Authority
JP
Japan
Prior art keywords
transport device
conveyor belt
wafer transport
belt
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13828581U
Other languages
Japanese (ja)
Inventor
志水 博
Original Assignee
沖電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 沖電気工業株式会社 filed Critical 沖電気工業株式会社
Priority to JP13828581U priority Critical patent/JPS5844847U/en
Publication of JPS5844847U publication Critical patent/JPS5844847U/en
Pending legal-status Critical Current

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  • Registering Or Overturning Sheets (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2、図は従来の搬送装置を示す概略構成図、
第3図は第2図に示した装置をA−A’面で切断Cた断
面図、第4図は、本考案の実施例を示す斜視図である。 1・・・・・・ウェハ、2・・・・・・搬送ベルト、4
・・・・・・駆動モータ、5・・・・・・ガイドベルト
、6・・・・・・ガス配管パイプ。
1, 2 and 2 are schematic configuration diagrams showing a conventional conveying device,
FIG. 3 is a cross-sectional view of the apparatus shown in FIG. 2 taken along the plane AA', and FIG. 4 is a perspective view showing an embodiment of the present invention. 1...Wafer, 2...Transport belt, 4
... Drive motor, 5 ... Guide belt, 6 ... Gas piping pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 搬送用ベルトと、前記搬送用ベルトの上方に前記搬送用
ベルトと同速度で同方向に動くガイドベルトと、前記搬
送用ベルトの表面にほぼ垂直に立てたウェハ番、前記ガ
イドベルトに立てかけるために吹きつけるエアまたは不
活性ガスを出す配管パイプとを具備してなるウェハの搬
送装置。
a conveyor belt, a guide belt that moves in the same direction at the same speed as the conveyor belt above the conveyor belt, a wafer number that stands approximately perpendicular to the surface of the conveyor belt, and a wafer number that is placed against the guide belt. A wafer transport device equipped with a piping that blows air or inert gas.
JP13828581U 1981-09-19 1981-09-19 Wafer transport device Pending JPS5844847U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13828581U JPS5844847U (en) 1981-09-19 1981-09-19 Wafer transport device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13828581U JPS5844847U (en) 1981-09-19 1981-09-19 Wafer transport device

Publications (1)

Publication Number Publication Date
JPS5844847U true JPS5844847U (en) 1983-03-25

Family

ID=29931514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13828581U Pending JPS5844847U (en) 1981-09-19 1981-09-19 Wafer transport device

Country Status (1)

Country Link
JP (1) JPS5844847U (en)

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