JPS5844847U - Wafer transport device - Google Patents
Wafer transport deviceInfo
- Publication number
- JPS5844847U JPS5844847U JP13828581U JP13828581U JPS5844847U JP S5844847 U JPS5844847 U JP S5844847U JP 13828581 U JP13828581 U JP 13828581U JP 13828581 U JP13828581 U JP 13828581U JP S5844847 U JPS5844847 U JP S5844847U
- Authority
- JP
- Japan
- Prior art keywords
- transport device
- conveyor belt
- wafer transport
- belt
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Registering Or Overturning Sheets (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図、第２、図は従来の搬送装置を示す概略構成図、
第３図は第２図に示した装置をＡ−Ａ’面で切断Ｃた断
面図、第４図は、本考案の実施例を示す斜視図である。
１・・・・・・ウェハ、２・・・・・・搬送ベルト、４
・・・・・・駆動モータ、５・・・・・・ガイドベルト
、６・・・・・・ガス配管パイプ。1, 2 and 2 are schematic configuration diagrams showing a conventional conveying device,
FIG. 3 is a cross-sectional view of the apparatus shown in FIG. 2 taken along the plane AA', and FIG. 4 is a perspective view showing an embodiment of the present invention. 1...Wafer, 2...Transport belt, 4
... Drive motor, 5 ... Guide belt, 6 ... Gas piping pipe.
Claims (1)
ベルトと同速度で同方向に動くガイドベルトと、前記搬
送用ベルトの表面にほぼ垂直に立てたウェハ番、前記ガ
イドベルトに立てかけるために吹きつけるエアまたは不
活性ガスを出す配管パイプとを具備してなるウェハの搬
送装置。a conveyor belt, a guide belt that moves in the same direction at the same speed as the conveyor belt above the conveyor belt, a wafer number that stands approximately perpendicular to the surface of the conveyor belt, and a wafer number that is placed against the guide belt. A wafer transport device equipped with a piping that blows air or inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13828581U JPS5844847U (en) | 1981-09-19 | 1981-09-19 | Wafer transport device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13828581U JPS5844847U (en) | 1981-09-19 | 1981-09-19 | Wafer transport device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5844847U true JPS5844847U (en) | 1983-03-25 |
Family
ID=29931514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13828581U Pending JPS5844847U (en) | 1981-09-19 | 1981-09-19 | Wafer transport device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5844847U (en) |
-
1981
- 1981-09-19 JP JP13828581U patent/JPS5844847U/en active Pending
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