JPS58147867U - Conveying device - Google Patents

Conveying device

Info

Publication number
JPS58147867U
JPS58147867U JP4632582U JP4632582U JPS58147867U JP S58147867 U JPS58147867 U JP S58147867U JP 4632582 U JP4632582 U JP 4632582U JP 4632582 U JP4632582 U JP 4632582U JP S58147867 U JPS58147867 U JP S58147867U
Authority
JP
Japan
Prior art keywords
box
self
built
transport platform
clean air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4632582U
Other languages
Japanese (ja)
Inventor
正博 中嶋
敏樹 森
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP4632582U priority Critical patent/JPS58147867U/en
Publication of JPS58147867U publication Critical patent/JPS58147867U/en
Pending legal-status Critical Current

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  • Auxiliary Methods And Devices For Loading And Unloading (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は半導体製造等の作業室内の概略図、第２図は本
考案による運搬装置の実施例を示す斜視図、第３図及び
第４図は第２図のＡ−Ａ線及びＢ−Ｂ線に沿う部分断面
図である。 ４・・・運搬装置、６・・・運搬台、７・・・ボックス
、８・・・清浄空気送風機構部、１２・・・（自走用）
モータ、１９・・・物品（被運搬物）、２３．２６・・
・フィルタ、２４・・・ファン。Fig. 1 is a schematic diagram of the inside of a work room for semiconductor manufacturing, etc., Fig. 2 is a perspective view showing an embodiment of the conveying device according to the present invention, and Figs. 3 and 4 are lines AA and B- in Fig. 2. It is a partial sectional view along the B line. 4...Transportation device, 6...Transportation platform, 7...Box, 8...Clean air blowing mechanism section, 12...(For self-propelled)
Motor, 19... Article (transported object), 23.26...
- Filter, 24...Fan.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 自走駆動源のモータを内蔵する自走可能な運搬台と、運
搬台上に設置され、被運搬物を出し入れ自在に収納する
ボックスと、ボックスに付設され、ファン及びフィルタ
を内蔵して外気を浄化して前記ボックス内に送り込む清
浄空気送風機構部とを具備したことを特徴とする運搬装
置。A self-propelled transport platform with a built-in motor for a self-propelled drive source; a box installed on the transport platform to store objects to be transported in and out; and a box attached to the box with a built-in fan and filter to draw outside air A transportation device comprising: a clean air blowing mechanism section that purifies and sends clean air into the box.
JP4632582U 1982-03-30 1982-03-30 Conveying device Pending JPS58147867U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4632582U JPS58147867U (en) 1982-03-30 1982-03-30 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4632582U JPS58147867U (en) 1982-03-30 1982-03-30 Conveying device

Publications (1)

Publication Number Publication Date
JPS58147867U true JPS58147867U (en) 1983-10-04

Family

ID=30057325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4632582U Pending JPS58147867U (en) 1982-03-30 1982-03-30 Conveying device

Country Status (1)

Country Link
JP (1) JPS58147867U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178270U (en) * 1984-05-08 1985-11-27 株式会社椿本チエイン Travel guide device for a transport vehicle that travels inside an air purification room

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568722A (en) * 1979-06-29 1981-01-29 Hitachi Ltd Transporting vehicle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568722A (en) * 1979-06-29 1981-01-29 Hitachi Ltd Transporting vehicle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178270U (en) * 1984-05-08 1985-11-27 株式会社椿本チエイン Travel guide device for a transport vehicle that travels inside an air purification room

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