JPS5843416A - Reverse expand afocal illuminating optical system of mirror condensing type - Google Patents
Reverse expand afocal illuminating optical system of mirror condensing typeInfo
- Publication number
- JPS5843416A JPS5843416A JP56141677A JP14167781A JPS5843416A JP S5843416 A JPS5843416 A JP S5843416A JP 56141677 A JP56141677 A JP 56141677A JP 14167781 A JP14167781 A JP 14167781A JP S5843416 A JPS5843416 A JP S5843416A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical system
- optical axis
- condenser lens
- afocal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
Abstract
Description
【発明の詳細な説明】
本発明は、超高圧水銀ランプのような放電履光□渾の照
明光学系に関する。 ′□従来、この種の光源
は
第１図（ａ）ミラー集光タイプ
（ｂ）し゛ンズ集光タイプ
（、）バックミラータイプ
のように、ミラー又はレンズを組合せセ□集光させてい
た。ご仁でのミラー集゛光タイプは、光源から放射され
るす′べての光束を集光できるものとして、゛＝番効率
の良いものであった。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an illumination optical system for a discharge lamp such as an ultra-high pressure mercury lamp. Conventionally, this type of light source has used a combination of mirrors or lenses to condense light, as shown in FIG. The mirror light condensing type used in Gonin was the most efficient as it could condense all the light beams emitted from the light source.
しかし、光軸の・ＭｍＫ光束は存在せず、角度分布的に
は中心の抜けた照明光束になってしま“う欠点があった
。すなわち、物体に対して透過光として照明し、対゛物
しンズに門いて結偉′する顕微鏡などにこの照明系を用
いると、対物レンズめ入射瞳に対して、中心を通る光・
束□が存在せず一円環状の分布を持ってしまう。However, there is no .MmK light flux on the optical axis, and the illumination light flux misses the center in terms of angular distribution.In other words, it illuminates the object as transmitted light, When this illumination system is used in a microscope, etc., which is focused on light, the light passing through the center of the objective lens's entrance pupil is
The bundle □ does not exist, resulting in a ring-shaped distribution.
このむと社、多少の収差を含有した実際の対物レンズに
対し、周辺光束のみを使うことになシ、余シ望ましいこ
とではない。However, it is not desirable to use only the peripheral light flux for an actual objective lens that contains some aberrations.
また対物レンズのＮ、ム、に対応し”Ｃ，Ｒ明光のＮ、
Ａを規定する場合、中心を通る光束がないえ、わ、□□
２１、□□ヵ；′あつぇ二通常、
照明Ｎ、ム、／対物Ｎ、ム、冨ｑ
とした場合、−はｌよシ多少小さな値になるよ５照明Ｎ
６ム、を設定すると、対物レンズは深度、解儂とも一番
良くなる・すなわちこの種の照明系では照明光束のＮ、
Ａを限定するために、絞シを光量の多い円、環部に入れ
る必要があシ、有効に使われる光量紘滅る。例えば設定
した＃に合致するよう焦点距離の短いコンデンサーレン
ズを使うことも考えられる。しかし実際の光源は点光源
ではなく１、大きさを持っているため、焦点距−が短く
なるとコンデンサーレンズの後で平″″′會、になるべ
き光束が、光軸に対し角度を持つようになシ、やはシ絞
シで遮断されムダになる光量が多くなる。Also, it corresponds to the objective lens N, M, "C, R bright N,"
When defining A, there is no light flux passing through the center.
21, □□ka;'Atsue 2 Normally, if the illumination is N, mu, /objective N, mu, and q, then - will be a somewhat smaller value than l.5 Illumination N
6mm, the objective lens has the best depth and resolution.In other words, in this type of illumination system, the illumination flux N,
In order to limit A, it is necessary to place the diaphragm in a circle or annulus with a large amount of light, which reduces the amount of light that can be used effectively. For example, it is possible to use a condenser lens with a short focal length to match the set #. However, an actual light source is not a point source but has a size of 1, so when the focal length becomes short, the light beam that should be flat after the condenser lens becomes angular with respect to the optical axis. In other words, a large amount of light is wasted as it is blocked by the diaphragm.
本発明では％ｊ１１図（畠）で示される従来の超高圧水
銀ランプのミラー集光タイプという、効、率の良、い集
光法において、欠点であった光量分布を改善しより効率
の高い理想的なミラー−光ｍ−エキスパンドアフォーカ
ル照明光学−系を提供することを目的としている。The present invention improves the light intensity distribution, which was a drawback, in the conventional ultra-high pressure mercury lamp mirror condensing type, which is a highly efficient and efficient condensing method, as shown in Figure 11 (Hata), and achieves higher efficiency. The objective is to provide an ideal mirror-optical m-expanded focal illumination optical system.
以下本発明を添付図面の１！施例によって詳述する。The present invention is shown in the attached drawings below! This will be explained in detail by way of examples.
第２図は本発明の１つの□実施例を示した光学系で、公
知の如く楕円ミラー１の一方の焦点Ｏ上に光源を設ける
と他方功焦点り１′上に集光する。そしてこの光束をコ
ンデンサーレンズ２で平行系にする。本発明の特徴はと
の後方に第１面及び第２ｍを円錐状に加工したプリズム
３を配設したものである。FIG. 2 shows an optical system showing one embodiment of the present invention.As is well known, when a light source is provided on one focal point O of an elliptical mirror 1, the light is focused on the other focal point 1'. This luminous flux is then made into a parallel system by a condenser lens 2. The feature of the present invention is that a prism 3 whose first surface and second m are shaped into a conical shape is disposed behind the prism.
第１図（１）のものでは光゛軸近傍′の光束は存在しな
いが、本発→では上記円錐状プリズム３によシ、光軸よ
□′□′ｊ、、、離れた平行光束を、光軸近傍までシフ
トさせ、理想的な光量分布としたものである。In the case of Fig. 1 (1), there is no light beam near the optical axis, but in the main beam →, the conical prism 3 generates parallel light beams □′□′j, . . . away from the optical axis. , the light intensity is shifted to the vicinity of the optical axis to obtain an ideal light amount distribution.
例えば焦点Ｏ上の光源がα＝β−１！４５°として立体
状に均等に光を放射してい、るとすると、第１図（ａ）
及び第２図の最終的な平行系でのスポットダイヤグラム
はそれぞ、れ・第３図及び第４図のようになる。
、本発明の円錐状プリズム３杜本夾施例に
限る仁となく２つのブリズ・ムに分解しても、凸として
の円錐と凹としての円錐があれば同様な・効果を持ち、
このように分けるζをによシ、プリズムを通る光路長が
短かくなれば、透過率の点で有利に、なることは云う迄
もない４更に第５図示のように円錐状プリズム３をフレ
ネルａ１３′にしても同等の効・果を得ることができる
。、 ・ 、淘本発明の前記実施例
では、光源を、理想的な点光源として説明した。即ち、
点光・源よ°シ角度αで出た光線は、楕円ミラー１の内
側絞シ及び、光源の指向性によ、シ最、も光軸に近い光
線として、コンデンサーレンズ２・を通っ九後、第６図
に詳記した如＜ＨＯの高さで光軸と平行な光線となる。For example, if a light source at the focal point O emits light uniformly in three dimensions with α=β-1!45°, then Figure 1(a)
The final parallel system spot diagrams of FIG. 2 and FIG. 2 are as shown in FIGS. 3 and 4, respectively.
, Even if the conical prism of the present invention is decomposed into two brisms instead of a radial one, as long as there is a convex cone and a concave cone, the same effect can be obtained,
It goes without saying that if the optical path length passing through the prism is shortened by dividing ζ in this way, it will be advantageous in terms of transmittance. Even if a13' is used, the same effects and effects can be obtained. In the above embodiments of the present invention, the light source was described as an ideal point light source. That is,
A ray of light emitted from a point light/source at an angle α passes through a condenser lens 2 as a ray closest to the optical axis due to the inner aperture of the elliptical mirror 1 and the directivity of the light source. , the light beam becomes parallel to the optical axis at a height of <HO, as detailed in FIG.
第２図、では、同様の光線は円錐状プリズム３によＪ）
、Ｈｏ＝Δｈだけシフトして光軸ど重うている（Ｈｓ−
ＯＬ。・し赤し一般に光源は有限□な大きさを持ってお
シコンデンサーレンズ３の後で、−円一錨゛状プリズム
３に入る□光量、線は光軸に平・行なものばか夛では表
い。 パ
確４かに点光源の場合には
一ΔｈｗｍＨｏ・、 ・ ・が望ましい
が、光、源が有限の大きさを持っているため ・・
□゛杏ｕｏ＜Δｈ（２Ｈａ ＝
＜１） −とすることが望ましい。光軸に平行な光束だ
゛けを考えると、左辺では補正不足、右辺、では′補正
過多になるが、大きさを持った光源では。In Figure 2, a similar ray is passed through the conical prism 3.
, shifted by Ho=Δh and overlaps the optical axis (Hs-
OL.・In general, the light source has a finite size, and after the condenser lens 3, it enters the anchor-shaped prism 3. The amount of light is parallel to the optical axis. Table. In the case of a point light source, it is desirable to have -ΔhwmHo, . . ., but since the light source has a finite size...
□゛杏uo＜Δh(2Ha=
<1) - is desirable. Considering the light flux parallel to the optical axis, the left side will be under-corrected, and the right side will be over-corrected, but for a light source with a large size.
ともに中抜けがなくなシ、照明、光として曳い結果が得
られ石゛。・ □
即ち、第６図に示すようにΔｈとプリズム３の頂角の重
分θ、１折率ｎ：、中心厚ｄの関る。而して、゛°光颯
を２次曲面ミラーで集光させる場合について考える。例
えば楕円ミラー１では第１焦点面Ｏに点光源を置くと、
第２焦点Ｏ′に集光するので、コンデンサーレンズ３で
７フオーカル系ぺした場合、楕円ミラー１の中央間ｐ部
によシコンデンサーレンズ３の後では第３図示のように
半径Ｄｓの円型ケラレを生じる。ｉ九、放物面ミラー１
では焦点ＯＫ点光源を置くと、平行光束（アフオ、−カ
ル系）となシ、やはシ中央開ロ部に対して半径Ｄａの円
層ケラレを生じる。In both cases, there are no hollow spots, and the results obtained as lighting and light are stone.・□ That is, as shown in FIG. 6, Δh is related to the overlap θ of the apex angle of the prism 3, the refractive index n:, and the center thickness d. Let us now consider the case where the light beam is focused by a quadratic curved mirror. For example, in elliptical mirror 1, if a point light source is placed on the first focal plane O, then
Since the light is condensed at the second focal point O', when the condenser lens 3 forms a 7-focal system, the part between the centers of the elliptical mirror 1 becomes circular with a radius Ds after the condenser lens 3 as shown in the third figure. Causes vignetting. i9, parabolic mirror 1
If a point light source with OK focus is placed, a parallel light beam (affo, -cal system) and a circular layer vignetting of radius Da will occur with respect to the center aperture.
本発明では円錐状プリズム３の形状、屈折率ｎとケラレ
半径Ｄ＄の関係を以下のようにすることが望ましい。即
ち、
−Ｄａ≦ｄｔｉｍ（！！−−自″′″＊ａｍｅ−θ）≦
２Ｄ易・・・（２）２ ２
ｎこの範囲で円錐状プリズム３を規定することによ
シ、大きさを持つ木光源に対しても、光□
量的にも、中抜けの解栖についても実用上は有効よ作ｍ
ｉ５＜、ｂｔと・：フ・１アき、６゜以上述べた如く本
発明によれば、光軸上から周辺部に亘って理想的な光量
分布の照明系In the present invention, it is desirable that the shape of the conical prism 3, the relationship between the refractive index n and the vignetting radius D$ be as follows. That is, -Da≦dtim(!!--self″′″*ame-θ)≦
2D easy...(2) 2 2
By specifying the conical prism 3 within this range, it is practically effective in terms of light quantity and hollow removal even for wooden light sources with a certain size.
i5<, bt and...: f・1a, 6° As described above, according to the present invention, an illumination system with an ideal light amount distribution from the optical axis to the peripheral area is provided.
第１図は従来の照明系、
第２図は本発明の照明系、
第３図は従来の照明系の光量分布を示すスポットダイヤ
グラム、
第４図は本発明の照明系の光量分布を示すスポットダイ
ヤグラム、
第５図は本発明の円錐状プリズムの他の実施例、
第６図は本発明の円錐状プリズムの説明−である。
（主要部分の符号の説明）
１、楕円ミラー
２、コンデンサーレンズ
３、円錐状／リズム
、１
′□□１゜
ｌ。
Ｙ −
オ、ｉ囚Figure 1 is a conventional illumination system, Figure 2 is an illumination system of the present invention, Figure 3 is a spot diagram showing the light intensity distribution of the conventional illumination system, and Figure 4 is a spot diagram showing the light intensity distribution of the illumination system of the present invention. Diagrams FIG. 5 is another embodiment of the conical prism of the present invention, and FIG. 6 is an explanation of the conical prism of the present invention. (Explanation of symbols of main parts) 1. Elliptical mirror 2, condenser lens 3, conical/rhythm, 1'□□1゜l. Y - O, i prisoner
Claims (1)
レンズとを有す為ミラー集光腫・照明光学系に於て、円
錐状屈折部材を、前記コンデンサーレンズの後方で且つ
又照明光学系の光軸にその頂点な略−歇せしめて成るア
フォーカル照明光学系。 ２、特許請求の範囲第１項記□載の７フオーカル照明光
学系・において、円錐状屈折部材の頂角の半分−１屈折
率論、中心厚４、ケラレ半ｆｉＤｓ、光軸の高さＨ・、
シフト量４ｈとすると・き次の条件（ｌ）、（２）式を
満足した７フオーカル照明光学系。 □[Claims] 1. In a mirror concentrator/illumination optical system that includes a reflecting mirror having at least a secondary/self-portrait and a condenser lens, a conical refractive member is provided behind the condenser lens. Moreover, the afocal illumination optical system is formed by having its apex approximately aligned with the optical axis of the illumination optical system. 2. In the 7 focal illumination optical system described in claim 1, □, half the apex angle of the conical refractive member - 1 refractive index theory, center thickness 4, vignetting half fiDs, optical axis height H・、
When the shift amount is 4h, a 7-focal illumination optical system satisfies the following conditions (l) and (2). □
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56141677A JPS5843416A (en) | 1981-09-10 | 1981-09-10 | Reverse expand afocal illuminating optical system of mirror condensing type |
| US06/416,029 US4498742A (en) | 1981-09-10 | 1982-09-08 | Illumination optical arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56141677A JPS5843416A (en) | 1981-09-10 | 1981-09-10 | Reverse expand afocal illuminating optical system of mirror condensing type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5843416A true JPS5843416A (en) | 1983-03-14 |
| JPH0125046B2 JPH0125046B2 (en) | 1989-05-16 |
Family
ID=15297627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56141677A Granted JPS5843416A (en) | 1981-09-10 | 1981-09-10 | Reverse expand afocal illuminating optical system of mirror condensing type |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5843416A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6265014A (en) * | 1985-07-23 | 1987-03-24 | フュージョン・システムズ・コーポレーション | Optical system for projecting uneven light source on image plane |
| EP0231029A2 (en) * | 1986-01-31 | 1987-08-05 | Dainippon Screen Mfg. Co., Ltd. | Optical system |
| JPS6382408A (en) * | 1986-09-19 | 1988-04-13 | ミネソタ マイニング アンド マニユフアクチユアリング カンパニ− | Lighting apparatus for overhead projector |
| EP0299475A2 (en) * | 1987-07-17 | 1989-01-18 | Dainippon Screen Mfg. Co., Ltd. | Optical system for effecting increased irradiance in peripheral area of object |
| JPH02250016A (en) * | 1989-03-23 | 1990-10-05 | Mitsutoyo Corp | Vertical dark field illuminating device |
| US5345292A (en) * | 1992-03-31 | 1994-09-06 | Canon Kabushiki Kaisha | Illumination device for projection exposure apparatus |
| JP2012191148A (en) * | 2011-03-14 | 2012-10-04 | Ricoh Co Ltd | Surface-emitting laser module, optical scanning device, and image forming device |
-
1981
- 1981-09-10 JP JP56141677A patent/JPS5843416A/en active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6265014A (en) * | 1985-07-23 | 1987-03-24 | フュージョン・システムズ・コーポレーション | Optical system for projecting uneven light source on image plane |
| EP0231029A2 (en) * | 1986-01-31 | 1987-08-05 | Dainippon Screen Mfg. Co., Ltd. | Optical system |
| JPS6382408A (en) * | 1986-09-19 | 1988-04-13 | ミネソタ マイニング アンド マニユフアクチユアリング カンパニ− | Lighting apparatus for overhead projector |
| EP0299475A2 (en) * | 1987-07-17 | 1989-01-18 | Dainippon Screen Mfg. Co., Ltd. | Optical system for effecting increased irradiance in peripheral area of object |
| JPH02250016A (en) * | 1989-03-23 | 1990-10-05 | Mitsutoyo Corp | Vertical dark field illuminating device |
| US5345292A (en) * | 1992-03-31 | 1994-09-06 | Canon Kabushiki Kaisha | Illumination device for projection exposure apparatus |
| US5726740A (en) * | 1992-03-31 | 1998-03-10 | Canon Kabushiki Kaisha | Projection exposure apparatus having illumination device with ring-like or spot-like light source |
| JP2012191148A (en) * | 2011-03-14 | 2012-10-04 | Ricoh Co Ltd | Surface-emitting laser module, optical scanning device, and image forming device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0125046B2 (en) | 1989-05-16 |
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