JPS5843244Y2 - Conductor ball filling device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a conductor ball filling device, and more particularly to a conductor ball filling device that can easily perform conductor ball filling with excellent accuracy.

Conventionally, the method of filling this kind of ceramic green sheet with conductors is usually done by two steps: drilling a hole with the diameter of the conductor in advance at the position where the conductor is to be filled in the ceramic green sheet, and then filling it with the conductor. It was being done.

However, the above-mentioned conventional method requires a step of drilling precise holes in advance at the positions where the conductor is to be filled, and drilling a large number of minute holes requires a lot of work and is extremely inefficient. there were.

In order to improve these shortcomings, the inventors of the present invention etc.
As shown in the figure, an application has been filed for a conductor ball filling device that omits the step of punching holes in a green sheet.

That is, as shown in the figure, a metal mask 3 with holes 4 provided at the positions where the conductor balls 2 are to be filled is placed on the top surface of the green sheet 1, and pins 5 are provided for embedding the conductor balls 2. It is pressurized and filled by the press die 6.

However, in the above-mentioned conventional method, the metal mask 3 for positioning and holding the conductor balls 2 does not come into close contact with the surface of the green sheet 1 and partially lifts up, resulting in misalignment of the conductor balls.

Due to the misalignment of the conductor balls, the conductor balls 2 are filled into the green sheet 1 with a and a' shifted as shown in FIG. 1B, resulting in a problem of poor accuracy.

The present invention has been devised in view of the above-mentioned problems, and its purpose is to provide a conductor ball filling device with excellent accuracy in the filling position of conductor balls.

In order to achieve the above object, the present invention is characterized in that, in an apparatus for filling conductor balls into ceramic green sheets, vacuum suction grooves are provided around the upper surface of the guide that holds the green sheets, and the conductor balls are positioned on the upper surface of the guide. A metal mask with holes was provided, conductor balls were placed in the holes of the metal mask, the metal mask was crimped onto a green sheet by vacuum suction, and then the conductor balls were pressurized with a press having pins for pressurizing them. There is a particular thing.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 2 is a side sectional view showing the structure of the conductor ball filling device according to the present invention, and FIG. 3 is a plan view of the guide holding the green sheet of FIG.

In relation to Figures 2 and 3, green sheet 1
Vacuum suction grooves 8, 8' around the upper surface of the guide 7 that holds the
are provided twice, and the groove is led to a position at the lower center 9 of the guide 7 through a hole and connected to a vacuum pump 10.

A green sheet 1 for filling conductor balls 2 is placed on the guide 7 provided with the vacuum suction grooves 8, 8' as described above, and a metal mask 3 provided with holes 4 for positioning the conductor balls 2 is placed on the top surface of the green sheet 1. , the vacuum pump 10 is operated, and then the conductor ball 2 is inserted into the hole 4 of the metal mask 3.

Suction groove 8 provided on the top surface of reguide 7 by vacuum pump 10
, 8', the metal mask 3 is vacuum-suctioned and uniformly adheres to the green sheet 1.

When the conductor ball 2 is pressed by the press die 6 with the metal mask 3 in close contact with the green sheet 1, the pin 5 of the press die 6
The conductor ball 2 is embedded in the green sheet 1 by the following steps.

In this case, as shown in FIG. 4A, the surface of the green sheet 1 provided on the filling guide 7 and the surface of the metal mask 3 into which the conductor balls 2 are inserted are placed in the vacuum suction grooves 8, 8' provided on the upper surface of the guide 7. It is suctioned and fixed tightly.

By bringing the metal mask 3 and the green sheet 1 into close contact with each other in this manner, the conductor balls 2 can be accurately embedded in the holes 4 of the metal mask 3 without any extra gaps.

FIG. 4B shows a conductor ball 2 filled with the above-mentioned method of the present invention.
Fill the green sheet 1 with the ball 2 and the deviation a a'
FIG.

As explained above, in the conductor ball filling apparatus according to the present invention, the metal mask 3 for positioning the conductor balls 2 and the green sheet 1 are brought into close contact with each other.
By fixing the conductor balls by vacuum suction, it is possible to obtain a conductor ball filling device with excellent accuracy, and its practical effects are extremely large.

[Brief explanation of drawings]

Fig. 1A is a partial cross-sectional view showing the state of a metal mask filled with conventional conductor balls, Fig. 1B is a cross-sectional view showing misalignment of conductor balls according to Fig. 1A, and Fig. 2 is a cross-sectional view according to the present invention. 3 is a plan view of a green sheet placed on the guide shown in FIG. 2; FIG. 4A is a partial sectional view showing the state of a metal mask filled with conductor balls according to the present invention; FIG. 4B is a sectional view showing the filling position of the conductor balls according to FIG. 4A. In the figure, 1... green sheet, 2...
...Conductor ball, 3..., Metal mask, 4
...hole of metal mask, 5 ... pin of press mold, 6 ... press mold, 7 ... guide, 8
゜8'...Vacuum suction groove, 9...Lower center part of force field, 10...Vacuum pump, a, a
'... Misalignment of conductor ball.

Claims (1)

[Scope of utility model registration request] A guide that has a holding part for the green sheet, a recess corresponding to the position where the green sheet is to be filled with conductor balls, a vacuum suction groove provided around the top surface for vacuum suction of the metal mask, and a vacuum suction hole connected to the groove. , a metal mask with a hole at the conductor ball filling position which is placed on the green sheet held by the holding part and vacuum suctioned into the vacuum suction groove of the guide, and a pressure pin at the conductor ball filling position. A conductor ball filling device characterized by having a press mold provided therein and a vacuum pump connected to a vacuum suction hole of the guide.