JPS5842935U - semiconductor manufacturing equipment - Google Patents

semiconductor manufacturing equipment

Info

Publication number
JPS5842935U
JPS5842935U JP13624581U JP13624581U JPS5842935U JP S5842935 U JPS5842935 U JP S5842935U JP 13624581 U JP13624581 U JP 13624581U JP 13624581 U JP13624581 U JP 13624581U JP S5842935 U JPS5842935 U JP S5842935U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
thermocouple sensor
section
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13624581U
Other languages
Japanese (ja)
Inventor
博 田村
船越　清彦
岡部　隆博
矢木　邦博
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP13624581U priority Critical patent/JPS5842935U/en
Publication of JPS5842935U publication Critical patent/JPS5842935U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は電気炉概略図、第２図、第３図は炉心管内温度
変化を示す図、第４図は本考案の実施例を示すブロック
図で弗る。 １１・・・制御部、１２・・・炉体部、１２２・・・電
気炉コントローラ、１３・・・ガスシステム部。FIG. 1 is a schematic diagram of an electric furnace, FIGS. 2 and 3 are diagrams showing changes in temperature within the furnace core tube, and FIG. 4 is a block diagram showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 11... Control part, 12... Furnace body part, 122... Electric furnace controller, 13... Gas system part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 炉芯管内に熱電対センサを有する炉体部と、ガスシステ
ム部と、制御部とからなる半導体製造装置において、熱
処理中の熱電対センサの信号およびガガス流人条件、処
理時間等の測定データから、製作されるウェハの状態を
制御部で計算し、始めに与えられる目標状態と比較し、
両者が等しくなる様に上記の条件を自動的に実行するこ
とを特徴とする半導体製造装置。In semiconductor manufacturing equipment that consists of a furnace body section that has a thermocouple sensor in the furnace core tube, a gas system section, and a control section, from the signal of the thermocouple sensor during heat treatment and measurement data such as gas flow conditions and processing time, etc. , the control unit calculates the state of the wafer to be manufactured and compares it with the target state given at the beginning.
A semiconductor manufacturing apparatus characterized in that the above conditions are automatically executed so that both are equal.
JP13624581U 1981-09-16 1981-09-16 semiconductor manufacturing equipment Pending JPS5842935U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13624581U JPS5842935U (en) 1981-09-16 1981-09-16 semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13624581U JPS5842935U (en) 1981-09-16 1981-09-16 semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
JPS5842935U true JPS5842935U (en) 1983-03-23

Family

ID=29929580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13624581U Pending JPS5842935U (en) 1981-09-16 1981-09-16 semiconductor manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5842935U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318130A (en) * 1987-06-22 1988-12-27 Hitachi Ltd Semiconductor manufacturing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318130A (en) * 1987-06-22 1988-12-27 Hitachi Ltd Semiconductor manufacturing device

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