JPS5842198A - 中性粒子入射装置 - Google Patents

中性粒子入射装置

Info

Publication number
JPS5842198A
JPS5842198A JP56138481A JP13848181A JPS5842198A JP S5842198 A JPS5842198 A JP S5842198A JP 56138481 A JP56138481 A JP 56138481A JP 13848181 A JP13848181 A JP 13848181A JP S5842198 A JPS5842198 A JP S5842198A
Authority
JP
Japan
Prior art keywords
gas
neutralization cell
neutral particle
injection device
particle injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56138481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355756B2 (cg-RX-API-DMAC7.html
Inventor
裕 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56138481A priority Critical patent/JPS5842198A/ja
Publication of JPS5842198A publication Critical patent/JPS5842198A/ja
Publication of JPS6355756B2 publication Critical patent/JPS6355756B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
JP56138481A 1981-09-04 1981-09-04 中性粒子入射装置 Granted JPS5842198A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56138481A JPS5842198A (ja) 1981-09-04 1981-09-04 中性粒子入射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56138481A JPS5842198A (ja) 1981-09-04 1981-09-04 中性粒子入射装置

Publications (2)

Publication Number Publication Date
JPS5842198A true JPS5842198A (ja) 1983-03-11
JPS6355756B2 JPS6355756B2 (cg-RX-API-DMAC7.html) 1988-11-04

Family

ID=15223078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56138481A Granted JPS5842198A (ja) 1981-09-04 1981-09-04 中性粒子入射装置

Country Status (1)

Country Link
JP (1) JPS5842198A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866299A (ja) * 1981-10-15 1983-04-20 株式会社東芝 中性粒子入射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866299A (ja) * 1981-10-15 1983-04-20 株式会社東芝 中性粒子入射装置

Also Published As

Publication number Publication date
JPS6355756B2 (cg-RX-API-DMAC7.html) 1988-11-04

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