JPS5840841U - Circular photomask and wafer transfer jig - Google Patents

Circular photomask and wafer transfer jig

Info

Publication number
JPS5840841U
JPS5840841U JP13502381U JP13502381U JPS5840841U JP S5840841 U JPS5840841 U JP S5840841U JP 13502381 U JP13502381 U JP 13502381U JP 13502381 U JP13502381 U JP 13502381U JP S5840841 U JPS5840841 U JP S5840841U
Authority
JP
Japan
Prior art keywords
wafer transfer
transfer jig
plane
circular
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13502381U
Other languages
Japanese (ja)
Inventor
正五 松井
真島　由光
賢一 小林
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP13502381U priority Critical patent/JPS5840841U/en
Publication of JPS5840841U publication Critical patent/JPS5840841U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案にかかる治具の正面図、第２図は第１図
のＡＡ’断面図で、図中１は円形フォトマスク、２は平
面板、３は空気噴射口、４は角度調整器、５は溝を示す
。Figure 1 is a front view of the jig according to the present invention, and Figure 2 is a cross-sectional view taken along line AA' in Figure 1, where 1 is a circular photomask, 2 is a flat plate, 3 is an air injection port, and 4 is an angle. Regulator, 5 indicates a groove.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 水平方向に対してα角度で搬送方向に下向し、鉛直方向
に対してβ角度で後方に傾斜した平面を有し、旦つ該平
面に多数設けられた噴射口より気体を噴出し、円形の被
搬送体を該平面に沿って回転下向する構造が設けられた
ことを特徴とする円形フォトマスクおよびウェハーの搬
送治具。It has a plane that faces downward in the conveying direction at an α angle to the horizontal direction and tilts backward at an angle β to the vertical direction, and gas is ejected from a large number of injection ports provided on the plane, and a circular shape is formed. 1. A circular photomask and wafer transfer jig, characterized in that the jig is provided with a structure for rotating the transferred object downward along the plane.
JP13502381U 1981-09-10 1981-09-10 Circular photomask and wafer transfer jig Pending JPS5840841U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13502381U JPS5840841U (en) 1981-09-10 1981-09-10 Circular photomask and wafer transfer jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13502381U JPS5840841U (en) 1981-09-10 1981-09-10 Circular photomask and wafer transfer jig

Publications (1)

Publication Number Publication Date
JPS5840841U true JPS5840841U (en) 1983-03-17

Family

ID=29928414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13502381U Pending JPS5840841U (en) 1981-09-10 1981-09-10 Circular photomask and wafer transfer jig

Country Status (1)

Country Link
JP (1) JPS5840841U (en)

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