JPS5840275U - 塗布装置 - Google Patents

塗布装置

Info

Publication number
JPS5840275U
JPS5840275U JP13386381U JP13386381U JPS5840275U JP S5840275 U JPS5840275 U JP S5840275U JP 13386381 U JP13386381 U JP 13386381U JP 13386381 U JP13386381 U JP 13386381U JP S5840275 U JPS5840275 U JP S5840275U
Authority
JP
Japan
Prior art keywords
coating device
cup
waste liquid
wall
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13386381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6344989Y2 (enrdf_load_stackoverflow
Inventor
井口　順二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP13386381U priority Critical patent/JPS5840275U/ja
Publication of JPS5840275U publication Critical patent/JPS5840275U/ja
Application granted granted Critical
Publication of JPS6344989Y2 publication Critical patent/JPS6344989Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP13386381U 1981-09-09 1981-09-09 塗布装置 Granted JPS5840275U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13386381U JPS5840275U (ja) 1981-09-09 1981-09-09 塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13386381U JPS5840275U (ja) 1981-09-09 1981-09-09 塗布装置

Publications (2)

Publication Number Publication Date
JPS5840275U true JPS5840275U (ja) 1983-03-16
JPS6344989Y2 JPS6344989Y2 (enrdf_load_stackoverflow) 1988-11-22

Family

ID=29927308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13386381U Granted JPS5840275U (ja) 1981-09-09 1981-09-09 塗布装置

Country Status (1)

Country Link
JP (1) JPS5840275U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6481223A (en) * 1987-09-22 1989-03-27 Nec Corp Coater for multi-layer film
JP2009206359A (ja) * 2008-02-28 2009-09-10 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2011181588A (ja) * 2010-02-26 2011-09-15 Takata Corp 半導体基板の処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197069U (enrdf_load_stackoverflow) * 1981-06-11 1982-12-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197069U (enrdf_load_stackoverflow) * 1981-06-11 1982-12-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6481223A (en) * 1987-09-22 1989-03-27 Nec Corp Coater for multi-layer film
JP2009206359A (ja) * 2008-02-28 2009-09-10 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2011181588A (ja) * 2010-02-26 2011-09-15 Takata Corp 半導体基板の処理装置

Also Published As

Publication number Publication date
JPS6344989Y2 (enrdf_load_stackoverflow) 1988-11-22

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