JPS583968A - Method of controlling chemical thermal treament of work piece in glow discharge and device for carrying out method - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to thermal processing, and more particularly to a method and apparatus for controlling chemical-thermal processing of articles in a glow discharge.

The method and apparatus of the present invention are useful for controlling the entire process of processing workpieces in ion nitration equipment, which is used, for example, in the machine building and navigation industries to obtain high workpiece strength. Applicable.

Chemical-thermal treatment of a workpiece by glow discharge, especially ion nitration treatment, usually involves two steps: a step of completely cleaning the surface of the workpiece by cathode sputtering, and a step of applying diffusion saturation to the workpiece. It consists of two stages: maintaining the work piece at a predetermined temperature. It not only quickly removes various dirt from the surface of the workpiece, but also evens it out over the entire surface, which is important in processing complex alloy steels! It is considered good practice to use voltages considerably higher than those specified for cathodic sputtering methods to cure the distributed layer. However, this method does not give good results at high voltages, since in this case glow discharges often transition to arc discharges, and the higher the voltage, the more frequently this transition occurs, especially at the beginning of the treatment stage. It gets expensive. Under these circumstances, damage to the surface of the wandering workpiece being treated may occur if the arcing frequency exceeds an acceptable limit. Therefore, when increasing the cathode sputtering voltage, it is necessary to ensure that the degree of arc occurrence tM does not exceed this allowable limit.

It must be noted that during cleaning the workpiece is heated. Therefore, the temperature of the workpiece and its color development rate must be kept within certain limits, otherwise the workpiece will be deformed and the properties of the nitrated layer will deteriorate.

The chemical-thermal treatment method of a workpiece by glow discharge consists of two steps: measuring the temperature of the workpiece and its rate of change, and comparing the measured quantities with predetermined values. A processing method is known which comprises the steps of generating an error signal based on this comparison and releasing a signal to control the glow discharge voltage. (F'RG Uke! Shin 1i Book JPa
2.606,396°cl, see HO5B 7/16).

A disadvantage of this method is that in many cases the heating rate and temperature of the workpiece is controlled by applying a glow discharge voltage, which does not allow for powerful cathodic sputtering. The predetermined values of these adjustable quantities are obtained at lower voltages than intense cathodic sputtering is achieved, thereby reducing the quality of the process. Another disadvantage of this method is that the arcing frequency is not kept at a predetermined level during the chemical-thermal treatment, and the only control measures available are to suppress the rise in glow discharge voltage that would accompany the arcing. This is something that cannot be done. Finally, with this method, it is not possible to simultaneously maintain the workpiece temperature change rate and arcing frequency, or the workpiece temperature and arcing frequency, at all specified levels. This is because it only has a controlling effect on the glow discharge voltage, which results in a longer chemical-thermal treatment time.

As an apparatus for carrying out the above method, there is an apparatus in which a power source is connected to a lead of a discharge chamber that accommodates a workpiece.

In this device, a temperature sensor and a temperature change rate sensor are connected to a control unit as respective comparison elements.
This control unit is connected to a power source. The output of the temperature comparison element is connected to the setting input of the temperature change rate comparison element,
The output of the temperature change rate comparison element is connected to the input of the control unit. This is a large integral constant proportional-integral regulator whose second input is connected to a sensor that confirms the occurrence of an arc.

In the known device, this proportional-integral regulator is used to control the workpiece temperature and its rate of change, and its power supply supplies a constantly variable voltage, so that the process parameter total pressure remains constant. cannot be adjusted.

The basic object of the present invention is to maintain the work piece temperature and arcing frequency at desired levels while simultaneously improving the control characteristics of these quantities in controlling the chemical-thermal treatment of glow discharges. The object of the present invention is to realize a method and apparatus that can shorten processing time and improve processing quality by performing strong cathode sputtering.

The purpose of this is to include a step of measuring the temperature of the workpiece and the rate of change of said temperature in the control of the chemical-thermal treatment of the workpiece in a glow discharge, and to set these measured quantities to their respective predetermined values. A method comprising the steps of: comparing, generating an error signal from the comparison, and generating a control signal for controlling the glow at pressure from the error signal; The method according to the present invention includes the steps of measuring the arc occurrence frequency in glow discharge simultaneously with the measuring step, and the measuring frequency it-
a step of comparing with a predetermined value, a step of generating an error signal based on this comparison, a step of generating another control signal from the error signal, and a step of calculating the arc occurrence frequency using the another control signal. and controlling.

In addition, in the method of the present invention, a pulsed voltage having an adjustable amplitude value and an average value is used as the glow discharge voltage from the start of processing of the work piece to the end of cathode sputtering, and the average value of the pulsed voltage is Preferably, the value is used to control the temperature and its rate of change, and the amplitude value of the pulse voltage is used to control the arcing fM degree, thereby enabling intense cathode sputtering.

The present invention also compares a signal based on the arc occurrence frequency suitable for controlling the glow discharge voltage with a control signal based on the warm temperature or a control signal based on the rate of temperature change, and compares the signal based on the arc occurrence frequency, which is suitable for controlling the glow discharge voltage, with the control signal based on the temperature change rate. It is preferable to fully control the glow discharge voltage using the Shingetsu-kai corresponding to the tt pressure, thus improving the quality of simultaneous control of at least two types of processing characteristics.

In the method of the present invention, it is also preferable to reduce the arc occurrence frequency by a predetermined value when the temperature of the workpiece increases.

This object is achieved in an apparatus for carrying out the method of the invention, which comprises as its components a power supply connected to the lead of the discharge chamber containing the workpiece;
A workpiece temperature sensor, a temperature change rate sensor, an element that compares the measured temperature and its rate of change with predetermined values, and a regulator unit), and the output of the above sensor is determined by each comparison. The regulator unit is connected to the source through an element, and the regulator unit is connected to the source. In this case, in the 4& It comprises an element for comparing with a predetermined value, a control unit, and a glow discharge voltage transmitter, and the regulator unit is equipped with a regulator for regulating the temperature of the work piece, its rate of change, and the frequency of arc occurrence. and the arcing frequency sensor is connected to the arcing frequency regulator via a corresponding comparison element,
The output of the arcing frequency regulator is connected to a corresponding one of the inputs of the control unit, and the other two inputs of this control unit are connected to the outputs of a temperature regulator and a temperature rate of change regulator; The input is connected to the output of the temperature comparison element, the remaining input is connected to a corresponding one of the leads via a glow discharge voltage transmitter, and the output is connected to a power source.

The control unit of the apparatus of the present invention preferably includes two switches, a zero detector, a minimum signal extractor, and a cathode sputtering completion confirmation circuit,
Here, the output of the zero detector is connected to the ono input of the ono switch of the two switches, the output of the switch is connected to the first input of the second switch, and the output of the zero detector is connected to the first input of the second switch, and
The 20th input of the switch is connected to the output of the cathode sputtering completion confirmation circuit, the ono output of the second switch is connected to the ono input of the minimum signal extractor, and the respective inputs of the ono switch, The input of the zero detector, the second input of the minimum signal extractor, and the input of the cathode sputtering completion confirmation circuit are respectively used as inputs of the control unit, and the second output of the second switch and the minimum signal The extractors are each used as an output of the control unit.

Preferably, the cathode sputtering completion confirmation circuit of the apparatus of the present invention comprises a comparator, a reference power source, and a time counter, and here, the input and output of the comparator are the reference power source and the time counter, respectively. The second input of the comparator and the output of the time counter are used as the input and output of the cathode sputtering completion confirmation circuit, respectively.

The present invention will be described in detail below with reference to the drawings.

In the following elaboration of the invention, reference is made to the drawings which disclose an apparatus for carrying out the method of the invention.

In FIG. 1, the device of the invention comprises a power source 1;
Its output is connected to the lead 2 of the discharge chamber 3, in which the workpiece 4 is subjected to chemical-thermal treatment. Discharge: The work piece 4 in the chamber 3 is suspended from a suspension member 5. The wall of the discharge chamber 3 functions as one of the leads 2. The apparatus of the invention includes a temperature sensor 6, the input of which is connected to the workpiece 4. A thermocouple with an amplifier can be used as the temperature sensor 6, and the output of the temperature sensor 6 is connected to the input of the temperature change rate sensor 7 and the first input of the temperature comparison element 8. The output of temperature sensor 7 is connected to a first input of temperature change rate comparison element 9 . An input of the arc occurrence frequency sensor 10 is connected to an output of a glow discharge current transmitter 11 and a glow discharge voltage transmitter 12.

The output of the arcing frequency sensor 10 is connected to a first input of the arcing tMv comparison element 13. Comparison element 8.9
, 13].2 is a signal Q corresponding to predetermined values of the workpiece temperature, its rate of change, and arc occurrence frequency.
Used to receive t. Comparison element 8.9.13 ff
l force is connected to the input of the respective regulator 14.15.16 of a regulator unit 17, which adjusts the workpiece on the basis of the error coefficient supplied to the output of the comparison element 8, 9.13. It is designed to generate all control signals related to the single temperature, its rate of change, and the frequency of arc occurrence. The outputs of the regulators 14, 15, 16 and the output of the comparator 8 are connected to the inputs 18, 19, 20, 21 of the control unit 22, respectively, and the input 23 of the control unit 22 is connected to the glow discharge [11 output of the pressure transmitter 12]. connected to. The outputs 24 , 25 of the control unit 22 are connected to the inputs of the power supply 1 .

The control unit 22 is designed to control the fluctuation liQ value and average value of the power supply voltage.

Referring now to FIG. 2, the control unit 22 comprises a switch 26 whose output is connected to the switch 2.
Connected to the off input of 7. The input of fang 2 of the switch 27 is connected to the output 28 of the cathode sputtering completion confirmation circuit 29, and the first output of the switch 270 is connected to the first input of the minimum signal extractor 300. switch 260 first
The input of is connected to the output of zero detector 31. The other two inputs of the switch 26, the input of the zero detector 31, the second input of the minimum signal extractor 31, and the input of the cathode sputtering completion confirmation circuit 29 are connected to the control unit 22, respectively.
used as input 18.19.21.20.23. The output of the minimum signal extractor 30 and the second output of the switch 27 respectively correspond to the output 25.2 of the control unit 22.
Used as 4. Switch 26 is used to connect the output of one of the regulators 14 or 15 of FIG. 1 to the corresponding input of switch 27 (FIG. 2), and switch 27 is used to connect the output of one of the regulators 14 or 15 of FIG.
5 (off diagram) is connected to the corresponding input of the minimum signal extractor 30 or directly to the input 25 of the control unit 22, depending on the presence or absence of a signal at the output 28 of the cathode sputtering completion confirmation circuit 29. used. The minimum signal extractor 30 has a function of comparing the signals supplied to its two inputs and selecting all the signals having the smaller amplitude.

FIG. 3 shows one embodiment of the cathode sputtering completion confirmation circuit 29, which includes a comparator 32, the output of which is connected to the input of a time counter 33. The '17 input of comparator 32 is connected to reference power supply 34 and the second input is used as input 23 of control unit 22. The output of the time counter 33 is used as the output 28 of the cathode sputtering completion confirmation circuit 29. The comparator 32 has a function of comparing the power supply voltage with a reference voltage from the total reference power supply 34 according to a predetermined value of the glow discharge voltage. Further, the comparator 32 generates all operating signals for the time counter 33. A time counter 33 counts the time during which cathode sputtering is carried out in the presence of a signal at the output of comparator 32 and switches 27 at the end of cathode sputtering.
(FIG. 2).

FIG. 4 to the off-line diagram are graphs showing the history of the operation of the control device that completely controls the ion nitro furnace.

FIG. 4 shows how the temperature T (solid line) of the workpiece 4 and the arc generation type 1j[f (broken line) in the off-line diagram change over time. The horizontal axis is the current value at time tK, and the vertical axis is the values of T, f, and 'I'. The vertical axis T is the predetermined temperature of the work piece 4 (off view).

FIG. 5 shows how the control signal U□ at the output of the arc occurrence frequency regulator 6 (FIG. 1) changes over time.

FIG. 6 shows how the control signal U2 (solid line) at the output of the temperature change rate regulator 5 and the control signal U3 (broken line) at the output of the temperature regulator 4 change over time. It is.

The off diagram is the power supply voltage U. This shows how the changes over time. In the off-graph, the solid line shows the envelope waveform of the voltage, and the broken line shows the nine voltages averaged over the corresponding time. The vertical axis U4 is the power supply voltage at which intense cathode sputtering occurs.

t work, t3, t3, t4, and t5 on the horizontal axis indicate the following values.

t□ is the time for the heating temperature to reach a predetermined value.

t is the time when the amplitude value of the power supply voltage reaches U4.

t3 is the start time of the interval between two consecutive pulses.

t4 is the end time of cathode sputtering.

t5 is the start time of the next arc discharge occurrence.

In the OFF diagram, τp5 τ0 and τ0 represent the pulse interval, pulse width, and pulse period, respectively.

The method of the present invention is carried out in the following manner using the apparatus of FIGS. 2 and 3.

At the starting time 1=0 (from figure 4 to the off figure) the voltage of the power supply 1 is applied to the lead 2 of the discharge chamber 3 (off figure), the value of which corresponds to the initial value of the control signal at the input of the power supply 1. Initial value U. (off diagram). At the start of processing,
Generally, glow discharge changes to intense arc discharge. The extinction of arc discharge is as follows. The supply voltage immediately drops to zero and is reapplied after sufficient time has elapsed for the discharge gap to achieve a deionized state. For this purpose, a power supply 1 connected to the output 24 of the control unit 22
The control signal at the input of becomes zero and rises after a certain delay time. Due to the occurrence of arc discharge, the discharge current increases,
Discharge voltage decreases. In this way, the current transmitter 11 (first
The signal generated by the voltage transmitter 12 and the signal generated by the voltage transmitter 12 indicate the occurrence of arc discharge.The output of the arc frequency sensor 10 has a signal proportional to the rate at which arc discharge occurs (the frequency of arc occurrence). generated. This signal is fed to the input of an arcing frequency comparison element 13, where it is compared with a signal proportional to a predetermined arcing frequency. In this way, the output of the arc occurrence frequency comparison element 13 is
A signal is generated that is proportional to the difference between the predetermined value and the measured value of the arcing frequency.

This signal is fed to the input of an arcing frequency regulator 16, the output of which controls the power supply 1 (see Figure 1) to determine the amplitude value Ua (off diagram) of the supply voltage pulse according to the selected regulation law. The U□ (Fig. 5) used to change is formed. A proportional-integral regulator can be used as the regulator 16 (FIG. 1). The signal formed by the regulator 16 is fed to an input 20 of a control unit 22, which input is connected to a minimum signal extractor 30.
It can be used as one of the inputs (Figure 1-2).

Another input of the minimum signal extractor 30 receives a signal from a switch 27 which, in addition to its basic function, also serves as a reference power supply.

This signal has a constant value that significantly exceeds the value of the signal at input 20 of control unit 22. The minimum signal extractor has the function of comparing the signals at its two inputs, and the smaller of the compared signals appears at the output. This smaller signal is here obtained from the output of the arcing frequency regulator 16. This signal is applied to the input 24 of the power supply 1 and varies the value of U2 (voltage amplitude, off diagram) to keep the arcing frequency at a predetermined level. In this case, Ua increases.

During this process, the work piece 4 (off view) is being heated.

Therefore, in the outputs of the temperature sensor 6 and the temperature change rate sensor 7, signals appear which are actually directly proportional to the temperature of the work piece and its rate of change. Comparison element 8.9 has the function of comparing these signals with a signal proportional to a predetermined value of said meter. The output of comparison element 8.9 then forms an error signal regarding the workpiece temperature and its rate of change.

According to these error signals and the selected fc regulation law, the regulators V-14.15 are used to control the average value of the supply voltages U, and U3 (FIG. 6)? Form.

A proportional-integral regulator can be used as the regulator 14,15.

The generated control signal is sent to the input 18.1 of the control unit 22.
9 (FIG. 1) and are used as respective inputs of switches 26 (FIG. 2, 9).

When switch 26 is activated, only a control signal U2 based on the rate of change of temperature is provided to the input of switch 27 before time te. This signal is supplied from the output of the regulator 15 through the switch 27 to the input 25 of the power supply 1.

In this way, the average value U5 of the power supply voltage changes. Accordingly, the average value of the discharge voltage changes, and the heating rate is maintained at a predetermined level. To change the average value U5, for example, the pulse width τ□ and the pulse period τ. It is sufficient to change the pulse interval τ while keeping it completely constant.

At time t (Fig. 4), the temperature T of the work piece is a predetermined value T. reach. As a result, the zero detector 31
At the output of (FIG. 2) appears a signal which switches the switch 26 and causes the control signal U3 produced by the temperature regulator 14 to appear at its output.

It is desirable that the transition from control signal U to control signal U3 occurs smoothly. This means that the initial value of U3 is equal to the value of U2 at the time of transition. Therefore, at time t, temperature regulator 14
There exists a condition in which a control signal U3 (FIG. 6) from the source 1 is supplied to the input 25 of the power supply 1, whereby the average value of the discharge voltage changes and the temperature of the workpiece reaches a predetermined value T. K is maintained.

Time 1. (Figure 7), the amplitude value Ua of the power supply voltage
reaches U4]7, this causes the input 23 of the strong cathode sputtering completion confirmation circuit 29, that is, the comparator 32 (the third
The signal at one input of FIG. All driving signals are formed. At time i3 (off diagram), the output signal of comparator 32 (FIG. 3) disappears and time counter 33 stops counting. In this way, the time counter 33 counts the entire time during which the discharge voltage is maintained at U4 (off diagram). At time t4, the time counted by the time counter 33 (FIG. 3) reaches a predetermined value, and the cathode sputtering A signal for switching the switch 27 (FIG. 2) is formed at the output 28 of the termination confirmation circuit 29. This switches the signal at the output of switch 27. Thus, the input 25 (off diagram) of the power supply 1 receives a constant signal such that the discharge voltage is virtually continuous, and the on-line input of the minimum signal extractor 30 receives the full signal formed by the temperature regulator 14. The signal generated by the frequency regulator 16 is always received by a second output of the minimum signal extractor 30, at the output of which the smaller of the two output signals appears. If not, this smaller signal is the temperature-based control signal U3.
becomes. By changing the continuous wave power supply voltage (Figs. 2 and 7), the temperature of the work piece can be maintained at a predetermined level T. (Figure 4)
is maintained.

When arcing occurs again at time t5 (FIGS. 4, 5, and OFF diagrams), the arcing frequency regulator 16
The output signal U (Fig. 1) (Fig. 5) becomes smaller.

When this signal becomes smaller than the signal U3 (FIG. 6) produced by the temperature regulator 14, the power supply voltage decreases and the arc occurrence W4 degrees also decreases.

As the temperature rises, the negative effects of arc discharge become stronger.
In this case, where it is customary to reduce the arcing frequency during heating, it is necessary to connect the setting input of the arcing frequency comparison element 13 to the input of the temperature sensor 6. (This connection is not shown in FIGS. 1, 2, and 3).

In the method and apparatus of the present invention, by using two types of control parameters simultaneously, it is possible to control the entire required process before the end of cathode sputtering.
The type of control parameters are arc occurrence frequency and work piece 4L
Alternatively, it is the arc occurrence frequency and the rate of change in temperature of the work piece, and in this case, the amplitude value and average value of the power supply voltage are the objects of control. This (higher voltage and stronger cathode spackling)
! - can be carried out, resulting in reduced processing times and improved quality of the workpiece.

In the device of the present invention, individual regulation L is set for each control parameter.
/-2, thereby increasing the control effect and improving the quality of workpiece processing.

[Brief explanation of drawings]

Figure 1 shows the chemical effects of the work piece on the glow discharge according to the present invention.
2 is a block diagram of an apparatus for performing thermal processing; FIG. 2 is a block diagram of a control unit of the apparatus of the present invention; and FIG. 3 is a block diagram of a cathode sputter link completion confirmation circuit of the apparatus of the present invention. Figures 2 and 4 are diagrams showing the relationship between time and workpiece temperature depression according to the present invention, and time and arc occurrence frequency, and Figures E and 5 are diagrams showing the relationship between time and work piece temperature depression according to the present invention, and Figures E and 5 are diagrams showing the relationship between time and work piece temperature depression according to the present invention. It is a diagram showing the relationship between the control signal based on the arc occurrence frequency and the control signal based on the time and temperature change rate according to the present invention and the control signal based on the time and temperature change rate. Figure 7 is a diagram showing the relationship between time and power supply voltage according to the present invention. 1... Power source 2... Lee-1 of discharge chamber 3
・3...Discharge chamber 4...Work piece 6...
・Temperature sensor 7...Temperature change rate sensor 8...
・Temperature comparison element 9...Temperature change rate comparison element 10
... Arc occurrence fineness sensor 12 ... Glow discharge voltage transmitter 13 ... Arc occurrence frequency comparison element 14 ... Temperature regulator 15 ... Temperature change rate regulator 16 ... Arc occurrence frequency regulator 18. 19,2
0.21...Control unit 220 input 22...Control unit 23...Input 24 of control unit 22...Output 26 of control unit 22...Fang 1 switch 27...Fang 2 Switch 28...Output 29 of cathode sputtering completion confirmation circuit 29...Cathode sputtering completion confirmation circuit 30...
Minimum signal extractor 31...Zero detector 32...Comparator 33...Time counter 34...Reference power supply Continued from page 1 0 Inventor Vladimir Vasilyevich
Kirichenko Soviet Union Istra Moskovskoy Obrasti Ulitsa 9 Oi Gvardiscoy Deivyiy 43 Cavy 3 0 Inventor Igor Afanasyevich Kozlovsky Soviet Union Istra Moskovskoy Obrasti Ulitsa Soviet Union Istra Moskovskoy Obrasti Ulitsa Bougua 14 Cavey 92 0 Inventor Viktor Vasilyevich Solomadein Soviet Union Istra Moskovskoy Moskovskoy Obrasti Ulyvsa 9Oi Guvardiskoy Daveyzyi 43Kevy 0 0 Inventor Viktor Nikolaevitsch Blinovsovjet Federation Dedovsk Moskovskoy Obrasti Ulitsa Komalova 2Kevy 0 ■Applicant Evgeny Reizerovitsch・Abres Soviet Union Istra Moskovskoy Obrasti Ulitsa Ulitsutskogo 40 cavy ■Applicant Vladimir Vasilievitsi
Kirichenko Soviet Union Istra Moskovskoy Obrasti Ulitsa 9 Oi Gvardiscoy Deivyiy 43 Cavy 3 ■Applicant Igor Afanasyevich Kozlovsky Soviet Union Istra Moskovskoy Obrasti Ulitsa Soviet Union 28 K. 56 ■Applicant Two Emelyanovna Sizovya Soviet Union Istra Moskovskoy Obrasti Ulissa Vosovya 14 K. 92 Istra Moskovskoy Obrasti Ulivsa 9 Oi Guvardiskoy Daveysyi 43 Cavy 0 ■Applicant Viktor Nikolaevitchy Blinov Soviet Federation Dedovsk Moskovskoy Obrasti Ulitsa Komarovya 2 Cavi

Claims (1)

[Claims] 1. A method for controlling the chemical-thermal treatment of a work piece performed during glow discharge, the temperature of the work piece (4), the rate of change of the temperature, and the temperature during glow discharge. measure the frequency with which arcs occur, compare these measured quantities with their predetermined values, generate corresponding error signals, and from these signals determine the temperature, its change. A method comprising: obtaining a control signal for controlling a glow discharge voltage with respect to a rate of arcing and said arcing frequency; and controlling arcing during the glow discharge using a control signal based on the arcing frequency. 2. Claim 1 in which the work piece held during glow discharge is simultaneously subjected to heating and cathode sputtering.
In the method for chemically-thermal processing of a workpiece as described in paragraph 1, a pulse voltage with an adjustable amplitude and an average value is applied from the start of treatment of the workpiece (4) to the end of cathode sputtering. A method characterized by using the glow discharge voltage as a glow discharge voltage, controlling the temperature and its rate of change using the average value of the pulse voltage, and controlling the frequency of arc occurrence using the midpoint value of the pulse voltage. 3. Compare the control signal based on the arc occurrence frequency to control the glow discharge voltage with the control signal based on temperature 7, and select the control signal corresponding to the smaller glow discharge N voltage among these compared control signals. 2. The method according to claim 1 and 2, wherein the glow discharge voltage is controlled using the method of claim 1. 4. Compare a control signal based on the arcing frequency for controlling the glow discharge voltage with a control signal based on the rate of change of temperature, and determine which of these compared control signals corresponds to the smaller glow discharge voltage. A method according to claims 1 and 2, in which the glow discharge voltage is controlled using a control signal. 5. The method according to claim 1, wherein the value of the arc occurrence frequency is increased as the temperature of the work piece (4) becomes higher. 6. In an apparatus for carrying out the method according to any one of claims 2, 3, 4, and 5, the work piece (4) is entirely accommodating, and the lead (2) in the chamber (3) is provided. ) and a temperature sensor (6) for the workpiece.
, a temperature change rate sensor (7), an arcing frequency sensor (10), and measuring measured quantities representative of temperature, its rate of change, and arcing frequency, respectively, at their predetermined values. elements (8, 9, 13) for comparison, regulators (14, 15, 16) for adjusting the temperature, its rate of change, and arc occurrence frequency, and a control unit (22).
and a glow discharge voltage transmitter (12),
The outputs of the sensors (6, 7, 10) are connected to the respective regulators (14, 15, 16) via their corresponding comparison elements (8, 9, 13)' (r,
The output of 6) is connected to the input (20) of the control unit (22), the inputs (18, 19) of the control unit are connected to the outputs of the regulators (14, 15), the inputs of the control unit (21) is connected to the output of the comparison element (8), the input (23) of the control unit is connected to each of the leads (2) via the transmitter (12), and the output (24, 25) is a device characterized in that it is connected to the power source (1). 7゜The control unit (22) has a switch (26゜27
), zero detector (31), and minimum signal extractor (3
0) and a cathode sputtering completion confirmation circuit (29), the output of the zero detector (31) is connected to the ono power of the switch (26), and the output of the switch is connected to the switch (27). The second manual input of the switch (27) is connected to the output (28) of the cathode sputtering completion confirmation circuit (29), and the output of the switch (27) is connected to the minimum signal extractor (30). ), each input of the switch (26),
The input of the zero detector (31), the second manual input of the minimum signal extractor (30), and the input of the cathode sputtering completion confirmation circuit (29) are each connected to a control unit (22).
The second output of the switch (27) and the minimum signal extractor (3o) are used as inputs (18, 19, 21, 20, 23) of the control unit (
22) as an output (25, 24). 8. The cathode sputtering completion confirmation circuit (29) is as follows:
It is equipped with a comparator (32), a reference power source (34), and a time counter (33), and the input and output of the comparator (32) are connected to the power source (34) and the time counter (33), respectively.
The output of the second manual power of the comparator (32) and the time counter (33) are used as the input and output (28) of the cathode sputtering completion confirmation circuit (29), respectively. The device described in the off-ring.