JPS5829970U - ウエハ−収納容器の包装体 - Google Patents

ウエハ−収納容器の包装体

Info

Publication number
JPS5829970U
JPS5829970U JP12312881U JP12312881U JPS5829970U JP S5829970 U JPS5829970 U JP S5829970U JP 12312881 U JP12312881 U JP 12312881U JP 12312881 U JP12312881 U JP 12312881U JP S5829970 U JPS5829970 U JP S5829970U
Authority
JP
Japan
Prior art keywords
storage container
wafer storage
wafer
container packaging
waveform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12312881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145013Y2 (enrdf_load_stackoverflow
Inventor
津田　政亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takara Co Ltd
Original Assignee
Takara Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takara Co Ltd filed Critical Takara Co Ltd
Priority to JP12312881U priority Critical patent/JPS5829970U/ja
Publication of JPS5829970U publication Critical patent/JPS5829970U/ja
Application granted granted Critical
Publication of JPS6145013Y2 publication Critical patent/JPS6145013Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Buffer Packaging (AREA)
  • Packaging Frangible Articles (AREA)
JP12312881U 1981-08-20 1981-08-20 ウエハ−収納容器の包装体 Granted JPS5829970U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12312881U JPS5829970U (ja) 1981-08-20 1981-08-20 ウエハ−収納容器の包装体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12312881U JPS5829970U (ja) 1981-08-20 1981-08-20 ウエハ−収納容器の包装体

Publications (2)

Publication Number Publication Date
JPS5829970U true JPS5829970U (ja) 1983-02-26
JPS6145013Y2 JPS6145013Y2 (enrdf_load_stackoverflow) 1986-12-18

Family

ID=29917032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12312881U Granted JPS5829970U (ja) 1981-08-20 1981-08-20 ウエハ−収納容器の包装体

Country Status (1)

Country Link
JP (1) JPS5829970U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375248U (enrdf_load_stackoverflow) * 1987-09-18 1988-05-19
JPS63120942U (enrdf_load_stackoverflow) * 1987-02-02 1988-08-05
JP2007109761A (ja) * 2005-10-12 2007-04-26 Tana-X:Kk ウエハ収納用紙製容器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120942U (enrdf_load_stackoverflow) * 1987-02-02 1988-08-05
JPS6375248U (enrdf_load_stackoverflow) * 1987-09-18 1988-05-19
JP2007109761A (ja) * 2005-10-12 2007-04-26 Tana-X:Kk ウエハ収納用紙製容器

Also Published As

Publication number Publication date
JPS6145013Y2 (enrdf_load_stackoverflow) 1986-12-18

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