JPS582808A - Color filter and color solid-state image pickup element - Google Patents

Abstract

PURPOSE:To obtain a precise color filter free of color mixture by forming a simple dyable resin layer on a light-transmittable substrate, providing a striped dyed area, dyed in >=2 colors, on said resin layer, and vapor-depositing a light- shielding layer on undyed areas. CONSTITUTION:On a glass substrate 1, a pllyether sulfone resin layer 2 is formed as a simple dyable resin layer. Then, while a dyeing mask of casein photoresist is used, dyeing is carried out with a dispersed dye to provide stripes of dyed areas of red 21, green 22, and blue 23. Undyed areas 20 are formed between respective dyed stripes at intervals of 5mum. Further, a light-shielding layer 5 of Al is vacuum-deposited on the undyed areas 20 to 8mum width, thus obtaining a striped color filter. Then, a heat treatment is carried out to separate respective dyed areas by the light shielding layers 5 and undied areas 20, obtaining a color filter for color separation which never causes color mixture.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a color filter for color separation, particularly a color filter suitable for a solid-state image sensor, and a color filter suitable for a solid-state image sensor.
It is something to do.

In front of CCD and BBD, solid-state imaging devices such as MOS are used.
A color camera configured using one or two filters requires a mosaic or stripe color filter for color separation. In these color cameras, the element is formed on a transparent substrate such as glass, and nine color filters are aligned and bonded to each part of the solid-state image sensor], or on the solid-state iron sensor. Form a oak filter @2#1 and b. □ Conventionally, these color filters were made of gelatin.

Protein-based resins such as casein and glue dye dyeable lI#1111 of polyvinyl alcohol, acrylic, polycarbonate, polyamide, polyester, etc., and round filters are well known.

These O-power 2-filters are 1m1 of irises (Hatake) or
) If the structure is as shown in K*<a>O, the uniform dyeing layer 2 on the transparent substrate or solid-state sensor is dyed in red, green, blue (21 to xi) colors (21 to xi) K'. So 6
In M, (b), the separated dyed round can regions 31 to 33 are laminated on a support 10 with a dye-resistant intermediate layer 4 interposed therebetween.

In the case of a force 2 filter used in a high-resolution solid-state photographic filter, the area of each color region is small), and its dimensional accuracy is also becoming stricter. Color mixing occurs when the boundaries of each color area are undyed, or conversely when the color areas overlap, color separation occurs correctly.In both cases, color separation occurs correctly. Therefore, in order to avoid gaps at the boundaries of each color area, the color areas are intentionally overlapped with #cTob width, and the boundaries of each color area are placed on top of that. A color filter with a K color that overlaps with the spicy area has also been proposed. However, the first
Figure (a) If a color filter with a uniformly dyed layer shown in Figure K was used to dye the dark areas overlappingly, color mixing would occur and correct color reproduction would be impossible. Although color mixing does not occur in a round color filter in which each color region shown in FIG. 1(b) is laminated via an intermediate layer, it has the drawback that it is difficult to control the size of overlapping one color region.

I! When a color filter with a spicy region provided on a support is formed directly on a solid-state sensing element having an uneven surface, it has the disadvantage that it is difficult to form a fine non-spicy region due to rounding of the surface irregularities. Furthermore, color filters that separate the uniform dyed layer have the drawback of color mixing, which costs $#J.
In addition, color filters in which each dyed area is laminated via an intermediate layer have the disadvantage that it is difficult to form a mosaic or striped dyed area with good Kf# because of the unevenness of the surface.

Another object of the present invention is to provide a color filter for color separation that is suitable for solid-state imaging devices and that does not cause color mixture and has high precision.Furthermore, another object of the present invention is to provide a color filter that is suitable for solid-state imaging devices and that can be formed with high precision without color mixture. The purpose is to provide an element.

The color filter of the present invention comprises a single dyeable resin layer as a dyeable resin layer, the dyeable resin layer is dyed in at least two colors, and has two or more dyed areas, and each of the scissors has two or more dyed areas. Force 2 by zero-shot @, characterized in that the dyeing area is separated by a dry layer provided on the dyeable resin layer and the undyed workable resin layer under the dyeable resin layer. - In the case of a color solid-state image sensor in which a filter is provided on the solid-state image sensor, the color solid-state image sensor is provided with two or more dyed areas dyed in at least two colors, which are provided on the imaging area of the solid-state image sensor. Resin layer and the above-mentioned photographic area O non-sensitivity part
The dyeable resin layer includes at least a dry layer provided on the dyeable resin on the non-exposed area where the border of the dyed area exists.

In addition, the combination of 0 colors as a color filter is red, green,
Two or more colors are selected and combined as appropriate from the three primary colors of blue, yellow, cyan, complementary colors of magenta, and white (colorless as a filter).In this case, the white (colorless) area is extremely low in 11111fK staining. It is formed as a colored area or an undyed area.ζO area The rounded area formed as one color area of the color filter, even if this white area is not dyed, it should be considered as a dyed area and should not be It is easy to distinguish between the unstained area and the underlying layer.
! 40. According to the present invention, solid-state imaging is suitable for devices, and it is possible to obtain color filters that are constructed with high accuracy without color mixture, and a good color solid-state imaging device.

Another advantage of the WAC filter is that it is easy to manufacture.

A color filter in which a single dyed resin layer is dyed separately using a dyeing mask has the advantage of using a heat-resistant resin as the dyeing resin. However, with this type of color filter, if the boundaries of the dyed areas overlap (1111) or are in contact, color mixing occurs due to dye diffusion between the dyed areas that are in contact during dyeing or heat treatment. was found to occur.

It has also become clear that the distance expanded by this dye diffusion is large when the borders of the dyed areas overlap or are in contact, and is small when the borders of the dyed areas are separated. Therefore, as shown in FIG. 2, each dyed area 21 to 23 is divided into an undyed area 20 having a width larger than the diffusion distance of the dye that occurs during dyeing or subsequent heat treatment.
By separating the colors, it is possible to prevent color mixing. - The width required for this undyed a-shape is usually a few arms or less. If polyether sulfon tree 11 (manufactured by Sumitomo Chemical Co., Ltd.) is dyed with a fractional dye and dyed, 1g0C10j
During the heat treatment of I##4, the distance that the dye spreads due to diffusion is 0.
．． It is about 5pm. Therefore, in this case, if the dyed area is separated by an undyed area of 111.5 μl or more, color mixing will not occur during the Kojiki heat treatment.

On the other hand, C0D-? Each element of a solid state element such as MO8 has a photoelectric conversion function, and a charge transfer section for outputting a signal, or a distribution section or a sensor section, to be separated into three parts. It consists of a non-photosensitive part such as a channel stopper. The width of these non-sensitive yt parts is usually several microns.
It is possible to provide a non-dyed area of several fim on the unexposed area.

The insensitive yts bug of the same body in ζro is that if the source enters a part of the channel stopper, the light will chaff 4#x) and generate a light beam at the bottom of the channel stopper. Color mixture occurs when the photocarriers are diffused by the photosensitive sK. For this reason, it is necessary to prevent light from entering the non-photosensitive @ of the solid-body image sensor and to make it thicker.

Undyed area 2 of dyed resin layer 2 in JII2m 5 with irises ζ
If you form the spicy layer 5 with 0 coating, you can prevent light from entering the non-photosensitive area. #IIJ
! When one layer is formed, it becomes easy to form a rounded spicy layer whose surface is flattened.

If a spicy layer is provided in the KJii single body camera, an even better layer of spicy food is possible.

It is also possible to make the spicy layer larger than the width of the non-dyed area. All substances that can be converted into metals are used as materials, especially aluminum and chromium.

For the resin layer dyed black with a dye that does not stain any metal or the dyeing of the filter, metal oxides, i1 oxides, a oxides, etc. can be used.

When the reflectance of the material forming the opaque layer is high, the light reflected from the phosphorous layer causes flare.
-For this reason, the material forming the -L gravel layer is 3
A material with a low reflectance of 0X or less%lK 10X or less is desirable.In the case of a bottle octopus, the spicy layer can be formed of two or more layers, and the material on the incident side of one layer can be formed of a low reflectance material.Low Examples of reflectance materials include CrO, V2O4, and Nb.
OmA I! *0, CuO, NtO, WO
t, k ()l m Metal oxides such as FeO, metal nitrides such as GIN, CrN, NbN, TaN, or A11@b, Cr@b@, Cg
S, CuS, Pl) 8.

Metal sulfides such as MO8 can be used. If you enjoy these, Mari! A film may be formed by vapor deposition or the like, and the etched i may be turned into a thin layer by lift-off or the like to form a hard layer.

In addition, anodized aluminum film colored black], black chrome plating, copper, zinc, nickel, iron, etc. blackened layer can also be used as a low reflectivity hard layer. When a layer is formed corresponding to multiple pixels of a solid-state sensor, it not only forms a spicy layer on the unstained area that separates the stained area, but also forms a part corresponding to the non-exposed area of all pixels. By doing so, variations in sensitivity between pixels due to the influence of a part of the channel stopper can be reduced.

In this way, if all pixels correspond to non-sensitized IIK and the middle layer is moved, even if the dyeing of 1') corresponds to multiple areas, all the middle layers will be covered. It is also possible to provide one stained area for each pixel and divide the stained area for each pixel.

The present invention will be explained below by way of example.

Mourning discussion l.

As shown in the third cabinet, Sumitomo Chemical (2) on the glass base [1]
Polyether Nalfoy resin (hereinafter referred to as PE8-1i) K
The mono-O-dyed tree layer 2 was coated to a thickness of 3 μm.
# Using a dyeing mask made with casein photoresist o-5osrc manufactured by Tokyo Ohka Co., Ltd., S: dyed with a disperse dye manufactured by Yukagaku Co., Ltd., red (normal) 21, edge (G)
! 2, Blue (B) 12 2 m three-color stripes
It was formed with a pitch of 04m and a pitch of 31jm. IlIJ4mO non-stained areas 20 are formed in each stained stripe.
Next, by vacuum evaporation and etching) an aluminium oxide layer 5 was formed on the non-dyed area 20 to obtain a striped color filter.

Heat section mt of this color filter at 180℃ for 10 hours.
- As a result, the unstained area with a width of 5 μm is approximately 2°
9), each stained area 21 to 2s is separated by the spicy layer 5 and the non-stained area 20.
), no color mixing occurred and a good condition was maintained.

Implementation 2: Same as actual tsubari, width in X direction 28jm, pitch 33
aaa, the width in the Y direction is 38 am, the pitch is 405 m, and the dyeing area of 3 colors R, G, and B is formed in a mosaic shape, and then the width is @s
un and width 2srnt) on the unstained area;
Obtain a mosaic color filter.

This color filter is also between 180C and 10111.
Even with 1&llK, color mixing did not occur and the result was good.As described above, with the #AK of the present invention, one color was produced and a good quality Kato filter 2 was obtained.

Implementation N&
! 141i1 shows t 5KX7j direction 33 fim, Y
The dyed resin layer 2 of PΣ8 resin can be formed using the same fllK method as the KII theory on 1G, and as a result, the dyed resin layer 2 is 2am. 2 round photosensitive 1lill and transfer part 1 0111io unevenness was flattened to below.

Implementation #12. Similarly: A mosaic pattern [R, G, stained areas 21 to 23 of 83 colors] with a size of 28×38 μm was formed. In this case, one dyed area is formed on two lli elements in the Y direction.
Form a hard layer S of 8 srn in width and a hard layer of @4 μm on the unstained area on the channel stopper (not shown) to obtain a color solid-state imaging device. The surface of the element was flattened by the dyed resin layer, and the formation of a spicy layer was prevented, and a mosaic-like color separation area was formed with good WIF.

As described above, according to the present invention, it is possible to obtain a color filter and a color solid-state image sensor that are suitable for a solid-state image sensor and have no color mixture and have high precision.

[Brief explanation of drawings]

m 1 ml (a) and (b) are cross-sectional views showing the configuration of conventional color filters), 2nd! l, Rattan Figure 3 is a cross-sectional view showing an example of a zero-source @0*ra□ filter, II4
■ is the cross section of the solid-state image sensor in the X direction according to the present invention 1jiK:
It is n. 1 is transparent platysma%2ti monolithic dyeable resin layer, 2122
and 23 is a dyed area of a single dyeable resin. 31.3! and 33 indicates a dyeable resin layer that is dyed in each color and separated into 9 layers, 4 indicates a dye-resistant intermediate layer, 9, 20
5 shows the non-dyed area of the monolithic dyeable resin layer, 5 shows the hard layer, 10 shows the interline type CCD@body imaging element, 11 shows the photosensitive part, and 12 shows the transfer part.

Claims (1)

[Claims] 1. A color separation filter formed by dyeing a dyeable resin layer. The dyeable resin layer is provided with two or more dyed areas in which the dyeable resin layer is dyed in at least two colors, and each wrinkle dyed area is provided on the dyeable resin layer, and the intermediate light layer and the dark layer are provided under the dark layer. Stained t%/%-Called IJ
A color filter characterized in that it is separated from an Ii resin layer by K. A solid-state image sensor and two or more dyed areas provided on the imaging area of the solid-state image sensor and stained with at least two colors, including a solid-state image sensor and a single image sensor. Of the dyeable fat layer on the non-photosensitive area of area O, at least the intermediate layer is provided on the dyeable fat layer on the non-sensory area where the border of the dyed area exists! , A color solid-state imaging device, characterized in that each dyeing area marked with # is provided with a color filter separated by a medium light layer and a dyeable resin layer under the light blocking layer. element.