JPS5825327Y2 - 半導体装置用ボンディング装置の加圧工具の荷重測定装置 - Google Patents

半導体装置用ボンディング装置の加圧工具の荷重測定装置

Info

Publication number
JPS5825327Y2
JPS5825327Y2 JP1975129783U JP12978375U JPS5825327Y2 JP S5825327 Y2 JPS5825327 Y2 JP S5825327Y2 JP 1975129783 U JP1975129783 U JP 1975129783U JP 12978375 U JP12978375 U JP 12978375U JP S5825327 Y2 JPS5825327 Y2 JP S5825327Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
lead wire
tool
wire extraction
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975129783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5243480U (enExample
Inventor
伸一 宇野
勝徳 横山
宏一 千葉
泰毅 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1975129783U priority Critical patent/JPS5825327Y2/ja
Publication of JPS5243480U publication Critical patent/JPS5243480U/ja
Application granted granted Critical
Publication of JPS5825327Y2 publication Critical patent/JPS5825327Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
JP1975129783U 1975-09-23 1975-09-23 半導体装置用ボンディング装置の加圧工具の荷重測定装置 Expired JPS5825327Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975129783U JPS5825327Y2 (ja) 1975-09-23 1975-09-23 半導体装置用ボンディング装置の加圧工具の荷重測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975129783U JPS5825327Y2 (ja) 1975-09-23 1975-09-23 半導体装置用ボンディング装置の加圧工具の荷重測定装置

Publications (2)

Publication Number Publication Date
JPS5243480U JPS5243480U (enExample) 1977-03-28
JPS5825327Y2 true JPS5825327Y2 (ja) 1983-05-31

Family

ID=28610076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975129783U Expired JPS5825327Y2 (ja) 1975-09-23 1975-09-23 半導体装置用ボンディング装置の加圧工具の荷重測定装置

Country Status (1)

Country Link
JP (1) JPS5825327Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180283U (enExample) * 1981-05-13 1982-11-15
JPS57192754A (en) * 1981-05-21 1982-11-26 Mitsubishi Electric Corp Air conditioner

Also Published As

Publication number Publication date
JPS5243480U (enExample) 1977-03-28

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