JPS5824804A - Displacement detecting probe - Google Patents

Abstract

PURPOSE:To make it possible to detect a long displacement stroke, by holding a main shaft having a contact which is contacted with the surface of an object to be measures so that the shaft can be displaced in two dimensions. CONSTITUTION:The main shaft 1 is moved in two dimensions in the axial direction and the direction that is vertical with respect to the axial direction in response to the movement of the contact 4 which is contacted with the object to be measured. A movable slit 15b, which is fixed to a movable glass slit 12 and a sleeve 2 which are fixed to the main shaft 1 through a slit receiving plate 15a, is also synchronously moved. The movement in the axial direction of the main shaft 1 is achieved by the movement of the main shaft 1 in the sleeve 2. The movement of the main shaft 1 in the vertical direction with respect to the axial direction is achieved by the rolling movement of rolling pherical bodies 13d in a V groove 13c, the resulting movement of a movable table 13a, and the further movement of the main shaft 1 together with the sleeve 2.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement detection probe used as a gauge for dimension measurement or press part measurement.

Conventionally, various high-precision displacement detectors are commercially available, but
All of these displacement detectors have short measurable displacement amounts, and there are no long-stroke multidimensional displacement detection probes. Furthermore, among commercially available multidimensional displacement detection probes, so-called touch type probes have the disadvantage that they are unsuitable for measuring the shape, hole diameter, and hole position of press parts.

An object of the present invention is to provide a displacement detection device that can maintain stable measurement accuracy over a long period of time with a simple mechanism, and has a sufficiently long displacement stroke so that it can be effectively used as a detector for a panel measurement system. The purpose is to provide probes.

The basic structure of the present invention is to hold a main shaft equipped with a contact that contacts the surface of the bow to be measured so that it can be displaced two-dimensionally or three-dimensionally by a slide mechanism, and to move the main shaft from a predetermined reference position. An optical detection device is provided that optically detects the amount of displacement of the main shaft by using changes in the amount of light, etc., and outputs this detected value as a corresponding electrical signal. The displacement detection probe is designed to obtain .

Embodiments of the present invention will be described below with reference to the drawings.

1 to 4 show a first embodiment of the present invention, and this first embodiment shows a two-dimensional displacement detection probe.

The two-dimensional displacement detection probe referred to herein refers to a displacement detection probe that is capable of axial displacement of the main shaft and unidirectional reciprocating displacement perpendicular to this axial direction.

The main shaft 1 is housed in a sleeve 2 so as to be displaceable in the axial direction (displaceable in the vertical direction), and is always urged downward by the elastic force of a compression coil spring 3 interposed between the main shaft 1 and the sleeve 2. ing.

Reference numeral 1a indicates a spring receiver that holds the lower end of the compression coil spring 3. At the tip 1b of the main shaft 1 is a bow to be measured (not shown).

) is attached to the rear end IC of the main shaft 1, and an ear portion 1d projecting laterally is fixed to the rear end IC of the main shaft 1.

In the ear part 1d, there is a dog 5 for operating the limit switch.
is installed, and the dog 5 turns on and off a limit switch 6 for overstroke abnormality detection in the axial direction of the main shaft 1. The limit switch 6 is secured to a bracket 7 secured to the upper end of the sleeve 2, which also carries an optical detection device 8 on its upper surface.

The optical detection device 8 has the function of optically detecting the amount of axial displacement of the main shaft 1 and outputting this detected value as an electrical signal.

The optical detection device 8 has the following configuration. That is, a frame 8C is fixed to the frame 8a via bolts sb, sb, and the frame 8a and the frame 8C are positioned facing each other with a constant interval. A fixed slit (glass) 9 and a light receiver 10 are fixed to the frame 8a5-, while a light emitter 11 is fixed to the frame 8c. 1 and 12 indicate a movable slit (glass) fixed to the rear end 1c of the main shaft 1.
(Glass) 12 is in sliding contact with the rigid foot slit (Glass) 9.

The above-mentioned emitter 1] and receiver 10 are shown in FIG.
As shown in b), the fixed slit (glass) 9 and the movable slit (glass) 12 are sandwiched between them and are positioned opposite to each other.

A slide mechanism 13 is attached to the lower end of the sleeve 2 for displacing the main shaft 1 in a direction perpendicular to the axial direction of the main shaft 1. The slide mechanism 13 includes a movable base 13a fixed to the sleeve 2, and a fixed base 1.3 located opposite to one surface of the movable base 13a and fixed to the machine frame 14.
b, a groove 13c formed on the opposing surfaces of the movable table 13a and the fixed table 13'b, and a transfer sphere 13 (l) disposed in the groove 13c.Slide mechanism As a result of the sleeve 6-2 being held by the sleeve 6-2, the main shaft 1, together with the sleeve 2,
(2) It is possible to reciprocate along the groove 13c in a direction perpendicular to the axial direction of the main shaft 1 (left-right direction in FIG. 2; up-down direction in FIG. 4).

The optical detection device 15 that detects the amount of displacement in the vertical direction with respect to the axial direction of the main shaft 1 has the following configuration.

This optical detection device 15 is similar to the optical detection device 8 described above.
There is basically no difference. That is, a slit receiving plate 15a is fixed to the sleeve 2, and a movable slit (glass) 15b is fixed to this slit receiving plate 15a. On the other hand, a bracket 15c is fixed on the machine frame 14, and a slit receiving plate 15d is fixed to the bracket 15c. A fixed slit (glass) 15e and a light receiver 15f are fixed to the slit receiving plate 15 (l),
The light receiver 15f is the projector 1 fixed to the platen) 15c.
Located opposite 5g. Emitter 15g and receiver 15f
The movable slit (glass) 15'b and the fixed slit (glass) 15θ are located between the optical detection device 8, which is similar to the optical detection device 8 described above. 16, 16, 16.16 are fixed, and the amount of displacement in the vertical direction with respect to the axial direction of the main shaft 1 is determined by these stoppers 16.
, 16, 16.16. Also, spindle 1
An overstroke in a direction perpendicular to the axial direction of is also regulated by a limit switch 17. That is,
The limit switch 17 is fixed to the machine frame 14 and sends a signal that instantly stops the operation of the displacement detection probe when the main shaft 1 is about to overstroke or when an impact is applied to the contact 4 to prevent damage to the mechanism part. emits. The limit switch 6 described above also has the same function as this limit switch 17.

In addition, in FIG. 1(a), 18 indicates a stopper for regulating the axial displacement of the main shaft 1 fixed to the lower end of the sleeve 2,
The amount of axial displacement of the main shaft 1 is determined by the contact 4
It is regulated by coming into contact with 8.

The machine frame 14 is fixed to the lower end of a cylindrical case 19, and the main components of the displacement detection probe are housed within the case 19. An annular member 20 is fixed to the lower surface of the machine frame 14, and a dustproof flexible shoe 21 is attached between the annular member 20 and the contacts 4. Reference numeral 22 denotes a lid that forms the ceiling surface of the case 19, and members 23 and 24 for holding displacement detection probes are connected to the top surface of the lid 22.

A compression coil spring 25 is interposed between the inner surface of the case 19 and the slit receiving plate 15a, and the main shaft 1 is urged downward (in FIG. 4) by the elastic force of the compression coil spring 25. When not in operation, the movable bases 13a and 13a are the stoppers 16.
．． 16 and stopped. Reference numeral 26 indicates a nozzle receiver fixed to the inner surface of the case 19.

The basic operation of the first embodiment will be explained below.

The main shaft 1 moves two-dimensionally in the axial direction and in a direction perpendicular to the axial direction according to the movement of the contact 9-contact 4 that is in contact with the bow to be measured (not shown), and is fixed to the main shaft 1. The movable slit (glass) 12 and the movable slit fixed to the sleeve 2 via the slit receiving plate 151L
(Glass) 15b also moves synchronously. Here, the axial movement of the main shaft 1 is achieved by the main shaft 1 moving inside the sleeve 2, and the movement in the vertical direction with respect to the axial direction of the main shaft 1 is achieved by moving within the groove 13c. This is achieved by the rolling of the sphere 13t1, which causes the movable base 13a to move, which causes the main shaft 1 to move together with the sleeve 2.

The output signal corresponding to the displacement of the contact 4 from the reference position is obtained by photo-electrically converting the change in the light amount of the light receiving part by the movable ring 12, 15b existing between the emitter 11.15g and the receiver 10°15f. This is a pulse signal that indicates directionality. In the case of this embodiment, there are two signals with a phase difference of 90 degrees. And this signal is
Furthermore, the signal is transmitted to a subsequent amplifier, counter, and display (not shown). Note that the above-mentioned reference position means that the contact 4 is brought into contact with a master whose dimensions are known in advance, and the contact 4 is brought into contact with a master whose dimensions are known in advance.

) is preset. Furthermore, the above amplifier,
The counter and display are a combination of known devices. With this configuration, the display on the display becomes a measured value of the relative dimension according to the displacement of the contact 4 with reference to the preset dimension.

Next, in order to explain the above operation in more detail, panel hole position measurement and panel end face measurement will be taken as examples and explained based on FIG. N9 and FIG.

FIG. 9 shows a specific example of panel hole position measurement.

First, the displacement detection probe is set at a certain position, and the contact 4 is placed at the In position to connect the rear counter (not shown). ) to preset. Next, after dropping the contact 4 into the hole (3) of the panel P, the probe is again set at the predetermined position, and the displacement position ΔL of the contact 4 at this time is displayed.

The position of the hole H can be determined from the position of the toy and ΔL. In such an operation, accurate measurement is possible due to the shape of the contact 4 and the mechanism of parallel movement of the main shaft 1.

FIG. 10 shows a specific example of end face measurement of a panel. In this case, the probe is moved from the position Ll to the position L2 where the contact contacts the mask panel P, and a counter (not shown) is preset. Next, the master panel P1 is replaced with the workpiece W, and the probe is moved to the position L2 again. At this time, workpiece W and master panel P1
If the difference is ΔLx, the contact will be displaced by that amount,
A display (not shown) will display the value.

In other words, the comparison value (difference) between the workpiece W and the master panel pl
By obtaining , the end face position can be measured.

5 to 8 show a second embodiment of the present invention, and this second embodiment shows a three-dimensional displacement detection probe.

The three-dimensional displacement detection probe referred to here refers to axial displacement of the main shaft, unidirectional reciprocating displacement perpendicular to this axial direction, and unidirectional reciprocating displacement perpendicular to both the axial and vertical directions. A displacement detection probe that enables dynamic displacement. The three-dimensional displacement detection probe of the second embodiment is no different from the two-dimensional displacement detection probe of the first embodiment in its basic configuration and operation, and the difference between the two is the displacement of the contact. Since there are only three-dimensionally possible points, in Figures 5 to 8,
Components with the same reference numerals as in Figures 1 to 4 are as follows:
Indicates components with the same name that perform the same function.

Since the displacement detection probe of the second embodiment is a three-dimensional displacement detection probe, it is characterized in that the displacement direction of the contact 4 is weighted in one direction more than that of the first embodiment. Therefore, the structural feature of this three-dimensional displacement detection probe is that another slide mechanism 27 is stacked at right angles below the slide mechanism 13, and the sleeve 2
is held movably by two slide mechanisms 13 and 27. The structure of the slide mechanism 13-27 is the same as that of the slide mechanism 13, and in FIG. 6, 27a is a movable base, 27b is a fixed base, 27c is a V structure,
27d shows a rolling sphere. In order to detect the amount of displacement of the main shaft 1 in the direction of the slide mechanism 27, another optical detection device 28 is added, and the configuration of the optical detection device 28 is the same as that of the optical detection device 8.13. It is.

That is, 28a is a slit receiving plate, 28b is a movable slit (glass), 28c is a bracket, 28(l is a slit receiving plate, 28e is a fixed slit (glass), 28f is a light receiver, and 28g is a light emitter. The three-dimensional displacement detecting probe of the second embodiment has two components perpendicular to the axial direction of the main shaft 1 and perpendicular to each other.
In order to reciprocate the main shaft 1 in the direction, the main shaft 1 is compressed by compression coil springs 29a, 29b, 30a.

When held in the center by 30b, the dovetail is opened.

Compression coil springs 29a, 29b and 30a.

It is clear from FIGS. 5 and 6 that 14- and 30b are attached in directions orthogonal to each other. In FIG. 8, 31a and 31b indicate brackets,
32a and 32b are brackets 31a.

Compression coil spring 30a held by 31b.

This is a spring holder for 30b.

As is clear from the above description, in the three-dimensional displacement detection probe of the second embodiment, displacement in two directions perpendicular to the axial direction of the main shaft 1 is achieved by moving the main shaft 1 in parallel using the slide mechanism 13.27. At this time, the displacement of the contact 4 is achieved by moving the movable slit (glass) 1
5b, 281). Further, the axial displacement of the main shaft 1 is exactly the same as in the first embodiment, and the amount of displacement of the movable slit (glass) 12 matches the amount of axial displacement of the main shaft 1.

In addition, in the first and second embodiments, the slide mechanism 13
．． It is desirable to attach a retainer to 27 to prevent the transfer spheres t3a, 27a from falling off.

Further, the optical detection used in the optical detection devices 8, 15, 28 may employ the well-known principle of optical interference, and the preamplifier circuits for emitting and receiving light may be built into the optical detection devices.

As explained above, according to the displacement detection probe of the present invention, the configuration is simple, stable measurement accuracy can be maintained over a long period of time, and the number of measurement steps is reduced, resulting in extremely high work efficiency. Furthermore, since it has a sufficiently long displacement stroke, it has the effect of being extremely versatile.

[Brief explanation of the drawing]

FIG. 1(a) is a longitudinal sectional view of a two-dimensional displacement detection probe according to the first embodiment of the present invention, FIG. 1(b) is a side view illustrating the principle of the optical detection device, and FIG. Figure 3 is a left side view including some parts of Figure (A), Figure 3 is a sectional view taken along the line ■-■ in Figure 1 (A), Figure 4 is a sectional view taken along IV-■ in Figure 1 (A), and FIG. 5 is a longitudinal sectional view of a three-dimensional displacement detection probe according to the second embodiment of the present invention, FIG. 6 is a left side view including a partial cross section of FIG. 5, and FIG. 7 is a cross section taken along Figure 8 is a sectional view taken along the line ■-■ in Figure 6, Figure 9 is a side view when the present invention is applied to panel hole position measurement, and Figure 10 is a side view when the present invention is applied to panel edge measurement. FIG. 1... Main shaft, 2... Sleeve, 3.25, 29a, 29b, 30a, 30b...
...Compression coil spring, 4...Contact, 6.17...Limit switch, 8.15.2
8... Optical detection device, 9.15e, 28e.
・Fixed slit (glass), 12.1511,28
t+...Movable slit (glass), 11.15g
, 28g...Emitter, 10.15r, 28r...Receiver, 13.27......Slide mechanism, 13a, 27a... ...Movable stand, 13b, 27b...Fixed stand,
13c, 27a・・・・・・・・・V groove, 13
d, 274・・・・・・・・・・・・Rolling sphere, 16.
18 ・・・・・・・・・・・・Stopper, 1
4...Machine frame, 19...Case, 17-P...Panel, Pl...Master handle , W...
...Workpiece, H...... Hole, 18- Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Fig. 4 Fig. 7 1b Fig. 8 Fig. 9 Fig. 10

Claims (1)

[Scope of Claims] (1) A slide mechanism that attaches a contact for detecting a foot object to the tip of the main shaft, displaces the main shaft in the axial direction of the main shaft, and a slide mechanism that displaces the main shaft in a direction perpendicular to the axial direction of the main shaft. The main shaft is held movably by a slide mechanism that displaces the main shaft, optically detects the amount of axial displacement and vertical displacement of the main shaft, and outputs the detected value as an electrical signal. A displacement detection probe, characterized in that it is equipped with an optical detection device. (2. The displacement detection probe according to claim 1, wherein the main shaft is held by the slide mechanism so as to be two-dimensionally displaceable in the axial direction and the vertical direction. (3) 4. The displacement detection probe according to claim 1, wherein the main shaft is three-dimensionally displaceable in the axial direction, the vertical direction, and a direction perpendicular to both of these directions by the slide mechanism. (4) In the displacement detection probe according to any one of claims 1 to 3, a movable base that displaces the slide mechanism integrally with the main shaft. , a fixed base located opposite to one surface of the movable base, a (2) groove formed on the opposing face of the core movable base and the fixed base, and a transfer sphere disposed within the V-groove. (5) The displacement detection probe according to any one of claims 1 to 4, further comprising: a movable slit that displaces the optical detection device integrally with the main shaft; Consisting of a fixed foot slit located opposite the movable slit, and a pair of emitter and light receiver located oppositely on both sides of the movable slit and the fixed foot slit. (6) Patent The displacement detection glove according to any one of claims 1 to 5, wherein the optical detection devices are arranged along the displacement direction of the main shaft.