JPS5823159U - Sample moving device - Google Patents

Sample moving device

Info

Publication number
JPS5823159U
JPS5823159U JP10822581U JP10822581U JPS5823159U JP S5823159 U JPS5823159 U JP S5823159U JP 10822581 U JP10822581 U JP 10822581U JP 10822581 U JP10822581 U JP 10822581U JP S5823159 U JPS5823159 U JP S5823159U
Authority
JP
Japan
Prior art keywords
moving device
sample
sample moving
drive screw
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10822581U
Other languages
Japanese (ja)
Inventor
公郎 大井
本田　敏和
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP10822581U priority Critical patent/JPS5823159U/en
Publication of JPS5823159U publication Critical patent/JPS5823159U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示した試料移動装置、第２
図はその動作の説明を補足する為の図である。 １：鏡体、２：試料ステージ、３：試料ホルダ、１３：
試料、１４Ａ、１４Ｂ、１４Ｃ：駆動ネジ、１５Ａ、１
５Ｂ、１５に：加熱手段。Figure 1 shows a sample moving device showing an embodiment of the present invention;
The figure is a diagram to supplement the explanation of the operation. 1: Mirror body, 2: Sample stage, 3: Sample holder, 13:
Sample, 14A, 14B, 14C: Drive screw, 15A, 1
5B, 15: heating means.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 鏡体内に配置された試料ステージ、該ステージ内に配置
された試料ホルダ、及び該ステージを鏡体を介して水平
方向に移動させる為の駆動ネジから成る装置において、
前記駆動ネジの近傍に該ネジを加熱する為の手段を設け
たことを特徴とする試料移動装置。A device comprising a sample stage disposed within a mirror body, a sample holder disposed within the stage, and a drive screw for horizontally moving the stage through the mirror body,
A sample moving device characterized in that means for heating the drive screw is provided near the drive screw.
JP10822581U 1981-07-21 1981-07-21 Sample moving device Pending JPS5823159U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10822581U JPS5823159U (en) 1981-07-21 1981-07-21 Sample moving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10822581U JPS5823159U (en) 1981-07-21 1981-07-21 Sample moving device

Publications (1)

Publication Number Publication Date
JPS5823159U true JPS5823159U (en) 1983-02-14

Family

ID=29902636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10822581U Pending JPS5823159U (en) 1981-07-21 1981-07-21 Sample moving device

Country Status (1)

Country Link
JP (1) JPS5823159U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55131461A (en) * 1979-03-27 1980-10-13 Honda Motor Co Ltd Grinding method for cam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55131461A (en) * 1979-03-27 1980-10-13 Honda Motor Co Ltd Grinding method for cam

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