JPS58223392A - Ion laser device - Google Patents
Ion laser deviceInfo
- Publication number
- JPS58223392A JPS58223392A JP10741582A JP10741582A JPS58223392A JP S58223392 A JPS58223392 A JP S58223392A JP 10741582 A JP10741582 A JP 10741582A JP 10741582 A JP10741582 A JP 10741582A JP S58223392 A JPS58223392 A JP S58223392A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- output
- laser tube
- gas
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
Abstract
Description
【発明の詳細な説明】
本発明は、イオンレーザ装置、特に光出力の安定化を図
ったイオンレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion laser device, and particularly to an ion laser device with stabilized optical output.
従来、イオンレーザ装置では光出力の安定化を図るため
、レーザ出力の一部を検出しそれが一定になるようにレ
ーザ管の放電電流を制御する帰還回路が用いられている
。すなわち、１４１図に示すように直流電源Ｉの一つの
出力端をレーザ管９のカソード１０に接続し、他端をト
ランジスタ２全通してレーザ管９のアノード１１に接続
する。そして、レーザ光１２の一部のレーザ光１３を光
検出器６で検出し、抵抗５の両端に現われる出力電圧と
基準電源４との差電圧を比較増幅器３で増幅゛シ、トラ
ンジスタ２のベースに供給し、差電圧が０になるように
制御している。しかし、イオンレーザ装置は、レーザ管
内の封入希ガスをイオン化するために大電流（２０〜４
０Ａ）のアーク放電をさせるため、トランジスタ２は大
容量、大型。Conventionally, in order to stabilize the optical output of an ion laser device, a feedback circuit has been used that detects a portion of the laser output and controls the discharge current of the laser tube so that it remains constant. That is, as shown in FIG. 141, one output end of the DC power supply I is connected to the cathode 10 of the laser tube 9, and the other end is connected to the anode 11 of the laser tube 9 through the entire transistor 2. Then, a part of the laser beam 13 of the laser beam 12 is detected by the photodetector 6, and the difference voltage between the output voltage appearing across the resistor 5 and the reference power source 4 is amplified by the comparator amplifier 3. The voltage difference is controlled to be zero. However, the ion laser device requires a large current (20 to 4
Transistor 2 has a large capacity and is large in order to generate an arc discharge of 0 A).
高価となる。また、アーク放電によるガスクリーンアッ
プ作用によリレーザ管内のガスが減少する。It becomes expensive. Further, the gas inside the laser tube decreases due to the gas clean-up effect caused by the arc discharge.
レーザ封入ガスが減少すると、レーザ管電圧が減少し、
減少が進むと正常な放電が行なわれなくなり、管の動作
が停止して使用不能となる。When the laser fill gas decreases, the laser tube voltage decreases,
As the amount decreases, normal discharge will no longer occur, and the tube will stop operating and become unusable.
本発明の目的は、トランジスタ２を使用せず小型、安価
にし、レーザ管のガス圧を自動的かつ適正に補正し、長
期間にわたり安定な動作をするイオンレーザ装置を提供
するにある。An object of the present invention is to provide an ion laser device that does not use a transistor 2, is small and inexpensive, automatically and appropriately corrects the gas pressure in the laser tube, and operates stably over a long period of time.
次に第２図に示した実施例により本発明の詳細な説明す
る。図において、直流電源ｌの一つの出力端をレーザ管
９のカソード１０に接続し、他端をレーザ管９のアノー
ド１１に接続する。７．７′はレーザ管９をはさんで対
向配置の共振器ミラーであり、１６はレーザ管９と支管
１７により接続されたガスリザーバで、ガスリザーバ１
６はベローズ構造になっており、モータシリンダ１５に
よって容積を変えられる。Next, the present invention will be explained in detail with reference to the embodiment shown in FIG. In the figure, one output end of the DC power supply l is connected to the cathode 10 of the laser tube 9, and the other end is connected to the anode 11 of the laser tube 9. 7.7' is a resonator mirror placed oppositely across the laser tube 9; 16 is a gas reservoir connected to the laser tube 9 by a branch pipe 17;
6 has a bellows structure, and its volume can be changed by a motor cylinder 15.
レーザ管９が放電し、レーザ出力■２の一部のレーザ光
１３が光検出器６により検出され、抵抗５の両端に現わ
れる出力電圧と基準電源４との差電圧を比較増幅器３で
増幅し、モータシリンダ駆動回路１４を動作させ、モー
タシリンダ１５を駆動し、ガスリザーバ１６のベローズ
部を縮め、レーザ管９のガス圧を上昇させ、規定のレー
ザ出力になるまでレーザ管９のガス圧を調整する。その
結果、初期状態では第３図（麹の曲線１９の（ａ）点に
レーザ管９のガス圧は調整される。また約１ｏｏｏＨ動
作後レーザ管９の光学窓２２．２２’がある程度汚れる
と、第３図（Ｂ）の曲線２０の（ｂ）点にレーザ管９の
ガス圧は調整される。そして約２０００Ｈ動作後レーザ
管９の光学窓２２．２７がさらに汚れると、第３図（Ｂ
）の曲線２１のＦＣ）点にレーザ管９のガス圧は調整さ
れる。なお前記第３図ｆＢｌのｆａ）、 （ｂ）。The laser tube 9 discharges, a part of the laser beam 13 of the laser output 2 is detected by the photodetector 6, and the difference voltage between the output voltage appearing across the resistor 5 and the reference power source 4 is amplified by the comparator amplifier 3. , operates the motor cylinder drive circuit 14, drives the motor cylinder 15, contracts the bellows portion of the gas reservoir 16, increases the gas pressure in the laser tube 9, and adjusts the gas pressure in the laser tube 9 until the specified laser output is reached. do. As a result, in the initial state, the gas pressure in the laser tube 9 is adjusted to point (a) of the koji curve 19 in FIG. , the gas pressure in the laser tube 9 is adjusted to point (b) of the curve 20 in FIG. B
The gas pressure in the laser tube 9 is adjusted to the point FC) of the curve 21 of ). In addition, fa) and (b) of FIG. 3 fBl.
（Ｃ）点のガス圧の時レーザ管９のアノード１１． カ
ッーＦｌＯ間の放電電流（アノード電流〕は第３図（四
の曲線１８の（ａ）、 （ｂ）、 （Ｃ）点の電流とな
る。At the gas pressure at point (C), the anode 11 of the laser tube 9. The discharge current (anode current) between Ka-FLO is the current at points (a), (b), and (C) of curve 18 in Figure 3 (4).
以上のように、レーザ管９のガス圧を制御することによ
りレーザ出力１２は一定に保たれ、前記アーク放電によ
るガスクリーンアップ作用によるレーザ管９のガス圧減
少も自動的に補正されるので、常にレーザ管９のガス圧
は適正に保たれる。As described above, by controlling the gas pressure in the laser tube 9, the laser output 12 is kept constant, and the decrease in the gas pressure in the laser tube 9 due to the gas clean-up effect due to the arc discharge is automatically corrected. The gas pressure in the laser tube 9 is always maintained at an appropriate level.
以上のべたように規格レーザ出力を出力するためにレー
ザ管９のガス圧は最高に、アノード電流は最小に自動的
に調整される。よってレーザ管９のアーク放電によるガ
スクリーンアップは最少になるよう抑制され、長期間に
わたって安定なレーザ出力を得ることができる。As described above, in order to output the standard laser output, the gas pressure in the laser tube 9 is automatically adjusted to the maximum and the anode current to the minimum. Therefore, gas clean-up due to arc discharge in the laser tube 9 is suppressed to a minimum, and stable laser output can be obtained over a long period of time.
第１図は従来のイオンレーザ装置を示すブロック図、第
２図は本発明のイオンレーザ装置を示すブロック図、第
３図（Ａ）は本発明のイオンレーザ装置のレーザ管内ガ
ス圧対アノード電流、第３図（均はレーザ管内ガス圧対
レーザ出力特性を示す曲線図である。
■・・・・・・直流電源、２・・・・・・トランジスタ
、３・・・・・・比較増幅器、４・・・・・・基準電源
、５・・・・・・抵抗、６・・・・・・光検出器、７．
１・・・・・・光共振器、８・・・・・・ビームスプリ
ッタ、９・・・・・・ガスレーザ管、１０・・・・・・
カソード、１１・・・・・・アノード、１２．１３・・
・・・・レーザｉ、１４・・・・・・モータシリンダ駆
動回路、１５・・・・・・モータシリンダ、１６・・・
・・・ガスリザーバ、１７．・・・・・支管。
５ −
し−プ゛藩井何カス圧（Ｔｏｒｒ
し−サ噛−９〃′ヌ圧（丁Ｏｒ腔〕
狛３７
（Ａ）
ン
（ヒシ）
４０１−FIG. 1 is a block diagram showing a conventional ion laser device, FIG. 2 is a block diagram showing an ion laser device of the present invention, and FIG. 3 (A) is a graph showing gas pressure in the laser tube versus anode current of the ion laser device of the present invention. , Figure 3 (average is a curve diagram showing the gas pressure in the laser tube vs. laser output characteristics. ■...DC power supply, 2...transistor, 3...comparison amplifier , 4...Reference power source, 5...Resistor, 6...Photodetector, 7.
1... Optical resonator, 8... Beam splitter, 9... Gas laser tube, 10...
Cathode, 11... Anode, 12.13...
...Laser i, 14...Motor cylinder drive circuit, 15...Motor cylinder, 16...
...Gas reservoir, 17. ...Branch pipe. 5 - Torr Shi-Sagami-9〃'nu Pressure (Teng Or cavity) Koma 37 (A) N (Hashi) 401-
Claims (1)
と、このレーザ管の動作電圧を供給する直流電源と、レ
ーザ管からのレーザ光の一部を検出し、その値が一定に
なるよう前記ガスリザーバのベローズ部を制御するモー
タシリンダを駆動するモータシリンダ駆動回路とを備え
たことを特徴とするイオンレーザ装置。A laser tube equipped with a gas reservoir having a bellows as an envelope, a DC power supply that supplies the operating voltage of this laser tube, and a part of the laser beam from the laser tube that detects a portion of the laser beam and uses the gas reservoir to keep the value constant. An ion laser device comprising: a motor cylinder drive circuit that drives a motor cylinder that controls a bellows portion of the ion laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10741582A JPS58223392A (en) | 1982-06-22 | 1982-06-22 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10741582A JPS58223392A (en) | 1982-06-22 | 1982-06-22 | Ion laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58223392A true JPS58223392A (en) | 1983-12-24 |
Family
ID=14458563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10741582A Pending JPS58223392A (en) | 1982-06-22 | 1982-06-22 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58223392A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947786A (en) * | 1982-08-06 | 1984-03-17 | フエランテイ・ピ−エルシ− | Gas laser device |
| WO1995034927A1 (en) * | 1994-06-16 | 1995-12-21 | Komatsu Ltd. | Laser gas controller and charging-discharging device for discharge-excited laser |
-
1982
- 1982-06-22 JP JP10741582A patent/JPS58223392A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947786A (en) * | 1982-08-06 | 1984-03-17 | フエランテイ・ピ−エルシ− | Gas laser device |
| JPH023313B2 (en) * | 1982-08-06 | 1990-01-23 | Ferranti Plc | |
| WO1995034927A1 (en) * | 1994-06-16 | 1995-12-21 | Komatsu Ltd. | Laser gas controller and charging-discharging device for discharge-excited laser |
| US5754579A (en) * | 1994-06-16 | 1998-05-19 | Komatsu Ltd. | Laser gas controller and charging/discharging device for discharge-excited laser |
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