JPS58221497A - Pressure substitute apparatus for high temperature - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention transmits the pressure of the high-temperature fluid to the low-temperature fluid when detecting and measuring process variables such as the pressure, liquid level, differential pressure, and flow rate of the high-temperature fluid. Regarding a diaphragm pressure displacement device.

Generally, in a sensor that detects the pressure of a fluid, the temperature of the fluid that comes into contact with the sensor needs to be 100° C. or less due to the structure of the sensor. For this reason, conventionally, when detecting the pressure of a fluid of 100° C. or higher, a pressure displacement unit that isolates the high-temperature fluid from a pressure transmission medium and incorporates a seal membrane that transmits the pressure of the high-temperature fluid to the pressure transmission medium is used. and a diaphragm pressure replacer comprising the pressure transmission medium and a pressure transmission pipe section containing the pressure transmission medium is provided between the high temperature fluid and the sensor, and the pressure of the high temperature fluid is changed to the pressure transmission medium. The temperature of the pressure transmission medium near the pressure introduction port of the senna is usually controlled to be 100°C or less by guiding the pressure transmission medium to the sensor through the pressure transmission pipe section or the like and utilizing the heat radiation effect to the atmosphere in the pressure transmission pipe section. It is being said.

The diaphragm pressure displacement device may be configured as a multiple pressure displacement device in which two or more pressure displacement devices are connected in series in consideration of process conditions, heat resistance of the sensor, and the like. The conventional technology will be explained in detail below with reference to figures, but since the method of using a diaphragm pressure displacement device is the same for measuring high-temperature fluid pressure, liquid level, differential pressure, flow rate, etc., here we will only measure liquid level. An example will be explained below.

FIG. 1 is a configuration diagram showing an example of the installation of a liquid level measuring device using a diaphragm type multiple pressure displacement device, which is conventionally used in a high-temperature process of an atomic coupler.

In FIG. 1, 400 is a tank containing a high-temperature liquid to be measured 401, 402 is the vapor of the liquid to be measured 401, and the liquid level H is the valve 403, 404 that adjusts the inflow and outflow of the liquid 401. Changes depending on the operation. 40
5 is a low-pressure side pressure take-out part that is equipped with a 7-lunge 406 and takes out the pressure of the steam 402 (low-pressure side pressure) to the outside of the tank 400;
05' is a high-pressure side pressure extraction part that is equipped with a flange 40'6' and extracts the pressure at the bottom of the liquid column H (high-pressure side pressure) to the outside of the tank 400;
and 16, a low pressure side first pressure replacer having a seal membrane and an eleventh pressure transmission medium inside; 2o is a pressure transmission pipe section 2;
a low-pressure side second pressure displacer having seven flanges 22 and 26 at both ends of the 4 and having a sealing membrane and a second pressure transmission medium therein;
3o is a low-pressure side third pressure replacer which has seven flange 32 at one end of pressure transmission pipe part 34 and has a third pressure transmission medium inside;
10'.

20' and 30' are a first pressure replacer and a second pressure replacer on the high pressure side having the same configuration as 10 and 20.30, respectively.

This is the third pressure displacement device. the low pressure side pressure outlet 405;
Low pressure side first pressure replacer 10. Low pressure side second pressure replacer 20
．． The third pressure displacement device 3o on the low pressure side is sequentially connected by flange connection, and the end of the pressure transmission pipe section 34 on the opposite side from the 7 flange 32 is connected to the low pressure side pressure introduction port 51 of the liquid level detection sensor 50, In addition, the high pressure side outlet 405', the high pressure side first pressure replacer 10', and the high pressure side second pressure replacer 20
', the high-pressure side third pressure replacer 30' is connected to the pressure transmitting pipe section 34 of the pressure replacer 30' by a convex 7-lunge connection.
'The end opposite to the flange 32' is the liquid level detection sensor 5.
0 is connected to the high pressure side pressure inlet 51'. As a result, the low pressure side pressure outlet 4o5. Low pressure side pressure displacement device 10.
In the low-pressure side impulse path composed of 20 and 30, the pressure of high-temperature steam 402 is sequentially transmitted to the pressure transmission medium housed in each pressure replacer and replaced by the pressure of the medium. , the temperature of each pressure transmission medium gradually decreases along the low-pressure side impulse path due to heat radiation to the atmosphere, so that the pressure of the high-temperature steam 402 reaches the liquid level detection sensor 50 at an appropriate temperature (100 °C or less), that is, the pressure of the third pressure transmission medium, is introduced to the low-pressure side pressure inlet 51 of the sensor 50, and is also introduced to the high-pressure side pressure extraction part 405'.
, high pressure side pressure displacement lO'.

In the high-pressure side impulse path composed of 20' and 30', the pressure of the high-temperature liquid column H is lower than 100°0 in the same manner as in the low-pressure side impulse path. High pressure side pressure inlet 51 of sensor 50 as pressure
Conventionally, the liquid level H is measured by the sensor 50 based on the pressure introduced to the pressure introduction ports 50 and 50' in this manner.

Next, the pattern of the impulse in the pressure replacer will be explained, but the pattern of the impulse is the same in both the low-pressure side impulse path and the high-pressure side impulse path, and also that Since the same applies to any of the first to third pressure replacers in the present invention, the conduction pressure pattern of the second pressure replacer, which is closely related to the high-temperature pressure replacer according to the present invention to be described later, will be described below as a low-pressure The side impulse path will be explained.

FIG. 2 is a vertical cross-sectional view of the second pressure displacement device 20 on the low pressure side in FIG. 1 and the vicinity of both ends thereof. In the figure, the first
Parts having the same functions as those in the figures are given the same reference numerals. In FIG. 2, reference numeral 23 indicates a high temperature side that airtightly partitions the first pressure transmission medium 18 sealed in the first pressure replacer 10 and the second pressure transmission medium 28 sealed in the second pressure replacer 20. 22 is a sealing membrane, 22 is a high-temperature-side pressure displacement part formed by the seven flanges 22 and the high-temperature-side sealing membrane 23, and 21a is the high-temperature-side pressure displacement part formed by the recess of the flange 22 and the high-temperature side sealing membrane 23. An internal space 27 on the side of the low temperature side pressure/displacement section 25' of the high temperature side pressure displacement section 21 sealingly connects the pressure transmission medium 28 and the third pressure transmission medium 38 enclosed in the third pressure displacement device 30. 26 is a flange; 25 is a low-temperature side pressure displacement section consisting of the seven flanges 26 and the low-temperature side seal membrane 27;
5'a is the low temperature side pressure displacement part 25 formed by the recess of the 7 flange 26 and the low temperature side sealing film 27;
24 is a pressure transmission pipe section that communicates the internal spaces 21a and 25a with each other, and 28 is an internal space between the internal spaces 21a and 25a and the pressure transmission pipe section 2.
The second pressure transmission medium is sealed in one communicating cavity formed by the interior 24a of the high temperature side pressure displacement section 21, the low temperature side pressure displacement section 25, and the pressure transmission pipe section 2.
4 and the second pressure transmission medium 28 to form a low temperature side second pressure replacer 2
0 is configured.

Therefore, the pressure of the first pressure transmission medium 18 is replaced by the pressure of the second pressure transmission medium 28 via the high temperature side seal membrane 23, and the pressure of the medium 28 is replaced by the third pressure through the low temperature side seal membrane 27. However, when the first pressure transmission medium 18 is at a high temperature, the heat of each pressure transmission medium is radiated to the atmosphere along the pressure transmission path.
The temperatures near the pressure transmission medium 18 and the second pressure transmission medium 28 in contact with the high temperature side seal membrane 23 are respectively T1 and T2, and the low temperature of both the second pressure transmission medium 28 and the third pressure transmission medium 38 is assumed to be T1 and T2, respectively. If the temperatures near the side seal film 27 are T3 and T4, respectively, T1≧T2>T3.
≧T4, and eventually the pressure of the high temperature fluid 18 is transferred to the pressure of the low temperature fluid 38.

It will be replaced.

Conventionally, pressure has been measured in the high-temperature process of an atomic coupler (7) as described above, and the second pressure transmission medium 20 is made of NaK (NaK), for example, in consideration of temperature etc. :, 22% by weight, KF 8% by weight)
However, with regard to the use of NaK, there are concerns that the reaction between NaK and water is intense, making it troublesome to seal it into the pressure replacer, and that it may cause damage to the pressure replacer. There is a problem that NaK is dangerous if it leaks outside, and the use of Hg has problems such as the well-known problem of pollution.

In a diaphragm-type pressure replacer that transmits the pressure of a high-temperature fluid to a low-temperature fluid, the pressure transmission medium sealed in the pressure replacer does not react with water, and even if it leaks out of the pressure replacer, there is no pollution problem. The purpose of the present invention is to obtain a high-temperature pressure replacer that is easy to manufacture and safe to handle, without the risk of causing problems such as The high-temperature side pressure displacement section of the pressure displacement device and the high-temperature section of the pressure transmission pipe section, both of which are in contact with the pressure transmission medium, are made of a material that is corrosion resistant to GaIn alloy. Alternatively, this can be achieved by means as described below, such as forming a vapor deposited film of a material that is corrosion resistant to GaIn alloy on the surface in contact with the pressure transmission medium.

Next, embodiments of the present invention will be described in detail based on the drawings, but the method for using the high temperature pressure replacer according to the present invention can be applied to any measurement of process pressure, liquid level, differential pressure, flow rate, etc. In addition, the same applies to both the low-pressure side lead-out route and the high-pressure side lead-out route in the case of the differential pressure type liquid level measurement method as shown in Fig. 1, so below we will mainly explain the differences in the differential pressure type liquid level measurement method as shown in Fig. 1. The low voltage side impulse path 1 will be explained below.

FIG. 3 is a longitudinal cross-sectional view of a high-temperature pressure replacer and the vicinity of both ends thereof showing one embodiment of the present invention, and FIG. 4 is a high-temperature side pressure displacement section of a high-temperature pressure replacer showing another embodiment of the present invention. FIG. 5(a) is a longitudinal sectional view of the high temperature side pressure displacement part of a high temperature pressure displacement unit and its vicinity showing still another embodiment of the present invention, FIG. 5(b) 5(a) is an enlarged vertical sectional view of the main part S in FIG. 5(a), and in each drawing, parts having the same functions as in FIG. 2 are given the same reference numerals as in FIG. 2.

In FIG. 3, the 7 flange 22 is composed of an external 7 flange 221 and an internal 7 flange 222 that is fitted into the recess 21bJ of the 7 flange 221 and welded W1 to the 7 flange 2211 at the periphery. The high-temperature side sealing film 23 has an inner sealing film 232 welded W2 to the inner flange 222 at the periphery, and an outer sealing film 231 welded W3 to the outer 7 flange 221 at the periphery. It has an overlapping structure, and the inner seal membrane 232 and the inner flange 222
The high temperature side pressure displacement section 21 is constituted by the cavity 21a surrounded by the above, the high temperature side sealing film 23, and the flange 22. The pressure transmission pipe section 24 is an external pressure transmission pipe 24
1 and an internal pressure transmission pipe 242 fitted therein, and after the internal pressure transmission pipe 242 is passed through the flange 26, the periphery of its end is welded to the flange 26 (
W4) Yes. The low temperature side seal membrane 27 is welded (W5) to the flange 26 at the periphery, and the space 25 surrounded by the seal membrane 27 and the flange 26 is
a, the seal membrane 27, and the seven flanges 26 constitute a low-temperature side pressure displacement section 25.

In FIG. 3, the portion consisting of the outer 7 flange 221, the outer pressure transmitting tube 241, and the flange 26, and the portion consisting of the inner 7 flange 222 and the inner pressure transmitting tube 242 are each made of one piece of material. However, the parts 221, 241, 26, 222, and 242 may be manufactured separately and then formed into the structure shown in FIG. 3 by means such as welding, or The two parts may be combined and formed from one piece of material.

In this case, 28 is a GaIn alloy (GaNia 5 .5% by weight, In224.5
% by weight, melting point: 15.7°C).

Outer seal membrane 231. External 7 langes 221. The external pressure transmission pipes 241, 7, the 7 langes 26, and the low-temperature side seal membrane 27 are all made of commonly used materials such as 5U8316, but the portions in contact with the GaIn alloy, that is, the inner seal membrane 232. Both the internal flange 222 and the internal pressure transmitting tube 242 are constructed of a material that is resistant to corrosion relative to the GaIn alloy, such as Kuntal or tungsten.

In FIG. 3, since the pressure replacer is constructed as described above, when transmitting and replacing the pressure of high-temperature fluid using this pressure replacer, the high-temperature side pressure replacement part 21 and the pressure transmission pipe part Even if 24 reaches a high temperature, the portion in contact with the GaIn alloy will not be corroded by the alloy,
In addition, the GaIn alloy has the above 5U831 at low temperature.
6 etc., the 7 flange 26 and the low temperature side sealing film 27 in contact with the Ga In alloy in the low temperature side pressure displacement section 25, which becomes low temperature due to heat radiation from the pressure transmission pipe section 24 etc. to the atmosphere, are made of the alloy. It will not be corroded by Welding Wl, W2. W3 is performed in the order of this number, but in particular, since W3 is electron beam welding, there is a vacuum state between the outer seal film 231 and the inner seal film 232. There are no problems with the pressure transmission characteristics of Furthermore, since the GaIn alloy does not react with water, it is easy to seal the alloy in a pressure displacement device, and even if the alloy leaks due to damage to the pressure displacement device, it is safe. There is no risk of causing pollution problems.

In FIG. 4, the outer seal membrane 231 and the inner seal membrane 232 are initially welded W2 in a flat state as shown in FIG. After W3 is performed, the films 231 and 232
The seating surface 222 is pressed all at once against the seal membrane seating surface 222a which has been formed into a corrugated shape in advance.
The same waveform as a (;600 is formed,
Because of this waveform 600, the pressure transmission characteristics of the seal membrane 23 are improved compared to the case shown in FIG.

In FIG. 5, 22 is the 7 lunge 221 and the 7 lunge 2.
21 is fitted inside and welded W around the 7 flange 221, and a ring 223 is welded to the ring 223 around the 7 flange 22. The high-temperature side pressure displacement section 21 is constituted by the single-sheet sealing film 23 subjected to W9. Fula/J221. ') The constituent materials of the 7-gage 223 and the seal membrane 23 are commonly used materials, such as 5U8316. Flange 221
Materials that are corrosion resistant to GaIn alloys, e.g.
An internal pressure transmission pipe 242 made of tantalum or tungsten is penetrated, and after the transmission pipe 242 is welded (W8) to the seventh flange 221 around its end, the surface of the side surface 221b of the flange 221 and the sealing membrane are welded. A vapor deposited film 224 of a material that is corrosion resistant to GaIn alloy, such as tantalum or tungsten, is continuously formed on the surface of the seating surface 221a by vacuum evaporation or sputtering. Surface 23 of the seal membrane seating surface 221a side of the surface and seal membrane 23
After welding W9 is performed on the exposed surface, a vapor deposited film 233 of a material that is corrosion resistant to GaIn alloy, such as tantalum or tungsten, is continuously formed on both sides by vacuum evaporation or sputtering. Welding WIO is performed after the vapor deposited films 224 and 233 are formed, respectively.
, 7 by fitting the flange 221 into the ring 223.

FIG. 6 is a longitudinal sectional view showing a different embodiment from FIG. 3 of the high temperature pressure replacer according to the present invention, which replaces the pressure of the directly measured fluid, and FIG. 7 shows a low temperature side pressure replacer. FIG. 3 is a longitudinal cross-sectional view showing still another embodiment of the high-temperature pressure replacer according to the present invention, which is built into a sensor, and in each drawing, parts having the same functions as in FIGS. 1 and 2; are given the same reference numerals as in FIGS. 1 and 2.

FIG. 6 shows a configuration in which the high temperature side pressure displacement part 21 of the pressure displacement device 20 according to the present invention is directly connected to the low pressure side pressure outlet 405 of the process, omitting the first pressure displacement device 10 in FIG. Therefore, it is possible to reduce the cost compared to bromo.

In FIG. 7, the configuration in which the high temperature side pressure displacement section 21 is directly connected to the low pressure side pressure outlet 405 of the process is the sixth
Although it is similar to the figure, the pressure transmission pipe section 24 is connected to the pressure inlet 51 of the differential pressure type sensor 50 by means not shown in the figure. 28 is GaIn as a pressure transmission medium
alloy, 56 is a liquid sealed in the sensor 50, 27 is G
The aIn alloy 28 and the filled liquid 56 are airtightly partitioned by GaI.
a sealing membrane that transmits the pressure of the n-alloy 28 to the filled liquid 56;
7 is a sealing film 2 inside the case 58 of the sensor 50.
The pressure receiving chamber 7 is fixedly installed and is sealed in the cavity of the GaIn alloy 28. Although not shown in FIG. 7, the pressure on the high pressure side of the process is also led to the sealed liquid 56' of the differential pressure type sensor 50 in the same manner as in the low pressure side pressure path. As a result, the sensor 50 is made of GaIn alloy 28
The measuring diaphragm 52 detects the pressure difference between the pressure of the sealed liquid 56 transmitted from the GaIn alloy 2g through the sealing membrane 27 and the pressure of the sealed liquid 56' transmitted from the GaIn alloy 2g through the sealing membrane 27'.

Therefore, if the high-temperature pressure replacer according to the present invention is applied to the configuration shown in FIG. 7, the measurement system will be simpler than that shown in FIG. 6, and it will naturally be possible to further reduce costs.

As explained above, in the high temperature pressure replacer according to the present invention, the pressure transmission medium is a Galn alloy that does not react with water and is stable even in the atmosphere, and the surface that is in contact with the alloy and becomes high temperature is used as the pressure transmission medium. The pressure displacer according to the present invention is made of a material that is corrosion resistant to the alloy, and in some cases has a corrugated sealing membrane with a stacked structure.
Even if the temperature of both the high-temperature side pressure displacement part and the high-temperature part of the pressure transmission pipe part is within a wide temperature range of about 20'C or more, will the surface in contact with the Galn alloy be the same? Therefore, there is an effect of accurately replacing and transmitting the pressure of the high temperature fluid without corrosion, and the present invention also has the effect that the high temperature pressure replacer is easy and safe to manufacture and handle.

[Brief explanation of the drawing]

Figure 1 is a configuration diagram showing an installation example of a liquid level measuring device using a conventional diaphragm type multiple pressure displacement device, and Figure 2 is a vertical cross-sectional view of the second pressure displacement device on the low pressure side in Figure 1 and the vicinity of both ends thereof. ,
FIG. 3 is a longitudinal cross-sectional view of a high-temperature pressure replacer and the vicinity of both ends thereof showing one embodiment of the present invention, and FIG. 4 is a high-temperature side pressure displacement section of a high-temperature pressure replacer showing another embodiment of the present invention. FIG. 5(b) is a longitudinal sectional view of the high temperature side pressure displacement part and its vicinity of a high temperature pressure displacement unit showing still another embodiment of the present invention. FIG. 5(a) is an enlarged vertical cross-sectional view of the main part S, FIG. 6 is a vertical cross-sectional view showing a different embodiment from FIG. 3, and FIG. 7 is a low-temperature side pressure displacement part built into the sensor. It is a vertical cross-sectional view showing an embodiment of the pressure displacement device according to the present invention, which has the following configurations: 10.10'... first pressure displacement device, 12.12'...
・Flange, 14.14'...first pressure transmission pipe section, 1
6.16'...7 langes, 18...first pressure transmission medium, 20.20'...second pressure displacement device, 21.21'
...High temperature side pressure displacement part, 22.22'...7 lunge, 23...High temperature side cool membrane, 24.24'...Second
Pressure transmission pipe section, 25.25'...low temperature side pressure displacement section,
26.26'...flange, 27', 27'...low temperature side seal membrane, 28.28'...second pressure transmission medium,
30.30'・Third pressure replacer, 32.32'...Flange, 34.34'...Third pressure transmission pipe section, 38...
- Third pressure transmission medium, 50...Liquid level detection sensor, 51
．． 51'...Pressure inlet, 52.Measuring diaphragm,
53...Floating diaphragm, 54.Housing, 55...Insulator, 56.56'...Filled liquid, 5
7.57'...pressure receiving chamber, 58...case, 221.
...External 7 lunges, 222...Internal 7 lunges, 223
...Ring, 224...Vapour-deposited film, 231...Outer sealing film, 232...Inner sealing film, 233...Coating film,
241... External pressure transmission pipe, 242... Internal pressure transmission pipe, 400... Tank, 401... Liquid to be measured,
402...Steam, 403.404...Control valve, 40
5,405'...Pressure extraction part, 406,406'...
・7 ranges, T1 to T4...Temperature, Wl to W
IO...Welding part. +1 (3) Sai2 Figure t3 (¥1 Sai5 Seki (o) (b)

Claims (1)

[Scope of Claims] 11) A high-temperature side pressure displacement section that transmits the pressure of the high-temperature fluid to the pressure transmission medium via a high-temperature side seal membrane that airtightly partitions the high-temperature fluid and the pressure transmission medium, and the pressure transmission a low-temperature-side pressure displacement section that transmits the pressure of the pressure transmission medium to the low-temperature fluid via a low-temperature-side seal membrane that airtightly partitions the medium and the low-temperature fluid; and a low-temperature-side pressure displacement section of the high-temperature side pressure displacement section. a pressure transmission pipe section that communicates an internal space on the side with an internal space on the high temperature side pressure displacement section of the low temperature side pressure displacement section, the low temperature side pressure displacement section of the high temperature side pressure displacement section; The pressure sealed in one communicating cavity formed by the internal cavity on the side of the pressure displacement part, the internal cavity on the side of the high temperature side pressure displacement part of the low temperature side pressure displacement part, and the internal cavity of the pressure transmission pipe part. A pressure displacement device for high temperature use, characterized in that the transmission medium is a GaIn alloy. 2. In the pressure displacement device according to claim 1, the surfaces in contact with the pressure transmission medium of both the high temperature side pressure displacement part and the high temperature part of the pressure transmission pipe part are made of a material that is corrosion resistant to GaIn alloy. A high-temperature pressure displacement device characterized by having the following. 3) In the pressure replacer according to claim 1,
A high-temperature pressure displacement device characterized in that the high-temperature side seal membrane has an inner seal membrane made of a material that is corrosion resistant to Galn alloy superimposed on the side of the seal membrane that contacts the pressure transmission medium. 4) In the pressure replacer according to claim 3,
1. A high-temperature pressure displacement device characterized in that an outer seal membrane and an inner seal membrane constituting a seal membrane having a stacked structure are formed in the same waveform as a seal membrane seating surface which is subjected to a waveform processing. 5) A high-temperature pressure replacer as set forth in claim 2 or 3, characterized in that tantalum or tungsten is used as a corrosion-resistant material for the GaIn alloy.