JPS5821878U - LSI inspection equipment - Google Patents
LSI inspection equipmentInfo
- Publication number
- JPS5821878U JPS5821878U JP11445281U JP11445281U JPS5821878U JP S5821878 U JPS5821878 U JP S5821878U JP 11445281 U JP11445281 U JP 11445281U JP 11445281 U JP11445281 U JP 11445281U JP S5821878 U JPS5821878 U JP S5821878U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- operating rod
- compression spring
- main body
- fitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第３図は本考案の実施例を示し、第１図は使
用中の状態を示した縦断面図、第２図は使用時の取付け
る寸法の状態を示した縦断面図、第３図はコネクタを省
略した使用中の状態を示した斜視図である。第４図は本
考案の実施例におけるプローブ・ユニットの分解斜視図
である。 −１は本体、２は鍔、６はコーナ・ガイド
、７は貫通孔、８は中空部、９は嵌合孔、１０は原動カ
ム、１２は操作棒、１３は圧縮バネ、１５は摘み、２０
は固定軸、２１は従動カム板、２２は作動板、２３はプ
ローブ・ユニット。
２ −−−−
Ｎ ＥＷ侶
２８ ノｆ１１）
９１０
ｉ！３ 口
１ ＼ ＸＸ
４３５２８３１Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a vertical sectional view showing the state in use, Figure 2 being a vertical sectional view showing the mounting dimensions in use, FIG. 3 is a perspective view showing the state in use with the connector omitted. FIG. 4 is an exploded perspective view of the probe unit in the embodiment of the present invention. -1 is the main body, 2 is the collar, 6 is the corner guide, 7 is the through hole, 8 is the hollow part, 9 is the fitting hole, 10 is the driving cam, 12 is the operating rod, 13 is the compression spring, 15 is the knob, 20
2 is a fixed shaft, 21 is a driven cam plate, 22 is an operating plate, and 23 is a probe unit. 2 ---- N EW 28 no f11) 910 i! 3 Mouth 1 \XX 4352831
Claims (1)
直交する水平方向の貫通孔を穿設し上部に鍔を形成した
概略中空円筒状本体の前記赤道孔と中空部が交わる位置
に嵌合孔を設け、該嵌合孔には上下に摺動可能な下部に
鼓形をした原動カムを設けた操作棒を嵌挿し、該操作棒
の外周の本体中空部に圧縮バネを挿入すると共に、該圧
縮バネを下端面で圧縮し得る摘みを前記操作棒上部に螺
装した操作部と、前記原動カムの上下動により貫通孔を
横切る固定軸を支点とした揺動運動をするような各貫通
孔を挿通する従動カム板に垂設された作動板に各々プロ
ーブ・ユニットを取付けた作動部とから、なるＬＳＩ検
査装置。A corner kite is provided on the lower end surface, horizontal through holes perpendicular to the front, back, left, and right of the lower part are bored, and a flange is formed on the upper part of the main body.The body is fitted into a position where the equatorial hole intersects with the hollow part. A hole is provided, an operating rod having a drum-shaped drive cam at the bottom that can slide up and down is fitted into the fitting hole, and a compression spring is inserted into the hollow part of the main body on the outer periphery of the operating rod, an operating section having a knob that can compress the compression spring at its lower end surface screwed onto the upper part of the operating rod; and each through hole that swings about a fixed shaft that traverses the through hole due to the vertical movement of the driving cam. An LSI inspection device consisting of an actuating section in which a probe unit is attached to each actuating plate that is vertically installed on a driven cam plate that is inserted through a hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11445281U JPS5821878U (en) | 1981-08-03 | 1981-08-03 | LSI inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11445281U JPS5821878U (en) | 1981-08-03 | 1981-08-03 | LSI inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5821878U true JPS5821878U (en) | 1983-02-10 |
Family
ID=29908728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11445281U Pending JPS5821878U (en) | 1981-08-03 | 1981-08-03 | LSI inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821878U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213872A (en) * | 1984-03-19 | 1985-10-26 | アイ・テイー・インダストリーズ、インコーポレーテツド | Chip carrier test adapter |
-
1981
- 1981-08-03 JP JP11445281U patent/JPS5821878U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213872A (en) * | 1984-03-19 | 1985-10-26 | アイ・テイー・インダストリーズ、インコーポレーテツド | Chip carrier test adapter |
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