JPS58209167A - Amorphous silicon solar battery - Google Patents

Abstract

PURPOSE:To facilitate the taking out of lead while reducing contact resistance by a method wherein, when the first electrode of transparent conductive film, amorphous Si layer, and ohmic second electrode are provided on a transparent substrate to produce a solar battery, the second electrode is formed into a double layer construction comprising Ni layer and Mo, Ti, W, Ta etc. located under the Ni layer. CONSTITUTION:A transparent insulated substrate 21 such as glass etc. wherein light enters is coated with the first electrode 22 comprising a transparent conductive film and then an amorphous Si layer 23 made of PIN is formed on the first electrode 22. Next an ohmic second electrode is to be provided on the amorphous Si layer 23, however said layer 23 is firstly coated with a layer 25 comprising such metals as Mo, Ti, W, Ta etc. around 500Angstrom thick as a primer layer and then an Ni layer 24 exceeding 5,000Angstrom thick is provided on the layer 25 as the second electrode. Through these procedures, the taking out of the lead from this electrode 24 may be facilitated with the ohmic property remarkably improved while reducing the contact reistance since there is the layer 25 comprising Mo, etc. between the Si layer 23 and the Ni layer 24.

Description

[Detailed description of the invention] [4F technical field of the invention] Hontakuma is a thick 4-inch film using amorphous silicon T-
1 plum.

[Prior art and the gap]

Photovoltaic power sources such as Juei's Tai 44 Pond and Hikari Yokoide 4,
It is possible to convert the celestial rays into ``Kei energy'', but as a point between these two points, the bending is extremely difficult compared to other ``Ki energy generation'' steps. I can say something big. The cause of this is that the ↑ body cut 4 of the semiconductor material that makes up the main body is low, and the 11
11i pickling cost is high 1 t/l. Muchika amorphous silicon is considered to be a semiconductor material that can solve these problems. In other words, amorphous 7 Lico/Fu generates plasma from glow emission of silicon compound gas such as 7 Lan or Fluoran.
Since it can be produced directly from gas raw materials, and the benefit in terms of disposal is extremely low compared to the production of medicinal crystal materials, it has become popular in towns and cities to use So, there it is.

However, +rj : * =
There is x. Figure 1 is the Tathagata's amorphous silico/thick 1l.
It is a schematic diagram of an example of a pond II. 11 is a counterfeit board, 12 transparent conductive electrodes are used for #1, 13 is r-morph American silicon In, 14d- & 41+IIt.
I The second T-takuderori-ominori made of aluminum.
t−i,=ke also has a predetermined bond formed in the rmorphous silicon 71113 in the thickness direction. According to this -
The second electrode 14, in which r is divided by an ohmic quadrature of rfus silicon + 113, is made of aluminum, and the first period aluminum is formed by, for example, sputtering or straw deposition. However, this aluminum and amorphous silicon (have good ohmic properties and 'Llttt' in general! (contact resistance is large. Also, it is difficult to attach 1/V for lead → extraction). The drawback is j)ro.@
Although chromium is used to reduce the contact resistance as described in No. 71, it has drawbacks such as dust and pollution at just one turn of Kuhamuna High School. In addition, -r aluminum has the property of being easily amenable, and with the addition of the 4 degree rise when aluminum is formed, the expansion of ML in amorphous silicon may worsen the temporality and cause the first problem. 1. What are you doing about the short circuit with 41141t4?

[Purpose of deterioration]

Doshiaki was probably made with Toru in mind,
It simplifies the removal of one lead wire, improves the lead rate, reduces the contact resistance between amorphous silicon and metal 4*, and makes it possible to provide amorphous silicon with different characteristics. Deromo.

[Summary of the invention]

The present invention is rMorphson Recon! - The above object is particularly achieved by constructing the upper ohmic polarization with molybdenum or the like and nickel.

[Effect of recitation]

Since the VC of the present invention uses nickel, lead extraction can be easily performed.
1 ~ By inserting molybdenum into i5 with amorphous silicon, the ohmic property is improved, the contact resistance is reduced, and the problem of metal expansion into the amorphous silicon is also eliminated, making it possible to You can improve the characteristics of Kaiike.

[Embodiments of the invention]

Time-interruption model of the l-transportation sequence according to the present activity Mei 1. 1. Total IL 2. Acceptable at the threshold. 21 is a translucent insufficiency board such as glass. 22 is 11
['J1f) Onλ no Hide” 1J-4i; Mo ([rO)
6・ra1'2rum l'1t41 te4 rl,F
Ugly K 5 o O'<)lJl+7) Mo+)-1den(+4o)4 rli is lost and Vh is also lost. Here, amorphous series 1y 4 dn run K F32
1 (6, Pt13
4.150λ P4.1-4th order of 5000 shaku (Hede 5o
Forms n- of o'l- and lacks. This mausoleum, :W(O next 0 and N
't'l M~l 50'017) Tear 7 in Ar gas
) X formed with Hano4'-. This is sushi (1r of shrimp is also close).

□Sometimes 6 yen is required for 4 storeys where you can put on a hat directly.
There was a relatively small amount of water in the atmosphere, and there were 4 warehouses with iJi・t.
The lead is made by dry etching (remove the chamber body 4 on the op side. While heating the plate to 100°C, add half a ton of lead (Cu) to nickel.
I got it.

Huh, #! By using d/dium-tin or indium-lead-tin, the expansion of the 4E material can be prevented, and the cube characteristic of Shaku JII 4 can be prevented. ζL and half lB were attached, and it was 6 and t. rE1'J
% If nickel is used as it is, it will have poor ohmic properties with amorphous/sun, resulting in deterioration of characteristics.
Due to poor adhesion, it may peel off and feel like l:
L Yuko for having IJ Budden inserted 4 shi
4. In this example, molybdenum is inserted to reduce the contact resistance, reduce contact resistance, and prevent peeling.
As mentioned in 1c, titanium (['i), tangsude/~
■You can also obtain If1's youthful height with tantalum ('ra).

4,! Nozomi Nae's side Torakari Kaoru 1 91J It's conventional amorphous silicon containing 4. tlt12C:) Dust with the place number showing 1 column,
・Figure 2 is a cross-sectional view showing the amorphous silico/Taiba 4 pond of 4 cases of 1st life according to Honbatsugetsu Shide. ,・41 Here, 21...Transparent insulation + ξ plate, 22...Transparent conductor (@1 Bakoshi), 23...Amorphous silicon-1, z4...Nickel (second Electrode), 25...Molybdenum (I-Kin2).

Claims (1)

[Claims] Looking at the amorphous 7-recon board, in which the second It pole, which is the first pole made of a transparent conductor, was sequentially formed on the blue-light-emitting resistant plate, the 21st wax was applied. A morphous silicon material made of molybdenum, titanium, tungsten or tantalum with a nickel base.