JPS5820775U - 流量制御装置 - Google Patents

流量制御装置

Info

Publication number
JPS5820775U
JPS5820775U JP11605381U JP11605381U JPS5820775U JP S5820775 U JPS5820775 U JP S5820775U JP 11605381 U JP11605381 U JP 11605381U JP 11605381 U JP11605381 U JP 11605381U JP S5820775 U JPS5820775 U JP S5820775U
Authority
JP
Japan
Prior art keywords
pressure
valve
pressure chamber
response
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11605381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350533Y2 (enrdf_load_stackoverflow
Inventor
小島　義
和彦 村田
一夫 関
健太郎 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP11605381U priority Critical patent/JPS5820775U/ja
Publication of JPS5820775U publication Critical patent/JPS5820775U/ja
Application granted granted Critical
Publication of JPS6350533Y2 publication Critical patent/JPS6350533Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Feeding And Controlling Fuel (AREA)
JP11605381U 1981-08-04 1981-08-04 流量制御装置 Granted JPS5820775U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11605381U JPS5820775U (ja) 1981-08-04 1981-08-04 流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11605381U JPS5820775U (ja) 1981-08-04 1981-08-04 流量制御装置

Publications (2)

Publication Number Publication Date
JPS5820775U true JPS5820775U (ja) 1983-02-08
JPS6350533Y2 JPS6350533Y2 (enrdf_load_stackoverflow) 1988-12-26

Family

ID=29910296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11605381U Granted JPS5820775U (ja) 1981-08-04 1981-08-04 流量制御装置

Country Status (1)

Country Link
JP (1) JPS5820775U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6350533Y2 (enrdf_load_stackoverflow) 1988-12-26

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