JPS58201380A - Cooling type photoelectric converter - Google Patents

Abstract

PURPOSE:To obtain the small and high reliable titled device by a method wherein a photoelectric converter element is supported on the vacuum side of the inside tube of a cooling vessel having dual structure, and circuit elements for protection of the element are arranged on the vacuum side of the conductive film patterns of a ceramic terminal plate being sealed traversing an outside tube wall. CONSTITUTION:The photoelectric converter element 7 is set up on the base 5 of the inside tube 2, and an infrared rays transmitting window 9 is sealed facing to the element 7 to the outside tube 3. The annular disk type ceramic terminal plate 10 is sealed intersecting the outside tube 3. The Au film patterns 11 on the plate surface and the photo acceptance elements of the element 7 are connected with lead wires 13, and moreover the thin film resistance elements 12 are arranged in series respectively on the vacuum side. According to this construction, the inflow of an overcurrent from lead terminals 14 to the element 7 can be prevented surely. By the function of the L-P-L formed by floating capacitance among the resistances 12, the Au patterns 11 connected thereto and the terminal plate 10, the crest value of a spike voltage can be reduced, and the element 7 can be protected against the application of an overvoltage.

Description

[Detailed Description of the Invention] (a) Sharing of the Technology of the Invention The present invention relates to an improvement of a cooling type optical conversion device, and in particular to an optical conversion device mounted in a cooling device having a dewar structure. The present invention relates to the arrangement structure of circuit elements for use in the present invention.

(b) Prior art and problems Photoelectric conversion elements using infrared light or light from semiconductors are usually used in a state where they are cooled to about the elementary temperature of the casing (approximately 77″K). The photoelectric conversion device W1 for infrared detection uses an adiabatic cooling container with a dewar structure consisting of an inner tube, an inner tube, and an outer tube. A nine electric conversion element for red Y-ray detection is installed on a cooling base placed in the opposing inner tube, and a liquid refrigerant such as liquid nitrogen is stored in the inner tube of the cooling container, or a Joule-Thomson type A cooler is installed to cool the Moeki conversion element to a predetermined low temperature and operate it.

On the other hand, in the case where the conversion element is a multi-element type, the signal output from the photoelectric conversion element in the above-mentioned configuration gc is carried out by scattered lead wires via a relay terminal board arranged at the IIIi11+i1 part of the conversion element. It is taken out from the conductive film pattern individually led out of the tube on the ceramic terminal plate in the shape of a circular disc made of cedar that crosses a part of the outer tube. Unexpected leakage overcurrent or self-ignition voltage due to static electricity or the like is unexpectedly applied to each end of the guided Wt expansion pattern led out of the tube individually, and the light [conversion In order to prevent the element from being destroyed, a current limiting resistor for protection may be arranged in series, or a P1N diode or the like for voltage control may be arranged in parallel with the current mya resistor arranged in series. It is set up.

However, as mentioned above, if a circuit element consisting of a resistor for the photoelectric conversion element, a PIN diode, etc.
In the case of a configuration in which the conductive spiral membrane is individually led out to the outer tube on the terminal board, *t1 marked 4fIi led out separately on the ramic terminal board There is a risk that excessive current or excessive voltage may be applied directly to the conductor pattern area between the outer circumferential wall of the outer tube and the MiJ circuit element arrangement area in the expansion pattern, and the protection circuit element in the no. There was a drawback that the effect of the arrangement configuration could not be fully demonstrated.Also, by arranging the protective circuit element on the outer circumferential side of the cooling device, the circuit scale increases, and the This is also one of the reasons for hindering miniaturization.

(C) f@Aim of the present invention The purpose of the present invention is to eliminate the above-mentioned conventional drawbacks by providing a current limiting resistance element and PIN for protection of the photoelectric conversion element.
Diode, etc.) Ranaru times & I? 1. The circuit element is placed in an insulated cooling container to ensure that the circuit element has a protective effect. .

(d) @Ming structure In order to achieve the above object, the cooling type photoelectric conversion device W of the present invention
1 is mainly composed of a cooling container with a dewar structure consisting of an inner tube and an outer tube, and the vacuum space of the inner tube is
In addition to supporting the optical conversion element, the lead mark of the optical conversion element is airtightly led out through a conductive film pattern on the ceramic terminal plate sealed in a cross-section across a part of the optical conversion element. In this configuration, V) a circuit element for protection against the electric power conversion element described in H is arranged on the terminal plate described in 1. It is characterized by the fact that

(e) Practical Examples of the Invention Examples of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a longitudinal cross-sectional view showing an example of a cooled photoelectric conversion device for infrared radiation detection to which the present invention is applied, and FIG. . In FIG. 1, reference numeral 1 denotes a dewar-structured cooling container consisting of an inner tube 2 and an outer tube W8 made of glass, and the space between them is evacuated through an exhaust gas 4. An infrared detection light is provided on the cooling base 5 disposed in the inner tube 2. An IT conversion element 7 is installed, and an infrared transmitting MK9 made of germanium or the like is sealed to the paper portion of the outer t8 facing the photoelectric conversion element 7. Further, an annular disc-shaped ceramic terminal plate 10 is sealed to a part of the outer wall 8 so as to cross the outer wall 8, as shown in the figure. As is clear from the square diagram of FIG. 2, on the surface of the ceramic terminal plate 10,
In the present invention, a conductive pattern 11 made of gold or the like is provided to connect to a light receiving element (not shown) with a number of films configured to Butterfly, IKΩ~IDKQf/!, which is enshrined by thick film or thin yIl technology, is placed on the vacuum side of the 1111-specific storm membrane pattern 11. A circuit element for protection against the above-mentioned light Wl switching element 7 of 4 degrees, that is, a resistance element ν
are arranged in series.

In this way, a protective resistor of χ・1 is placed on the charging conversion element 1-7, and the vacuum side 411 in the cooling container l is connected to the film pattern 11.
By configuring the photoelectric conversion element 7 to be arranged in series, a four-electron pattern 11 that can be led out of the tube is provided in the photoelectric conversion element 7.
And it is possible to reliably prevent and maintain undesirable overcurrent from flowing into the lead terminal 14.

In addition, such a resistor drying, the conductor MII11 pattern 11 connected to it, and the seven UMIC skin board lO
Since it is possible to lower the t11 value of the spike-like voltage by using a low-pass filter that generates a noise between When the '-pressure is applied, the uJ rudder is used to prevent the rudder from collapsing.

Figure #I8 is a partially enlarged plan view of the main parts of another terminal board according to the present invention, and the same parts as in Figure 2 are given the same reference numerals. The embodiment shown in Fig. 8 is different from the actual pond example shown in Figs. Resistance elements are disposed on the vacuum side of the conductive film pattern 11 on the mold side, and the conductive film pattern 11 and a charge conversion element 7 (not shown) disposed on the back side of the ceramic terminal plate 10 are connected to each other. The ceramic terminal plate 10 is connected between the substrate potential and a conductive electrode pattern that supplies the same potential.
For example, PIN diode chips 32 are arranged in parallel via the blanked through holes 31 by face-down bonding. The configuration of this embodiment also allows the above-mentioned first. Similar to the actual oil example shown in FIG. It is obvious that the object of the invention can be accomplished quickly.

(f) Explanatory power that exceeds the effect of the invention) As is clear, the cooled photoelectric change WIA device according to the present invention has a circuit element consisting of a resistance element for the body axis, a PIN diode, etc. for the light-conversion element. Since the configuration is such that the 4-electrode film is arranged in a four-electrode film pattern on the vacuum side ceramic plate space in the cooling container, undesirable overload is applied to the optical IM and conversion elements from the outside of the 1g device.
This has the advantage of being able to reliably prevent and protect the element from being destroyed by the inflow of 6L current or self-ignition voltage. In addition, there is no need to increase the size of the outer circuit of the cold TL II customer equipment, which forms the main body of the device.
11. Since the circuit elements for erasure are held in a vacuum, there are excellent results such as no damage caused by the environment around the device or external force, and the reliability of the surface mounting is improved. will improve.

[Brief explanation of drawings]

FIGS. 1 and 2 are longitudinal cross-sectional views showing an example of an infrared IftA detection light awakening device to which the present invention is applied, and its details.
-1f' is a cross-sectional view taken along the cut cicada, and FIG. 8 is a plan view of the IM section showing the eleventh embodiment of the seven optical conversion device for infrared detection to which the present invention is applied. In the figure, l is a cooling container, 2 is an inner bone, 8 is an outer tube 5 is a cooling base, 7 is an optically variable narrow element, 10 is a ceramic terminal plate, and I
I indicates a conductor 1'lU expansion pattern, 1 indicates a resistor element, 13 indicates a lead loop, 31 indicates a through hole, and a support indicates a PIN diode chip. 37 Figure 1 Figure 3 IyIA 378-

Claims (1)

[Scope of Claims] The main body is a cooling device with a dewar structure consisting of an inner tube and an outer tube, and a photoelectric conversion element is supported on the vacuum space side of the inner tube, and the lead wire of the photoelectric conversion element and the In a structure in which a ceramic terminal is sealed and suctioned across a part of the wall of the outer vessel and is airtightly led out through a conductive film pattern on the ceramic terminal plate, the vacuum of the conductive film pattern thereon is placed on the ceramic terminal plate. 1. A cooling type light converting device, characterized in that a circuit element ##J connected to the photoelectric conversion element is arranged at a side end thereof.