JPS58200509A - Method of regulating resistance value of thin film resistor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for adjusting the resistance value of a thin film resistor to a predetermined value with high accuracy.

Conventionally, the resistance value of a thin film resistor is adjusted by thermally cutting the thin film resistor with a laser or mechanically cutting it with sandblasting, and then measuring the resistance value with a measuring device. This was done by the so-called laser trimming method or sandblasting method, in which the material was adjusted to a predetermined value. However, these methods are unable to adjust the resistance to a predetermined value with high accuracy because of limitations in the cutting accuracy and measurement accuracy of the devices.

The present invention has been made in view of the above-mentioned points. A plurality of resistors/bodies whose resistance values are known in advance are provided in parallel with each other and connected by a cutting conductor. By cutting the cutting conductor, the overall resistance value is adjusted to a predetermined value.

Hereinafter, one embodiment of the present invention will be described based on the drawings.

Figure 1 shows the configuration circuit of a thin film resistor (ltJ) formed between the terminals (&l (B). This thin film resistor (RAB) is a resistor (Ro) (R
A thin film resistor (r) for adjustment is inserted in series between the resistors (r) and (o).

This thin film resistor for adjustment (r) is such that the (2n - 1)th resistor has a resistance value R, and the 'fH2nth resistor (xR) has a resistance value xR (x\l). The IJ1 series circuit which is alternately connected in series with
1) The th is the resistance (XR), and the Qznth is the resistance (xR)
The first series circuit and the second series circuit are connected in parallel, and the resistors (xR) having different resistance values are connected in parallel with each other. Cutting conductor (1) (2)...(n-1) at each connection point
).

The terminal (3) of the thin film resistor (RAB) formed in this way
) (8) The resistance value RAB is expressed by .

Terminal Wl (resistance value R between B1) when the first cutting conductor (1) is cut using a laser, sandblasting, etc.
AB 1 is represented by .

Therefore, the increase ΔR1 in the resistance value of the thin film resistor (RAB) due to cutting the first cutting conductor (11) is as follows.

Next, the resistance value RAT313 between the terminal (A) 031 when the 1.3rd cutting conductor (1) (31 is cut)
Since it is expressed as , the increment ΔR□ becomes.

Similarly, the 1st, 3.5th cutting conductor (1) (31+
The increase ΔR,3, when cutting 51 is as follows.

As mentioned above, the cutting conductor (11(3)...(2n
1) and 1 as a unit, it increases by the value multiplied by the number of cuts. Therefore, at the stage of setting the adjustment thin film resistor (rl), X and R are appropriately determined and the size of ΔR1 is set in advance. If this is done, it is possible to adjust linearly so that the resistance value increases by twice ΔR1 by appropriately selecting the number to be cut when adjusting the resistance value. Therefore, as shown in Figure 1. After forming a thin film resistor (RAB) as shown in Figure 3, the resistance value between terminals (A) and 031 was determined, and once the magnitude of the resistance value to be increased was determined, this resistance value was divided by ΔR. By cutting every other cutting conductor (11 (3) (51...) by the number of quotients, wA can be adjusted to a predetermined resistance value.

The accuracy of the resistance value at this time is determined by the magnitude of ΔR, and the values of violet and R, which determine this ΔR1, can be arbitrarily set at the design stage, so that m* can be obtained with high precision.

In the above embodiment, seven parallel circuits of adjusting thin film resistors (rl is two types of resistors (R) (xR) with different resistance values are connected in series, but the number is not limited to seven, of course. There is also a cutting conductor (11(2+...(n-
1) The case where the resistance value is adjusted by cutting every 11th needle is excluded, but this is not limited to this. Can be adjusted. - As an example, as shown in Fig. 182, n pieces of two types of resistors (R) (xR) D parallel circuits with resistance values B and xR are connected in series to form an adjustment thin film resistor r), and then cut. We will explain the case where the resistance value is adjusted by cutting the conductor (llf2+river(n-1)) one by one into a number. In this case, the resistance value RCD between terminals 1) and 2) is RCD = 2R.
o + n-R- (represented by force x+1.

Next, conductors for cutting (1), (2)...(n-1) and 1
Consider the resistance value RCDI~k between the terminals (C1<DJ) when cutting one by one from the th.

(a) RcD1~ when k is an odd number. Since it is expressed as , the increase in resistance value ΔZ1 is as follows.

#:I) When k is an even number, indulgence D1~...01j Therefore, the increase in resistance value Δz1~.

...0υ Therefore, if the cutting conductor (1) (2) ... (n-1) is cut in order from the 1st to the It can be adjusted so that it increases by the multiplied value.

Since the present invention is configured as described above, when the cutting conductor of the thin film resistor for adjustment is cut to adjust the resistance value to a predetermined value, the resistance value increased by the cutting is arbitrarily determined in advance at the design stage. Can be set. Therefore, unlike in the past, the limit of accuracy is not determined by the cutting accuracy or measurement accuracy of the device, and the adjustment accuracy can be adjusted arbitrarily at the design stage, making it possible to adjust the resistance value with high accuracy. Moreover, since it is a cutting operation, adjustment can be made extremely easily.

[Brief explanation of the drawing]

FIG. 1 is a structural circuit diagram of a thin film resistor showing one embodiment of a method for adjusting the resistance value of a thin film resistor according to the present invention, and FIG. 2 is a structural circuit diagram of a thin film resistor in another embodiment. (RAB)... Thin film resistor, (r)... Thin film resistor for adjustment, (R) (XR)... Resistance, (1) (2)
~(n-1) cutting conductor. Patent applicant: General Co., Ltd. Same as above.
Kano − Wandering

Claims (1)

[Scope of Claims] (1) Known resistors are provided in parallel with each other and connected in the middle with at least one cutting conductor to form an adjusting thin film resistor, and a predetermined number of the cutting conductors are cut. 1. A method for adjusting a resistance value of a thin film resistor, the method comprising: adjusting the resistance value to a predetermined value. (2. In claim 1, the adjusting thin film resistor is composed of a series circuit in which 1% IJ thin film resistors having different resistance values are alternately connected in series; A series circuit in which first and second thin film resistors are alternately connected in series in the reverse order is connected in parallel with each other, and the first and second thin film resistors are connected in parallel.
, the second thin film resistor is mutually 1. A method for adjusting the resistance value of a thin film resistor, in which one connection point and the other connection point of the two series circuits are connected by a cutting conductor so as to form an XE parallel connection. (3)! A method for adjusting a resistance value of a thin film resistor according to claim 2, wherein the cutting conductor of the adjusting resistor is cut by E cutting every other conductor to adjust the resistance value. (4) % Allowable Scope of Claims 'W112' states that the resistance of a thin film resistor is such that the cutting conductor of the adjusting thin film resistor is cut one by one in succession to adjust the resistance value. Value adjustment method.