JPS58200506A - Moisture sensitive element - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to a humidity element using a moisture-sensitive substance whose electrical resistance changes depending on humidity.

As for the cyclized lithium, it has been widely used for some time; however, in recent years, a few moisture-sensitive elements using oxidized metal have been produced. This metal oxide yarn moisture sensing element is superior to the above-mentioned lithium tetrachloride yarn p5+ moisture element in terms of the custom-made rE time change and the size of the relative and frequency ranges that can be produced during A. Shi〃shi, humidity water instep! e
Since A-moisture causes the formation of safe metal hydroxide on the surface of antibody 1-, which lowers the sensitivity, it is necessary to perform periodic heating cleaning. Therefore, as a precautionary measure, an indirect heating type heater is attached to such a metal oxide thread moisture sensing element, but this makes the structure unsightly, so it is difficult to A large quantity line remains at the @ point. Also, the adhesion between the substrate and the moisture-sensitive resistor layer may deteriorate during the hybrid cycle or the 1M counter cycle. It has been reported that cracks often occur in the resistor due to high humidity.
Custom-made excerpts from Kono (2) are also desired.

This invention eliminates the above-mentioned drawbacks and has a high sensitivity and stable moisture sensitivity over a wide range of phase kf and temperature. Therefore, it is 1 day '9 to eliminate the need for attaching a separate cleaning means, to increase the effectiveness of the cleaning process, and to provide a 14-voice product with an i-priced or G1-like feel.

That is, - this invention is a faithful resistor layer formed over a pair of opposing 11 layers formed on an insulating layer - containing 6 to 50 mol % of Li-containing figurine powder, and Mn0r.
204, Fe0r! 041Mn1Fe204, Mg
0r204N i (j r(There is C which is made of a sintered body of a composition consisting of 60 to 90 mol % of a compound powder of at least one oak from 04 and a vanadate compound powder.

The compound powder containing L1 in the above composition is as follows:
Li2O, Li2003, Li2TiO3, LiZr
Powders of at least one selected from O3, Li2W04L' i "J 03 ', + which group of compounds are used, and these are added as a source of L1 ions in the moisture-sensitive resistor layer. In that case: If the blending ratio is less than 5 mol %, the pressure sensitivity of the humidity sensitive element will be significantly reduced, and if it is more than 50 mol %, the effect of the hidden side of the tenon will be reduced.

L, T-The blending ratio of this compound powder is 5 to 50 mol%. Next, Mn0r204, Fe0ry04, MnF
e04, MgCr2O4, N i lj r204
If the blending ratio of at least one other compound bastwood contained in the compound is less than 50 mol %, the resistance to gradual collapse and wear resistance of the damping resistor to the outer substrate of the damping resistor will be reduced to 90 mol %. If the above is the case, Ibarakahaku#FJ of the compound Gaki as the above-mentioned ion story
or severely discouraged. Therefore, the compounding ratio of this compound powder is 60 to 90 mol%.

In addition, )<f zinc acid compound powder is added as a binder.
For example, 7205. vc, VN
, '1! *V2O6, M:nVl 06, etc. are used. And ■, 0. When using the above-mentioned two types of compound powders, the blending ratio is 5 to 5, which does not impede the purpose and is effective for fully binding the powders.
It is desirable to appropriately select the amount within the range of 0 mol%.

Next, to form the moisture-sensitive resistor layer, use a vehicle, a cellulose or an acrylic resin to form the moisture-sensitive resistor layer.
By adding a vehicle consisting of I, butyl carpitol acetate, TV book oar, etc., and mixing it with light using a roller or ball mill, it becomes a paste with a liquid viscosity. good.

This C') invention provides excellent linearity over a wide range of relative wetland loading, and also exhibits characteristics that are extremely stable when left unattended in high-humidity areas. No, also,
Because the custom-made image changes little over time, cleaning is almost unnecessary, and there is no need to install extra cleaning means such as indirect heaters as in the past.
This device can be manufactured using thick film technology. However, its mass production is suitable for 1d1i popularization, and has the advantage of high 1n value for industrial use.

Next, a detailed description will be given of the horizontal writing of the moisture-sensitive element of the present invention on one page.

Figure a1 shows the humidity sensing element of the present invention. In the figure, 11 is an insulating substrate made of ceramic or the like, 12 and 16. A pair of comb-shaped and opposing delicate grooves are formed in the lead-out portions 12b and 13b' of the electrodes 1z and 16, respectively.
In 5a, 1-4 is made of the sintered body mentioned above.
115B and 16, which are temporarily placed in the BE body 14, are electrodes C for receiving the electrodes 16 and 16 into the external leads 17 and 18, respectively. Figure 2 shows 2-2 in Figure 1.
'Blow the new lfO.

A moisture-sensitive element such as this is manufactured by, for example, the following method: First, an insulating substrate 11 on which a shade 15E and a groove 16 are provided in advance is used, and a comb-shaped VI is formed on the surface of the insulating substrate 11.
, = 12 and 15 by screen printing, and the electrodes are fired at about 850 to 950°C during one firing. Next, using the paste composition described above, the selection 412
Screen printing is performed with a uniform thickness so as to completely cover the main parts 12a and 13b of 16 to form a broken layer,
In order to maintain the adhesion between the insulating substrate 11 and the moisture resistance layer 14, the insulating substrate 11 and the moisture resistance layer 14 are fired in a firing oven, for example, at a temperature of 900 to 1200° C. under a moderate temperature. When this baked soap is cooled, the resistor skin 14 hardens and becomes a thick layer with excellent adhesion to the loquats 11 and a tight pore distribution. After this cooling - external leads 17 and 18? After installation, the shell was aged under humidity in a hematometrometer to stabilize its properties.

ε・In the above-mentioned 11th Aδ and the 2nd Apocalypse, in the case of Drunken Risunao and his Jyokariho 1 (tyu), in the 7th mind that temporarily places 12 and 16 of Sōgoku. Itchy resistance body J So 14
1 of this invention.
The moisture and humidity layer also includes one in which the formation order of both is reversed and a pair of electrodes 1 are formed on the moisture-sensitive low antibody layer, and an opposing four layer in which the moisture-sensitive resistor layer is formed into a sandwich shape with electrodes. do.

Next - a detailed explanation of the invention will be given.

Various types of romic acid and L
ii Compounds containing imitation powder δ and v205 imitation powder are mixed in a T-ball mill, and a vehicle consisting of ethyl cellulose, butyl carpitol acetate terpineol, and sword 1?
In addition, this composition was made into a paste-like composition with a uniform viscosity in an agate mortar. 415b and 16 Ag-Pa film poles are also used.Put the screen on the 415b and 16mm Ag-Pa film so that the film thickness is 0 to 1μ. Heating at 950'C'r to volatilize the vehicle components.
After cooking and cooling, heat at 60℃ with a 90% R13L iron.
A moisture-sensitive element was prepared according to the down-aging aging process and the /g method.

Table 2 below shows the values of the electrical resistance between the electrodes obtained in the iU2 example above, measured at 25° C. while changing the relative humidity of the measurement atmosphere.

Table 1 Table 2 Figure 86 shows the relationship between relative humidity and resistance for the representative samples shown in Table 2.
In Figure 6, for comparison, the characteristics of the conventional ○○@kakumono system/D coin 8 votes are also shown.

As is clear from Fig. 6, the above-mentioned 'Daishi mouth/7' nokimobo has higher sensitivity, linearity, and ambiguity over a wide range of relative humidity than conventional ones. - In particular, for Group 1 I in a high humidity atmosphere, the waiting Tg
, is shown. .

Furthermore, as is clear from the above yi5, this element can be easily produced using thick film technology.

[Brief explanation of the drawing]

FIG. 1 is a plane showing -1 of the moisture sensing element of the present invention.
Figure 1 is the 2-2' section of Figure 1 - Figure 6 1. There is a diagram C where you can beat the opposite wet horse and 1d or 1st opponent. 11... I as one substrate, 12.13... Opposing base of Myanmar (-114... J 4 moisture-mimicking antibodies Patent applicant: Tateishi stock tips

Claims (1)

[Claims] (1) In a humidity sensing element in which a pair of magnetic poles facing each other and a humidity sensing resistor layer extending between these two poles are formed on an insulating substrate, the humidity sensing resistor layer ≦, a compound powder containing Lii 6
~50 mol% and Mu(Jr204, Fe1Jr20
4, MnFe2O4, Mg0r204, Ni0r2
04 At least one compound powder selected from 60
90 mol % of a vanadate compound powder.