JPS5819739A - Thin film magnetic recording medium - Google Patents

Abstract

PURPOSE:To increase the strength of the film face, the corrosion resistance and the traveling performance of a thin film magnetic recording medium, by coating a solid lubricant, a specific metallic oxide, etc. simultaneously on a magnetic thin film formed on a nonmagnetic supporter by a sputtering process. CONSTITUTION:A ferromagnetic metal such as Fe, Co, Ni or their alloy is coated onto a nonmagnetic supporter such as a flexible nonmagnetic base made of polyethylene terephthalate, etc. by a vacuum vapor deposition process, an ion plating process, etc. Thus a magnetic thin film of 1- several hundreds Angstrom thickness is obtained. Then (A) a solid lubricant (MoS2, WS2, etc.) and (B) >=1 kind among oxides such as SiO2, Al2O3, carbides such as SiC, WC, and nitrides such as CrN, TiN, are coated on the magnetic thin film to obtain a recording medium.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic thin film magnetic recording medium, and more particularly to a magnetic tape that has improved film surface strength, as well as running properties and corrosion resistance.

In recent years, for the purpose of increasing the density of magnetic recording, magnetic thin films (1μ to several hundred times larger) have been deposited on thin-film magnetic recording materials, that is, non-magnetic films, by electroplating, electroless plating, vacuum deposition, ion blating, sputtering, etc. Research into formed magnetic recording media (hereinafter referred to as vapor-deposited tapes) has become active. However, compared to coated tapes, this vapor-deposited tape has the magnetic part (metal or alloy only) directly exposed, so it is more likely to be scratched when running in contact with magnetic heads, tape guides, etc., and has poor still characteristics. But it is opaque,
There were also problems in terms of runnability and corrosion resistance.

Conventionally, in order to eliminate such drawbacks, for example: ■ Coating a polymer material on the surface of the magnetic thin film, ■ Applying a surfactant with an HLB value of 5 to 30, ■ Forming a circulation layer by sputtering 8i0z, etc. ■ Co-depositing an organic lubricant and a polymeric substance is known, but ■ and ■ are effective in terms of still characteristics and corrosion resistance, ■ is in terms of friction, and ■ is in terms of still and corrosion resistance. Each had their shortcomings.

The present invention aims to provide a novel vapor deposition tape that improves these drawbacks, and specifically, after forming a magnetic thin film on a non-magnetic support, f7) a magnetic thin film is formed on a magnetic thin film. Solid lubricant, 5tO2, AQ203. Crz03゜Ti
Oxides such as O2, ZrO2, SiC, WC, Tic, N
Carbide such as bC, B4C, CrN, TiN, N1)N
, is characterized in that at least one selected nitride such as ZrN is deposited by a sputtering method.

As the solid lubricant, molybdenum disulfide, tungsten disulfide, etc. can be used. As the ferromagnetic thin film, Fe,
Ferromagnetic metals such as Co and Ni or Fe-Co, Fe-
Magnetic alloys such as Ni, Co-Ni, or these metals,
Non-extractable metals such as Cr, Ti, AE, etc. may be co-deposited onto the alloy. Preferred methods for producing the ferromagnetic thin film include vacuum evaporation, sputtering, and ion blating.

Furthermore, this magnetic thin film may have a multilayer structure with a non-magnetic layer interposed, a base layer formed between it and a non-magnetic support, or a slippery layer etc. applied to the back surface. The non-magnetic support that can be used in the present invention is preferably a flexible non-magnetic base such as polyethylene terephthalate, polyethylene naphthalate, polyimide or polyamide, but is limited to these. It is not something that will be done.

The present invention will be explained below with reference to Examples.

The magnetic thin film was formed using an oblique evaporation method in all of the experimental examples, as follows.

Base material: 10μ thick polyethylene terephthalate based magnetic material: C0100% Incident angle = 65° Heating method: Electron beam heating Vacuum degree: 10-' to 10-"Il'orr Exhaust characteristic 1 (c: 830 oersted) // Bm
: 9800 Gauss The vapor-deposited film is sputtered under the following conditions to form a protective layer.

Target: See Table (1) Atmosphere gas: Argon gas Pressure: 4X10 Torr Voltage between electrodes: 4
．． OKV The physical properties of the vapor-deposited tape thus obtained were as shown below.

Table (1) However, scratches were measured by visually observing the surface after running 100 times, and corrosion resistance was measured by applying a 0.5% ammonium chloride solution and visually observing the occurrence of rust after standing for 24 hours. Regarding head wear, ○ indicates less, X indicates more, and Δ indicates intermediate.

As mentioned above, the present invention not only improves the film surface strength, but also
It is possible to provide a thin film type magnetic recording medium with excellent running properties and corrosion resistance.

Claims (1)

[Claims] After forming a magnetic thin film on a non-magnetic support, a solid lubricant, 5iOz, Ag20a, Cr0a, TiO2
, ZrO2, etc. 17) Oxide, SiC, w2. TiC,
Carbides such as NbC, B4C, CrN, TiN, NbN
, A thin film magnetic recording medium characterized in that at least one selected from nitrides such as ZrN is deposited by a sputtering method.