JPS58193964A - Screw feeder - Google Patents
Screw feederInfo
- Publication number
- JPS58193964A JPS58193964A JP7524082A JP7524082A JPS58193964A JP S58193964 A JPS58193964 A JP S58193964A JP 7524082 A JP7524082 A JP 7524082A JP 7524082 A JP7524082 A JP 7524082A JP S58193964 A JPS58193964 A JP S58193964A
- Authority
- JP
- Japan
- Prior art keywords
- disc
- bearing
- feed screw
- screw
- thrust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transmission Devices (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、ねじ送り装置、特に精密位置決め用ねじ送り
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a screw feeding device, and particularly to a screw feeding device for precision positioning.
現在、精密位置決めを要する移動台は数多いが、それら
は、移動側が各種の方法で進行直角方向が規制され(ガ
イド機構)、ねじ送りにより進行方向に送られ位置決め
を行っている。位置決め精度を支配する要因は、その移
動台が、位置検出補正機構を持ち移動量をモータ側にフ
ィードバックする方式かどうかによりかなり変ってくる
が、ねじ・ナツトの精度、ナツトと移動物の固定力法、
上目ピガイド機構のn度、および、ねじがモータ等によ
り回転きれ移動台が動いている時にも、ねじ自身が進行
方向に動かないように保愕するねじのスラスト軸受の精
度等である。従ってこのスラスト軸受は回転方向にはス
ティックスリップがなく軽く回ねり、軸方向(a行方向
)には剛性が高いことが不可欠である。もちろん、ねじ
をその中心を回転中心として回すためのラジアル軸受を
重要である。At present, there are many moving tables that require precise positioning, and in these moving tables, the perpendicular direction of movement on the moving side is regulated by various methods (guide mechanism), and positioning is performed by being sent in the direction of movement by a screw feed. The factors governing positioning accuracy vary considerably depending on whether the moving table has a position detection correction mechanism and feeds back the amount of movement to the motor, but it also depends on the accuracy of the screws and nuts, and the fixing force between the nuts and the moving object. law,
These include the n degrees of the upper gear guide mechanism, and the accuracy of the thrust bearing of the screw that keeps the screw itself from moving in the advancing direction even when the screw is fully rotated by a motor or the like and the moving table is moving. Therefore, it is essential that this thrust bearing rotates lightly without stick-slip in the rotational direction, and has high rigidity in the axial direction (a-line direction). Of course, a radial bearing is important for rotating the screw around its center.
従来の精密位置決め移動台は、第1図に示すように、上
記カイト機構およびねじ軸受部に、鋼球またはころ等の
転動体を用いるころがり軸受や、すべり接触を用いるす
べり軸受を用いる方法が、一般的であった。すなわち、
モータ1や人力等により、ねじ軸受2に支えられたねじ
3を回すことにより、そのねじに噛み合うナツト4が取
付いた移動台5が、鋼球6等の転動体やすべり面でねじ
の回転に伴う回転を規制され、固定台7に対し、ねじの
軸方向に移動するわけである。As shown in FIG. 1, a conventional precision positioning moving table uses a rolling bearing using rolling elements such as steel balls or rollers, or a sliding bearing using sliding contact in the kite mechanism and screw bearing part. It was common. That is,
When a screw 3 supported by a screw bearing 2 is turned by a motor 1 or by human power, a moving table 5 equipped with a nut 4 that engages with the screw rotates with a rolling element such as a steel ball 6 or a sliding surface. The accompanying rotation is restricted, and the screw moves in the axial direction of the screw with respect to the fixed base 7.
これらの機構には、次のような欠点があった。These mechanisms had the following drawbacks.
即ち、(1)ころがり軸受は、鋼球径やころ径の不ぞろ
いによる、いわゆるごろ等の撮動が11けられない。That is, (1) rolling bearings are not susceptible to so-called rolling motions due to irregularities in steel ball diameters and roller diameters.
(2)すべり軸受はスティックスリップが避けられず、
微少位置決めができない。(2) Stick-slip is inevitable in sliding bearings,
Fine positioning is not possible.
(3)両者とも、軸方向剛性を上げようとすると、回転
方向にも負荷トルクが増え、微少位置決めの障害となる
。(3) In both cases, if an attempt is made to increase the rigidity in the axial direction, the load torque will also increase in the rotational direction, which will impede minute positioning.
上記C2)A3)は特に、フィードバック方式の場合は
特に大きな欠点となっていた。これらを解決するために
、ガイド機構部には、空気等の軸受を用いたものも、最
近艶られる。The above C2) and A3) are particularly large drawbacks in the case of the feedback method. In order to solve these problems, guide mechanisms using air bearings have recently become popular.
本発明は、これらの欠点がない軸受、即ち、振動がなく
、スティックスリップがなく、軸方向剛性が^く、円筒
方向に軽い(負荷トルフカ司・さい〕スラスト軸受ヲ傍
供すると共に、ダンパ効果をもたせたスラスト軸受を倒
供することにある。The present invention provides a bearing that does not have these drawbacks, that is, a thrust bearing that has no vibration, no stick-slip, has high axial rigidity, and is light in the cylindrical direction (load torque capacity), and also provides a damper effect. The purpose is to provide a tilted thrust bearing.
かかる目的を達成するために本発明では、送りねじの軸
受に静圧気体軸受を用い、さらに込りねじと、その軸受
の間に油ダンパを設けたこと全特徴とする。In order to achieve this object, the present invention is characterized in that a static pressure gas bearing is used as the bearing of the feed screw, and an oil damper is further provided between the set screw and its bearing.
本発明の実施例として第2図に示す光デイスク原盤記録
装置へ応用した場合を用いて説明する。An embodiment of the present invention will be described using a case where the present invention is applied to an optical disk master recording apparatus shown in FIG.
光ディスク僚盤紀録装置は、ガラス円機上にホトレジス
トを塗り、数百rpmで回転きぜながら、変調信号によ
り細く絞ったレーザ光t#r続照射させ、カラス面上に
凸凹を形成することにより、画1象信号等會記録する装
置であるが、光学系の安定等のため′″JtJt勇’し
、(ロ)転するカラスディスフケ、ディスク(ロ)転@
欄ともども半径方向に移動する一14fMkしている。The optical disk recorder is made by coating a glass circular machine with photoresist, rotating it at a few hundred rpm, and continuously irradiating it with a narrow laser beam t#r based on a modulation signal to form unevenness on the glass surface. , it is a device for recording image signals, etc., but due to the stability of the optical system etc.
Both the column and the column move in the radial direction by -14 fMk.
ディスク回転装置が搭載される移動台・清缶にηミニさ
れた送りねじ・ナツトの関係は第1図と同じであるが、
送りねじの軸と同軸に、油ダンパのための円板11と、
スラスト軸受のための円板12が設げられている。油ダ
/パ円数部分には、その円板よりも直径と厚8刀向にわ
ずかに広い丁き1?もった油ため13があり、その中で
円板が直流モータ14にエリ回転きれる送りねじ15と
共に(ロ)転する工うになっている。The relationship between the moving table on which the disk rotating device is mounted, the feed screw and nut miniaturized by the can is the same as in Figure 1, but
A disk 11 for an oil damper coaxially with the axis of the feed screw,
A disk 12 is provided for the thrust bearing. On the oil/pa circle number part, there is a blade 1 that is slightly wider in diameter and thickness than the disk. There is an oil reservoir 13 in which a disc is rotated by a DC motor 14 together with a feed screw 15 that can be rotated.
またスラスト円板12の部分には、それをとり囲むよう
に直径と厚さ方向にわずかなすきまをもつ軸受16があ
り、数ケ所に設けられ次オリフィス17から、圧縮空気
がスラスト円板に向は供給湯れている。油ダンパは、空
気軸受の減衰能が悪いという欠点をとり除き、回転方向
・軸方向に衝撃力がかかった時に動きを清めらかにする
ために付加したものであり、その能力は円板と油ための
間のすき1の大小や、使用油の特性ケ変えることにより
調整できるものである。本実施例では、ディスク1回転
に1回出てくるディスクの不っりあいによるカヤその他
の原因による衝撃力の対策の意味金もつ。以上の叩く本
発明を適用することにより、実施例の光ディスク原盤記
録装(tは、高精度のトラックピッチをもつディスク作
成がOT能となった。In addition, there is a bearing 16 surrounding the thrust disk 12 with a slight clearance in the diameter and thickness direction, and compressed air is directed toward the thrust disk from orifices 17 provided at several locations. There is no hot water supply. The oil damper was added to remove the drawback of air bearings, such as poor damping ability, and to smoothen the movement when impact force is applied in the rotational or axial direction. This can be adjusted by changing the size of the gap 1 between the oil reservoirs and the characteristics of the oil used. This embodiment has the meaning of countermeasures against impact force caused by splatter caused by disc misalignment and other causes that occur once per rotation of the disc. By applying the present invention described above, the optical disk master recording device (t) of the embodiment has become capable of producing a disk with a highly accurate track pitch.
本発明を用いることにより、次のような構造上の利点が
得られる。By using the present invention, the following structural advantages are obtained.
(1)移動台のガイドにも空気軸受を用い、送りねじの
軸受に静圧空気軸受ヶ用いることにより、スティックス
リップがなく、移動台のスムーズな動きが可亜となり位
置決め精度が上った。(1) By using an air bearing for the guide of the moving table and a static pressure air bearing for the bearing of the feed screw, there is no stick-slip and the moving table can move smoothly, improving positioning accuracy.
(2)送りねじの回転に伴う転動体の寸法不ぞろいによ
るゴロなどの振動がなくなり、送りねじのスムーズな動
きが、ディスクのスムーズな動キにその11反映される
こととなった。(2) Vibrations such as rolling caused by uneven dimensions of the rolling elements accompanying the rotation of the feed screw are eliminated, and the smooth movement of the feed screw is reflected in the smooth movement of the disk.
(3)油ダンパの付加により、送りねじの軸方向・移動
方向の衝撃力の影響全減少させ、送りねじの←圧仝気軸
受の原衰馳が悪いという欠点をカバーする効果カミりら
れる工うになった。(3) By adding an oil damper, the effect of the impact force in the axial direction and movement direction of the feed screw is completely reduced, and the effect of overcoming the disadvantage of poor primary deterioration of the pressure bearing of the feed screw is achieved. I became angry.
なお、実願例として光デイスク原盤記録装置に適用した
場合についてを明したが、他の移動台にも本発明の本質
を損なわず適用できるものである。Although the present invention is applied to an optical disk master recording device as a practical example, it can also be applied to other moving platforms without impairing the essence of the present invention.
第1図は従来のねし送り装fiiを示す図、第2図は本
発明の一実施例を、光デイスク原盤記録装置に応用した
場合を示す図である。FIG. 1 is a diagram showing a conventional screw feeding device fii, and FIG. 2 is a diagram showing an embodiment of the present invention applied to an optical disk master recording device.
Claims (1)
の送りねじに噛み合うナツトが取付いている移動台の移
動部が、鋼球等を用いた回り止め案内に沿って、固定部
に対して移動するねじ送り装置において、上記送りねじ
の軸受に静圧空気軸受を用いたことt−特徴とするねじ
送り装置。1. By rotating the feed screw by a motor, etc., the movable part of the movable platform, which has a nut that engages with the feed screw, moves relative to the fixed part along a detent guide using a steel ball, etc. A screw feeding device characterized in that a hydrostatic air bearing is used as a bearing of the feeding screw.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7524082A JPS58193964A (en) | 1982-05-07 | 1982-05-07 | Screw feeder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7524082A JPS58193964A (en) | 1982-05-07 | 1982-05-07 | Screw feeder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58193964A true JPS58193964A (en) | 1983-11-11 |
Family
ID=13570490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7524082A Pending JPS58193964A (en) | 1982-05-07 | 1982-05-07 | Screw feeder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58193964A (en) |
-
1982
- 1982-05-07 JP JP7524082A patent/JPS58193964A/en active Pending
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