JPS58193557U - Magnet device for ion pump - Google Patents
Magnet device for ion pumpInfo
- Publication number
- JPS58193557U JPS58193557U JP9019182U JP9019182U JPS58193557U JP S58193557 U JPS58193557 U JP S58193557U JP 9019182 U JP9019182 U JP 9019182U JP 9019182 U JP9019182 U JP 9019182U JP S58193557 U JPS58193557 U JP S58193557U
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- magnet device
- ion pump
- auxiliary
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は、従来のイオンポンプの磁石装置の1例を示す
側面図、第2図は、その縦断面図、第3図は、その磁界
分布曲線図、第4図は、本考案の1実施例による磁石装
置の側面図、第5図は、その縦断面図、第6図は、その
磁界分布曲線図、第7図は、本考案の他の実施例を示す
側面図、第8図は、その縦断面図である。
11.12,21.22・・・・・・主磁石;13゜2
3・・・・・・ヨーク;14,24.25・・・・・・
補助磁石。FIG. 1 is a side view showing an example of a conventional magnet device for an ion pump, FIG. 2 is a longitudinal sectional view thereof, FIG. 3 is a magnetic field distribution curve diagram thereof, and FIG. 5 is a longitudinal sectional view thereof, FIG. 6 is a magnetic field distribution curve diagram thereof, FIG. 7 is a side view showing another embodiment of the present invention, and FIG. 8 is a side view of a magnet device according to an embodiment. is a longitudinal sectional view thereof. 11.12, 21.22... Main magnet; 13゜2
3... Yoke; 14, 24.25...
Auxiliary magnet.
Claims (1)
外周部に1個あるいは数個の補助磁石を配置して成る磁
石装置。 2 補助磁石を主磁石の下部及び(又は)上部に配置し
て成る実用新案登録請求の範囲第1項記載の磁石装置。 3 主磁石と補助磁石とが同極を向き合うように配置さ
れた実用新案登録請求の範囲第1又は第2項記載の磁石
装置。[Claims for Utility Model Registration] 1. A magnet device used in an ion pump, in which one or several auxiliary magnets are arranged around the outer periphery of a main magnet. 2. The magnet device according to claim 1, wherein the auxiliary magnet is arranged below and/or above the main magnet. 3. The magnet device according to claim 1 or 2, wherein the main magnet and the auxiliary magnet are arranged so that the same poles face each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9019182U JPS58193557U (en) | 1982-06-18 | 1982-06-18 | Magnet device for ion pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9019182U JPS58193557U (en) | 1982-06-18 | 1982-06-18 | Magnet device for ion pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58193557U true JPS58193557U (en) | 1983-12-23 |
JPS6331481Y2 JPS6331481Y2 (en) | 1988-08-23 |
Family
ID=30098732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9019182U Granted JPS58193557U (en) | 1982-06-18 | 1982-06-18 | Magnet device for ion pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58193557U (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6138453A (en) * | 1984-07-17 | 1986-02-24 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Nuclear magnetic resonance device |
JPS61218120A (en) * | 1985-03-23 | 1986-09-27 | Sumitomo Special Metals Co Ltd | Magnetic field generator |
JPS6285404A (en) * | 1985-10-09 | 1987-04-18 | Daido Steel Co Ltd | Cylindrical multipolar magnet structure |
JPS62177903A (en) * | 1986-01-31 | 1987-08-04 | Fuji Electric Co Ltd | Permanent magnet type uniform magnetic-field magnet |
JP2006511921A (en) * | 2002-12-18 | 2006-04-06 | バリアン・インコーポレイテッド | Magnet assembly for sputter ion pump |
-
1982
- 1982-06-18 JP JP9019182U patent/JPS58193557U/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6138453A (en) * | 1984-07-17 | 1986-02-24 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Nuclear magnetic resonance device |
JPS61218120A (en) * | 1985-03-23 | 1986-09-27 | Sumitomo Special Metals Co Ltd | Magnetic field generator |
JPS6285404A (en) * | 1985-10-09 | 1987-04-18 | Daido Steel Co Ltd | Cylindrical multipolar magnet structure |
JPS62177903A (en) * | 1986-01-31 | 1987-08-04 | Fuji Electric Co Ltd | Permanent magnet type uniform magnetic-field magnet |
JP2006511921A (en) * | 2002-12-18 | 2006-04-06 | バリアン・インコーポレイテッド | Magnet assembly for sputter ion pump |
Also Published As
Publication number | Publication date |
---|---|
JPS6331481Y2 (en) | 1988-08-23 |
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