JPS58193557U - Magnet device for ion pump - Google Patents

Magnet device for ion pump

Info

Publication number
JPS58193557U
JPS58193557U JP9019182U JP9019182U JPS58193557U JP S58193557 U JPS58193557 U JP S58193557U JP 9019182 U JP9019182 U JP 9019182U JP 9019182 U JP9019182 U JP 9019182U JP S58193557 U JPS58193557 U JP S58193557U
Authority
JP
Japan
Prior art keywords
magnet
magnet device
ion pump
auxiliary
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9019182U
Other languages
Japanese (ja)
Other versions
JPS6331481Y2 (en
Inventor
鈴木 公文
Original Assignee
三菱製鋼磁材株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱製鋼磁材株式会社 filed Critical 三菱製鋼磁材株式会社
Priority to JP9019182U priority Critical patent/JPS58193557U/en
Publication of JPS58193557U publication Critical patent/JPS58193557U/en
Application granted granted Critical
Publication of JPS6331481Y2 publication Critical patent/JPS6331481Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来のイオンポンプの磁石装置の1例を示す
側面図、第2図は、その縦断面図、第3図は、その磁界
分布曲線図、第4図は、本考案の1実施例による磁石装
置の側面図、第5図は、その縦断面図、第6図は、その
磁界分布曲線図、第7図は、本考案の他の実施例を示す
側面図、第8図は、その縦断面図である。 11.12,21.22・・・・・・主磁石;13゜2
3・・・・・・ヨーク;14,24.25・・・・・・
補助磁石。
FIG. 1 is a side view showing an example of a conventional magnet device for an ion pump, FIG. 2 is a longitudinal sectional view thereof, FIG. 3 is a magnetic field distribution curve diagram thereof, and FIG. 5 is a longitudinal sectional view thereof, FIG. 6 is a magnetic field distribution curve diagram thereof, FIG. 7 is a side view showing another embodiment of the present invention, and FIG. 8 is a side view of a magnet device according to an embodiment. is a longitudinal sectional view thereof. 11.12, 21.22... Main magnet; 13゜2
3... Yoke; 14, 24.25...
Auxiliary magnet.

Claims (1)

【実用新案登録請求の範囲】 1 イオンポンプに使用する磁石装置において、主磁石
外周部に1個あるいは数個の補助磁石を配置して成る磁
石装置。 2 補助磁石を主磁石の下部及び(又は)上部に配置し
て成る実用新案登録請求の範囲第1項記載の磁石装置。 3 主磁石と補助磁石とが同極を向き合うように配置さ
れた実用新案登録請求の範囲第1又は第2項記載の磁石
装置。
[Claims for Utility Model Registration] 1. A magnet device used in an ion pump, in which one or several auxiliary magnets are arranged around the outer periphery of a main magnet. 2. The magnet device according to claim 1, wherein the auxiliary magnet is arranged below and/or above the main magnet. 3. The magnet device according to claim 1 or 2, wherein the main magnet and the auxiliary magnet are arranged so that the same poles face each other.
JP9019182U 1982-06-18 1982-06-18 Magnet device for ion pump Granted JPS58193557U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9019182U JPS58193557U (en) 1982-06-18 1982-06-18 Magnet device for ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9019182U JPS58193557U (en) 1982-06-18 1982-06-18 Magnet device for ion pump

Publications (2)

Publication Number Publication Date
JPS58193557U true JPS58193557U (en) 1983-12-23
JPS6331481Y2 JPS6331481Y2 (en) 1988-08-23

Family

ID=30098732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9019182U Granted JPS58193557U (en) 1982-06-18 1982-06-18 Magnet device for ion pump

Country Status (1)

Country Link
JP (1) JPS58193557U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6138453A (en) * 1984-07-17 1986-02-24 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ Nuclear magnetic resonance device
JPS61218120A (en) * 1985-03-23 1986-09-27 Sumitomo Special Metals Co Ltd Magnetic field generator
JPS6285404A (en) * 1985-10-09 1987-04-18 Daido Steel Co Ltd Cylindrical multipolar magnet structure
JPS62177903A (en) * 1986-01-31 1987-08-04 Fuji Electric Co Ltd Permanent magnet type uniform magnetic-field magnet
JP2006511921A (en) * 2002-12-18 2006-04-06 バリアン・インコーポレイテッド Magnet assembly for sputter ion pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6138453A (en) * 1984-07-17 1986-02-24 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ Nuclear magnetic resonance device
JPS61218120A (en) * 1985-03-23 1986-09-27 Sumitomo Special Metals Co Ltd Magnetic field generator
JPS6285404A (en) * 1985-10-09 1987-04-18 Daido Steel Co Ltd Cylindrical multipolar magnet structure
JPS62177903A (en) * 1986-01-31 1987-08-04 Fuji Electric Co Ltd Permanent magnet type uniform magnetic-field magnet
JP2006511921A (en) * 2002-12-18 2006-04-06 バリアン・インコーポレイテッド Magnet assembly for sputter ion pump

Also Published As

Publication number Publication date
JPS6331481Y2 (en) 1988-08-23

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