JPS58192459U - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS58192459U
JPS58192459U JP9037382U JP9037382U JPS58192459U JP S58192459 U JPS58192459 U JP S58192459U JP 9037382 U JP9037382 U JP 9037382U JP 9037382 U JP9037382 U JP 9037382U JP S58192459 U JPS58192459 U JP S58192459U
Authority
JP
Japan
Prior art keywords
light source
source device
discharge light
microwave discharge
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9037382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638007Y2 (enExample
Inventor
大貫　一志
和生 伴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9037382U priority Critical patent/JPS58192459U/ja
Publication of JPS58192459U publication Critical patent/JPS58192459U/ja
Application granted granted Critical
Publication of JPS638007Y2 publication Critical patent/JPS638007Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
JP9037382U 1982-06-17 1982-06-17 マイクロ波放電光源装置 Granted JPS58192459U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9037382U JPS58192459U (ja) 1982-06-17 1982-06-17 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9037382U JPS58192459U (ja) 1982-06-17 1982-06-17 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS58192459U true JPS58192459U (ja) 1983-12-21
JPS638007Y2 JPS638007Y2 (enExample) 1988-03-09

Family

ID=30098892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9037382U Granted JPS58192459U (ja) 1982-06-17 1982-06-17 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS58192459U (enExample)

Also Published As

Publication number Publication date
JPS638007Y2 (enExample) 1988-03-09

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