JPS5819208U - 加工状態の検査装置 - Google Patents

加工状態の検査装置

Info

Publication number
JPS5819208U
JPS5819208U JP11427281U JP11427281U JPS5819208U JP S5819208 U JPS5819208 U JP S5819208U JP 11427281 U JP11427281 U JP 11427281U JP 11427281 U JP11427281 U JP 11427281U JP S5819208 U JPS5819208 U JP S5819208U
Authority
JP
Japan
Prior art keywords
optical system
detection device
inspection device
irradiates
calculated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11427281U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218358Y2 (enrdf_load_stackoverflow
Inventor
壽 三角
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP11427281U priority Critical patent/JPS5819208U/ja
Publication of JPS5819208U publication Critical patent/JPS5819208U/ja
Application granted granted Critical
Publication of JPS6218358Y2 publication Critical patent/JPS6218358Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP11427281U 1981-07-30 1981-07-30 加工状態の検査装置 Granted JPS5819208U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11427281U JPS5819208U (ja) 1981-07-30 1981-07-30 加工状態の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11427281U JPS5819208U (ja) 1981-07-30 1981-07-30 加工状態の検査装置

Publications (2)

Publication Number Publication Date
JPS5819208U true JPS5819208U (ja) 1983-02-05
JPS6218358Y2 JPS6218358Y2 (enrdf_load_stackoverflow) 1987-05-12

Family

ID=29908557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11427281U Granted JPS5819208U (ja) 1981-07-30 1981-07-30 加工状態の検査装置

Country Status (1)

Country Link
JP (1) JPS5819208U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62110857U (enrdf_load_stackoverflow) * 1985-12-28 1987-07-15

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263445U (enrdf_load_stackoverflow) * 1975-11-01 1977-05-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263445U (enrdf_load_stackoverflow) * 1975-11-01 1977-05-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62110857U (enrdf_load_stackoverflow) * 1985-12-28 1987-07-15

Also Published As

Publication number Publication date
JPS6218358Y2 (enrdf_load_stackoverflow) 1987-05-12

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