JPS58180037A - 半導体装置のホツトスポツト観察装置 - Google Patents

半導体装置のホツトスポツト観察装置

Info

Publication number
JPS58180037A
JPS58180037A JP57064412A JP6441282A JPS58180037A JP S58180037 A JPS58180037 A JP S58180037A JP 57064412 A JP57064412 A JP 57064412A JP 6441282 A JP6441282 A JP 6441282A JP S58180037 A JPS58180037 A JP S58180037A
Authority
JP
Japan
Prior art keywords
semiconductor device
ferromagnetic
substance
hot spot
viewer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57064412A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227742B2 (enExample
Inventor
Masakazu Nakabayashi
正和 中林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57064412A priority Critical patent/JPS58180037A/ja
Publication of JPS58180037A publication Critical patent/JPS58180037A/ja
Publication of JPS6227742B2 publication Critical patent/JPS6227742B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Magnetic Variables (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Thin Magnetic Films (AREA)
JP57064412A 1982-04-15 1982-04-15 半導体装置のホツトスポツト観察装置 Granted JPS58180037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57064412A JPS58180037A (ja) 1982-04-15 1982-04-15 半導体装置のホツトスポツト観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57064412A JPS58180037A (ja) 1982-04-15 1982-04-15 半導体装置のホツトスポツト観察装置

Publications (2)

Publication Number Publication Date
JPS58180037A true JPS58180037A (ja) 1983-10-21
JPS6227742B2 JPS6227742B2 (enExample) 1987-06-16

Family

ID=13257550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57064412A Granted JPS58180037A (ja) 1982-04-15 1982-04-15 半導体装置のホツトスポツト観察装置

Country Status (1)

Country Link
JP (1) JPS58180037A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9115264B2 (en) 2010-02-15 2015-08-25 Productive Research Llc Delamination resistant, weldable and formable light weight composites
US9233526B2 (en) 2012-08-03 2016-01-12 Productive Research Llc Composites having improved interlayer adhesion and methods thereof
US9239068B2 (en) 2009-12-28 2016-01-19 Productive Research Llc Processes for welding composite materials and articles therefrom
US9434134B2 (en) 2008-08-18 2016-09-06 Productive Research Llc Formable light weight composites

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211971A (en) * 1975-07-18 1977-01-29 Tohoku Metal Ind Ltd Sensible temperature magnetic material of noncontact temperature detection
JPS53111776A (en) * 1977-03-11 1978-09-29 Tohoku Metal Ind Ltd Surface temperature detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211971A (en) * 1975-07-18 1977-01-29 Tohoku Metal Ind Ltd Sensible temperature magnetic material of noncontact temperature detection
JPS53111776A (en) * 1977-03-11 1978-09-29 Tohoku Metal Ind Ltd Surface temperature detector

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9434134B2 (en) 2008-08-18 2016-09-06 Productive Research Llc Formable light weight composites
US9889634B2 (en) 2008-08-18 2018-02-13 Productive Research Llc Formable light weight composites
US9239068B2 (en) 2009-12-28 2016-01-19 Productive Research Llc Processes for welding composite materials and articles therefrom
US9115264B2 (en) 2010-02-15 2015-08-25 Productive Research Llc Delamination resistant, weldable and formable light weight composites
US9415568B2 (en) 2010-02-15 2016-08-16 Productive Research Llc Formable light weight composite material systems and methods
US9981451B2 (en) 2010-02-15 2018-05-29 Productive Research Llc Delamination resistant, weldable and formable light weight composites
US10710338B2 (en) 2010-02-15 2020-07-14 Productive Research Llc Delamination resistant, weldable and formable light weight composites
US11331880B2 (en) 2010-02-15 2022-05-17 Productive Research Llc Delamination resistant, weldable and formable light weight composites
US9233526B2 (en) 2012-08-03 2016-01-12 Productive Research Llc Composites having improved interlayer adhesion and methods thereof

Also Published As

Publication number Publication date
JPS6227742B2 (enExample) 1987-06-16

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