JPS58179986A - Magnetic bubble memory element - Google Patents

Magnetic bubble memory element

Info

Publication number
JPS58179986A
JPS58179986A JP57061831A JP6183182A JPS58179986A JP S58179986 A JPS58179986 A JP S58179986A JP 57061831 A JP57061831 A JP 57061831A JP 6183182 A JP6183182 A JP 6183182A JP S58179986 A JPS58179986 A JP S58179986A
Authority
JP
Japan
Prior art keywords
bubble
magnetic
transfer
magnetic field
memory element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57061831A
Other languages
Japanese (ja)
Other versions
JPS6117074B2 (en
Inventor
Takeyasu Yanase
柳瀬 武泰
Naotake Orihara
折原 尚武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57061831A priority Critical patent/JPS58179986A/en
Publication of JPS58179986A publication Critical patent/JPS58179986A/en
Publication of JPS6117074B2 publication Critical patent/JPS6117074B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C19/00Digital stores in which the information is moved stepwise, e.g. shift registers
    • G11C19/02Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements
    • G11C19/08Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure
    • G11C19/0808Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure using magnetic domain propagation
    • G11C19/0816Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure using magnetic domain propagation using a rotating or alternating coplanar magnetic field

Abstract

PURPOSE:To obtain a memory element which has no deterioration of transfer characteristics owing to the bubble transfer direction, by setting the transfer direction of a clubfoot pattern to a prescribed direction in terms of the magnetic field facilitating axis and at the same time by applying an electrostatic magnetic field of a prescribed direction in order to increase the pattern gap margin. CONSTITUTION:The magnetic bubble transfer paths II and IV which are formed with clubfoot patterns of a large pattern gap margin are set in parallel and unparallel to an axis direction of easy magnetization (1, 1, -2). An electrostatic magnetic field is applied to the paths II and IV to form a holding magnetic field in the direction rectangular to the bubble transfer direction. Thus the transfer margin is increased. As a result, the margin of the pattern gap is increased and furthermore no deterioration of transfer characteristics owing to the bubble transfer direction is generated for a magnetic bubble memory element.

Description

【発明の詳細な説明】 (11発明の技術分野 本発明は電子計算装置又はその末端機等のメモリとして
使用される磁気バブルメモリ素子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (11) Technical Field of the Invention The present invention relates to a magnetic bubble memory element used as a memory for electronic computing devices or terminal devices thereof.

(2)技術の背景 磁気バブルを利用して情報の蓄積、論理演算等を行なう
磁気バブル利用装置は不揮発性、高記憶密度及び低消費
電力であり、さらには機械的要素を全く含まない固体素
子であることから非常に高い信頼性を有1.2でいる等
積々の特徴をもりているため大容量メモリとして将来が
期待されている。
(2) Background of the technology Magnetic bubble utilization devices that use magnetic bubbles to store information, perform logical operations, etc. are nonvolatile, have high storage density, and low power consumption, and are solid-state devices that do not contain any mechanical elements. Therefore, it has many characteristics such as extremely high reliability of 1.2, and is expected to have a promising future as a large capacity memory.

この磁気バブルメモリ装置は、磁気バブルを磁界により
一軸異方性を有するa性薄膜内を自由に動かすことがで
きることを利用したものであって、第1図に示す如く磁
気バブルメモリ素子1、バブルを駆動するための回転磁
界発生用コイル2.2′、バブルを安定に保持するため
のバイアス磁界発生用磁石3.3′等により構成されて
いる。
This magnetic bubble memory device utilizes the fact that magnetic bubbles can be freely moved in an a-type thin film having uniaxial anisotropy by a magnetic field, and as shown in FIG. It is composed of a rotating magnetic field generating coil 2.2' for driving the bubble, a bias magnetic field generating magnet 3.3' for stably holding the bubble, and the like.

そしてメモリ素子1は例えばガドリニウム・ガリウム・
ガーネット単結晶基板の上に液相エピタキシャル成長法
により磁性ガーネット等のバブル8区結晶膜が形成され
、その上にパーマロイ等の形Vされている。この転送路
の構成には大別してシリアルループ方式とメジャーマイ
ナ一方式とがある。第3図はこのメジャーマイナ一方式
の1例を示したもので、バブル磁区発生器5、検出器6
、消去器7等を有するメジャーループ8と、これにトラ
ンスファゲート9を介して接続された多数個のマイナー
ループ10−□〜10nとにより構成されている。
The memory element 1 is made of, for example, gadolinium, gallium, etc.
A bubble crystal film of magnetic garnet or the like is formed on a garnet single crystal substrate by a liquid phase epitaxial growth method, and a V-shaped film of permalloy or the like is formed thereon. The configuration of this transfer path can be roughly divided into a serial loop type and a major/minor type. Figure 3 shows an example of this major-minor one-sided system, with a bubble domain generator 5, a detector 6
, an eraser 7, etc., and a large number of minor loops 10-□ to 10n connected to this through transfer gates 9.

このようなS気バブルメモリ装置も最近の情報量の増加
、fc+f’tの小型化等の要求により記憶密度の向上
が求められている。
Such S-air bubble memory devices are also required to have improved storage density due to the recent increase in the amount of information and demands for miniaturization of fc+f't.

(3)従来技術と問題点 @記のハーフディスクパターンを用いた転送路はギャッ
プが割合広くともバブルを転送することができると言わ
れており、従来の転送路では、記憶容jl:IMビット
の場合、ギャップが1.0μm、パターン川明が7〜8
μmとなっている。ところが記憶密度を向上するため前
記と同一面積の素子に4Mビットを収容しようとすると
、転送路のギャップは0,5μm、パターン周期tf4
μm程度に縮少する必要がある。このギャップ0.5μ
mはパターン作成時の光りソグラフィの解偉力の限界を
越えるものであり、素子作成が困難となる。
(3) Prior art and problems It is said that the transfer path using the half-disk pattern described in @ is capable of transferring bubbles even if the gap is relatively wide. In the case of , the gap is 1.0 μm and the pattern width is 7 to 8
It is μm. However, when attempting to accommodate 4M bits in a device with the same area as above in order to improve storage density, the transfer path gap is 0.5 μm and the pattern period tf4.
It is necessary to reduce the size to about μm. This gap is 0.5μ
m exceeds the resolution limit of optical lithography during pattern creation, making device creation difficult.

このため最近、第4図a−eに示す如き形状のC1ub
 footと称されるパターンが開発されている。
For this reason, recently, C1ub with a shape as shown in Fig. 4 a-e has been developed.
A pattern called foot has been developed.

このパターンはハーフディスクパターンよりもギャップ
を大きくできるという利点がある本のの、基板上に作成
される方向によってバブル転送特性に優劣が生ずるとい
う欠点があった。
Although this pattern has the advantage of allowing a larger gap than the half-disk pattern, it has the disadvantage that bubble transfer characteristics vary depending on the direction in which it is formed on the substrate.

(4)発明の目的 本発明は上記従来の欠点に鑑み、パターンギャップに余
裕度があるパターンを用い、バブル転送方向によるバブ
ル転送特性に優劣の生じない磁気バブルメモリ素子を提
供することを目的とするものである。
(4) Purpose of the Invention In view of the above-mentioned conventional drawbacks, an object of the present invention is to provide a magnetic bubble memory element that uses a pattern with a sufficient margin in the pattern gap and has no difference in bubble transfer characteristics depending on the bubble transfer direction. It is something to do.

(5)発明の構成 そしてこの目的は本発明によれば、バブル磁区結晶の上
に軟磁性パターンを周期的に配列したバブル磁区転送路
を有する磁気バブルメモリ素子において、バブル磁区結
晶の面内の磁化容易軸がバブル磁区転送方向と平行また
は反平行となるように該バブル磁区転送路を該バブル磁
区結晶上に配置したことを特徴とし、さらに前記磁気バ
ブルメモリ素子において、バブル磁区結晶面内にあって
1つバブル磁区転送方向に直角な方向に靜磁界を印加す
ること全特徴とする磁気バブルメモリ素子を提供するこ
とによって達成される。
(5) Structure and object of the invention According to the present invention, in a magnetic bubble memory element having a bubble magnetic domain transfer path in which soft magnetic patterns are periodically arranged on a bubble magnetic domain crystal, The bubble magnetic domain transfer path is arranged on the bubble magnetic domain crystal so that the axis of easy magnetization is parallel or antiparallel to the bubble magnetic domain transfer direction, and further, in the magnetic bubble memory element, the bubble magnetic domain transfer path is arranged in the bubble magnetic domain crystal plane. This is achieved by providing a magnetic bubble memory device characterized in that one feature is the application of a silent magnetic field in a direction perpendicular to the bubble domain transfer direction.

(6)発明の実施例 以丁塞発明実施例を図面によって詳述する。(6) Examples of the invention Embodiments of the invention will now be described in detail with reference to the drawings.

第5図は第4図に示したクラブフートパターンを用いた
転送路を第6図に示す如くバブル磁区結晶面に耐重した
場合の転送マージンを示す図である。
FIG. 5 is a diagram showing the transfer margin when the transfer path using the club foot pattern shown in FIG. 4 is loaded with the bubble magnetic domain crystal plane as shown in FIG.

第5図は縦軸にバイアス磁界、横軸に駆動磁界をと9、
曲#!i〜■により第6図の1〜■のパターン配置の転
送路の転送マージンをそれぞれ示した。
Figure 5 shows the bias magnetic field on the vertical axis and the drive magnetic field on the horizontal axis9.
song#! I to ■ indicate the transfer margins of the transfer path of the pattern arrangement of 1 to ■ in FIG. 6, respectively.

第6図において、矢印(112)、(211)。In FIG. 6, arrows (112) and (211).

(121)はそれぞれバブル磁区結晶の結晶軸を示した
ものであり、それぞれは面内磁化容晶軸でもあり各12
00の間隔である。転送路■及び■は磁化容易軸(11
2)に平行又は反平行に配置され、転送路■と■は何れ
の磁化容易軸とも平行又は反平行ではない。
(121) respectively indicate the crystal axes of bubble domain crystals, and each is also an in-plane magnetization crystal axis, and each 12
00 intervals. Transfer paths ■ and ■ are easy magnetization axes (11
2), and the transfer paths (1) and (2) are not parallel or antiparallel to any axis of easy magnetization.

$5図より転送マージンは■の転送路が他に比し最も優
れていることがわかる。
From the $5 diagram, it can be seen that the transfer path (■) has the best transfer margin compared to the others.

第7図は第6図の転送路■に白ぬき矢印の如く直角方向
に静磁界を印加した場合のマージンを示す図である。同
図において縦軸にはバイアス磁界、横軸には駆動磁界を
とり、靜磁界(ホールド磁界)を0〜100e印加した
ときのマージンを曲$a〜fで示した。なお印加した靜
磁界は、曲線aが00e、bが20e、eが40@、d
が60s、sが80e、fが100・−である。
FIG. 7 is a diagram showing the margin when a static magnetic field is applied in a perpendicular direction to the transfer path (2) in FIG. 6 as indicated by the white arrow. In the figure, the vertical axis represents the bias magnetic field, the horizontal axis represents the drive magnetic field, and the margins when a static magnetic field (hold magnetic field) of 0 to 100 e is applied are shown by curves $a to f. The applied quiet magnetic field is as follows: curve a is 00e, b is 20e, e is 40@, d
is 60s, s is 80e, and f is 100.-.

転送路■は第6図の如くマージンの悪い転送路であるが
、第7図の如く直角方向のホールド磁界印加によりその
マージンは改善されることがわかる。このように各方向
の転送路はそねぞれホールド磁界依存性を有する。本発
明はこの性質を利用したものである。
Although the transfer path (2) has a poor margin as shown in FIG. 6, it can be seen that the margin can be improved by applying a hold magnetic field in the right angle direction as shown in FIG. In this way, the transfer paths in each direction each have hold magnetic field dependence. The present invention takes advantage of this property.

第8図は本発明の1実施例であり白ぬき矢印方向に60
eのホールド磁界を印加した場合を示した図である。
FIG. 8 shows one embodiment of the present invention, and shows 600 mm in the direction of the white arrow.
FIG. 6 is a diagram showing a case where a hold magnetic field of e is applied.

図中曲+1’1illはホールド磁界0のときの最小駆
動磁界が300eと(第5図参照)大きかったものが1
500まで低下している。逆に曲111Vはホールド磁
界Oのときの最小駆動磁界が100・程度であったもの
が150eと多小劣化するが前者とほぼ同等のマージン
を示している。
For the song +1'1ill in the figure, the minimum driving magnetic field when the hold magnetic field is 0 is 300e (see Figure 5), which is 1.
It has dropped to 500. On the other hand, in the case of the track 111V, the minimum driving magnetic field when the hold magnetic field is O was about 100°, but it is slightly degraded to 150e, but shows almost the same margin as the former.

本発明の磁気バブルメモリ素子はこのように転送路をバ
ブル磁区結晶の結晶軸に対して平行あるいは反平行に配
積し、巨つホールド磁界を転送路に+1!角な方向に印
加するようにした本のであり、駆動磁界を低減でき、か
つマイナールーズの行き帰りのマージンを一致させるこ
とを可能としたものである。
In the magnetic bubble memory device of the present invention, the transfer path is arranged parallel or antiparallel to the crystal axis of the bubble domain crystal in this way, and a large hold magnetic field is applied to the transfer path by +1! This is a book in which the magnetic field is applied in an angular direction, which makes it possible to reduce the driving magnetic field and to match the margins of minor looseness.

(7)発明の効果 1試上詳細に説明したように、本発明の磁気バブルメモ
リ孝子は、ギャップ余裕度を有するパターンを用いた転
送路において、マージンの悪い方向の転送路をホールド
磁界によってそのマージンを補強することにより、バブ
ル転送方向によるノ(プル転送に優劣を生じない転送特
性が得られるといった効果大なる本のである。
(7) Effects of the Invention 1 Trial As explained in detail in the trial, the magnetic bubble memory filtration device of the present invention, in a transfer path using a pattern with a gap margin, uses a hold magnetic field to suppress the transfer path in a direction with a poor margin. By reinforcing the margin, it is possible to obtain transfer characteristics that are independent of the bubble transfer direction (pull transfer), which is a great book.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の磁気バブルメモリ装置を説明するための
図、第2図は)・−フデイスクノくターンを示す図、第
3図はメジャーマイナー構成の磁気ノ(プルメモリ素子
を示す図、第4図はギャップに余裕度のあるパターンを
示す図、第5図は)(プル磁区結晶上の転送路における
転送特性の転送方向依存性を示す図、第6図は結晶軸方
向と転送路の関係を示し電図、第7図は転送路に直角方
向のホールド磁界を印加したときの特性を示した図、第
8図は本発明の磁気バブルメモリ素子の1実施例の特性
を示した図である。 第2図 ム 第3図 弗4図 第5図 駆動磁界HD(○e) 第6図 ■
Fig. 1 is a diagram for explaining a conventional magnetic bubble memory device, Fig. 2 is a diagram showing a pull memory element with a major minor configuration, Fig. The figure shows a pattern with a margin in the gap, Figure 5 shows the transfer direction dependence of transfer characteristics in a transfer path on a pull domain crystal, and Figure 6 shows the relationship between the crystal axis direction and the transfer path. FIG. 7 is a diagram showing the characteristics when a hold magnetic field is applied in a direction perpendicular to the transfer path, and FIG. 8 is a diagram showing the characteristics of one embodiment of the magnetic bubble memory element of the present invention. Yes. Figure 2 M Figure 3 弗 4 Figure 5 Drive magnetic field HD (○e) Figure 6 ■

Claims (1)

【特許請求の範囲】 1、 バブル8区結晶の上に軟磁性パターンを周期的に
妃列したバブル8区転送路を有する磁気バブルメモリ素
子において、バブル磁区結晶の面内の磁化容易軸がバブ
ル磁区転送方向と平行または反平行となるように該バブ
ル磁区転送路を咳バブル磁区結晶上に配置したことを特
徴とする磁気バブルメモリ素子。 2、特許請求の範囲第1項記載の磁気バブルメモリ素子
におい、て、バブル磁区結晶面内にあって叶つバブル磁
区転送方向に直角な方向に靜磁界を印加することを特徴
とする磁気バブルメモリ素子。
[Claims] 1. In a magnetic bubble memory element having an 8-bubble transfer path in which a soft magnetic pattern is periodically arranged on the 8-bubble-domain crystal, the axis of easy magnetization in the plane of the bubble magnetic domain crystal is aligned with the bubble. A magnetic bubble memory element characterized in that the bubble domain transfer path is arranged on a cough bubble magnetic domain crystal so as to be parallel or antiparallel to the magnetic domain transfer direction. 2. The magnetic bubble memory device according to claim 1, wherein a magnetic bubble is characterized in that a quiet magnetic field is applied in a direction perpendicular to the bubble magnetic domain transfer direction that is within the crystal plane of the bubble magnetic domain. memory element.
JP57061831A 1982-04-15 1982-04-15 Magnetic bubble memory element Granted JPS58179986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57061831A JPS58179986A (en) 1982-04-15 1982-04-15 Magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57061831A JPS58179986A (en) 1982-04-15 1982-04-15 Magnetic bubble memory element

Publications (2)

Publication Number Publication Date
JPS58179986A true JPS58179986A (en) 1983-10-21
JPS6117074B2 JPS6117074B2 (en) 1986-05-06

Family

ID=13182428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57061831A Granted JPS58179986A (en) 1982-04-15 1982-04-15 Magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS58179986A (en)

Also Published As

Publication number Publication date
JPS6117074B2 (en) 1986-05-06

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