JPS58178999A - ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 - Google Patents
ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置Info
- Publication number
- JPS58178999A JPS58178999A JP57054971A JP5497182A JPS58178999A JP S58178999 A JPS58178999 A JP S58178999A JP 57054971 A JP57054971 A JP 57054971A JP 5497182 A JP5497182 A JP 5497182A JP S58178999 A JPS58178999 A JP S58178999A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- arc
- electromagnet
- guide
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000696 magnetic material Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 description 19
- 150000002500 ions Chemical class 0.000 description 12
- 230000005684 electric field Effects 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 239000010406 cathode material Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241001125048 Sardina Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 235000019512 sardine Nutrition 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57054971A JPS58178999A (ja) | 1982-04-02 | 1982-04-02 | ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57054971A JPS58178999A (ja) | 1982-04-02 | 1982-04-02 | ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58178999A true JPS58178999A (ja) | 1983-10-20 |
| JPS637680B2 JPS637680B2 (enrdf_load_stackoverflow) | 1988-02-17 |
Family
ID=12985536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57054971A Granted JPS58178999A (ja) | 1982-04-02 | 1982-04-02 | ア−クプラズマ発生器及びこれを備えた被加工片の表面処理用のプラズマア−ク装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58178999A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007299733A (ja) * | 2006-05-01 | 2007-11-15 | Vapor Technologies Inc | プラズマ発生装置 |
| JP2014503935A (ja) * | 2010-11-08 | 2014-02-13 | ナショナル サイエンス センター ハリコフ インスティテュウト オブ フィジックス アンド テクノロジー | 真空アークプラズマを輸送するための方法及び装置 |
-
1982
- 1982-04-02 JP JP57054971A patent/JPS58178999A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007299733A (ja) * | 2006-05-01 | 2007-11-15 | Vapor Technologies Inc | プラズマ発生装置 |
| JP2014503935A (ja) * | 2010-11-08 | 2014-02-13 | ナショナル サイエンス センター ハリコフ インスティテュウト オブ フィジックス アンド テクノロジー | 真空アークプラズマを輸送するための方法及び装置 |
| JP2015159113A (ja) * | 2010-11-08 | 2015-09-03 | ナショナル サイエンス センター ハリコフ インスティテュウト オブ フィジックス アンド テクノロジーＮａｔｉｏｎａｌ Ｓｃｉｅｎｃｅ Ｃｅｎｔｅｒ Ｋｈａｒｋｏｖ Ｉｎｓｔｉｔｕｔｅ Ｏｆ Ｐｈｙｓｉｃｓａｎｄ Ｔｅｃｈｎｏｌｏｇｙ | 真空アークプラズマを輸送するための方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS637680B2 (enrdf_load_stackoverflow) | 1988-02-17 |
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