JPS5817546U - 表面状態検出素子 - Google Patents

表面状態検出素子

Info

Publication number
JPS5817546U
JPS5817546U JP11267581U JP11267581U JPS5817546U JP S5817546 U JPS5817546 U JP S5817546U JP 11267581 U JP11267581 U JP 11267581U JP 11267581 U JP11267581 U JP 11267581U JP S5817546 U JPS5817546 U JP S5817546U
Authority
JP
Japan
Prior art keywords
surface condition
condition detection
detection element
heater
heats
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11267581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133566Y2 (enrdf_load_stackoverflow
Inventor
木村　郁彦
Original Assignee
フイガロ技研株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by フイガロ技研株式会社 filed Critical フイガロ技研株式会社
Priority to JP11267581U priority Critical patent/JPS5817546U/ja
Publication of JPS5817546U publication Critical patent/JPS5817546U/ja
Application granted granted Critical
Publication of JPS6133566Y2 publication Critical patent/JPS6133566Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP11267581U 1981-07-28 1981-07-28 表面状態検出素子 Granted JPS5817546U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11267581U JPS5817546U (ja) 1981-07-28 1981-07-28 表面状態検出素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11267581U JPS5817546U (ja) 1981-07-28 1981-07-28 表面状態検出素子

Publications (2)

Publication Number Publication Date
JPS5817546U true JPS5817546U (ja) 1983-02-03
JPS6133566Y2 JPS6133566Y2 (enrdf_load_stackoverflow) 1986-10-01

Family

ID=29906996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11267581U Granted JPS5817546U (ja) 1981-07-28 1981-07-28 表面状態検出素子

Country Status (1)

Country Link
JP (1) JPS5817546U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6133566Y2 (enrdf_load_stackoverflow) 1986-10-01

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