JPS58174849U - Plasma X-ray generator - Google Patents

Plasma X-ray generator

Info

Publication number
JPS58174849U
JPS58174849U JP7184082U JP7184082U JPS58174849U JP S58174849 U JPS58174849 U JP S58174849U JP 7184082 U JP7184082 U JP 7184082U JP 7184082 U JP7184082 U JP 7184082U JP S58174849 U JPS58174849 U JP S58174849U
Authority
JP
Japan
Prior art keywords
ray generator
plasma
chamber
anode
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7184082U
Other languages
Japanese (ja)
Inventor
岡部　正博
北村　芳隆
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP7184082U priority Critical patent/JPS58174849U/en
Publication of JPS58174849U publication Critical patent/JPS58174849U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のプラズマＸ線源の断面図、第２図はこの
正面図また第３図は本考案に係るプラズマＸ線源の構成
を示す断面図である。 図において、１はガス、４はガス噴出口、５は陰極、７
は陽極、９はＸ線照射孔、１０は噴出ガス、１１はＸ線
とり出し方向、１２は補助排気口。FIG. 1 is a sectional view of a conventional plasma X-ray source, FIG. 2 is a front view thereof, and FIG. 3 is a sectional view showing the configuration of a plasma X-ray source according to the present invention. In the figure, 1 is a gas, 4 is a gas outlet, 5 is a cathode, and 7
9 is an anode, 9 is an X-ray irradiation hole, 10 is an ejected gas, 11 is an X-ray extraction direction, and 12 is an auxiliary exhaust port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 高真空に排気されたチャンバ内に陽極および陰極が対向
して配設してあり、該陽極および陰極が充放電回路を経
て高圧電源に接続されてなるＸ線発生装置において、該
陽極を陰極方向を頂点として開口部をもつ円錐状に形成
すると共にガスを噴出するチャンバ内に複数個の排気口
を備えたことを特徴とするプラズマＸ線発生装置。In an X-ray generator, an anode and a cathode are arranged facing each other in a chamber evacuated to a high vacuum, and the anode and cathode are connected to a high-voltage power source via a charging/discharging circuit. 1. A plasma X-ray generator characterized in that the chamber is formed in a conical shape with an opening at the apex and is provided with a plurality of exhaust ports in a chamber from which gas is ejected.
JP7184082U 1982-05-17 1982-05-17 Plasma X-ray generator Pending JPS58174849U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7184082U JPS58174849U (en) 1982-05-17 1982-05-17 Plasma X-ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7184082U JPS58174849U (en) 1982-05-17 1982-05-17 Plasma X-ray generator

Publications (1)

Publication Number Publication Date
JPS58174849U true JPS58174849U (en) 1983-11-22

Family

ID=30081432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7184082U Pending JPS58174849U (en) 1982-05-17 1982-05-17 Plasma X-ray generator

Country Status (1)

Country Link
JP (1) JPS58174849U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61200695A (en) * 1985-02-27 1986-09-05 マツクスウエル・ラボラトリ−ズ・インコ−ポレ−テツド Soft x rays generator
JPH01132099A (en) * 1987-11-18 1989-05-24 Hitachi Ltd X-ray generating device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61200695A (en) * 1985-02-27 1986-09-05 マツクスウエル・ラボラトリ−ズ・インコ−ポレ−テツド Soft x rays generator
JPH01132099A (en) * 1987-11-18 1989-05-24 Hitachi Ltd X-ray generating device

Similar Documents

Publication Publication Date Title
JPS58174849U (en) Plasma X-ray generator
JPS5974659U (en) Ion generator of ion implanter
JPS62136570U (en)
JPS58120558U (en) Negative ion detection device
JPS58144750U (en) Ion source of ion implanter
JPS58117053U (en) Field ionization type ion source
JPS58120557U (en) Negative ion detection device
JPS58160457U (en) X-ray fluorescence multiplier tube
JPH0472548U (en)
JPS58138265U (en) spiral battery
JPS6113456U (en) Linear cathode type electron beam irradiation device
JPS59152555U (en) ion source device
JPS6263179A (en) Rf type ion source
JPS60264016A (en) Hollow cathode
JPS6274773U (en)
JPS63134659A (en) Hollow cathode type ion source device
JPS6418568U (en)
JPS58188000U (en) Charged particle accelerator ion source cone
JPS5730298A (en) X-ray generator
JPS60140356U (en) mass spectrometer
RU96123642A (en) PLASMA ION EMITTER
JPS5982945U (en) Traveling wave tube multistage collector
JPS6180497U (en)
JPS5979969U (en) Connection structure of cartridge type electron gun
JPH02110166U (en)