JPS58167086A - Diffusion joining method - Google Patents

Diffusion joining method

Info

Publication number
JPS58167086A
JPS58167086A JP4741982A JP4741982A JPS58167086A JP S58167086 A JPS58167086 A JP S58167086A JP 4741982 A JP4741982 A JP 4741982A JP 4741982 A JP4741982 A JP 4741982A JP S58167086 A JPS58167086 A JP S58167086A
Authority
JP
Japan
Prior art keywords
bonding
joining
melting point
alloy layer
joined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4741982A
Other languages
Japanese (ja)
Inventor
Mitsuo Kato
光雄 加藤
Mitsuo Chikazaki
充夫 近崎
Akira Okayama
岡山 昭
Takao Funamoto
舟本 孝雄
Kousei Nagayama
永山 更成
Kiyoshi Otaka
大高 清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4741982A priority Critical patent/JPS58167086A/en
Publication of JPS58167086A publication Critical patent/JPS58167086A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/16Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating with interposition of special material to facilitate connection of the parts, e.g. material for absorbing or producing gas

Abstract

PURPOSE:To prevent defects such as joining failure and voids and to reduce the stage for diffusion treatment after joining considerably by placing a member to be joined which has a low m.p. alloy layer on the joint surface and a member to be joined which does not have said layer so as to face each other and joining both member. CONSTITUTION:An alloy layer 4 having a m.p. lower than the m.p. of joining members is provided on one joint surface of said members and the members are joined. Such method is employed because one of the joint surfaces is used as a base material 1 and therefore an element for lowering the melting point in the joint part is diffused and the constituting elements of the base material to be joined are made more vulnerable to diffusion in the joined part. The amt. of the intermetallc compd. to be formed in the joint part is thus decreased considerably, and defects such as joining failure and voids are less produced as compared to joining of the alloy layers to each other.

Description

【発明の詳細な説明】 本発明は拡散接合方法に係り、特に耐熱合金の拡散接合
に好適な接合方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a diffusion bonding method, and particularly to a bonding method suitable for diffusion bonding of heat-resistant alloys.

従来、耐熱合金の接合方法としては、溶接又はろう接が
あるが、溶接1は、溶接部が脆弱かつ割れやすく、まt
ろう接では接合強度が低く、接合部が低融点であるなど
の問題があり、これらはいずれも十分なものとは君先な
かつ友、従って、耐熱合金の接合にあっては、このよう
な背景から、現在、高品質の接合部を得る九めに主に拡
散接合法が適用されている。
Conventionally, welding or brazing has been used as a joining method for heat-resistant alloys.
Soldering has problems such as low joint strength and low melting point of the joint, and it is impossible to say that either of these is sufficient.Therefore, when joining heat-resistant alloys, these problems are Therefore, diffusion bonding is currently mainly used to obtain high-quality joints.

拡散接合法は、同相拡散接合法と液相拡散接合法の二種
類に分類される。同相拡散接合は、接合温度において比
較的高い単位圧力を加えなければならず、脆弱な部品中
高精度な部品などの場合、その高加圧力の危め変形音生
じやすく使用範囲が制限されるという欠点がある。液相
拡散接合は被接合材料間に低融点の薄い層(箔、粉末等
)を挿入し、これ含分して接合する方法である。しかる
に箔や粉末をインサートする方法では、接合面が複雑形
状になった場合や大型化し九場合、箔中粉末が接合面か
らずれたり、はがれtりして、接合不良を起こし中すく
信頼性が劣るという間臘点がある・ 本発明者らは、固相拡散接合に比べて高加圧力を必要と
しない液相拡散接合の利点を生かし、より確実に接合を
行なうことができる方法を開発すべく検討した結果、接
合面の一方に低融点の合金層を設けることにより、良好
な拡散接合が行なえることを見い出し、本発明に到達し
た・本発明の目的は、接合部に発生する欠陥(接合不良
、ボイド、介在物等)が極めて少なく、曳好な接合部を
得ることを可能KL、かつ低圧力で、拡散処理時間も少
ない拡散接合方法を提供することにある。
Diffusion bonding methods are classified into two types: in-phase diffusion bonding method and liquid phase diffusion bonding method. In-phase diffusion bonding requires the application of a relatively high unit pressure at the bonding temperature, and in the case of fragile or high-precision parts, the disadvantage is that the high pressurizing force tends to cause deformation noise and limits the range of use. There is. Liquid phase diffusion bonding is a method in which a thin layer with a low melting point (foil, powder, etc.) is inserted between the materials to be bonded, and the materials are then bonded together. However, with the method of inserting foil or powder, when the joint surface has a complex shape or becomes large, the powder in the foil may shift or peel off from the joint surface, resulting in poor joints and poor reliability. The present inventors have developed a method that can perform bonding more reliably by taking advantage of the advantage of liquid phase diffusion bonding, which does not require high pressure compared to solid phase diffusion bonding. As a result of extensive research, it was discovered that good diffusion bonding could be achieved by providing a low melting point alloy layer on one of the bonding surfaces, and the present invention was achieved.The purpose of the present invention is to eliminate defects ( It is an object of the present invention to provide a diffusion bonding method which makes it possible to obtain a smooth joint with extremely few bonding defects (bonding defects, voids, inclusions, etc.), and which uses low pressure and short diffusion processing time.

しかして、この目的は、被接合部材の接合面を拡散接合
によ秒接合する方法において、一方の接合面に該線接合
部材よりも低融点の合金層を設けて、他方の接合面と対
面させ、拡散接合を行なうことを特徴とする拡散接合方
法により、容馬に4成される。
The purpose of this is to provide an alloy layer with a melting point lower than that of the wire bonding material on one bonding surface and facing the other bonding surface in a method of bonding the bonding surfaces of the members to be bonded in seconds by diffusion bonding. By the diffusion bonding method, which is characterized in that the material is made of a metal material and then subjected to diffusion bonding, four parts are formed in a uniform manner.

以下に本発明の詳細な説明するe 本発明の方法は、座接合部材の一方Ofa合面に該部材
よりも低融点の合金層を設けて接合を行なうこと以外は
、従来の拡散接合方法と全く同様に行なうことができる
The present invention will be described in detail below.The method of the present invention is different from the conventional diffusion bonding method, except that an alloy layer having a lower melting point than that of the member is provided on one of the mating surfaces of the seat-joining members. It can be done in exactly the same way.

本発明において、被接合部材の接合面に設ける該部材よ
りも低融点の合金(以下、「低融点合金」という)は、
被接合部材の母材が金属又は合金の場合には、該母材と
同一の金属又は合金を基礎とする合金が最も好オしい。
In the present invention, an alloy having a lower melting point than that of the member (hereinafter referred to as "low melting point alloy") provided on the joint surface of the member to be joined is
When the base material of the members to be joined is a metal or an alloy, an alloy based on the same metal or alloy as the base material is most preferable.

例えば、被接合部材がN1基合金である場合には、Ni
基合金にさらに融点降下元素としてBやSl等を含有す
る低融点の合金の層を設けるのが有利である。特に、こ
の場合、Bは固体内での拡散速度が速いtめ、Bの存在
は、拡散により接合部の均質化を良好にするので好適で
ある。
For example, if the member to be joined is an N1-based alloy, Ni
It is advantageous to further provide the base alloy with a layer of a low melting point alloy containing B, Sl, etc. as a melting point depressing element. Particularly in this case, since B has a fast diffusion rate in the solid, the presence of B is preferable because it improves the homogenization of the joint by diffusion.

本発明の、被接合部材〇一方に誉接合部材より低融点合
金層を設けることは、従来法の箔や粉末をインサートし
て接合する方法で生起する箔中粉末の接合面からのズレ
やハガレなどによる接合不良を防止することができる。
In the present invention, the provision of a lower melting point alloy layer on one side of the member to be joined than the Homare joining member prevents the displacement of the powder in the foil from the joining surface that occurs in the conventional method of inserting foil or powder and joining. It is possible to prevent bonding defects due to peeling, etc.

さらに低融点合金層を設は危たわ、接合時間も短く、接
合時に必要な圧力は、小さくてよ14(Dで接合時の高
加圧力によ秒発生する変形を防止することができる。
Furthermore, it is dangerous to provide a low melting point alloy layer, the bonding time is short, and the pressure required during bonding is small enough to prevent deformation caused by high pressure during bonding.

iた低融点合金層が被接合部材の母材の構成元素を含む
場合には、さらに拡散処理時間が短縮され、極めて有利
である。
When the low melting point alloy layer contains constituent elements of the base material of the members to be joined, the diffusion treatment time is further shortened, which is extremely advantageous.

本発明の接合面に低融点合金層管設けた被接合部材と被
接合部材とを対面させて接合(合金層と母材との接合)
することは、接合面に低融点合金層を設けた被接合部材
同士の接合(合金層同士の接合)又は箔をインサートす
る接合に比べ接合部の均質化が促進し、拡散処理時間が
短縮される。
According to the present invention, a member to be joined with a low melting point alloy layer pipe provided on the joint surface is joined by facing each other (joining of an alloy layer and a base material)
This method promotes homogenization of the joint and shortens the diffusion process time compared to joining parts to be joined with a low melting point alloy layer on the joint surface (joining between alloy layers) or joining by inserting foil. Ru.

これは、接合面の一方を母材としf#:、ため、接合部
の融点降下元素が拡散され、被接合母材O構成元素が接
合部に拡散されやすくなるためである。しかもこれによ
り1接合部の金属間化合物の生成量も非常に少なく、本
発明による接合は、合金層同士の接合に比べ接合不良や
ボイド等の欠陥の発生が少なく接合率が向上する。
This is because one of the bonding surfaces is used as the base material f#:, so the elements that lower the melting point of the bonded portion are diffused, and the constituent elements of the base material O to be bonded are more likely to be diffused into the bonded portion. Moreover, as a result, the amount of intermetallic compounds produced in one joint is extremely small, and the bonding according to the present invention has fewer defects such as poor bonding and voids than bonding between alloy layers, and improves the bonding rate.

次に本発明を実施例管挙げてさらに具体的に説明するが
、本@明はその要旨を越えない@動、以下の実施例に限
定されるものではない・実施例 1 供試材は、Ni基合金としてlN−738LCを用いた
。供試材の接合面に低融点合金層を形成する友めにN1
−ntB:s*)粉末(粒径7Is〜100μm)t−
z用しfcユ 低融点合金層の形成法は、lN−738LCの接合面に
上記したN1−B粉末をバインダー剤(アクリル樹脂)
で固着させ、レーザ照射して合金層管形成した。形成し
九合金層の融点は約105(1〜110(lであり、合
金層vlIIは約250 μm−300μmである。
Next, the present invention will be explained in more detail by citing examples, but the present invention does not go beyond the gist and is not limited to the following examples.Example 1 The test materials were: 1N-738LC was used as the Ni-based alloy. N1 to form a low melting point alloy layer on the joint surface of the test materials
-ntB:s*) powder (particle size 7Is~100μm) t-
The method for forming the low melting point alloy layer for Z and fc is to apply the above N1-B powder to the joint surface of IN-738LC as a binder agent (acrylic resin).
The alloy layer was fixed in place by laser irradiation to form an alloy layer tube. The melting point of the nine alloy layers formed is about 105 (1-110), and the alloy layer vlII is about 250 μm-300 μm.

このようにして低融点合金層を一方の接合面にのみ形成
させ次場合(本発明方法、第1図(3)参照)、及び、
低融点合金層を両方の接合面に形成させ几場合(比較例
、第1図(2)参照)について、第1表に示す如自接合
秦件で拡散接合を行なった。得らよ抄求め几・その結果
、本発明方法による接合部の接合率は99IIIであり
、低融点合金層同士の接合部の接合率が65チであるこ
とから、本発明方法によれば極めて高い接合率が得られ
ることが立証され友、また、これらの接合部の金属組織
の顕微鏡写真′fr第2図に示すが、第2図よ抄、本発
明方法によれば(82図(b)参照)接合部が均一で、
合金層同士の接合部(第2図(a)参照)に比べて。
In this way, the low melting point alloy layer is formed only on one joint surface (method of the present invention, see FIG. 1 (3)), and
In the case where a low melting point alloy layer was formed on both bonding surfaces (comparative example, see FIG. 1 (2)), diffusion bonding was performed under the conditions shown in Table 1. As a result, the bonding rate of the bonded portion by the method of the present invention is 99III, and the bonding rate of the bonded portion of the low melting point alloy layers is 65III, so the bonding rate of the bonded portion by the method of the present invention is extremely It has been proven that a high bonding rate can be obtained, and the micrograph of the metallographic structure of these bonded parts is shown in Fig. 2. )) The joints are uniform,
Compared to the joint between alloy layers (see Figure 2(a)).

接合不良中ボイド等の欠陥が大幅に改善されていること
が明らかである。
It is clear that defects such as voids during poor bonding are significantly improved.

第1表 実施例 2 接合温度、加圧力及び雰囲気を実施例1と同一に設定し
て、実施例1と同一の供試材について、被接合部材の接
合面にJIS規格BNi−2ろう材をインサートして拡
散接合し友場合(比較例、第1図(1)参照)、接合面
に低融点合金層(形成方法は実施例1と同様)′t−有
する被接合部材同士を拡散接合した場合(比較例、第1
図(2)参照)、及び、一方の接合面にのみ低融点合金
層(形成方法は実施例1と同様)を有する拡散接合の場
合c本発明方法、第1図(3)参照)の接合部が均質に
なるまでに要する処理時間を求めた。結果を第2表に示
す。
Table 1 Example 2 JIS standard BNi-2 brazing filler metal was applied to the welding surfaces of the members to be welded using the same test materials as in Example 1, with the welding temperature, pressure and atmosphere set the same as in Example 1. In the case of inserting and diffusion bonding (comparative example, see Fig. 1 (1)), the parts to be bonded having a low melting point alloy layer (forming method is the same as in Example 1) on the bonding surfaces were diffusion bonded. Case (comparative example, 1st
In the case of diffusion bonding with a low melting point alloy layer (formation method is the same as in Example 1) only on one joint surface (see Figure 1 (3)), and diffusion bonding method according to the present invention (see Figure 1 (3)) The processing time required until the parts became homogeneous was determined. The results are shown in Table 2.

第2表 第2表より、本発明の接合方法によれば、他の方法に比
べて大幅に拡散処理時間を短縮できることがわかる。ま
t*実施例において、本発明の方法は、金属間化合物の
生成4、他の方法に比べて少ないことが確認され九〇 実施例 3 供試材は、NI基台IDlN−738LCt用い友、接
合面に低融点合金層を形成する方法はほう化処理法で行
なり友、第3表にほう化処理条件を示す、第3表に示す
条件で形成し交合金層の融点は約1135t″紡後であ
り、合金層の厚さは約20μmである。
Table 2 From Table 2, it can be seen that the bonding method of the present invention can significantly shorten the diffusion treatment time compared to other methods. In the Examples, it was confirmed that the method of the present invention produces less intermetallic compounds compared to other methods. The low melting point alloy layer was formed on the joint surface by a boriding process. Table 3 shows the boriding conditions. When formed under the conditions shown in Table 3, the melting point of the alloy layer was approximately 1135 t". After spinning, the thickness of the alloy layer is about 20 μm.

第3表 このようにして低融点合金層を一方の接合面にのみ形成
させて、合金層と母材の拡散接合t6なつ友場合c本発
明方法)及び低融点合金属を両方の接合面に形成させて
、合金層同士の拡散接合を行なつ九場合(比較例)につ
いて、実施例1と同様に接合率を求めた。その結果、本
発明方法の接合率は98チで、比較例の接合率85−に
比べて極めて優れていることが判明した。
Table 3 In this way, the low melting point alloy layer is formed only on one joint surface, and the alloy layer and the base material are diffusion bonded (t6). The bonding rate was determined in the same manner as in Example 1 for nine cases (comparative examples) in which alloy layers were formed and diffusion bonded to each other. As a result, it was found that the bonding rate of the method of the present invention was 98, which was extremely superior to the bonding rate of 85- in the comparative example.

ま友、両接合部の金属組織の顕微鏡写真を示す第3図か
ら、明らかなように、合金層同士の拡散接合部(第3図
(a)参照)はボイド状の欠陥の発生が多い。従って、
接合率が約SS*と悪く、金属間化合物の生成も多い。
As is clear from FIG. 3, which shows a microscopic photograph of the metal structure of both joints, void-like defects often occur in the diffusion joint between alloy layers (see FIG. 3(a)). Therefore,
The bonding rate is poor at approximately SS*, and intermetallic compounds are often formed.

これに対して、本発明の合金層と母材との拡散接合部(
第3図(ロ)参照)は、ボイド状欠陥の発生もなく、従
って接合率が約98チと非常に良く、金属間化合物の生
成も非常に少ない。
On the other hand, the diffusion bond between the alloy layer and the base material of the present invention (
Referring to FIG. 3(b)), there is no occurrence of void-like defects, so the bonding ratio is very good at about 98 inches, and the formation of intermetallic compounds is also very small.

実施例 4 実施例3におけると同様の低融点合金層の形成方法を採
用し九以外は実施例2と全く同様にして、各種の拡散接
合方法における拡散処理時間を求めた。結果を第4表に
示す。
Example 4 The same method of forming a low melting point alloy layer as in Example 3 was employed, and the diffusion treatment time in various diffusion bonding methods was determined in the same manner as in Example 2 except for the following. The results are shown in Table 4.

第4表 第4表よ抄、本発明方法によれば、拡散逃珊時間が大幅
に短縮できることが明らかである。
Table 4 From Table 4, it is clear that according to the method of the present invention, the diffusion and escape time can be significantly shortened.

本発明によれば、接合面に低融点合金層を有する被接合
部材とこれを有しない被接合部材とを対面させて接合す
ることにより、接合不良中ボイド等の欠陥を防止すると
ともに接合後に必要な拡散処理工程を大幅に短縮するこ
とができる。
According to the present invention, by joining a workpiece having a low melting point alloy layer on the joint surface and a workpiece without such a layer facing each other, defects such as voids during joint failure can be prevented, and defects necessary after joining can be prevented. The diffusion process can be significantly shortened.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は各種拡散接合方法の概略を説明する断面図であ
り、(1)は箔インサート拡散接合、(2)は合金層同
士の拡散接合、(3)は合金層と母材との拡散接合c本
発明方法)をそれぞれ示すものである。 第2図及び第3図は各々実施例1及び実施例3における
接合部の比較を示し、第2図(a)及び第3図(a)F
i、比較例に係る接合部の金属組織の顕微鏡写真であり
、第2図φ)及び第3図(b)は、本発明方法に係る接
合部の金属組織の顕微鏡写真である。 1・・・母材、2・・・インサート箔、3・・・低融点
合金層筒 1 図 (+)          /2)         
 (3)vl Z  回
Figure 1 is a cross-sectional view explaining the outline of various diffusion bonding methods, (1) is foil insert diffusion bonding, (2) is diffusion bonding between alloy layers, and (3) is diffusion bonding between alloy layer and base material. The bonding process (method of the present invention) is shown respectively. Figures 2 and 3 show a comparison of the joints in Example 1 and Example 3, respectively, and Figure 2 (a) and Figure 3 (a)
i is a microscopic photograph of the metallographic structure of the joint according to the comparative example, and FIG. 2 φ) and FIG. 1... Base material, 2... Insert foil, 3... Low melting point alloy layer tube 1 Figure (+) /2)
(3) vl Z times

Claims (1)

【特許請求の範囲】 1、被接合部材の接合面を拡散接合により接合する方法
において、一方の接合面に該被接合部材よりも低融点の
合金層を設けて、他方の接合面と対面させ、拡散接合を
行なうことを特徴とする拡散接合方法。 2、特許請求の範囲第1項に記載の拡散接合方法におい
て、該合金層が、被接合部材の母材0構成元素を含むこ
とを特徴とする方法。 1 %許請求の範囲第1項又は第2項に記載の拡散接合
方法において、肢被接合部材が耐熱合金であることを特
徴とする方法・ 表 特許請求の範囲113項に記載の拡散接合方法にお
いて、該被接合部材に設ける低融点の合金層が、該耐熱
合金に融点降下元素管添加し九合金からなることt特徴
とする方法−
[Claims] 1. In a method of joining joining surfaces of members to be joined by diffusion bonding, an alloy layer having a lower melting point than that of the joining surfaces is provided on one joining surface, and the alloy layer is made to face the other joining surface. , a diffusion bonding method characterized by performing diffusion bonding. 2. The diffusion bonding method according to claim 1, wherein the alloy layer contains zero constituent elements of the base material of the members to be bonded. 1% allowance The diffusion bonding method according to claim 1 or 2, characterized in that the member to be joined is a heat-resistant alloy. A method characterized in that the low melting point alloy layer provided on the member to be welded is made of an alloy made by adding a melting point lowering element to the heat resistant alloy.
JP4741982A 1982-03-26 1982-03-26 Diffusion joining method Pending JPS58167086A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4741982A JPS58167086A (en) 1982-03-26 1982-03-26 Diffusion joining method

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Application Number Priority Date Filing Date Title
JP4741982A JPS58167086A (en) 1982-03-26 1982-03-26 Diffusion joining method

Publications (1)

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JPS58167086A true JPS58167086A (en) 1983-10-03

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JP4741982A Pending JPS58167086A (en) 1982-03-26 1982-03-26 Diffusion joining method

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4736400A (en) * 1986-01-09 1988-04-05 The Machlett Laboratories, Inc. Diffusion bonded x-ray target
US4811892A (en) * 1986-03-08 1989-03-14 Messerschmitt-Boelkow-Blohm Gmbh Method for diffusion welding under isostatic pressure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4736400A (en) * 1986-01-09 1988-04-05 The Machlett Laboratories, Inc. Diffusion bonded x-ray target
US4811892A (en) * 1986-03-08 1989-03-14 Messerschmitt-Boelkow-Blohm Gmbh Method for diffusion welding under isostatic pressure

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