JPS58166552A - Electrostatic capacity type video disk stylus - Google Patents

Electrostatic capacity type video disk stylus

Info

Publication number
JPS58166552A
JPS58166552A JP4712282A JP4712282A JPS58166552A JP S58166552 A JPS58166552 A JP S58166552A JP 4712282 A JP4712282 A JP 4712282A JP 4712282 A JP4712282 A JP 4712282A JP S58166552 A JPS58166552 A JP S58166552A
Authority
JP
Japan
Prior art keywords
stylus
electrode
thin film
alloy
corrosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4712282A
Other languages
Japanese (ja)
Inventor
Yoshitsugu Miura
義從 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4712282A priority Critical patent/JPS58166552A/en
Publication of JPS58166552A publication Critical patent/JPS58166552A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/06Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using record carriers having variable electrical capacitance; Record carriers therefor
    • G11B9/07Heads for reproducing capacitive information
    • G11B9/075Heads for reproducing capacitive information using mechanical contact with record carrier, e.g. by stylus

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To prevent a decrease in signal reproduction level, by interposing a Ti thin film between a diamond base and a thin electrode film made of corrosion- resistant metal or alloy. CONSTITUTION:On one flank of a stylus after flushing, Ti6 is vapor-deposited to about 0.05mum by ion plating and then Ni is vapor-deposited to about 0.2mum as an electrode 5 in the same tank. The stylus is equipped to a pickup system and keel work is carried out. In a life test, signal detectin characteristics do not deteriorate at all even 300hr later. The same result is obtained even when (Ni- Cr) alloy, Co, Ta, or Nb is used instead of Ni.

Description

【発明の詳細な説明】 本発明は、静電容量型ビデオディスク用スタイラスの電
極構造及び電極材料に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrode structure and electrode material for a stylus for a capacitive video disc.

従来からよく知られた靜電賽−量型ビデオディスク用ス
タイラスとして、CED方式、(RCA方式)の場合を
例にとって説明する。第1図は同方式用スタイ2スの先
端部近傍を示す概略図で、1はダイアモンド基体、2は
キール部、5はディスクを滑走する滑走面、4は電極で
ある。
An explanation will be given by taking as an example the case of the CED method (RCA method) as a conventionally well-known stylus for an electric power type video disc. FIG. 1 is a schematic diagram showing the vicinity of the tip of a stylus for the same system, in which 1 is a diamond base, 2 is a keel, 5 is a sliding surface that slides on a disk, and 4 is an electrode.

電極4としては、一般的に膜厚的0.25#mのT1薄
膜が用いられている。T1電極形成法としては、蒸着法
、スパッタリング法、イオンブレーティング法等が用い
られている。電極材料としてT1を用いる理由は、同薄
膜のダイアモンドに対する付着強度が他の材料に比べ比
較的大きいという事実によるものである。
As the electrode 4, a T1 thin film having a film thickness of 0.25 #m is generally used. As a method for forming the T1 electrode, a vapor deposition method, a sputtering method, an ion blating method, etc. are used. The reason for using T1 as the electrode material is due to the fact that the adhesion strength of this thin film to diamond is relatively high compared to other materials.

さて前述せる構造のスタイラスをピックアップ系に装着
し、信号再生を行なう場合、後述せる信頼性に関する問
題点が存在する。
Now, when a stylus having the above-mentioned structure is attached to a pickup system and signal reproduction is performed, there are problems regarding reliability, which will be described later.

すなわち、該スタイラスを用いて信号再生を行なった場
合、50〜60時間経過後、突如とし1信号再′生レベ
ルが低下し、はなはだしき場合には信号再生不能に陥い
る。また上記した以外の場合においても、如々に信号再
生レベルが低下し、100〜200時間後にはS/N比
が低下する。
That is, when a signal is reproduced using the stylus, the reproduction level of one signal suddenly drops after 50 to 60 hours, and in extreme cases, it becomes impossible to reproduce the signal. Also, in cases other than those described above, the signal reproduction level gradually decreases, and the S/N ratio decreases after 100 to 200 hours.

上述し九現象は、T1膜厚が大きいほど、またTi電極
形成時におけるダイアモンド基体の支持温度が低い程顕
著に現われるようである。
The nine phenomena mentioned above seem to appear more prominently as the T1 film thickness increases and as the supporting temperature of the diamond substrate during formation of the Ti electrode decreases.

なお、寿命試験に珀いたプレーヤにおいて、ディスクに
おけるチャージアップ防止用の対策が施されていること
は新めて明記するまでもない。
It goes without saying that measures were taken to prevent charge-up on the discs in the players that underwent the life test.

以上、従来のスタイラスにおいては前述せる解決すべき
問題点があった。
As mentioned above, the conventional stylus has the above-mentioned problems that need to be solved.

本発明の目的は、前述せる従来技術のもつ信頼性上の問
題点を解決し、信号再生レベル−の低下しない静電容量
型ビデオディスク用スタイラスを提供するにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a stylus for a capacitive video disk that solves the reliability problems of the prior art mentioned above and does not cause a drop in signal reproduction level.

本発明の要点は、耐高温酸化性の点においてT1より優
れた材料を電極材料として用いることにより、従来技術
のもつ問題点を解決しようとするものである。
The gist of the present invention is to solve the problems of the prior art by using a material superior to T1 in terms of high temperature oxidation resistance as an electrode material.

以下、本発明の要点について、更に詳細に説明する。Hereinafter, the main points of the present invention will be explained in more detail.

前述せる信号検出レベルの低下したスタイラスについて
、その先端部近傍をSEMで観察し系統的に検討を行な
った結果、第2図に示したような幾つかのモードがある
ことがわかった。第2図は電極損傷の状態を模式的に示
すスタイラス長手方向概略側断面図である。
As a result of observing the vicinity of the tip of the stylus with a reduced signal detection level using an SEM and conducting a systematic study, it was found that there are several modes as shown in FIG. 2. FIG. 2 is a schematic side sectional view in the longitudinal direction of the stylus, schematically showing the state of electrode damage.

すなわら、第1のモードは、図2−aに示した如く、T
1電極の損傷を受けた部分は非常にゆるやかなテーバ形
状をなしているものであり、第2のモードは図2−bに
示した如く、損傷部においてT1の隆起が見られるもの
である。
That is, in the first mode, as shown in FIG. 2-a, T
The damaged part of the first electrode has a very gentle taper shape, and in the second mode, as shown in FIG. 2-b, a protrusion of T1 can be seen in the damaged part.

また、無損傷の部分ではT1の結晶粒が明確に観察され
るにもかかわらず、いずれの場合も損傷部においては結
晶粒が観察されなかった。
Further, although crystal grains of T1 were clearly observed in the undamaged part, no crystal grains were observed in the damaged part in any case.

以上前述せる損傷モードよυ、その原因が単にダイアモ
ンドとT11を極との付着強度不足という単純なもので
はないことは明らかである。更にその損傷モードより、
電極損傷部はかなりの高温状態を級友ような形跡がうか
がえる。
It is clear that the cause of the damage mode described above is not simply insufficient adhesion strength between the diamond and the T11 pole. Furthermore, from the damage mode,
There is evidence that the damaged part of the electrode was in a very high temperature state.

スタイラス先端部が高温状態になる原因としては、第1
にディスクのチャージアップによるスパークが考えられ
る。しかしこれに対しては前述したように、対策済みで
あり、本損傷の原因である確率は非常に少ない。
The first cause of the stylus tip becoming hot is
Sparks may be caused by charging up the disc. However, as mentioned above, countermeasures have been taken against this, and the probability that this is the cause of this damage is extremely low.

さて、Tl金属のq#敵として−Tt (ブロック状)
は常圧下、自然発火する唯一の金属であり、Oa雰囲気
25気圧の条件下では、ブロック状のT1はすみやかに
酸化され、全て酸化チタンと化してしまう。この原因と
して、IIk初の段階で形成された酸化チタンはTi金
属中に溶は込み、常に新しいT1金属が表面に出現する
ためといわれている。このT1金属の新しい面が出現す
る速度は温度の上昇と共に大きくなる。また常温、常圧
下で通常のT1ブロックが自然発火しない理由は表面が
酸化膜で被われ、かつ常温においては酸化チタンのT1
金属に対する溶解度が低いことによるものである。
Now, as Tl metal's q# enemy -Tt (block-like)
is the only metal that spontaneously combusts under normal pressure, and in an Oa atmosphere of 25 atmospheres, the block-shaped T1 is quickly oxidized and completely turns into titanium oxide. The reason for this is said to be that the titanium oxide formed at the initial stage of IIk dissolves into the Ti metal, and new T1 metal always appears on the surface. The rate at which this new surface of T1 metal appears increases with increasing temperature. Also, the reason why a normal T1 block does not spontaneously ignite at room temperature and pressure is that the surface is covered with an oxide film, and at room temperature, the T1 block of titanium oxide does not ignite spontaneously.
This is due to its low solubility in metals.

すなわち、従来技術にみられる電極損傷の原因は、前述
した高温状態に2けるT1の耐酸化性の劣化にある。
That is, the cause of the electrode damage seen in the prior art is the deterioration of the oxidation resistance of T1 in the above-mentioned high temperature condition.

つまり、ディスク滑走時において、スタイラスの先端部
におけるT1電極は常に新しい金属表面を露出している
。加えて摩擦熱により一先端部の温度は、かなシ上昇し
ている龜のと推定される。このような条件下ではT1が
前述したように自然発火しやすい状態にある。このよう
な状態に他の付加的要因が加わった場合は、T1が自然
発火し、前述せる電極損傷が発生することになる。
That is, when the disk is sliding, the T1 electrode at the tip of the stylus always exposes a new metal surface. In addition, it is estimated that the temperature at one tip of the barrel has increased considerably due to frictional heat. Under such conditions, T1 is likely to spontaneously ignite as described above. If other additional factors are added to this condition, T1 will spontaneously ignite, causing the electrode damage described above.

前述し九モデルにおいては、電極膜厚が厚くなればなる
ほど、損傷の程度が大きくなることは、新ためて述′べ
るまでもない。
It goes without saying that in the nine models mentioned above, the thicker the electrode film, the greater the degree of damage.

また゛、T1蒸着時のダイアモンド基体温度が高くなる
ほど、Ti薄膜内部への炭素の拡散が起こり、結果とし
て耐酸化性が向上することはよく知られた事実である。
Furthermore, it is a well-known fact that the higher the diamond substrate temperature during T1 deposition, the more carbon diffuses into the Ti thin film, resulting in improved oxidation resistance.

このことよシ、前述したT1蒸着時のダイアモンド基体
の温度が高いほと損傷が軽微である事実が説明される。
This explains the aforementioned fact that the higher the temperature of the diamond substrate during T1 deposition, the less damage occurs.

以上、述べた如く、従来技術の問題点を解決するために
は、耐高温酸化性がT1よシ優れた耐食性金属あるいは
合金材料を電極として用いればよいことになる。しかし
、系統的検討の結果そのような材料は、Tiに比ベダイ
アモノドに対する付着強度が小さく、ディスク滑走時に
′#1他がはく離するという間趙点があることがわかっ
た。このことよシ、接合層として、T1薄膜をダイアモ
ンド基体と耐食性金属あるいは合金から成る電極薄膜と
の間に介在させる方法を考案するに至った。
As mentioned above, in order to solve the problems of the prior art, it is sufficient to use a corrosion-resistant metal or alloy material that has better high-temperature oxidation resistance than T1 as an electrode. However, as a result of a systematic study, it was found that such materials have a lower adhesion strength to diamonds than Ti, and there is a problem in which the materials such as '#1 and others peel off when the disk slides. In view of this, we have devised a method in which a T1 thin film is interposed as a bonding layer between a diamond substrate and an electrode thin film made of a corrosion-resistant metal or alloy.

本発明について、実施例を用いて更に評#iBK説明す
る。
The present invention will be further explained using examples.

第5図は本発明によシ成るスタイラス先端部近傍の概略
図である。、図中、5は本発明により成る耐食性金属あ
るいは合金を用い九電極、6はT1薄膜(膜厚;約0.
05.am )である。
FIG. 5 is a schematic view of the vicinity of the tip of the stylus according to the present invention. In the figure, 5 is a nine electrode made of a corrosion-resistant metal or alloy according to the present invention, and 6 is a T1 thin film (thickness: approximately 0.
05. am).

(実施例1) 洗浄後のスタイラスの11111面に、イオンブレーテ
ィング法を用いて、T1を約0.05μm厚に蒸着し、
その後同一槽内で電極5としてN1を約0.2μm厚に
蒸着した。その後同スタイラスをピックアップ系に装着
し、第3図に示し九如くキール加工を行なった。
(Example 1) T1 was deposited to a thickness of about 0.05 μm on the 11111 surface of the stylus after cleaning using the ion blating method,
Thereafter, N1 was evaporated to a thickness of about 0.2 μm as an electrode 5 in the same tank. Thereafter, the same stylus was attached to the pickup system, and keel processing was performed as shown in Fig. 3.

前述した方法で作成したスタイラスについて寿命試験を
行なった結果、500時間経過後も信号検出特性に何ら
劣化はみられなかり九。
As a result of carrying out a life test on the stylus made by the method described above, no deterioration was observed in the signal detection characteristics even after 500 hours.

(実施例2) 実施例1におけるN1の代シに(Nl−Cr)合金を用
いても実施例1と同一の結果が得られた。
(Example 2) Even when a (Nl-Cr) alloy was used in place of N1 in Example 1, the same results as in Example 1 were obtained.

(実施例5) 実施例1におけるN1の代シにCoを用いても実施例1
と同一結果が得られた。
(Example 5) Even if Co is used as a substitute for N1 in Example 1, Example 1
The same results were obtained.

(実施例4) 実施例1におけるN1の代りに′1′aを用いても実施
例1と同一の結果が得られた。
(Example 4) Even when '1'a was used in place of N1 in Example 1, the same results as in Example 1 were obtained.

(実施例5) 実施例1におけるN1の代9にNbを用いても実施例1
と同一の結果が得られた。
(Example 5) Even if Nb is used as substitute 9 for N1 in Example 1, Example 1
The same results were obtained.

(実施例6) 実施例1におけるN1の代りにNi−Cr合金を用いて
本実施例1と同一の結果が得られた。
(Example 6) The same results as in Example 1 were obtained by using a Ni-Cr alloy in place of N1 in Example 1.

なお、本実施例において電極形成法としてイオンブレー
ティング法を用いたが、蒸着法、スパッタリング法等の
他の方法を用いても同一の効果が得られることは新めて
述べるまで°もない。
In this example, the ion blating method was used as the electrode forming method, but it goes without saying that the same effect can be obtained by using other methods such as vapor deposition and sputtering.

以上、前述したように本発明により信号検出特性の劣化
がほとんど発生しない静電容量型ビデオディスク用スタ
イラスの提供が可能となつ九。この意味で本発明の該ス
タイラスにおける信頼性向上に対する寄与は極めて大き
い。
As described above, the present invention makes it possible to provide a stylus for capacitive video discs in which signal detection characteristics hardly deteriorate. In this sense, the contribution of the present invention to improving the reliability of the stylus is extremely large.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、従来のID方式ビデオディスク用スタイ2ス
の先端部近傍の概略図、5g2図は、電極損傷モードの
概略を示す該スタイラスの概略側断面図、第5図は、本
発明により成るCKD方式ビデオディスク用スタイラス
の先端部近傍の概略図である。 1・・・ダイアモンド基体 2・・・キール部3・・・
滑走面      4・・・電極5・・・耐食性金属あ
るいは合金から成る電極6・・・Ti1il膜 代理人弁理士 薄 1)利、挙 1(P t)・−;−・I 才2図 才   3   図
FIG. 1 is a schematic diagram of the vicinity of the tip of a conventional ID system video disk stylus, FIG. 5g2 is a schematic side sectional view of the stylus showing an outline of the electrode damage mode, and FIG. FIG. 2 is a schematic diagram of the vicinity of the tip of a stylus for a CKD video disc. 1...Diamond base 2...Keel part 3...
Sliding surface 4...Electrode 5...Electrode made of corrosion-resistant metal or alloy 6...Ti1il membrane agent Patent attorney Usui 1) 利、Kyo1 (P t)・-;-・I 2 figure 3 figure

Claims (1)

【特許請求の範囲】[Claims] t 情報信号が幾何学的形状の変化として記録されてい
る媒体を相対的に走査して、骸情報信号を静電容量の変
化として検出するスタイラスにおいて、該スタイラスの
長手方向の少くとも1側面に電極が形成され、鋏電極が
T1薄膜及び耐食性金属薄膜あるいは耐食性合金薄膜か
ら成る2層構造を有することを%黴とする静電容量型ビ
デオディスク用スタイラス。
t In a stylus that detects a skeleton information signal as a change in capacitance by relatively scanning a medium on which an information signal is recorded as a change in geometric shape, at least one side surface in the longitudinal direction of the stylus is used. A stylus for a capacitive video disc, in which an electrode is formed, and the scissors electrode has a two-layer structure consisting of a T1 thin film and a corrosion-resistant metal thin film or a corrosion-resistant alloy thin film.
JP4712282A 1982-03-26 1982-03-26 Electrostatic capacity type video disk stylus Pending JPS58166552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4712282A JPS58166552A (en) 1982-03-26 1982-03-26 Electrostatic capacity type video disk stylus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4712282A JPS58166552A (en) 1982-03-26 1982-03-26 Electrostatic capacity type video disk stylus

Publications (1)

Publication Number Publication Date
JPS58166552A true JPS58166552A (en) 1983-10-01

Family

ID=12766346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4712282A Pending JPS58166552A (en) 1982-03-26 1982-03-26 Electrostatic capacity type video disk stylus

Country Status (1)

Country Link
JP (1) JPS58166552A (en)

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