JPS5816520A - Method of producing ekectret - Google Patents

Method of producing ekectret

Info

Publication number
JPS5816520A
JPS5816520A JP56113514A JP11351481A JPS5816520A JP S5816520 A JPS5816520 A JP S5816520A JP 56113514 A JP56113514 A JP 56113514A JP 11351481 A JP11351481 A JP 11351481A JP S5816520 A JPS5816520 A JP S5816520A
Authority
JP
Japan
Prior art keywords
electret
voltage
present
metal layer
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56113514A
Other languages
Japanese (ja)
Inventor
茂 藤原
栄 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56113514A priority Critical patent/JPS5816520A/en
Publication of JPS5816520A publication Critical patent/JPS5816520A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明はエレクトレットの製造方法に係り、特に両面に
金属層を一体化したエレクトレットの製造方法に関する
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an electret, and particularly to a method for manufacturing an electret in which metal layers are integrated on both sides.

周知のようにエレクトレットとは自発分極を持たない誘
電体物質に永久的に持続する電気的分極。
As is well known, an electret is an electrical polarization that persists permanently in a dielectric material that does not have spontaneous polarization.

を付与した事を特徴とする物質として定義されている。It is defined as a substance that is characterized by being endowed with.

この様に定義されるエレクトレットとは、広義には圧電
性、無電性を利用できるエレクトレットと、電気分極に
よって生じる表面電位を利用するエレクトレットに分類
される。
Electrets defined in this manner are broadly classified into electrets that can utilize piezoelectricity and non-electroactivity, and electrets that utilize surface potential generated by electric polarization.

この内、前者の圧電性、焦電性を利用するエレクトレッ
トは通常誘電性素体の両面に電極を設け、所定温度に加
熱後直流電圧を印加して分極処理を施した後、印加電圧
を零とすることにより得られる。
Among these, the former type of electret, which utilizes piezoelectricity and pyroelectricity, usually has electrodes on both sides of a dielectric element, heats it to a predetermined temperature, applies a DC voltage to polarize it, and then reduces the applied voltage to zero. It can be obtained by

このエレクトレットは外部に対して静電界を生ぜず、表
面電位を利用する事はできないが、圧電性、焦電性を有
するものである。
Although this electret does not generate an electrostatic field to the outside and cannot utilize surface potential, it has piezoelectricity and pyroelectricity.

これに対して、後者の表面電位を利用できるエレクトレ
ットは静電型ピックアップ、静電型マイクロホンや静電
型ヘッドホン、静電型スピーカなどの機械−電気変換器
、電気−音響変換器の成極電圧源として広く用いられて
おり、この他にも電位計、放射線量計、直流高子電源、
静電記憶装置等にも使用可能であや、利用価値の高いも
のである。
On the other hand, electrets that can utilize the latter surface potential are electrostatic pickups, electrostatic microphones, electrostatic headphones, electrostatic speakers, and other mechanical-electrical transducers, and electrostatic-acoustic transducers. It is widely used as a power source, and is also used in electrometers, radiation dosimeters, DC polymer power supplies,
It can also be used in electrostatic storage devices, etc., and has high utility value.

この様なエレクトレットの製造方法として、一般にいわ
ゆる熱エレクトレツト化方法、エレクトロ・エレクトレ
ット化方法が用いられているが、これらの方法を用^た
場合には、第2図曲線Aに示シタ如くエレクトレットの
表面電位(以下エレクトレット電圧と称す)分布が不均
一にな9易く、またエレクトレット電圧の制御が必ずし
も十分に行なえな込という欠点を有し、前述し°九機械
−電気変換器ある力は電気−音響変換器の種′々の特性
に悪影響を与えていた。
Generally, the so-called thermal electretization method and electro-electretization method are used as methods for producing such electrets, but when these methods are used, electrets are produced as shown in curve A in Figure 2. The surface potential (hereinafter referred to as electret voltage) distribution tends to be uneven, and the electret voltage cannot always be controlled sufficiently. - It had an adverse effect on various characteristics of the acoustic transducer.

本発明d上記の点に鑑み表面電位を利用するエレクトレ
ットレツト(以下単にエレクトレットト称す。)にお贋
でエレクトレットの電圧分布が均一で、かつエレクトレ
ット電圧の制御が容易なエレクトレットの製造方法゛を
提供する事を目的とする。
The present invention d In view of the above points, we provide a method for producing an electret (hereinafter simply referred to as electret) that utilizes surface potential, in which the voltage distribution of the electret is uniform and the electret voltage can be easily controlled. The purpose is to do.

本発明はエレクトレット材料の両面に金TlI4#を一
体化したエレクトレットにお論て、前記金1間に直流電
圧全印加し、前記直流電圧を印加した状態からこの電圧
印加を中止してエレクトレット化処理を行なうエレクト
レットの製造方法とは別な手段によってヒ記目的を達成
するものである。
The present invention deals with an electret in which gold TlI4# is integrated on both sides of the electret material, and the electret processing is performed by applying a full DC voltage across the gold 1, and then stopping this voltage application from the state where the DC voltage is applied. This purpose is achieved by means different from the method for producing electrets.

すなわち、本発明はエレクトレット材料の両面に金属;
@を一体化したエレクトレット素子において、前記金属
層の片面に誘電体物質を密接加圧した後剥鍾してエレク
トレット化処理を行なうエレクトレットの製造方法であ
る□ つまり本発明方法は、第1図に示す如く、ニレ□りルッ
ト材料11)の両面に一体化された金属1(21゜(2
10片面の金網層表面t−1llt体物質で加圧、すな
わち圧接および剥離することによって金属層(2)が帯
電するという知見に基づくもので、稲々の実験を行なつ
九結果、本発明方法によって製造したエレクトレットの
寿命は従来のエレクトレットと何ら変わりなく、極めて
安宇であり、さらに前記加圧および剥離するn電体物質
の圧力を前記−加圧および剥離する誘電体物質と前記金
属層+21とが完全に密着される圧力以上に設定してや
れば、加圧する圧力に関係なく、また通常の大気中の温
度及び湿度変動に影響されなlnで、再現性のある一宇
醒圧の)し2トレツドが得られることを見いだしたもの
である。
That is, the present invention has metal on both sides of the electret material;
In an electret element integrated with @, a dielectric material is closely pressed onto one side of the metal layer and then peeled off to form an electret. In other words, the method of the present invention is as shown in FIG. As shown, metal 1 (21° (2
This is based on the knowledge that the metal layer (2) becomes electrically charged when pressure is applied to the surface of the wire mesh layer on one side, that is, when the metal layer (2) is pressed and peeled off. The lifespan of the manufactured electret is no different from that of conventional electrets, and is extremely reliable.Furthermore, the pressure of the n-electric material to be applied and peeled off is applied to the dielectric material to be pressed and peeled off, and the metal layer +21. If the pressure is set at a level higher than that at which the two parts are completely adhered, it will be possible to achieve a reproducible starting pressure regardless of the applied pressure and unaffected by normal atmospheric temperature and humidity fluctuations. It was found that this can be obtained.

また、本発明方法でエレクトレットを製造することによ
って、エレクトレット素子各々のエレクトレット電圧の
バラツキが少なかエレクトレットカ得うれ、またエレク
トレット材料が金属層で一体化されているために、エレ
クトレット電圧の分布力均一なエレクトレットが得られ
ると(八うものである。
In addition, by manufacturing the electret by the method of the present invention, it is possible to obtain an electret with little variation in the electret voltage of each electret element, and since the electret material is integrated with a metal layer, the distribution of the electret voltage is uniform. If an electret can be obtained, it will be impossible.

本発明方法によって製造したエレクトレットの電荷の発
′生機構は一ヒ記の如く、金1と誘電体物質”との摩擦
帯電(接融・はく離帯電)であるので前記加圧および剥
離する誘電体物質として用いられるものは金属に対して
帯電序列が異なる物質であればいずれも使用可能で、金
属に対して正極側の゛誘電性物質を用いれば、負極性の
エレクトレットが得られ、金属に対して負極側の誘電体
物質を用゛いれば正極性のエレクトレットが得られる。
As described above, the electric charge generation mechanism of the electret produced by the method of the present invention is frictional charging (melting/peel charging) between the gold 1 and the dielectric material. Any substance can be used as long as it has a different charge order from the metal. If a dielectric substance is used on the positive side of the metal, an electret with negative polarity can be obtained, and By using a dielectric material on the negative electrode side, a positive polarity electret can be obtained.

t、75h12、実用に供しうるエレクトレット電圧を
着するエレクトレットを再現性よく確実に得るためには
、前記加圧する誘電体物質を適宜選択されるべきで、金
属に対して帯−電序列の幅が大きい誘電体物質、例えば
、正極側としてポリアミド、ポリメチルメタクリレート
負極側としてポリ四弗化エチレン。
t, 75h12, In order to reliably obtain an electret with a practically usable electret voltage, the dielectric material to be pressurized should be selected appropriately, and the width of the charge-electrification order should be set to the metal. Large dielectric materials, such as polyamide, polymethyl methacrylate as the positive electrode side and polytetrafluoroethylene as the negative electrode side.

ポリエチレン、ポリプロピレン等を使用することが実用
上望ましい。
It is practically desirable to use polyethylene, polypropylene, etc.

同本発明方法に用いるエレクトレット材料は通常に用い
られているものでよく、例えば、ポリエチレン、ポリプ
ロピレン、ポリ弗化ビニリデン。
The electret materials used in the method of the present invention may be those commonly used, such as polyethylene, polypropylene, and polyvinylidene fluoride.

ポリメチルメタクリレート、ポリエチレンテレフタレー
ト、ポリ四弗化エチレン、四弗化エチレン−六弗化プロ
ピレン共重合体などを用いることができる。
Polymethyl methacrylate, polyethylene terephthalate, polytetrafluoroethylene, tetrafluoroethylene-hexafluoropropylene copolymer, etc. can be used.

また、本発明方法K>いてエレクト2レツト材料の両面
に金属層を一体化する手段としては1通常の接着剤を用
いるかあるいは金属を真空蒸着することKよって行なえ
るが、金属と熱融着可能なエレクトレット材料において
は熱融着による方が簡便である。
In addition, as a means of integrating metal layers on both sides of the electret material according to the method of the present invention, it can be carried out by using an ordinary adhesive or by vacuum evaporating the metal, but it can also be carried out by thermal fusion bonding with the metal. Among possible electret materials, thermal fusion is easier.

以下、本発明を具体例を用いて詳しく説明する。Hereinafter, the present invention will be explained in detail using specific examples.

先ず181図の断面図に示す如くエレクトレット材料と
して75μm厚のFBPテフロンフィルム(/り一フロ
ロ・エチレン−プロピレン共重合体のデュホ/社商品名
)の両面に厚さ0.3騙のAl 1lit−熱融着一体
化して金属層を設け、直径60Ellの円盤状工レフト
レット素子2作製し、前記金属層(2)を固定した状態
で前記位属層(2)を図示しないパンチ治具に取付けら
れた第1表に示す如く、帯電序列が金属に対して正極側
に位置する誘電体物質ポリアミド、ポリメチルメタクリ
レートと帯電序列が全綱に対して負極側に位置するポリ
四弗化エチレン。
First, as shown in the cross-sectional view of Figure 181, a 75 μm thick FBP Teflon film (trade name of Duho Co., Ltd., a fluoro-ethylene-propylene copolymer) as an electret material was coated with 0.3 μm thick Al 1lit- on both sides. A metal layer is provided by heat-sealing and integrated, a disk-shaped left-hand element 2 with a diameter of 60Ell is prepared, and the metal layer (2) is attached to a punch jig (not shown) while the metal layer (2) is fixed. As shown in Table 1, the dielectric materials polyamide and polymethyl methacrylate are located on the positive side in the electrification order with respect to metals, and polytetrafluoroethylene whose electrification order is on the negative side with respect to all metals.

ポリエチレン、ポリプロピレンで各々61−の圧力(エ
レクトレット電圧は5々〜で飽和にたつした)で密接加
圧後、剥離してエレクトレット化した。/?!r銹成体
物質について10枚のエレクトレット素子のエレクトレ
ット電圧の平均値を表1に示す。伺、エレクトレット電
圧のバラツキの範囲は±30Vであった。
After pressing closely with polyethylene and polypropylene at a pressure of 61 - (the electret voltage reached saturation at 5 -5), they were peeled off to form an electret. /? ! Table 1 shows the average value of the electret voltage of 10 electret elements for the r-rusting material. The range of variation in electret voltage was ±30V.

第1表 本発明における誘電体物質とエレクトレット電
圧の関係 この様にして得られたエレクトレット電圧の分布を調べ
たところ、第2図直線Bの如く均一な分布をした。なお
、第2図曲線Aは従来のコロナ族[Kよる金属層のない
F’BPテフロンフィルムをエレクトレット化した場合
のエレクトレット電圧の分布を示している。
Table 1 Relationship between dielectric material and electret voltage in the present invention When the distribution of the electret voltage thus obtained was investigated, it was found to be uniformly distributed as shown by straight line B in FIG. Note that curve A in FIG. 2 shows the distribution of electret voltage when a conventional F'BP Teflon film without a metal layer of corona group [K] is made into an electret.

次K・1紀の如くシ″′!−4られた1vり)L/2)
のうちボリアミド+得られた負極性エレクトレットとポ
リ四弗化エチレンで得られ九正極性エレクトレットにつ
Aで160℃、140°0,120℃、90℃の各温麿
、各々4枚で加熱してエレクトレット電圧が一3dB減
衰する時間を測定して電用寿命ft#4ぺた結果、第3
図の直線A(負極性エレクトレット)と直線B(正極性
エレクトレット)が得られ、従来のエレクトレットと何
ら変わりのない電圧寿命に優れたエレクトレットである
ことが確認できた。
Next K・1st era's ``''!-4 1vri)L/2)
Of these, the polyamide + obtained negative polarity electret and the nine positive polarity electret obtained from polytetrafluoroethylene were heated at 160°C, 140°, 120°C, and 90°C with four sheets each. The time it takes for the electret voltage to attenuate by 13 dB is measured, and the result is 3.
Straight line A (negative polarity electret) and straight line B (positive polarity electret) in the figure were obtained, and it was confirmed that the electret had an excellent voltage life no different from conventional electrets.

同様に耐湿性を調べるために、50℃、相対湿度95%
の多湿雰囲気中に各々10枚放置してエレクトレット電
圧の経時変化全測定したところ、第4図(保持率で示し
である)の曲1mA(負極性エレクトレット)と曲線B
(正極性エレクトレット)が得られ、湿度に対しての安
定性が従来のニレ2トレツドよシ優れている事が確認で
きたう同、第3図直線Cは従来の負極性エレクトレット
の電圧寿命を、@4図曲IICは従来の負極性エレクト
レットの耐湿性を示している。
Similarly, to check humidity resistance, 50℃, relative humidity 95%
When we left 10 of each in a humid atmosphere and measured the change in electret voltage over time, we found that curve 1 mA (negative polarity electret) and curve B in Figure 4 (shown in terms of retention rate).
(positive polarity electret) was obtained, and it was confirmed that the stability against humidity was superior to that of the conventional Elm 2 Toledo.The straight line C in Figure 3 shows the voltage life of the conventional negative polarity electret. , @4 Figure IIC shows the moisture resistance of the conventional negative polarity electret.

以上の如く本発明方法を用いる事により、エレクトレッ
ト電圧の分布が均一で安定性に優れ、かつエレクトレッ
ト電圧を容易に制a−fる事が可能なエレクトレットを
得る事がで診る。また、加圧および剥離する誘電体物質
を適宜選択することにより、任意の極性のエレクトレッ
トを得ることかで鋒る。
As described above, by using the method of the present invention, it is possible to obtain an electret with a uniform electret voltage distribution, excellent stability, and in which the electret voltage can be easily controlled a-f. Furthermore, by appropriately selecting the dielectric material to be pressurized and peeled off, it is possible to obtain an electret of arbitrary polarity.

さらに、本発明方法によって得られたエレクトレットを
機械−電気変喚器ある(八は電気−音゛響変換器に応用
した場合、特に音響機器用としてピックアップカートリ
ッジ、マイクロホン、ヘッドホン、スピーカに応用した
場合には、エレクトレットシ圧分布の均一化による低歪
化、エレクトレット−分のバラツキの軽減による特性の
均一化ならびに歩留りの向上を図ることができる。
Furthermore, when the electret obtained by the method of the present invention is applied to a mechanical-electrical converter (e.g., an electro-acoustic converter), especially when applied to a pickup cartridge, microphone, headphone, or speaker for audio equipment. In addition, it is possible to reduce distortion by making the electret pressure distribution uniform, to make the characteristics uniform by reducing the variation in the electret component, and to improve the yield.

【図面の簡単な説明】[Brief explanation of the drawing]

第11図は本発明方法におけるエレクトレット素子の断
面図、第2図1m3図、第4図は本発明方法によって得
たエレクトレットの特性図である。 (1)・・・エレクトレット材料 121+21・・金属層 (7317)  代理人 弁理士 則 近 麿 佑 (
ほか1名)第1図 第2図 1六−士1ハζワゞう勇Y1閂叡(−L−1)第3図
FIG. 11 is a sectional view of the electret element obtained by the method of the present invention, and FIG. 2, 1m3, and 4 are characteristic diagrams of the electret obtained by the method of the present invention. (1)...Electret material 121+21...Metal layer (7317) Agent Patent attorney Rule Yu Chikamaro (
(and 1 other person) Figure 1 Figure 2 Figure 1 6-shi 1 Haze Wai Yu Y1 Keyword (-L-1) Figure 3

Claims (1)

【特許請求の範囲】[Claims] エレクトレット材料の両面に金属層を一体化したエレク
トレット素子におりて、前記金属層の片面に誘電体を密
接、加圧し、次いでこれを剥離することによりエレクト
レット化する事を特徴とするエレクトレットの製造方法
A method for manufacturing an electret, characterized in that an electret element is produced in which metal layers are integrated on both sides of an electret material, and a dielectric is closely applied and pressurized to one side of the metal layer, and then this is peeled off to form an electret. .
JP56113514A 1981-07-22 1981-07-22 Method of producing ekectret Pending JPS5816520A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56113514A JPS5816520A (en) 1981-07-22 1981-07-22 Method of producing ekectret

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56113514A JPS5816520A (en) 1981-07-22 1981-07-22 Method of producing ekectret

Publications (1)

Publication Number Publication Date
JPS5816520A true JPS5816520A (en) 1983-01-31

Family

ID=14614261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56113514A Pending JPS5816520A (en) 1981-07-22 1981-07-22 Method of producing ekectret

Country Status (1)

Country Link
JP (1) JPS5816520A (en)

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