JPS58164251A - Cooling type photoelectric converter - Google Patents

Cooling type photoelectric converter

Info

Publication number
JPS58164251A
JPS58164251A JP57047938A JP4793882A JPS58164251A JP S58164251 A JPS58164251 A JP S58164251A JP 57047938 A JP57047938 A JP 57047938A JP 4793882 A JP4793882 A JP 4793882A JP S58164251 A JPS58164251 A JP S58164251A
Authority
JP
Japan
Prior art keywords
cooling
head
base
cooling base
refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57047938A
Other languages
Japanese (ja)
Inventor
Isao Arakawa
荒川 勲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57047938A priority Critical patent/JPS58164251A/en
Publication of JPS58164251A publication Critical patent/JPS58164251A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/024Arrangements for cooling, heating, ventilating or temperature compensation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To improve the cooling efficiency of a photoelectric converter by increasing the contacting area of a cooling head of a member connected to a refrigerator with the back surface of a cooling base in which a photoelectric converting element is disposed with a simple structure and guiding and disposing the cooling head coincident so that the center of the head coincides with the back surface of the base. CONSTITUTION:The tapered engaging recess 21 of a cooling base 5 is formed in the inner tube 3 of a heat insulating container, and the cooling rod 16 of a refrigeratio 14 is engaged under pressure through a spring connecting member 10 associated with a cooling head 22 having a tapered engaging projection. Thus, the contacting area of the head 22 with the base 5 is increased, and cooling efficiency is improved. Since the head 22 is always engaged at the prescribed position, no irregular cooling distribution occurs.

Description

【発明の詳細な説明】 四 発明の技術分野 本発明は冷却型光電変換装置に係シ、特にデュヲ構造の
断熱賽器内の冷却基台に当接配置して光電変換素子を低
温に冷却せしめる冷凍機の配設構造の改良に関するもの
である。
[Detailed Description of the Invention] 4. Technical Field of the Invention The present invention relates to a cooling type photoelectric conversion device, and in particular, a photoelectric conversion device is cooled to a low temperature by being disposed in contact with a cooling base in a heat insulating bowl having a dual structure. This invention relates to improvements in the arrangement structure of refrigerators.

(至)従来技術と問題点 半導体の光電効果を利用し先光電変換装置において、I
IIIK長波長の赤外線領域で用いられる赤外線検知装
置は、その赤外線検知素子を常温よりも最かに低温に冷
却しないと良好に動作しない性質がある。それゆえにこ
のような赤外線検知装置は、一般に第1EK示す如く外
管2と内管8からなるデュツ構造の断熱審器lを用い、
外管2の一部に設けられ九遁光惣4に対内する内管8の
冷却基台すの真空側に赤外線検知素子6が配設されてい
る。
(To) Conventional technology and problems In the photoelectric conversion device using the photoelectric effect of semiconductors, I
Infrared detection devices used in the IIIK long wavelength infrared region have a property that they do not operate well unless the infrared detection element is cooled to a temperature much lower than room temperature. Therefore, such an infrared detection device generally uses a heat insulating device 1 of Dutsu structure consisting of an outer tube 2 and an inner tube 8 as shown in No. 1EK.
An infrared detecting element 6 is disposed on the vacuum side of the cooling base of the inner tube 8, which is provided in a part of the outer tube 2 and faces the nine-tone light source 4.

そして該素子6からの信号出力は、リード線7により外
管jlK管壁の一部を横断する形で封着され九環状円板
影のセラミック端子板8の外部リード端子9より取シ出
される。1*一方前記内管8内には、例えば諌内管8の
冷却基台6の背面に、クーリングヘッド11.帯状熱伝
蘂俸IB及びスプリング18からなる連結部材10を介
してヘリウムガス循環式冷凍機14のクーリングロッド
16が圧接した形に0リング16を用いて気密に挿設さ
れ、該冷凍機14によって前記素子6を冷却基台すを介
して効率よく低温に冷却して良好に動作せしめる構成が
とられている。
The signal output from the element 6 is taken out from an external lead terminal 9 of a ceramic terminal plate 8 shaped like a nine-annular disc, which is sealed by a lead wire 7 across a part of the outer tube wall. . 1*On the other hand, inside the inner tube 8, for example, on the back side of the cooling base 6 of the inner tube 8, there is a cooling head 11. A cooling rod 16 of a helium gas circulation type refrigerator 14 is inserted in a press-contact manner through a connecting member 10 consisting of a band-shaped heat transfer rod IB and a spring 18 using an O-ring 16, and the cooling rod 16 of the helium gas circulation type refrigerator 14 is inserted airtightly using an O-ring 16. A configuration is adopted in which the element 6 is efficiently cooled to a low temperature via a cooling base so that it can operate satisfactorily.

ところで上述の如き構成の赤外線検知素子にあっては、
冷却基台6と冷凍機14のクーリングロッド16との連
結構造が熱伝導性のよい銅等からなるクーりングヘッド
11、帯状熱伝導体18及びスプリング18からなる連
結部材lOを介して圧接接続され、前記冷却基台6とク
ーりングロツド16との間の熱交換は主として前記帯状
熱伝導体12を通してなされている。ところが、前記冷
却基台6の背面に対して前記連結部材10を介して冷凍
機14のクーリングロッド16を圧接接続した際、前記
連結部材10の帯状熱伝導体18と、スプリング18の
弾性のために、冷却基台5の背面に当接するクーりング
ヘッド11の位置がクーリングロッド16の中心と一致
しないで位置ずれが生じ、冷却基台6に対する冷却分布
が片寄シ該冷却基台6に配設された赤外線検知素子6が
杓等に冷却され難いといった不都合が生じていた。また
冷却基台6の背面に密接されるクーリングヘッド11の
接触面が平面的に構成されている丸め熱伝導あるいは熱
交換に寄与する面積が小さく、冷却効率が悪い欠点があ
った。
By the way, in the infrared sensing element having the above-mentioned configuration,
The connection structure between the cooling base 6 and the cooling rod 16 of the refrigerator 14 is press-connected via a connection member lO consisting of a cooling head 11 made of copper or the like having good thermal conductivity, a band-shaped heat conductor 18, and a spring 18. , heat exchange between the cooling base 6 and the cooling rod 16 is mainly performed through the band-shaped heat conductor 12. However, when the cooling rod 16 of the refrigerator 14 is pressure-connected to the back surface of the cooling base 6 via the connecting member 10, due to the elasticity of the band-shaped heat conductor 18 of the connecting member 10 and the spring 18, In this case, the position of the cooling head 11 that comes into contact with the back surface of the cooling base 5 does not coincide with the center of the cooling rod 16, resulting in a misalignment, and the cooling distribution with respect to the cooling base 6 is biased. There has been an inconvenience that the infrared sensing element 6 is difficult to cool down using a ladle or the like. In addition, the contact surface of the cooling head 11 that is brought into close contact with the back surface of the cooling base 6 is rounded and has a small surface area contributing to heat conduction or heat exchange, resulting in poor cooling efficiency.

(C)発明の目的 本発明は上記従来の不都合を除去するためになされ九も
ので、その目的は、光電変換素子が配設され要冷却基台
の背面と、冷凍機に連なる連結部材のクーリングヘッド
との接触面積を簡単な構成により大きくし、かつ前記冷
却基台背面の中心に連結部材のクーリングヘッドの中心
が一致するように誘導配置し得るようにした冷却効率の
改良され要冷却製光電変換装置を提供せんとするもので
ある。
(C) Purpose of the Invention The present invention has been made in order to eliminate the above-mentioned conventional disadvantages, and its purpose is to cool the back surface of the base on which the photoelectric conversion element is arranged and which requires cooling, and the connecting member connected to the refrigerator. The contact area with the head is increased by a simple structure, and the cooling head of the connecting member can be guided and arranged so that the center of the cooling head coincides with the center of the back surface of the cooling base, and the cooling efficiency is improved. The purpose is to provide a conversion device.

口)発明の構成 上記目的を達成する丸め、本発明の冷却型光電変換装置
は、透光窓を設けた外管と該透光窓に対向して冷却基台
を介し、光電変換素子を配設し九内管とからなシ、かつ
内外両管の空間を真空にした2重管構造の断熱容器内に
、前記冷却基台の背面に当接する形に冷凍機のクーリン
グロッドを挿設してなる構成において、前記冷却基台の
背面にテーパー状の嵌合凹部を形成し、該デーパー状嵌
合凹部に前記クーリングロッドの先端部をばね連結部材
を介して着脱自在に嵌合圧接してなることを特徴とする
ものである。
A) Structure of the Invention A cooling type photoelectric conversion device of the present invention that achieves the above object comprises an outer tube provided with a light-transmitting window and a photoelectric conversion element disposed opposite the light-transmitting window via a cooling base. The cooling rod of the refrigerator is inserted into a heat insulating container with a double pipe structure in which the space between the inner and outer pipes is evacuated, and the cooling rod of the refrigerator is in contact with the back surface of the cooling base. In the configuration, a tapered fitting recess is formed on the back surface of the cooling base, and the tip of the cooling rod is removably fitted and pressure-welded to the tapered fitting recess via a spring connecting member. It is characterized by:

(θ) 発明の実施例 以下図面を用いて本発明の好ましい実施例について詳細
に説明する。− 第2図は本発明を適゛用した赤外線検知用の冷却型光電
変換装置の一実施例を示す要部断面図であシ、第1図と
同等部分には同一符号が付しである。
(θ) Embodiments of the Invention Preferred embodiments of the invention will be described in detail below with reference to the drawings. - Figure 2 is a cross-sectional view of essential parts showing an embodiment of a cooled photoelectric conversion device for infrared detection to which the present invention is applied, and parts equivalent to those in Figure 1 are given the same reference numerals. .

図にシいて1は透光窓4をそなえた外管2と該透光窓4
に対向して冷却基台6を介して赤外線検知素子6が配設
され九内管8とからなり、かつ該内外両管2.8の空間
を真゛空に保ったデユワ構造の断熱容器であり、前記赤
外線検知素子6が配設された冷却基台6の素子配設面と
反対側の内管8内に露出する背面の形状を、本発明にお
いては図示の如くテーパー状嵌合凹部21とし、また一
方かかる冷却基台6のテーパー収嵌゛合凹部81に嵌合
接続すべきヘリウムガス循環式冷凍機14のクーリング
ロッド16の先端に介在せしめるばね連結部材lOのク
ーリングヘッド22の形状も熱伝導度のよい鋼材等によ
って前記冷却基台6のテーパー状嵌合凹郁81内に嵌合
するテーパー状嵌合凸形状に形成した構成にする。しか
して前記内管8内の冷却基台6のテーパー状嵌合凹部2
1に対向して、テーパー状嵌合凸形状をなすクーリング
ヘッド28と例えば鋼薄片を複数枚重ねて帯状とした熱
伝導体13及びスプリング18を組み合わせたばね連結
部材lOを先端に取り付けた前記ヘリウムガス循環式冷
凍機14のクーリングロッド16を挿入圧接し、前記断
熱容器lに図示の如く前記冷凍機14を0リング15を
介してねじ17により着脱自在に挿設した構成とする。
In the figure, 1 indicates an outer tube 2 equipped with a transparent window 4 and the transparent window 4.
The infrared detection element 6 is disposed opposite to the cooling base 6 through the cooling base 6, and consists of a nine-inner tube 8, and the insulated container has a dewar structure in which both the inner and outer tubes 2.8 are kept in a vacuum. In the present invention, the shape of the back surface exposed in the inner tube 8 on the opposite side to the element mounting surface of the cooling base 6 on which the infrared detecting element 6 is arranged is formed into a tapered fitting recess 21 as shown in the figure. On the other hand, the shape of the cooling head 22 of the spring connecting member 10 interposed at the tip of the cooling rod 16 of the helium gas circulation type refrigerator 14 to be fitted and connected to the tapered fitting recess 81 of the cooling base 6 is also determined. A tapered fitting convex shape that fits into the tapered fitting recess 81 of the cooling base 6 is formed of steel or the like having good thermal conductivity. Therefore, the tapered fitting recess 2 of the cooling base 6 in the inner tube 8
1, a cooling head 28 having a tapered fitting convex shape, a heat conductor 13 formed by stacking a plurality of steel thin pieces in the form of a band, and a spring connecting member lO, which is a combination of a spring 18, is attached to the tip of the helium gas. The cooling rod 16 of the circulation type refrigerator 14 is inserted and pressed, and the refrigerator 14 is removably inserted into the heat insulating container 1 via an O-ring 15 with a screw 17 as shown in the figure.

さらに内管8内のクーリングロッド16との空隙は、外
気が咳空隙内にて結露、あるいは霜が生じ九シ、またガ
ス分子の熱伝導によって該空隙内に熱が流入することを
防止するために排気管18より真空に排気されて封止し
ている。    − 上述のように内管8内の冷却基台6のテーパー状嵌合凹
部21に、デーバー状嵌合凸形状を有するクーりングヘ
ッド82を組み合わせ九ばね連結部材lOを介在して前
記冷凍機14のクーリングロッド16を嵌合圧接する挿
設構造とすることにより、冷却基台6と冷凍機14に連
なるばね連結部材10のクーリングヘッド22との接触
面積が増大し、冷却効率が向上すると共に前記冷却基台
6に対してばね連結部材10のクーりングヘッド22が
上記したテーパー状嵌合構成により常に定位置に嵌合配
置されるので従来の如き冷却基台5の冷却分布が不均一
となるといった不都合も解消される利点を有する。
Furthermore, the gap between the inner tube 8 and the cooling rod 16 is designed to prevent outside air from condensing or frosting inside the gap, and to prevent heat from flowing into the gap due to heat conduction of gas molecules. Then, it is evacuated to a vacuum through the exhaust pipe 18 and sealed. - As described above, the cooling head 82 having a Dever-like fitting convex shape is combined with the tapered fitting recess 21 of the cooling base 6 in the inner tube 8, and the refrigerator 14 is connected to the cooling head 82 through the spring connecting member IO. By adopting the insertion structure in which the cooling rod 16 is fitted and pressure-welded, the contact area between the cooling head 22 of the spring connecting member 10 connected to the cooling base 6 and the refrigerator 14 is increased, and the cooling efficiency is improved. Since the cooling head 22 of the spring connecting member 10 is always fitted to the cooling base 6 in a fixed position due to the above-mentioned tapered fitting configuration, the cooling distribution of the cooling base 5 becomes uneven as in the conventional case. This has the advantage of eliminating such inconveniences.

(0発明の効果 以上の説明から明らかなように、本発明に保る冷却製光
電変換装置の構造によれば、断熱容器の内管内の冷却基
台にヘリウムガス循環式冷凍機のクーリングロッドをば
ね連結部材を介して定位置に広いテーパー状の接触面積
で圧接した形に挿設する構成がとられているので、該冷
却基台上に載置され走光電変換素子を均等に、かつ効率
よく低温に冷却することが可能となるすぐれた利点を有
し、ヘリウムガス循環式冷凍機を用いて低温動作させる
赤外線検知装置あるいは赤外線半導体レーザ装置等から
なる各種冷却型光電変換装置に適用して極めて有利であ
る。
(0) Effects of the Invention As is clear from the above explanation, according to the structure of the cooled photoelectric conversion device according to the present invention, the cooling rod of the helium gas circulation refrigerator is installed on the cooling base inside the inner pipe of the heat insulating container. Since the structure is such that the device is inserted in a fixed position through a spring connecting member in a press-contact manner with a wide tapered contact area, the phototactic conversion element is placed on the cooling base and is evenly and efficiently It has the excellent advantage of being able to be cooled to low temperatures, and can be applied to various cooled photoelectric conversion devices such as infrared detection devices or infrared semiconductor laser devices that operate at low temperatures using helium gas circulation refrigerators. Extremely advantageous.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の冷却型光電変換装置の構造を説明する縦
断面図、1g図は本発明に係る冷却型光電変換装置の一
実施例構造を示す縦断面図である。 図においてlは断熱容器、2は外管、8は内管、番は透
光室、6は冷却基台、6は光電変換素子、10はばね連
結部材、Igは帯状熱伝導体、18はスプリング、14
はヘリウムガス循環式冷凍機、16はクーリングロッド
、15は0リング、17はねじ、18は排気管、21は
テーパー状嵌合凹部、22はクーリングヘッドを示す。 第1図 第2図
FIG. 1 is a vertical sectional view illustrating the structure of a conventional cooling type photoelectric conversion device, and FIG. 1g is a vertical sectional view showing the structure of an embodiment of the cooling type photoelectric conversion device according to the present invention. In the figure, l is a heat insulating container, 2 is an outer tube, 8 is an inner tube, number is a transparent chamber, 6 is a cooling base, 6 is a photoelectric conversion element, 10 is a spring connecting member, Ig is a band-shaped thermal conductor, and 18 is a spring, 14
16 is a helium gas circulation refrigerator, 16 is a cooling rod, 15 is an O-ring, 17 is a screw, 18 is an exhaust pipe, 21 is a tapered fitting recess, and 22 is a cooling head. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 遁光嫁を設けた外管と該逓光轍に宵崗して冷却基台を介
し、光電変換素子を配設し丸内管とからなり、かつ内外
両管の空間を真空にし九8重管構造の断熱春器内に、前
記冷却基台の背11に当接する形に冷凍機のクリーング
ロツドを挿設してなゐ構成において、前記冷却基台の背
面にテーパー状の嵌合凹部を般社、該テーパー状嵌合凹
郁にクリーングロツドの先端部をばね連結部材を介して
着脱自在に嵌合圧接してなることを特徴とする冷却型光
電変換装置。
It consists of an outer tube provided with a light beam, and a round inner tube with a photoelectric conversion element placed in the light transmission path via a cooling base, and the space between both the inner and outer tubes is vacuumed. In a configuration in which the clean grommet of the refrigerator is inserted into a heat insulating spring having a tubular structure so as to come into contact with the back 11 of the cooling base, a tapered fitting recess is provided on the back of the cooling base. A cooling type photoelectric conversion device, characterized in that the tip of a clean grout is removably fitted and pressed into the tapered fitting recess via a spring connecting member.
JP57047938A 1982-03-24 1982-03-24 Cooling type photoelectric converter Pending JPS58164251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57047938A JPS58164251A (en) 1982-03-24 1982-03-24 Cooling type photoelectric converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57047938A JPS58164251A (en) 1982-03-24 1982-03-24 Cooling type photoelectric converter

Publications (1)

Publication Number Publication Date
JPS58164251A true JPS58164251A (en) 1983-09-29

Family

ID=12789310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57047938A Pending JPS58164251A (en) 1982-03-24 1982-03-24 Cooling type photoelectric converter

Country Status (1)

Country Link
JP (1) JPS58164251A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63211772A (en) * 1987-02-27 1988-09-02 Mitsubishi Electric Corp Infrared-ray detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63211772A (en) * 1987-02-27 1988-09-02 Mitsubishi Electric Corp Infrared-ray detector

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