JPS58163846U - 気密検査回路 - Google Patents

気密検査回路

Info

Publication number
JPS58163846U
JPS58163846U JP6307082U JP6307082U JPS58163846U JP S58163846 U JPS58163846 U JP S58163846U JP 6307082 U JP6307082 U JP 6307082U JP 6307082 U JP6307082 U JP 6307082U JP S58163846 U JPS58163846 U JP S58163846U
Authority
JP
Japan
Prior art keywords
inspection circuit
chambers
airtightness inspection
airtightness
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6307082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643057Y2 (enExample
Inventor
川本　和正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aichi Machine Industry Co Ltd
Original Assignee
Aichi Machine Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aichi Machine Industry Co Ltd filed Critical Aichi Machine Industry Co Ltd
Priority to JP6307082U priority Critical patent/JPS58163846U/ja
Publication of JPS58163846U publication Critical patent/JPS58163846U/ja
Application granted granted Critical
Publication of JPS643057Y2 publication Critical patent/JPS643057Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP6307082U 1982-04-27 1982-04-27 気密検査回路 Granted JPS58163846U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6307082U JPS58163846U (ja) 1982-04-27 1982-04-27 気密検査回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6307082U JPS58163846U (ja) 1982-04-27 1982-04-27 気密検査回路

Publications (2)

Publication Number Publication Date
JPS58163846U true JPS58163846U (ja) 1983-10-31
JPS643057Y2 JPS643057Y2 (enExample) 1989-01-26

Family

ID=30073191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6307082U Granted JPS58163846U (ja) 1982-04-27 1982-04-27 気密検査回路

Country Status (1)

Country Link
JP (1) JPS58163846U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0441646U (enExample) * 1990-08-07 1992-04-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0441646U (enExample) * 1990-08-07 1992-04-08

Also Published As

Publication number Publication date
JPS643057Y2 (enExample) 1989-01-26

Similar Documents

Publication Publication Date Title
JPS58163846U (ja) 気密検査回路
JPS5958356U (ja) 隔膜式酸素電極
JPS5855358U (ja) 高真空装置用試料出入機構
JPS6041845U (ja) ガス分析計におけるドレントラツプ
JPS59100245U (ja) リ−クテスト装置
JPS6142831U (ja) 半導体製造装置
JPS6112047U (ja) 光音響効果型分析計
JPS6051456U (ja) 腐蝕試験装置
JPS5985956U (ja) フロ−型イオン選択性電極
JPS58180409U (ja) 測尺装置
JPS608861U (ja) 高温高圧材料試験装置
JPS5882651U (ja) 湿度発生装置の試験槽
JPS6130857U (ja) 固体電解質を用いた水分計
JPS59115337U (ja) 腐食試験片
JPS59175158U (ja) 内圧強度試験片
JPS60173050U (ja) 標準ガス製造用装置
JPS5982531U (ja) 酸素富化器
JPS5869213U (ja) 防爆接続機構
JPS59117949U (ja) タ−ビン試験装置
JPS6088254U (ja) 干渉ガス除去装置
JPS6052838U (ja) ガス滅菌器
JPS6083941U (ja) ガス拡散試験装置
JPS5982532U (ja) 酸素富化器
JPS58157071U (ja) 送気一排気弁
JPS599579U (ja) 変換器