JPS58162639U - Wafer holding mechanism for ion implantation equipment - Google Patents
Wafer holding mechanism for ion implantation equipmentInfo
- Publication number
- JPS58162639U JPS58162639U JP5810582U JP5810582U JPS58162639U JP S58162639 U JPS58162639 U JP S58162639U JP 5810582 U JP5810582 U JP 5810582U JP 5810582 U JP5810582 U JP 5810582U JP S58162639 U JPS58162639 U JP S58162639U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding mechanism
- ion implantation
- wafer holding
- implantation equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のイオン注入装置用ウニハードリング機構
を示す全体図、第２図は従来のディスク板上に設置され
たウェハー保持機構を示す図、第３図は本願考案の一実
施例を示すウェハー保持機構分解図である。
なお図において、１・・・ディスク板（ウェハー着脱エ
リア）、２・・・ディスク板（ビーム打ち込みエリア）
、３・・・アーム、４・・・ウェハー保持機構、５・・
・固定棒、６・・・ウェハー、７・・・固定リング、訃
・・スプリング、９・・・スプリングシャフトである。FIG. 1 is an overall view showing a conventional unihard ring mechanism for an ion implanter, FIG. 2 is a view showing a conventional wafer holding mechanism installed on a disk plate, and FIG. 3 is an illustration of an embodiment of the present invention. FIG. 3 is an exploded view of the wafer holding mechanism shown in FIG. In the figure, 1... Disc plate (wafer attachment/detachment area), 2... Disc plate (beam implantation area)
, 3... Arm, 4... Wafer holding mechanism, 5...
・Fixing rod, 6... Wafer, 7... Fixing ring, End... Spring, 9... Spring shaft.
Claims (1)
ィスク板に設けられたウェハー保持機構において、ウェ
ハー全体を保持する固定リングと、リング固定棒と、ホ
ルダーを具備しそれぞれのリング固定棒はウェハー保持
機構とディスク板を貫通し裏面よりスプリングでウェハ
ーを保持した機構を有することにより、ウェハー保持を
自動的に行なうことを特徴とするイオン注入装置用ウェ
ハー保持機構。A wafer holding mechanism installed on a disk plate of a wafer handling mechanism in an ion implantation apparatus includes a fixing ring that holds the entire wafer, a ring fixing rod, and a holder, and each ring fixing rod connects the wafer holding mechanism and the disk plate. A wafer holding mechanism for an ion implantation apparatus, characterized in that the wafer is automatically held by having a mechanism that extends through the wafer and holds the wafer from the back side with a spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5810582U JPS58162639U (en) | 1982-04-21 | 1982-04-21 | Wafer holding mechanism for ion implantation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5810582U JPS58162639U (en) | 1982-04-21 | 1982-04-21 | Wafer holding mechanism for ion implantation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58162639U true JPS58162639U (en) | 1983-10-29 |
Family
ID=30068515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5810582U Pending JPS58162639U (en) | 1982-04-21 | 1982-04-21 | Wafer holding mechanism for ion implantation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58162639U (en) |
-
1982
- 1982-04-21 JP JP5810582U patent/JPS58162639U/en active Pending
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