JPS5815346U - ウエハ回転装置 - Google Patents

ウエハ回転装置

Info

Publication number
JPS5815346U
JPS5815346U JP10858781U JP10858781U JPS5815346U JP S5815346 U JPS5815346 U JP S5815346U JP 10858781 U JP10858781 U JP 10858781U JP 10858781 U JP10858781 U JP 10858781U JP S5815346 U JPS5815346 U JP S5815346U
Authority
JP
Japan
Prior art keywords
rotating shaft
wafer
holder
rotation device
suction surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10858781U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629716Y2 (cs
Inventor
圭一 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP10858781U priority Critical patent/JPS5815346U/ja
Publication of JPS5815346U publication Critical patent/JPS5815346U/ja
Application granted granted Critical
Publication of JPS629716Y2 publication Critical patent/JPS629716Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP10858781U 1981-07-23 1981-07-23 ウエハ回転装置 Granted JPS5815346U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10858781U JPS5815346U (ja) 1981-07-23 1981-07-23 ウエハ回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10858781U JPS5815346U (ja) 1981-07-23 1981-07-23 ウエハ回転装置

Publications (2)

Publication Number Publication Date
JPS5815346U true JPS5815346U (ja) 1983-01-31
JPS629716Y2 JPS629716Y2 (cs) 1987-03-06

Family

ID=29902986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10858781U Granted JPS5815346U (ja) 1981-07-23 1981-07-23 ウエハ回転装置

Country Status (1)

Country Link
JP (1) JPS5815346U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62125780U (cs) * 1986-01-30 1987-08-10

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759438U (cs) * 1980-09-26 1982-04-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759438U (cs) * 1980-09-26 1982-04-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62125780U (cs) * 1986-01-30 1987-08-10

Also Published As

Publication number Publication date
JPS629716Y2 (cs) 1987-03-06

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