JPS58151503A - Position detecting device - Google Patents

Position detecting device

Info

Publication number
JPS58151503A
JPS58151503A JP3550582A JP3550582A JPS58151503A JP S58151503 A JPS58151503 A JP S58151503A JP 3550582 A JP3550582 A JP 3550582A JP 3550582 A JP3550582 A JP 3550582A JP S58151503 A JPS58151503 A JP S58151503A
Authority
JP
Japan
Prior art keywords
holding member
contact
electrode contact
housing
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3550582A
Other languages
Japanese (ja)
Other versions
JPH023442B2 (en
Inventor
Akiyoshi Narimatsu
成松 明壽
Hiroshi Yonemoto
米本 宏
Nobuyuki Suzuki
信之 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Magnescale Inc
Original Assignee
Sony Magnescale Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Magnescale Inc filed Critical Sony Magnescale Inc
Priority to JP3550582A priority Critical patent/JPS58151503A/en
Priority to DE8383301148T priority patent/DE3378279D1/en
Priority to EP83301148A priority patent/EP0088596B1/en
Priority to DE8787113047T priority patent/DE3382579T2/en
Priority to US06/471,680 priority patent/US4558312A/en
Priority to CA000422804A priority patent/CA1211530A/en
Priority to EP87113047A priority patent/EP0269795B1/en
Publication of JPS58151503A publication Critical patent/JPS58151503A/en
Publication of JPH023442B2 publication Critical patent/JPH023442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q35/00Control systems or devices for copying directly from a pattern or a master model; Devices for use in copying manually
    • B23Q35/04Control systems or devices for copying directly from a pattern or a master model; Devices for use in copying manually using a feeler or the like travelling along the outline of the pattern, model or drawing; Feelers, patterns, or models therefor
    • B23Q35/24Feelers; Feeler units
    • B23Q35/26Feelers; Feeler units designed for a physical contact with a pattern or a model
    • B23Q35/30Feelers; Feeler units designed for a physical contact with a pattern or a model for control of an electrical or electro-hydraulic copying system
    • B23Q35/32Feelers; Feeler units designed for a physical contact with a pattern or a model for control of an electrical or electro-hydraulic copying system in which the feeler makes and breaks an electrical contact or contacts, e.g. with brush-type tracers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/002Constructional details of contacts for gauges actuating one or more contacts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012Contact-making feeler heads therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To obtain a position detecting device having good reproducibility and high accuracy, by constituting so that the first holding member for holding an electrode contact makes a concentrical spherical surface with the electrode contact, and the second holding member linearly contacts with this concentrical spherical surface. CONSTITUTION:An electrode contact 21 is fitted to one end of a stylus 22, and the other end is fixed to the first holding member (disk 23) in a housing 26. The circumferential part of the disk 23 is formed so as to become a rotating curved surface body 24. On the bottom part of the housing 26, the second holding member 25 is provided, and the rotating curved surface body 24 and the second holding member 25 are made to press-contact by a spring 28. The contact face of the holding member 25 makes a concentrical circle with the electrode contact 21. To a relaying plate 27, a shank 29 is fitted, and through the shank 29, a position detecting device is installed to a machine tool, etc. The rotating curved surface body 24 makes an axis of the stylus 22 a center axis, and the circumference is fitted into the housing 26, therefore, even if any three-dimensional direction force is applied to the electrode contact, it is operated smoothly.

Description

【発明の詳細な説明】 本発明は3次元位置検出装置、特にその一端KIIc他
触子を有するスタイラスの保持機構の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a three-dimensional position detection device, and particularly to an improvement in a holding mechanism for a stylus having a KIIc handle at one end thereof.

周知の如くフライス盤尋の工作機械において、加工後の
被加工物の3次元の寸法針#J ′にその加工機械上で
行な5機能な有することが益々蒙求される傾向になりつ
つある。このため従来、例えば第1図及び第2図に示す
ような位置検出装mを用いて、被加工物の基準面、端面
の位1llc慣出、基準面。
As is well known, in machine tools for milling machines, it is becoming more and more desirable for the three-dimensional dimension needle #J' of the workpiece after processing to have five functions. For this purpose, conventionally, for example, a position detection device as shown in FIGS. 1 and 2 is used to determine the position of the reference surface and end surface of the workpiece, and to determine the position of the reference surface.

端面からの加工位置検出等を行なっていた。The machining position was detected from the end face.

第1及び2図において、11は導電性球体から成る電極
触子で、フィラー化の一端に設けられており、その保持
機構は次のように構成されている。
In FIGS. 1 and 2, reference numeral 11 denotes an electrode contact made of a conductive sphere, which is provided at one end of the filler, and its holding mechanism is constructed as follows.

卸ち、ハウジング1内において、フィラー化は円板4に
固定され、また受は部材6,7.8が絶縁板5を介して
上記8板4に保持固定されている。
In the housing 1, the filler is fixed to the disk 4, and the receiver members 6, 7, 8 are held and fixed to the 8 plates 4 through the insulating plate 5.

ハウジング五の1&部にはほぼ3等分された位置に球体
2を有する押ネジ3が配設されている。この球体は受は
部材1!、7.8に対接するよう罠なっていて、バネl
Oにより絶縁部材9を介して押圧力が印加され、圧接さ
れている。
At the 1 & portion of the housing 5, set screws 3 having spherical bodies 2 are disposed at positions approximately divided into three equal parts. This sphere is part 1! , 7.8 is a trap, and the spring l
A pressing force is applied by O through the insulating member 9, and the two are pressed together.

14は押ネジ3をロックするためのロックネジである。14 is a lock screw for locking the set screw 3.

上述した構成の位置検出装置は、鉤えば第3i1WK示
す如くシャンク13により工作機械14に織り付け、テ
ーブル15上KIkmされた被加工物14に電極触子1
1が接触すると、検出−路16によって電気的K11l
出され、位#IL◆の検知が行なわれる。
The position detection device having the above-mentioned configuration is attached to the machine tool 14 by the shank 13 as shown in the 3i1WK, and the electrode contactor 1 is attached to the workpiece 14 which is KIkm on the table 15.
1 contacts, the electrical K11l is activated by the detection path 16.
Then, the position #IL◆ is detected.

しかるに上述した従来装置の構成では、1112図から
鴫らかなよ5に受は部材@、7.Iの形状を円蟻、V@
、平向とし、夫々が各球体2と対振することにより、3
次元方向で唯一の安定した位置な確保するよう罠なって
いる。
However, in the configuration of the conventional device described above, as shown in FIG. The shape of I is a circular dot, V@
, and by each of them vibrating against each sphere 2, 3
It is a trap designed to ensure that it is the only stable position in the dimension.

本斃鞠はかかる!!:*技術の欠点な解決するため罠な
されたもので、導電性球体から成る電極触子を、スタイ
ラスを介してハウジング内の圧接されているIEI及び
82の保持部材により保持し、菖1の保持Ii#は上記
電極触子と同心球面をなし、纏2の保持S*tは上記同
心球−とI11秦触するよ5に構成されたことv4I像
とする。
It takes a real ball! ! :* This trap was created to solve the drawbacks of the technology, in which the electrode contactor made of a conductive sphere is held by the holding members of IEI and 82 which are press-contacted in the housing via the stylus, and the holding member of the irises 1 is held. It is assumed that Ii# forms a concentric spherical surface with the electrode contactor, and the holding S*t of the sleeve 2 is configured in 5 such that it contacts the concentric sphere I11.

以下IIl―に示す実施例を参蝋して本JilIij!
を説明すると、纂4N(a)、(−及び纂5図において
、電極触子ムはスタイラスnの一端Km付けられ、ハウ
ジング3内の第1保持部材、例えば円板23にはスタイ
ラスnの他端が固定されている。円板囚の円周部は回転
−1iii体スをなすように形成されている。
This book JilIij! refers to the examples shown in IIl- below.
To explain this, in Figures 4N(a) and 5, the electrode contact arm is attached to one end Km of the stylus n, and the first holding member in the housing 3, for example, the disk 23, is attached to the stylus n and other parts. The end is fixed.The circumferential portion of the disk holder is formed to form a rotating body.

ハウジング瀝の底sKは第2保持部材6が配設されてお
り、回転−面体スと#第2保持部材とはバネ28によっ
て圧接されていて、その保持部材すの接触面は図示の如
く電極触子4と同心球状をなしている。
A second holding member 6 is disposed on the bottom sK of the housing, and the rotating facepiece and the second holding member are pressed together by a spring 28, and the contact surface of the holding member is connected to an electrode as shown in the figure. It has a spherical shape concentric with the tentacle 4.

またハウジング謳の上sKは中継板ごが設けられていて
、この中継板27にはシャンク四が取り付けられており
、前記したよ5に該シャンクを介して上述した本発明の
位置検出装置はJIES図に示す如く工作機械32勢に
装着されている。
Furthermore, the upper sK of the housing is provided with a relay plate, and a shank 4 is attached to this relay plate 27. As shown in the figure, it is attached to 32 machine tools.

さて上述した本発明の!1置において、電極触子4の位
置決めなするための第2保持部材6の接触−に、仮KI
I7図に示す如く第1保持部材ムが3点A、B、Cで接
触しているとすれば、wL惚触子21の中心QK対して
半価凡の球面上にある。
Now, the above-mentioned invention! In the first position, a temporary KI is applied to the contact of the second holding member 6 for positioning the electrode contactor 4.
If the first holding member arm is in contact at three points A, B, and C as shown in FIG.

前述したように亀他触子ムの中心と[2保持郁材2Sf
)@加面(球面)の中心は一致しているので、球面上の
3点A、B、C内の一点IPとすればPQ=鼠で、A、
43即ちPの位置が変ってもQの位置は不変である。
As mentioned above, the center of the tentacle and [2 holding material 2Sf
)@The centers of the spherical surface (spherical surface) are the same, so if one point IP is among the three points A, B, and C on the spherical surface, then PQ=mouse, A,
43, that is, even if the position of P changes, the position of Q remains unchanged.

次に4LPQ=R十Δ8、即ちΔBの誤差が生ニて、P
がΔdずれたとすると、QはQの位llKずれ、その−
差QQ’=gは下記のようKなる。
Next, an error of 4LPQ=R+Δ8, that is, ΔB occurs, and P
is shifted by Δd, then Q is shifted by 11K by Q, and its -
The difference QQ'=g becomes K as shown below.

疵って電極触子の保持部材の設定位置にΔdの@差が島
っても、電極触子の誤差は6−に減少せしめられるが、
更に本発明の構成ではIEI保持@@znI)−転一一
体為がスタイラス乙の軸を中心軸としており、alll
l保持S材間心球向に円状IKallk触するように圧
接されていて、しかkjJ&mai体240周辺はハウ
ジング謳と静合的に濠合しているので、静止状態でΔ−
÷Oであって、前記@l1gは−めて小さくなる。また
如何なる3次元約方向の力が電極触子に加わっても円滑
に動作できる。
Even if there is a difference in Δd in the setting position of the holding member of the electrode contactor due to a defect, the error of the electrode contactor will be reduced to 6-.
Furthermore, in the configuration of the present invention, the IEI holding @@znI)-transfer unit has the axis of the stylus O as the central axis, and all
The holding S material is press-welded so that it touches circularly in the spherical direction, and the area around the kjJ & mai body 240 is statically connected to the housing cover, so that in a stationary state, Δ-
÷O, and the @l1g becomes smaller. Moreover, even if force is applied to the electrode contactor in any three-dimensional direction, it can operate smoothly.

回転曲面体スは例えば結綴物から成り、被測定物(導電
体)Km電極触子が接触する瞬間にリード−1,1′間
がオンとなって位置検出が行なわれる。
The rotating curved surface body S is made of, for example, a knot, and at the moment when the electrode contactor of the object to be measured (conductor) Km comes into contact, the leads 1 and 1' are turned on and position detection is performed.

aI6図は本発明に使用される接触位置検出回路の一例
で、コネクター(資)からのリード−31,32及び被
加工物33を載置するテーブルあからのリードII!3
6は増幅器nの入力#lc!I続されている。増幅器3
7の出力はリレー藁の励1141 m 3B’K *続
され、またリレー38を介して電源島がランプ、ブザー
等の軸知装置140及びカウンター41 K接続されて
いる。
Figure aI6 is an example of a contact position detection circuit used in the present invention, and shows the leads 31 and 32 from the connector (material) and the lead II from the table on which the workpiece 33 is placed. 3
6 is the input #lc of amplifier n! It is connected. Amplifier 3
The output of 7 is connected to the relay 38, and the power supply island is connected to the axis detection device 140 such as a lamp, buzzer, etc. and the counter 41K via the relay 38.

さて、今、工作機械のテーブル語又はその主軸41を矢
印方向に上下左右送りで移動させ被加工物おの端面へ電
極触子21を接近させ接触させると、増−器nの入力は
閉回路となり、その出力によりリレー蕊が作動せしめら
れる。従って報知装°置切が付勢されて、接触点が迅速
かつ正IIK検出される。また同時にカウンター41に
入力が与えられるので、皺入力によりカウンターdt/
零にリセットし、この時点からカウントな絢始させれば
、テープル又は主軸の移動距Sな知ることができる。
Now, when the table head of the machine tool or its main shaft 41 is moved in the direction of the arrow by vertical and horizontal feed, and the electrode contactor 21 approaches and contacts the end face of the workpiece, the input of the multiplier n is a closed circuit. This output activates the relay. Therefore, the annunciator switch is activated and the point of contact is quickly and positively detected. At the same time, an input is given to the counter 41, so the wrinkle input causes the counter dt/
By resetting it to zero and starting counting from this point, it is possible to know the moving distance S of the table or the main shaft.

なお、前記実施例はスタイラスnが何れの3次元方向く
対しても動作し得る構成となっているが、ll9−に示
すように第2保持部材5を円柱面部材とし、また第1保
持部材23には回転曲面体に代えて上記円柱面の母ll
1llK平行な母線からなる曲WJ体ス′とするか、或
いはg*図に示す如く2個の球又は錐体ム゛等の位置が
スタイラスnの軸の属りに回転しないような構造にして
Y方向の動きを規制しX及び2の2方向に作動するよ5
Kしてもよい。
In the above embodiment, the stylus n can be moved in any three-dimensional direction, but as shown in ll9-, the second holding member 5 is a cylindrical surface member, and the first holding member In 23, instead of the rotational curved surface, the matrix ll of the above cylindrical surface is used.
Either make it a curved WJ body consisting of parallel generatrix lines, or make it a structure in which the positions of two spheres or cones, etc., do not rotate around the axis of the stylus n, as shown in figure g*. It restricts movement in the Y direction and operates in two directions, X and 2.5
You can also K.

更にハウジング謳を円柱状ではなく、上記接触片が静止
状履(ある時その位置を動作前KOi帰する構造として
もよい。
Furthermore, instead of having a cylindrical housing shape, the contact piece may have a structure in which the contact piece is in a stationary position (at some time, its position is returned to KOi before operation).

以上it明した所から明らかなように本実−によれば、
電極触子の両保持ii#は**触しているので、接触内
積が大きく、水平方向では如何なる方向に作動してもス
タイラスの可動・量は一定である。
As is clear from what has been explained above, according to the truth,
Since both holders ii# of the electrode contactor are touching, the inner product of contact is large, and the movement and amount of the stylus is constant in any direction in the horizontal direction.

従って合楓性良好で高精度であり、しかも耐久性が良い
上、構成が比較的簡単なので、製造上も有利である。
Therefore, it has good curling properties, high precision, good durability, and has a relatively simple structure, which is advantageous in terms of manufacturing.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、 (b)は従来の位置検出装置の一例な
ボす概略図、ll2図(a)、 (b)はwX1図(a
)のA−A@及びB−BiiI矢視図、纂3図はこの従
来装置を用いた位置検出回路の一例を示すブロック図、
8g4!W(aL (b)及び第5図は本発明の一実施
例を示す概略図、第6図は該実施例を用いた位wIL検
出回路を示すブロック図、總7EV(a)、(−は上記
実施例の動作説明図、第8図及び第9図は夫々本発明の
他の実施例の主要部を示すブロック図である。 21・・・電極触子、n・・・スタイラス、る・・・円
板、ム・・・回転曲面体、%・・・ハウジング。 特 許 出 願 人   ソニーマグネスケール株式会
社代理人 弁理士  永 1)武 三 部第1図 1G) (b) 第2図 (0) 第7図 (0) (b) 第8図 手続補正書 昭和暴1年善許鳳 第38806号 2 烏−の名称 位置檎め装置 3 補正をする者 事件との関係 畳許崩−人 住所 名 称  ソエーマlネスケール株式会社4、代理人〒
105 住 所  東京都港区芝3丁目2番14号芝三丁目ピル
5 補正の対象 (1)本M明細誉I!4頁l114行「32」を削除す
る。 (23同蕾謳6頁j9に13行「41」を削除する。 (3)  謳6図を別紙の通り補正する。 手続補正書 1 事件の表示 昭和s1年脣許願 第5shos号 2 発−の4称 位置檎aS装置 3 補正をする者 事件との関係  轡許出願人 住所 名 称  ソニーマグネスケール株式会社4代理人〒1
05 住 所  東京都港区芝3丁目2番14号芝三丁目ピル
5 補正の対象 本願1jjIs書第7頁第13行と第14行との間に下
記の語句を加入する。
Figures 1 (a) and (b) are schematic diagrams of an example of a conventional position detection device, and Figures 11 and 2 (a) and (b) are diagrams w and 1 (a).
) are A-A@ and B-Biii arrow views, and Figure 3 is a block diagram showing an example of a position detection circuit using this conventional device.
8g4! W(aL (b) and FIG. 5 are schematic diagrams showing one embodiment of the present invention, and FIG. 6 is a block diagram showing a wIL detection circuit using the embodiment. 8 and 9 are block diagrams showing main parts of other embodiments of the present invention. 21... Electrode contact, n... Stylus, Ru... ... Disc, Mu ... Rotating curved surface body, % ... Housing. Patent applicant: Sony Magnescale Co., Ltd. Agent Patent attorney Eiji 1) Take 3 Part 1 Figure 1G) (b) Figure 2 (0) Figure 7 (0) (b) Figure 8 Procedural amendment document Showa era 1999 Zenkoho No. 38806 2 Crow's name position derogatory device 3 Relationship with the person making the amendment case Tatamikoro Person Address Name: Soe Manescale Co., Ltd. 4, Agent:
105 Address: Shiba 3-chome Pill 5, 3-2-14 Shiba, Minato-ku, Tokyo Subject of amendment (1) This M specification Honor I! Delete "32" on page 4, line 114. (Delete ``41'' in line 13 on page 6, j9 of 23 Doubou. 4th person position aS device 3 Relationship with the case of the person making the amendment License applicant address name Name Sony Magnescale Co., Ltd. 4 agent 〒1
05 Address: Shiba 3-chome Pill 5, 3-2-14 Shiba, Minato-ku, Tokyo Target of amendment The following words and phrases are added between lines 13 and 14 on page 7 of the present application 1jjIs.

Claims (1)

【特許請求の範囲】 11)  導電性球体から成る電極触子な、スタイラス
な介してハウジング円の圧接されている第1及び纂2の
保持−材により保持し、@1の保持部材は上記電極触子
と一心球−をなし、第2の保持部材は上記同心球−と−
接触するよ5に構成したことV特徴とする位置検出装置
。 (2)  前記第1の保持II#が円板の円周に回転曲
幽体V設けてなることを特徴とする特許錆求の範Ma1
項記執の位置検出装置。 (3)  *配箒2の保持部材は円柱状をなしており、
−1纂lの保持部材が上記第2の保持部材の円柱1上に
て2次元的K Dr鋤なように構成されたことV%黴と
する嚢許饋求の範囲第111記載の位置検出装置。
[Scope of Claims] 11) The electrode is held by the first and second holding members which are pressed into contact with the housing circle through an electrode contactor made of a conductive sphere, such as a stylus, and the holding member @1 is held by the above-mentioned electrode. The tentacle and the concentric sphere form a second holding member.
A position detection device characterized in that it is configured in such a way that it makes contact. (2) Patent rust-seeking range Ma1, characterized in that the first holding II# is provided with a rotating curved body V on the circumference of a disk.
Position detection device. (3) *The holding member of broom 2 has a cylindrical shape,
- Detecting the position according to item 111 in which the holding member of the first set is configured like a two-dimensional K Dr spade on the cylinder 1 of the second holding member; Device.
JP3550582A 1982-03-05 1982-03-05 Position detecting device Granted JPS58151503A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP3550582A JPS58151503A (en) 1982-03-05 1982-03-05 Position detecting device
DE8383301148T DE3378279D1 (en) 1982-03-05 1983-03-03 Apparatus for determining the location of the surface of a solid object
EP83301148A EP0088596B1 (en) 1982-03-05 1983-03-03 Apparatus for determining the location of the surface of a solid object
DE8787113047T DE3382579T2 (en) 1982-03-05 1983-03-03 DEVICE FOR DETERMINING THE LOCATION OF THE SURFACES OF A FIXED OBJECT.
US06/471,680 US4558312A (en) 1982-03-05 1983-03-03 Position detecting device
CA000422804A CA1211530A (en) 1982-03-05 1983-03-03 Position detecting device
EP87113047A EP0269795B1 (en) 1982-03-05 1983-03-03 Apparatus for determining the location of the surface of a solid object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3550582A JPS58151503A (en) 1982-03-05 1982-03-05 Position detecting device

Publications (2)

Publication Number Publication Date
JPS58151503A true JPS58151503A (en) 1983-09-08
JPH023442B2 JPH023442B2 (en) 1990-01-23

Family

ID=12443611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3550582A Granted JPS58151503A (en) 1982-03-05 1982-03-05 Position detecting device

Country Status (1)

Country Link
JP (1) JPS58151503A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987000915A1 (en) * 1985-07-30 1987-02-12 Norio Fukuhisa Position detector
JPS6288909U (en) * 1985-11-25 1987-06-06
JPH02109661A (en) * 1988-10-20 1990-04-23 Niigata Eng Co Ltd Contact detection device
US5509211A (en) * 1993-07-31 1996-04-23 Johannes Heidenhain Gmbh Multi-coordinate probe

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987000915A1 (en) * 1985-07-30 1987-02-12 Norio Fukuhisa Position detector
JPS6288909U (en) * 1985-11-25 1987-06-06
JPH0448482Y2 (en) * 1985-11-25 1992-11-16
JPH02109661A (en) * 1988-10-20 1990-04-23 Niigata Eng Co Ltd Contact detection device
US5509211A (en) * 1993-07-31 1996-04-23 Johannes Heidenhain Gmbh Multi-coordinate probe

Also Published As

Publication number Publication date
JPH023442B2 (en) 1990-01-23

Similar Documents

Publication Publication Date Title
US4451987A (en) Touch probe
EP0269795B1 (en) Apparatus for determining the location of the surface of a solid object
JPS58151503A (en) Position detecting device
CN213579023U (en) Precision detection device, tool accessory and machining system
CN213579024U (en) Precision detection device, tool accessory and machining system
JPH0213721B2 (en)
CN213657705U (en) Precision detection device, tool accessory and machining system
CN210173126U (en) Cutter accessory
JPS5985912A (en) Three dimensional position inputting device
JPS5992301A (en) Position detector
JPH023441B2 (en)
JPH0471248A (en) Measuring probe
JPS5892804A (en) Contact detector
JP3776552B2 (en) Measuring machine
JPS59136609A (en) Probe for detecting position
EP0348548B1 (en) Touch sensor
JPS59141002A (en) Position detector
US2888750A (en) Perimeter measuring device
JPH09330171A (en) Pointing device
JPH0716107U (en) Three-dimensional surface roughness / contour shape measuring machine
JPH0244361B2 (en) ICHIKENS HUTSUKI
JPH0116190Y2 (en)
JPH0526601A (en) Contact detecting device
JP2001109573A (en) Pointing device capable of being operated in all directions or in low-gravity environment
JPH0431542Y2 (en)